Influence of Nitrogen Plasma Treatment on Low Temperature Deposited Silicon Nitride Thin Film for Flexible Display (플렉서블 디스플레이 적용을 위한 저온 실리콘 질화막의 N2 플라즈마 처리 영향)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.1
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- pp.39-44
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- 2014