• Title/Summary/Keyword: 지지시스템

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Failure analysis of a turbo molecular pump in semiconductor equipments (반도체 장비에서 터보 분자 펌프의 파손 사례 연구)

  • Jeong, Jin-Yong;Ju, Jeong-Hun;O, Sam-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.120-120
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    • 2018
  • 반도체 소자나 디스플레이 패널 제조 공정에 가장 많이 사용되는 진공 펌프인 터보 분자 펌프는 오일을 사용하지 않고, 설치 방향이 자유로우며 넓은 작동 압력 영역을 가지고 있어서 고가임에도 불구하고 점점 더 사용 영역을 넓혀 가고 있다. 상하의 두 곳에 회전축을 지지하는 베어링이 필요한데, 기계식 금속 베어링을 채용하는 경우에는 반드시 윤활유를 공급해 주어야 하고, 고온, 부식성 또는 산화성 가스의 배기 시에는 퍼지 가스로 비활성인 질소나 알곤등을 이용하여 보호를 해주어야 한다. 반면, 자기 베어링을 채택한 모델은 윤활의 걱정에서 자유로울 수 있기 때문에 채용이 늘어나고 있다. 동일극의 반발력이나 반대극의 인상력을 이용한 구조를 갖게 되는데 갑작스러운 입구 쪽 압력의 증가 시에는 자석 끼리 부딪치는 일이 발생하고 이로 인해서 로터 모듈 전체에 큰 손상을 갖게 되므로 한 곳 정도에 비상용 터치 다운 베어링을 기계식으로 윤활제 없이 설치하기도 한다. 기본적으로 자기 베어링 방식은 로터 모듈의 부상과 제어를 위해서 3축 또는 5축 제어를 하게 되는데 여기에는 전자석의 전류를 미세하게 조정하여 피드백 하는 시스템을 활용하기 때문에 외부에서의 자기장이 일정값 이상 침투하게 되면 제어 회로의 기능에 문제를 일으키게 된다. 또한 축 방향에 수직인 자기장의 강도가 높아지면 고속으로 회전하는 금속 블레이드가 자속을 자르게 되므로 표면에 와전류가 발생하여 문제가 된다. 터보 분자 펌프는 회전자와 고정자 간격이 1 mm 이내로 작아서 약간의 진동이라도 발생하면 회전자와 고정자 간에 충돌이 일어나고 이는 곧 파손으로 이어진다. 그림 1에는 파손 원인 분석을 위한 회전자 모듈의 수치 해석용 모델의 일부를 나타내었고, 그림 2에는 실제로 외부 자기장에 의한 파손이 발생한 사례의 자기 베어링 모듈의 사진을 나타내었다. 본 발표에서는 외부 자기장의 형태에 따라 제어 자기장에 미치는 영향을 CFD-ACE+(ESI corp)를 활용하여 해석하였다.

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Vibrational Characteristics on the Cables in Cable Stayed Bridge (사장교 케이블의 진동거동 특성)

  • Sung, Ikhyun
    • Journal of the Society of Disaster Information
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    • v.13 no.2
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    • pp.249-257
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    • 2017
  • Recently, a cable disconnection accident occurred due to a lightning strike at the Seohae Bridge located in Dangjin-Pyeongtaek City. This is a natural occurrence, but it is a recall that it is very important to review the safety issues due to the disconnection of cable bridges. In other words, the role of cables in cable bridges has a profound effect on the safety of the structure, and it has become necessary to grasp the effect on the entire structural system. The cable bridge is an economic bridge that builds the main tower and supports the bottom plate by cable. The influence of the cable is the main member, which is a big influence on the safety of the whole bridge system. In the cable-stayed bridge, the cables exhibit nonlinear behavior because of the change in sag, due to the dead weight of the cable, which occurs with changing tension in the cable resulting from the movement of the end points of the cable as the bridge is loaded. Modal analysis is conducted using the deformed dead-load tangent stiffness matrix. A new concept was presented by using divided a cable into several elements in order to study the effect of the cable vibration (both in-plane and swinging) on the overall bridge dynamics. The result of this study demonstrates the importance of cable vibration on the overall bridge dynamics.

Loads of NREL Phase VI Rotor at Hub in Yawed Conditions (요 상태에서 NREL Phase VI 로터의 허브 중심 하중 예측)

  • Ryu, Ki-Wahn
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.47 no.12
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    • pp.841-847
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    • 2019
  • Time series data of 6-component loads were computed for a horizontal axis wind turbine rotor in yawed operating conditions with both rotating and non-rotating coordinate systems fixed at a center of a rotor hub. In this study, a well-known 20 kW class of the NREL Phase VI rotor was used for a model wind turbine, and this paper focuses on the yaw moments and over-turning moments for the operating wind speed range between 6 to 25 m/s. Unsteady blade element momentum theorem was adopted to get the aerodynamic loads acting on the wind turbine rotor. Computed 6-component loads using the developed UBEM code were compared with those using the NREL FAST program. From the computed results, both yaw and over-turning moments would be basic inputs to determine not only the specification of yawing mechanism but also the design condition of foundation.

Pyroelectric Infrared Microsensors Made for Human Body Detection (인체 감지용 강유전체 박막 초전형 적외선 센서의 제작)

  • Choi, Jun-Rim
    • Journal of Sensor Science and Technology
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    • v.7 no.2
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    • pp.103-110
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    • 1998
  • Pyroelectric infrared detectors based on La-modified $PbTiO_{3}$ (PLT) thin films have been fabricated by RF magnetron sputtering and rnicrornachining technology. The detectors form $Pb_{l-x}La_{x}Ti_{1-x/4}O_{3}$ (x=0.05) thin film ferroelectric capacitors epitaxially grown by RF magnetron sputtering on Pt/MgO (100) substrate. The sputtered PLT thin film exhibits highly c-axis oriented crystal structure that no poling treatment for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency. Polymide is coated on top of the sensing elements to support the fragile structure and the backside of the MgO substrate is selectively etched to reduce the heat loss. The sensing element exhibited a very high detectivity D* of $8.5{\times}10^{8}cm{\cdot}\sqrt{Hz}/W$ at room temperature and it is about 100 times higher than the case of micromachining technology is not used. A sensing system that detects the position as well as the existence of a human body is realized using the array sensor.

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An Analysis of Social Discourse on the Enactment of School Sport Promotion Law Produced in the Media (미디어에 나타난 학교체육(진흥)법 제정 관련 사회적 담론 분석)

  • Park, Jae-Woo
    • The Journal of the Korea Contents Association
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    • v.12 no.9
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    • pp.434-446
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    • 2012
  • The purpose of this paper was to analyze a social discourse on the enactment of School Sport Promotion Law produced in the media. For this purpose, 73 articles related to the law collected from portal sites such as 'Daum', 'Naver' and 'Yahoo' as well as 'KINDS' were utilized for data analysis. Therefore, it was concluded that a social discourse's feature related to the enactment of the law is a social 'support' discourse calling for the enactment of the law, a 'denunciation' discourse after the rejection at the regular session of the National Assembly, a 'opposition' discourse concerned about the regression of elite sport and a 'wish' discourse expecting the leap and vitalization of school sport. From the holistic point of view, a dominant discourse is the appropriateness and necessity of the enactment of the law. However, smaller but stronger voices of dissent concerning about the decline in the development of elite sport (especially elite sporting success) were raised.

Tip Deflection Analysis of Mobile Habor Crane Supported by Cable and Elastic Bar (케이블과 탄성보로 지지되는 모바일 하버 크레인의 끝단 처짐량 분석)

  • Hwang, Soon-Wook;Han, Ki-Chul;Choi, Eun-Ho;Cho, Jin-Rae;Lim, O-Kaung
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.23 no.3
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    • pp.283-288
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    • 2010
  • Mobile harbor is characterized by the lightweight compact structure when compared to the conventional above-ground port container crane. A new concept RORI crane system, which was devised for mobile harbor to satisfy the compactness and light weightness, not only can load/unload containers with high speed on sea but can be completely folded at maneuvering mode. This study is concerned with the tip deflection of the horizontal boom of mobile harbor at container loading operation. Both the theoretical method utilizing the Castigliano's theorem and the numerical approach by finite element method are employed, and the reliability of the latter approach is verified through the comparison with the theoretical results. And then, the effect of the initial cable tension on the tip deflection is parametrically examined by the finite element analysis.

단일 나노선의 열전물성 측정용 열전 MEMS 플랫폼 개발

  • Sin, Ho-Seon;Jeon, Seong-Gi;Lee, U;Yu, Jin;Song, Jae-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.589-589
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    • 2013
  • 열전재료는 제백효과(Seebeck effect)에 의해 폐열을 전기에너지로 변환시킬 수 있는 소재로서, 기존의 열전재료가 나노수준으로 크기가 줄어들 경우 양자제한효과에 의한 제백계수의 증가와 표면산란에 의한 열전도도 감소로 인해 벌크재료에 비해 높은 에너지변환효율을 가질 수 있을 것으로 기대되고 있다. 에너지 변환효율은 열전성능계수인 $ZT=S2{\sigma}T/k$로 정의되며 따라서 우수한 열전재료는 높은 제백계수 S와, 높은 전기전도도 ${\sigma}$ 및 낮은 열전도도 k를 갖는 재료여야 한다. 그러나 나노소재는 낮은 측정 신호와 측정소자준비가 어려워 기존 측정시스템으로는 원활한 측정이 어렵다. 특히 열전도도의 경우 나노소재 자체의 열전도 보다 나노소재 주변 구조에 의한 열전도가 큰 경우 정확한 열전도도 평가가 어렵다. 본 연구에서는 나노선의 열전물성을 평가하기 위해 MEMS기반 기술을 이용하여 열전물성 측정플랫폼(MEMS-based thermoelectric measurement platform, MTMP)을 개발하였다. 개발 된 MTMP는 얇은 Si nitride 브릿지들이 허공에 떠 있는 두 개의 아일랜드 형태의 멤브레인 구조를 지지하는 형태로 제작되었으며, 한 쪽 아일랜드구조 위에는 나노히터가 있어 두 아일랜드 구조 사이에 온도구배를 만들 수 있도록 제작되었다. 제작된 멤브레인을 이용하여 전기화학적인 방법으로 합성한 Bi-Te계 나노선의 S, ${\sigma}$ 그리고 k를 측정하였다. 측정결과 화학양론적 미세구조를 갖는 단결정 Bi2Te3 나노선은 300 K의 측정온도에서 $S=-57{\mu}V/K$, ${\sigma}=3.9{\times}10^5S/m$, k=2.0 W/m-K의 측정 값으로 ZT=0.19였다. 본 연구에서 개발한 MTMP는 나노선 뿐만 아니라 나노플레이트의 열전 측정에도 활용할 수 있는 구조로서 나노열전소재 측정에 널리 활용될 수 있다.

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Preparation and Characterization of Highly Permeable Facilitated Olefin Transport Nanocomposite Membrane Utilizing 7,7,8,8-tetracyanoquinodimethane (7,7,8,8-Tetracyanoquinodimethane를 활용한 고투과성 올레핀 촉진수송 나노복합체 분리막 제조 및 특성 분석)

  • Hwang, Jeonghyun;Lee, Eun Yong;Kang, Sang Wook
    • Membrane Journal
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    • v.24 no.6
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    • pp.417-422
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    • 2014
  • The poly(ethylene oxide) (PEO)/Ag Nanoparticles (NPs)/7,7,8,8-Tetracyanoquinodimethane (TCNQ) membrane was fabricated to obtain highly permeable facilitated olefin transport nanocomposite membrane, compared with PEO/Ag NPs/p-Benzoquinone (p-BQ) membrane. Polymer matrix, PEO and silver nanoparticle precursor $AgBF_4$ were fixed at 1 : 0.4 mole ratio and electron acceptor TCNQ content was controlled variously. And the best olefin separation performance was obtained at 1/0.4/0.004 mole ratio, and long-term separation performance was measured at this ratio. As a result, mixed-gas permeance decreased from 23 to 6 GPU, and selectivity decreased from 6 to 2 (propylene/propane) after 32 hours.

Low-Carbon Information Management of Street Lamps and Street Trees Using GIS (GIS를 이용한 가로등 및 가로수의 저탄소 정보 관리)

  • Choi, Byoung Gil;Na, Young Woo;Kwon, Oh Sub
    • Journal of Korean Society for Geospatial Information Science
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    • v.22 no.1
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    • pp.55-62
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    • 2014
  • Diverse improvement projects such as replacing street lamps with LED, street trees, etc are currently in progress in Korea to reduce greenhouse gas so as to cope with change in climate. However, the effect of climate change policy is not exactly analyzed, because exhaust quantity and absorption quantity of greenhouse gas of the target street lamp and street trees are not arranged as information. Thus, this study studied the method to systematically manage low carbon related information of urban facilities by using GIS. It was found that low carbon information of the urban facilities is necessary to exactly analyze effect of climate change policy and the method to calculate carbon exhaust quantity and absorption quantity of each facilities should be established to build exact low carbon information of urban facilities. Further, it was found that the visualization of information related to low carbon of street lamp and street trees by using GIS easily and visually grasps and systematically controls the effect of policy coping with change in climate than the existing numeral data of exhaust quantity and absorption quantity of greenhouse gas.

A Study on Elastic Shaft Alignment Using Nonlinear Soaring Elements (비선형 베어링 요소를 이용한 탄성 추진 축계정렬에 관한 고찰)

  • Choung, Joon-Mo;Choe, Ick-Heung;Shin, Sang-Hoon
    • Journal of the Society of Naval Architects of Korea
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    • v.42 no.3
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    • pp.259-267
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    • 2005
  • The effects of hull flexibility on shaft alignment are growing as ship sizes are increased mainly for container carrier and LNG carrier. In order to consider hull flexibility on a propulsion shafting system, standardization of ship service conditions is necessary because hull deformation is continuously variable according to ship service conditions. How to summarize ship service conditions is suggested based on practically applicable four viewpoints : hull, engine, loading and sea status. Effects of the external forces acting on a ship propulsion shafting system are generally commented. Several design criteria regulated by classification societies are pointed at issue which seems to have Insufficient technical background. A qualitative verification is carried out to point out the invalidity of the assumption of effective supporting position. In this work, an elastic nonlinear multi-supporting bearing system is introduced as a key concept of the elastic shaft alignment. Hertz contact theory is proved to be more proper one than projected area method in calculation of the nonlinear elastic stiffness of the bearing, The squeezing and oil film pressure calculations in the long journal bearing like an after stern tube bearing are recognized as a necessary process for elastic shaft alignment design.