• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.133-133
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• 2018

증착(Vapor Deposition)이란 어떤 물질을 증기화 시켜 기판에 응축시키는 공정을 말하며 물리증착(Physical Vapor Deposition; PVD)과 화학증착(Chemical Vapor Deposition)으로 대별된다. 빗각 증착 (Oblique Angle Deposition; OAD) 기술은 입사 증기가 기판에 비스듬히 입사하도록 조절하여 코팅하는 물리증착 기술의 하나로 피막의 조직을 다양하게 제어할 수 있으며 따라서 피막의 특성 제어가 가능한 기술이다. 지금까지 빗각증착은 증기의 산란이 발생하지 않는 $10^{-5}$ 토르 이하의 고진공에서 이루어져 왔다. 본 연구에서는 플라즈마를 이용한 스퍼터링과 음극 아크 증착을 이용하여 질화티타늄(TiN; Titanium Nitride) 박막을 제조하고 그 특성을 평가하였다. TiN 박막은 내마모성 향상 및 장식용 코팅에 널리 이용되고 있다. 박막 제조시 특히 바이어스 전압을 박막 조직의 기울기를 제어하는 수단으로 이용하였고 빗각과 바이어스 전압을 이용하여 다층박막의 조직제어에 활용하였다. 박막의 미세구조와 방위, 경도를 SEM, XRD, Nano Indenter를 이용하여 측정하였고 반사율 및 박막의 조도는 Spectrophotometer와 조도 측정기를 이용하여 측정하였다. 기울어진 조직 및 V형태의 조직이 단층 및 다층의 피막에서 명확하게 관찰됨을 확인하였고 특히 마지막 층 제조시 바이어스 전압을 인가할 경우 탄성계수는 크게 변하지 않는 상황에서 경도가 증가함을 확인하였다.

• 한국수소및신에너지학회논문집
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• 제18권2호
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• pp.132-139
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• 2007

Popular techniques for producing synthesis gas by converting methane include steam reforming and catalyst reforming. However, these are high temperature and high pressure processes limited by equipment, cost and difficulty of operation. Low temperature plasma is projected to be a technique that can be used to produce high concentration hydrogen from methane. It is suitable for miniaturization and for application in other technologies. In this research, the effect of changing each of the following variables was studied using an AC Glidarc system that was conceived by the research team: the gas components ratio, the gas flow rate, the catalyst reactor temperature and voltage. Glidarc plasma reformer was consisted of 3 electrodes and an AC power source. And air was added for the partial oxidation reaction of methane. The result showed that as the gas flow rate, the catalyst reactor temperature and the electric power increased, the methane conversion rate and the hydrogen concentration also increased. With $O_2/C$ ratio of 0.45, input flow rate of 4.9 l/min and power supply of 1 kW as the reference condition, the methane conversion rate, the high hydrogen selectivity and the reformer energy density were 69.2%, 36.2% and 35.2% respectively.

• Journal of Welding and Joining
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• 제15권5호
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• pp.92-103
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• 1997

The purpose of this study is to improve the wear resistance and hardness of Al alloy by making a formation of the thick surface hardening layers. The thick surface hardening layers were formed by PTAW(Plasma Transferred Arc Welding), with the addition of metal powders (Cu), ceramics powders (NbC, TiC), and mixture powders (Cu+NbC) in Al alloy (A1050, A5083). Mechanical properties of overlaid layers (wear resistance, hardness) were investigated in relation to the microstructure. The results obtained are summarized as follows: The depth of penetration was increased with increasing powder feeding rate. It is considered that these increase were due to the thermal pinch effect by the addition of powders, especially, for the Cu powders, were due to the heat of reaction with the matrix. The hardness and wear resistance of overlaid layers were improved with increasing powder feeding rate. For the Cu powders, it is considered that these increase were due to the increase of the formation of ${\theta}(CuAl_2)$ phase with increasing feeding rate of Cu powers.

• 한국전자통신학회논문지
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• 제8권9호
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• pp.1307-1312
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• 2013

본 논문에서는 알칼리성 또는 산성을 띠는 특정 용액 내에서 전기분해 원리를 이용하여 금속 표면을 산화시켜 절연피막을 형성하는 장치를 개발한다. 기존에는 주로 양극에만 펄스 형태로 전압을 인가하는 단극성(unipolar) 방식이지만 본 논문에서는 H-브리지를 이용하여 양극에 양(+)전압과 음(-)전압을 번갈아 가면서 전압을 공급하는 양극성(bipolar) 장치를 제작하였으며, 금속 시편의 특성에 맞는 다양한 전기적인 조건을 가지고 산화피막을 형성할 수 있는 장치를 개발하였다. 공급전류 가변은 PWM 변조를 이용하였으며, (+)와 (-)의 극성변화는 H-브리지를 이용하여 양극성 펄스전압을 공급할 수 있도록 하였다. 그 결과로써 단극성보다 균일한 기공을 갖는 피막이 형성되었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2109-2111
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• 2005

The effect of arc like streamer discharge is investigated on the hydrogen generation in the plasma reactor with multineedle - plate electrode geometry and SDR (Plasma reactor using the surface discharge). An additive of the two type (the saw type and the pellet type) was placed under the water surface to investigate the effect of the water surface conditions. The experimental results are compared in case of the reactor with and without an additive on the water surface. The generation of arc streamer discharge is more powerful with increasing applied voltage in the saw type. The maximum hydrogen Production concentration is about 4300 ppm at 74W in the SDR with additive of the saw type. Also, the Energy yield of the SDR (28990 g/kWh, 4300ppm, 74W) is higher than of the multineedle - plate electrode geometry (20892g/kWh, 3300ppm, 77W).

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1840-1842
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• 2003

This paper describes an experiment of detecting a temperature and components of arc plasma of electrical circuit breaker with a spectroscopic system. The system includes an optical fiber, a monochromator which has three gratings from low to high resolution and ICCD of which time resolution is 50 ns. This system enables measuring a temperature and components of arc plasma of a circuit breaker which is generated and extinguished in a few ms. We use a Planck's law and Boltzmann Plot method for calculating a temperature of arc plasma. A Xenon lamp is used for calibrating the system and this is very important for calculating a temperature of arc plasma. In this study, Arc plasma of Ag and Cu contact was investigated and these represent the contact of low voltage and extra-ultra high voltage circuit breaker, respectively. 8 $kA_{rms}$ test current was applied with a capacitor bank.

• 한국분말재료학회지
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• 제19권1호
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• pp.6-12
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• 2012

Electricity is generated by the combined reactions of hydrogen oxidation and oxygen reduction which occur on the Pt/C catalyst surface. There have been lots of researches to make high performance catalysts which can reduce Pt utilization. However, most of catalysts are synthesized by wet-processes and a significant amount of chemicals are emitted during Pt/C synthesis. In this study, Pt/C catalyst was produced by arc plasma deposition process in which Pt nano-particles are directly deposited on carbon black surfaces. During the process, islands of Pt nano-particles were produced and they were very fine and well-distributed on carbon black surface. Compared with a commercialized Pt/C catalyst (Johnson & Matthey), finer particle size, narrower size distribution, and uniform distribution of APD Pt/C resulted in higher electrochemical active surface area even at the less Pt content.

• 한국자원리싸이클링학회:학술대회논문집
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• 한국자원리싸이클링학회 2006년도 춘계임시총회 및 제27회 학술발표대회
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• pp.56-60
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• 2006

In 2005, the imports of titanium metals was about 22.8 million US$(7,700 tons) in Korea. New scrap produced was estimated to be 359 tons and the exports were about 352 tons. Generally scrap is recylced into titanium ingot either with or without virgin metal using traditional vacuum-arc-melting and cold hearth melting. In Korea, there is no titanium ingot producers(recyclers). In this paper, the brief summary of major titanium melting technology, such as vacuum arc remelting(VAR), electron beam melting(EBM), plasma arc melting(PAM) is given and discussed. In view of titanium market situation of Korea, the technological development of ingot production from scrap is big problem to be solved in order to realize extensive cost reduction for titanium products.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.161-161
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• 2012

결정질 TiCrN과 AlSiN 나노층이 교대로 구성하는 나노 다층 TiAlCrSiN 박막은 음극 아크 플라즈마 증착법에 의해 증착되었다. 나노 다층 TiAlCrSiN 박막의 산화특성들은 $600{\sim}1000^{\circ}C$사이에서 대기 중 최대 70시간동안 연구 되었다. 형성된 산화물들은 주로 $Cr_2O_3$, ${\alpha}-Al_2O_3$, $SiO_2$ 그리고 rutile-$TiO_2$들로 구성되었다. 나노 다층 TiAlCrSiN 박막이 산화하는 동안, 가장 바깥쪽의 $TiO_2$층은 Ti 이온의 외부확산에 의해, 외부 $Al_2O_3$층은 Al이온의 외부확산에 의해 형성되었다. 동시에, 내부($Al_2O_3$, $Cr_2O_3$) 혼합층과 가장 안쪽의 $TiO_2$층은 산소이온의 내부확산에 의해 형성되었다.

• 한국추진공학회지
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• 제23권2호
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• pp.68-77
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• 2019

고체 및 액체 로켓 추진 기관 내열부품으로 사용하기 위하여 C/SiC 복합 재료를 LSI(Liquid Silicon Infiltration) 공법으로 개발하였다. 조성비에 따른 내열 특성은 아크 플라즈마, 초음속 토치 시험으로 평가하였으며 $H_2O$ 및 $CO_2$ 산화에 의한 유효 삭마식을 제시하였다. 연소시험을 통하여 고체 및 액체 추진기관용 노즐목 삽입재, 확대부 내열재 및 연소실 내열부품 등 다양한 형상으로 제작이 가능함을 확인하였으며 높은 내삭마 성능과 열구조 성능이 입증되었다.