• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.248-253
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• 2004

We propose a near- field scanning optical interferometer (NSOI) based on the facet reflection of a nano-sized moveable tapered optical fiber. The interferometer can measure the position and the wave-front of a focused spot simultaneously. The interfering fringes are generated by the reflected beams from the sample surface and from the fiber facet. The wave-front analysis at the focusing position is obtained by using a phase shifting technique with a four-step algorithm. It is found that the resolution for controlling the focal position of our proposed NSOI is less than λ/3 and the measured wave-front aberration at the focal position is in good agreement with the ones obtained by a Twyman-Green interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.9 s.186
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.21-27
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• 2005

• Korean Journal of Optics and Photonics
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• v.20 no.5
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• pp.272-275
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• 2009

In order to enhance the background noise filtering performance of the white light interferometry(WLI), we demonstrate the noise filtering performance of preprocessing of the measured fringe signals. The WLI was realized through a mirau interferometer which was equipped with a green LED. When measuring large-height and rough surface objects, the illumination optics are considered the numerical aperture(NA) and the depth of focus(DOF). In this case, the limited NA of the illumination optics has a considerable impact on the interference fringe. Therefore, we propose a preprocessing method that uses the intensity difference between the measured intensity and the moving average intensity. The performance is demonstrated by measuring an array of metal solder balls fabricated on printed circuit board(PCB). The proposed method reduces the noise pixels by 15 percent.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.7-8
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.31 no.11
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• pp.999-1006
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• 2014

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.112-113
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• 2005

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.32-33
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• 2004

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.863-864
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• 2011

• Applied Microscopy
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• v.41 no.4
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• pp.223-228
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• 2011

White light scanning interferometry has been employed to analyze surface features of diverse specimens. Long established in the field of materials engineering, the technique provides quantitative three-dimensional data as well as qualitative morphological images. It uses white light that is split and reflected from a reference mirror and an object. Merged together, the light generates interference patterns representing topographical contours of the object surface. The amplitude of the z-axis data is differentiated by gray scale. The technique allows the rapid, noncontact, and wide-field measurements for morphometry of biological specimens including chondrocytes, tooth enamel, and plant leaves. Quantification of the dimension of surface structures such as width, length, and elevation angle could be achievable by white light scanning interferometry. The light reflection from plant leaves has been assumed to be sufficient for the technique. Without special specimen preparations like conductive metal coating, the technique can be increasingly used for quantitative three-dimensional surface measurements of biological specimens.