• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.301-301
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• 2011

최근 고밀도 메모리 반도체의 재료와 빠른 응답을 요구하는 나노입자를 이용한 비휘발성 메모리 소자의 제작에 대한 연구가 활발히 진행되고 있다. 그에 따른 기존의 플래쉬 메모리가 가지는 문제점을 개선하기 위해서 균일하고 규칙적으로 분포하는 새로운 나노소재의 개발과 비휘발성, 고속 동작, 고집적도, 저전력 소자의 공정기술이 요구되고 있다. 또한 부유게이트에 축적되는 저장되는 전하량을 증가시키기 위한 새로운 소자구조 개발이 필요하다. 한편, 실리 사이드 계열의 나노입자는 금속 나노입자와 달리 현 실리콘 기반의 반도체 공정에서 장점을 가지고 있다. 따라서 본 연구에서는 화합물 중에서 비휘발성 메모리 장치의 전기적 특성을 향상 시킬 수 있는 실리사이드 계열의 바나듐 실리사이드(V3Si) 박막을 열처리 과정을 통하여 수 nm 크기의 나노입자로 제작하였다. 소자의 제작은 p-Si기판에 실리콘산화막 터널층(5 nm 두께)을 건식 산화법으로 성장 후, 바나듐 실리사이드 금속박막을 RF 마그네트론 스퍼터 시스템을 이용하여 4~6 nm 두께로 터널 베리어 위에 증착하고, 그 위에 초고진공 마그네트론 스퍼터링을 이용하여 SiO2 컨트롤 산화막층 (20 nm)을 형성시켰다. 여기서 V3Si 나노입자 형성을 위해 급속 열처리법으로 질소 분위기에서 800$^{\circ}C$로 5초 동안 열처리하여 하였으며, 마지막으로 열 기화 시스템을 통하여 알루미늄 전극(직경 200 ${\mu}m$, 두께 200 nm)을 증착하여 소자를 제작하였다. 제작된 구조는 금속 산화막 반도체구조를 가지는 나노 부유게이트 커패시터이며, 제작된 시편은 투사전자현미경을 이용하여 나노입자의 크기와 균일성을 확인했다. 소자의 전기적인 측정을 E4980A capacitor parameter analyzer와 Agilent 81104A pulse pattern generator system을 이용한 전기용량-전압 측정을 통해 전하저장 효과 및 메모리 동작 특성들을 분석하고, 열처리 조건에 따라 형성되는 V3Si 의 조성을 엑스선 광전자 분광법을 이용하여 확인하였다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.10
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• pp.438-442
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• 2005

Si nanocrystal (Si NC) memory device has several advantages such as better retention, lower operating voltage, reduced punch-through and consequently a smaller cell area, suppressed leakage current. However, the physical and electrical reasons for this behavior are not completely understood but could be related to interface states of Si NCs. In order to find out this effect, we characterized electrical properties of Si NCs embedded in a SiO$_{2}$ layer by scanning probe microscopy (SPM). The Si NCs were generated by the laser ablation method with compressed Si powder and followed by a sharpening oxidation. In this step Si NCs are capped with a thin oxide layer with the thickness of 1$\~$2 nm for isolation and the size control. The size of 51 NCs is in the range of 10$\~$50 m and the density around 10$^{11}$/cm$^{2}$ It also affects the interface states of Si NCs, resulting in the change of electrical properties. Using a conducting tip, the charge was injected directly into each Si NC, and the image contrast change and dC/dV curve shift due to the trapped charges were monitored. The results were compared with C-V characteristics of the conventional MOS capacitor structure.

• Korean Chemical Engineering Research
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• v.46 no.1
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• pp.1-6
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• 2008

Block copolymers spontaneously assemble into various nanoscale structures such as spheres, cylinders, and lamellar structures according to the relative volumn ratio of each macromolecular block and their overall molecular weights. The self-assembled structures of block copolymer have been extensively investigated for the applications such as nanocomposites, photonic crystals, nanowires, magnetic-storage media, flash memory devices. However, the naturally formed nanostructures of block copolymers contain a high density of defects such that the practical applications for nanoscale devices have been limited. For the practical application of block copolymer nanostructures, a robust process to direct the assembly of block copolymers in thin film geometry is required to be established. To exploit self-assembly of block copolymer for the nanotechnology, it is indispensible to fabricate defect-free self-assembled nanostructure over an arbitrarily large area.

• Conservation Science in Museum
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• v.11
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• pp.9-16
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• 2010

The National Chuncheon Museum has carried out a conservation process in order to prevent corrosion of the seated iron Śākyamuni Buddha statue from Goreyo Dysnasty for its exhibition. Before the conservation process, the surface of the artifact showed exfoliation and the artifact was damaged from rear to legs so exhibition was impossible. Therefore a process to get rid of pollution and to reinforce and protect the artifact was carried out. Before the reinforcing process, a basic test was carried out using micro crystalline wax type with reference to foreign and domestic experiment results. As a result, as wax(in xylene) 5wt% of Dongnam petrochemical Ltd. showed no efflorescence and little change in surface color and was convenient to use, it was chosen as a reinforcing agent and used to suppress corrosion. For the restoration of damaged parts, an internal support was made and used with an epoxy resin, allowing removable restoration, thus increasing effectiveness for exhibition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.631-634
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• 2004

The method that exists in Photodynamic Therapy uses Photosensibility drug strongly Influencing tumour accumulation together with photochemical laser effect and makes the structure of tumour be localized and become extinct. The intracavity transformation of the Nd :YAP main radiation 1079 nm was Raman converted in barium nitrate crystal and the Stokes frequency (1216 nm) was doubled using KTP or RTA crystals. The LiF or Cr:YAG crystals are used for the Q-switch. The radiation Parameters were obtained at 100 Hz pump repetition frequency. The average power at 608 nm radiation with LiF and KTP was 700 mW at multi-mode generation. The 3-6 single 10-15 ns pulses were generated during one cycle of pumping. The doubling efficiency with RTA was two times more than with KTP. The cells of Ehrlich adenocarcinoma (0.1 ml) were i.m. implanted in hind thighs of ICR white non-imbred mice. The cells were preliminarily diluted in medium 199 in the ratio of 1 to 5. HpD was intravenous administered in a dose of 10 mg/kg. The left clean-shaven hind leg was irradiated with laser light 21-27 hours after the administration of the preparation. The right non-Irradiated leg of each animal served as a control. The animals with the transplanted tumor that were not injected with HpD sewed as a control to estimate the complex effect (HpD+ irradiation). Before the administration of HpD and on 3 and 4 days after irradiation the tumor size was measured and the percent of the tumor growth inhibition was calculated. The results of animal treatments has shown high efficiency of PDT method for cancer treatment by means 0.608 m high power pulse solid state laser.

• Applied Chemistry for Engineering
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• v.34 no.4
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• pp.383-387
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• 2023

The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.4
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• pp.374-381
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• 2024

This paper delves into the application of the short-wave infrared (SWIR) region, with a focus on the synthesis and optical characteristics of silver sulfide (Ag₂S) nanostructures. SWIR offers advantages such as reduced damage to biological tissues and enhanced optical transparency, making it valuable across various domains. The study introduces three distinct synthesis methods, each showcasing the ability to obtain nanostructures with improved optical properties. These research findings open up the possibility of providing tailored solutions in detection, imaging, and other applications by controlling the size and ligands of Ag₂S nanoparticles. This paper provides new insights into the utilization of Ag₂S in the SWIR region, which is expected to foster advancements in future technologies.

• Journal of Animal Science and Technology
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• v.51 no.4
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• pp.337-342
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• 2009

The feasibility of reutilization of magnesium ammonium phosphate (MAP) or struvite slurry recovered from the process through microwave irradiation was studied in this experiment. For this purpose, 4 different operations were performed with or without Mg source addition and different levels of MAP recycled in a batch reactor. Dissolution rate of MAP, ${NH_4}^+$ elimination pattern and physicochemical changes of MAP during microwave irradiation were also studied. The result showed that only 33% orthophosphate ($PO_4-P$) and 27% $NH_4-N$ removal occurred without adding any external Mg source (run A), whereas 87% $PO_4-P$ and 40% $NH_4-N$ removed when 1.0 M ratio of $MgCl_2$ (run B) was added based on $PO_4-P$ in influent. Although the addition of 1.0 molar ratio of microwave irradiated MAP (Run C) removed lower $PO_4-P$ and $NH_4-N$ than 1.0 M $MgCl_2$ (run B), $PO_4-P$ removal was double when compared with no Mg addition (run A). Addition of half MAP and half $MgCl_2$ (run D) showed the similar removal efficiency (88% $PO_4-P$ and 35% $NH_4-N$) with sole $MgCl_2$ addition (run B). Based on these results, the reutilization of MAP irradiated by microwave would be a feasible way to enhance the removal efficiencies of N and P, as well as curtail the Mg chemical usage. Track study showed that $NH_4-N$ gradually increased at initial stage of microwave irradiation of MAP, and then started eliminating from liquor as temperature increased over $45^{\circ}C$. Dissolution rate of ${PO_4}^{-3}$ during microwave irradiation was proportional to the initial MAP concentration, having $0.0091x^{0.6373}$ mg/sec. It was found from the scanning electron microscope (SEM) study that physical structure of MAP crystal started breaking down into small cube granules within very short time by electromagnetic vibration force during microwave irradiation and then gradually melted down into solution.

• Journal of the Korean GEO-environmental Society
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• v.11 no.7
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• pp.25-31
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• 2010

In this study, it was intended to suggest new cooling method that enables to improve the applicability and added value higher than existing slag by applying new cooling method(powder cooling slag) at the time discharging slag, which is produced from the ash melting system that the plasma torch is used for the first time in Korea. It is suggested the applicative direction in the development of future recycling process by discovering its nature of material and applicative possibility as earthwork material. The ashes produced after the sewage sludge discharged from Y city was incinerated by the fluidized bed method and was used as test materials. As result of XRF(X-Ray Flourescence Spectrometry) analysis, main ingredient of sewage sludge ashes was $SiO_2$(32%) besides CaO, $Al_2O_3$, $Fe_2O_3$, and so on. In addition, as result of XRD analysis, traditional diffuse pattern of glass could be found from granulated air-cooled slags, while a minor crystal phase could be observed from powder cooling slag, because the powder on the surface exists in the state not melted. From EDX(Energy Dispersive X-ray Spectroscopy) analysis, it is deemed that powder ingredient has no change before and after it is used as cooling medium, and accordingly it is thought that the powder can be produced as the material where the function is added if used in different shape.

• Restorative Dentistry and Endodontics
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• v.31 no.2
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• pp.133-139
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• 2006

The purposes of this study were firstly to identify the microbial species on gutta-percha (GP) cones exposed at outpatient clinics using polymerase chain reaction, and secondly to evaluate the rapid sterilization effect of two chemical disinfectants at chair side. It also evaluated the alteration of surface texture of GP cones after 5-min soaking into two chemical disinfectants. A total of 100 GP cones from two endodontic departments were randomly selected for microbial detection using PCR assay with universal primer. After inoculation on the sterilized GP cones with the same microorganism identified by PCR assay, they were soaked in two chemical disinfectants: 5% NaOCl and 2% chlorhexidine for 1, 3, 5, and 10 minutes. The sterilization effect was evaluated by turbidity and subculture. The change of surface textures using a scanning electron microscope was also examined after 5 min-soaking in two chemical disinfectants. Results showed that four bacterial species were detected in 17 GP cones, and all the species belonged to the genus Staphylococcus. Two chemical disinfectants were effective in sterilization with just 1 minute soaking. On the SEM picture of NaOCl-soaked GP cone, a cluster of cuboidal crystals was seen on the cone surface. Present data demonstrate that two chemical disinfectants are useful for rapid sterilization of GP cone just before obturation at chair side, while CHX-soaked GP cone has cleaner surface without crystal precipitation than that of NaOCl-treated cone.