• Title/Summary/Keyword: 채널도핑

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Dependence of Drain Induced Barrier Lowering for Doping Profile of Channel in Double Gate MOSFET (이중게이트 MOSFET에서 채널내 도핑분포에 대한 드레인유기장벽감소 의존성)

  • Jung, Hak-Kee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.9
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    • pp.2000-2006
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    • 2011
  • In this paper, the drain induced barrier lowering(DIBL) for doping distribution in the channel has been analyzed for double gate MOSFET(DGMOSFET). The DGMOSFET is extensively been studing because of adventages to be able to reduce the short channel effects(SCEs) to occur in convensional MOSFET. DIBL is SCE known as reduction of threshold voltage due to variation of energy band by high drain voltage. This DIBL has been analyzed for structural parameter and variation of channel doping profile for DGMOSFET. For this object, The analytical model of Poisson equation has been derived from Gaussian doping distribution for DGMOSFET. To verify potential and DIBL models based on this analytical Poisson's equation, the results have been compared with those of the numerical Poisson's equation, and DIBL for DGMOSFET has been investigated using this models.

Doping Profile Dependent Subthreshold Swing for Double Gate MOSFET (DGMOSFET에서 문턱전압이하 스윙의 도핑분포 의존성)

  • Jung, Hak-Kee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.8
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    • pp.1764-1770
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    • 2011
  • In this paper, the subthreshold swings for doping distribution in the channel have been analyzed in double gate MOSFET(DGMOSFET). The DGMOSFET is extensively been studying since it can lessen the short channel effects(SCEs) as next -generation nano device. The degradation of subthreshold swing(SS) known as SCEs has greatly influenced on application of digital devices, and has been analyzed for structural parameter and variation of channel doping profile in DGMOSFET. The analytical model of Poisson equation has been derived from nonuniform doping distribution for DGMOSFET. To verify potential and subthreshold swing model based on this analytical Poisson's equation, the results have been compared with those of the numerical Poisson's equation, and subthreshold swing for DGMOSFET has been analyzed using these models.

Ion Implant 시뮬레이션을 통한 MOSFET 최적점에 대한 연구

  • Lee, Dong-Bin
    • Proceeding of EDISON Challenge
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    • 2015.03a
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    • pp.347-349
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    • 2015
  • 본 연구에서는 MOSFET 제작방법중 하나인 이온주입법에서 다양한 변수로 작용하는 도핑농도, 에너지주입, 바탕농도의 역할에 대해서 알아보고 채널길이가 감소함에 따른 단채널효과를 억제할 수 있는 최적점에 대하여 분석하였으며 Ion Implant 이차원 시뮬레이션값과 비교하였다. 결과적으로 농도와 에너지주입 그리고 채널길이에 따른 MOSFET의 최적화된 모델을 분석하였다.

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Analysis for Potentail Distribution of Asymmetric Double Gate MOSFET Using Series Function (급수함수를 이용한 비대칭 이중게이트 MOSFET의 전위분포 분석)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.11
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    • pp.2621-2626
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    • 2013
  • This paper has presented the potential distribution for asymmetric double gate(DG) MOSFET, and sloved Poisson equation to obtain the analytical solution of potential distribution. The symmetric DGMOSFET where both the front and the back gates are tied together is three terminal device and has the same current controllability for front and back gates. Meanwhile the asymmetric DGMOSFET is four terminal device and can separately determine current controllability for front and back gates. To approximate with experimental values, we have used the Gaussian function as doping distribution in Poisson equation. The potential distribution has been observed for gate bias voltage and gate oxide thickness and channel doping concentration of the asymmetric DGMOSFET. As a results, we know potential distribution is greatly changed for gate bias voltage and gate oxide thickness, especially for gate to increase gate oxide thickness. Also the potential distribution for source is changed greater than one of drain with increasing of channel doping concentration.

The Study on Channel and Doping influence of MOSFET using TCAD (TCAD를 이용한 채널과 도핑 농도에 따른 MOSFET의 특성 분석)

  • 심성택;장광균;정정수;정학기;이종인
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2000.05a
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    • pp.470-473
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    • 2000
  • The metal-oxide-semiconductor field-effect transistor(MOSFET) has undergone many changes in the last decade in response to the constant demand for increased speed, decreased power, and increased patting density. The devices are scaled down day by day. Therefore, This paper investigates how MOSFET structures influence on transport properties in according to change of channel length and bias and, observes impact ionization between the drain and the gate. This paper proposes three models, i.e., conventional MOSFET, LDD MOSFET and EPI MOSFET. The gate lengths are 0.3$\mu\textrm{m}$ 0.15$\mu\textrm{m}$, 0.075$\mu\textrm{m}$ and scaling factor is λ = 2. We have presented MOSFET's characteristics such as I-V characteristic, impart ionization, electric field, using the TCAD. We have analyzed the adaptive channel and doping influences

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Analysis of Tunneling Current of Asymmetric Double Gate MOSFET for Ratio of Top and Bottom Gate Oxide Film Thickness (비대칭 DGMOSFET의 상하단 산화막 두께비에 따른 터널링 전류 분석)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.5
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    • pp.992-997
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    • 2016
  • This paper analyzes the deviation of tunneling current for the ratio of top and bottom gate oxide thickness of short channel asymmetric double gate(DG) MOSFET. The ratio of tunneling current for off current significantly increases if channel length reduces to 5 nm. This short channel effect occurs for asymmetric DGMOSFET having different top and bottom gate oxide structure. The ratio of tunneling current in off current with parameters of channel length and thickness, doping concentration, and top/bottom gate voltages is calculated in this study, and the influence of tunneling current to occur in short channel is investigated. The analytical potential distribution is obtained using Poisson equation and tunneling current using WKB(Wentzel-Kramers-Brillouin). As a result, tunneling current is greatly changed for the ratio of top and bottom gate oxide thickness in short channel asymmetric DGMOSFET, specially according to channel length, channel thickness, doping concentration, and top/bottom gate voltages.

Comparison of Current-Voltage Characteristics by Doping Concentrations of Nanosheet FET and FinFET (Nanosheet FET와 FinFET의 도핑 농도에 따른 전류-전압 특성 비교)

  • Ahn, Eun Seo;Yu, Yun Seop
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2022.10a
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    • pp.121-122
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    • 2022
  • In this paper, the device performance with the structure of Nanosheet FET (NSFET) and FinFET is simulated through a three-dimensional device simulator. Current-voltage characteristics of NSFET and FinFET were simulated with respect to channel doping concentrations, and the performance such as threshold voltage and subthreshold swing extracted from the current-voltage characteristics was compared. NSFET flows more drain current and has a higher threshold voltage in current-voltage characteristics depending on channel doping concentration than that of FinFET. The subthreshold voltage swing (SS) of NSFET is steeper than that of FinFET

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Drain Induced Barrier Lowering for Ratio of Channel Length vs. Thickness of Asymmetric Double Gate MOSFET (채널길이 및 두께 비에 따른 비대칭 DGMOSFET의 드레인 유도 장벽 감소현상)

  • Jung, Hakkee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2015.05a
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    • pp.839-841
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    • 2015
  • 본 연구에서는 비대칭 이중게이트 MOSFET의 채널길이와 채널두께의 비에 따른 드레인 유도 장벽 감소 현상의 변화에 대하여 분석하고자한다. 드레인 전압이 소스 측 전위장벽에 영향을 미칠 정도로 단채널을 갖는 MOSFET에서 발생하는 중요한 이차효과인 드레인 유도 장벽 감소는 문턱전압의 이동 등 트랜지스터 특성에 심각한 영향을 미친다. 드레인 유도 장벽 감소현상을 분석하기 위하여 포아송방정식으로부터 급수형태의 전위분포를 유도하였으며 차단전류가 $10^{-7}A/m$일 경우 비대칭 이중게이트 MOSFET의 상단게이트 전압을 문턱전압으로 정의하였다. 비대칭 이중게이트 MOSFET는 단채널효과를 감소시키면서 채널길이 및 채널두께를 초소형화할 수 있는 장점이 있으므로 본 연구에서는 채널길이와 두께 비에 따라 드레인 유도 장벽 감소를 관찰하였다. 결과적으로 드레인 유도 장벽 감소 현상은 단채널에서 크게 나타났으며 하단게이트 전압, 상하단 게이트 산화막 두께 그리고 채널도핑 농도 등에 따라 큰 영향을 받고 있다는 것을 알 수 있었다.

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Enhanced electrical property of Y doped IGZO thin film for TFT channel layer (TFT 채널 층 IGZO박막의 Yttrium 도핑에 따른 전기적 특성 개선)

  • Kim, Do-Yeong;Song, Pung-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.92-93
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    • 2015
  • 빠른 응답속도를 요구하는 고품질 대면적 디스플레이의 박막형 트랜지스터 적용에 있어서 비정질 IGZO 박막에 대한 많은 연구가 진행되어왔으나, 불순물 도입에 의한 5성분계 IGZO 박막의 전기적 특성 향상에 대한 연구는 거의 보고 되지 않고 있다. 따라서 이번 연구에서는 magnetron co-sputtering 법으로 50 nm 두께를 가지는 yttrium이 도핑된 5성분계 Y-IGZO박막과 Y-IGZO/IGZO 하이브리드막을 제조하여 그 전기적, 광학적 특성 및 표면 조도를 관찰 하였다.

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Analytical Model for the Threshold Voltage of Long-Channel Asymmetric Double-Gate MOSFET based on Potential Linearity (전압분포의 선형특성을 이용한 Long-Channel Asymmetric Double-Gate MOSFET의 문턱전압 모델)

  • Yang, Hee-Jung;Kim, Ji-Hyun;Son, Ae-Ri;Kang, Dae-Gwan;Shin, Hyung-Soon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.2
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    • pp.1-6
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    • 2008
  • A compact analytical model of the threshold voltage for long-channel Asymmetric Double-Gate(ADG) MOSFET is presented. In contrast to the previous models, channel doping and carrier quantization are taken into account. A more compact model is derived by utilizing the potential distribution linearity characteristic of silicon film at threshold. The accuracy of the model is verified by comparisons with numerical simulations for various silicon film thickness, channel doping concentration and oxide thickness.