• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.117-117
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• 2009

최근 고집적화 구조는 저항(resistance)과 정전용량 (capacitance)에 의한 신호 지연 (RC delay) 증가로 인한 혼선 (cross-talk noise)과 전력소모 (power dissipation)등의 문제를 발생시킨다. 칩 성능에 영향을 미치는 제한인자를 최소화하기 위해서는 저저항 배선 금속과 저유전상수 (low-k)의 층간 절연막 (IMD, intermetal dielectric) 물질이 필요하다. 최근 PECVD (plasma enhanced chemical vapor deposition)를 이용하여 증착시킨 유기살리케이트 (OSG, organosilicate glass)는 가장 유망한 저유전상수 물질로 각광받고 있다. 본 연구에서는 제일원리 연구를 통하여 OSG의 전구체 중에 하나인 DEMS 문자를 모델링하고, 에너지적으로 가장 안정한 구조를 찾아서 각 원자 간의 결합에 따른 해리에너지 (dissociation energy)를 계산하고, DEMS가 H-terminated Si 표면과 반응하는 기구에 대해 고찰하였다. 최적화된 DEMS 분자의 구조를 찾았고 DEMS 분자가 결합이 깨져 조각 분자군으로 될 때의 에너지들을 계산하였다. 계산된 해리에너지로부터 DEMS 분자의 O 원자와 C분자의 결합이 깨져서 $C_2H_5$를 조각 분자군으로 생성할 확률이 총 8가지의 경우에서 가장 높다는 것을 알 수 있었다. 8 가지의 해리된 DEMS 조각 분자군들이 H-terminated Si 표면과 반응할 때의 반응에너지를 계산한 결과 표면의 Si 원자와 DEMS 분자에서 $C_2H_5$가 해리되어 생성된 조각 분자군의 O 원자가 결합을 하고 부산물로 $C_2H_6$를 생성하는 반응이 가장 선호된다는 것을 알 수 있었다. DEMS 분자로 증착시킨 OSG에 대하여 제일원리법을 이용하여 계산한 연구는 보고된 바 없기 때문에, DEMS 분자의 각 원자 간의 해리에너지와 Si 기판과의 반응에너지는 추후 연구개발의 중요한 기초 자료가 될 수 있다.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.14 no.1
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• pp.1-6
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• 2000

In this paper, organic dispersion type back light EL(Electroluminescent) devices were manufactured using Ethyl hydroxy ethyl cellulose as organic binder, ZnS:Cu as phosphor powder and $BaTiO_3$ as dielectrics by screen printing method, which are focused on as a new light source. The properties of the fabricated organic dispersion type back light EL devices were showed $1.98[mA/\m^2]$ of current density, 0.075[W] of power consumption, 7.1[nF] of capacitance at $25[^{\circ}C]$, 100[V], 400[Hz], respectively. Also brightness of the fabricated device was revealed $20~110[cd/\m^2]$ at 50~150[V] and the change of color was shoed bluish green of x=0.1711, y=0.3676 which are color coordinate by CIE.

• Journal of the Korean Ceramic Society
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• v.40 no.2
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• pp.198-205
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• 2003

$Ba_{0.66}Sr_{0.34}TiO_3$ thin films and seed-layers were deposited on $Pt/Ti/SiO_2/Si$substrate by R.F. magnetron sputtering method. Effects of various substrate temperature conditions on electrical properties (such as capacitance and leakage current) of BST thin films were studied. The effect of seed-layer was also studied. When seed-layer was inserted between BST and Pt, the crystallization of the BST thin films was considerably improved and the processing temperature was lowered. Compared to the pure BST thin films, dielectric constant, dielectric loss, and leakage current of BST thin films deposited on the seed-layer were considerably improved. It could be revealed that electrical properties are influenced by the substrate temperatures of BST thin films and are enhanced by the seed-layer.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.1
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• pp.27-31
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• 2007

The cpapcitors with MIM(metal-insulator-metal) structures using PVP gate insulation films were prepared for the application of flexible organic thin film transistors (OTFT). The co-polymer organic insulation films were synthesized by using PVP(poly-4-vinylphenol) as a solute and PGMEA(propylene glycol monomethyl ether acetate) as a solvent. The cross-linked PVP insulation films were also prepared by addition of poly(melamine-co-formaldehyde) as thermal hardener. The leakage current of the cross- linked PVP films was found to be about 1.3 nA on Al/PES(polyethersulfone) substrate, whereas, on ITO/ glass substrate was about 27.5 nA indicating improvement of the leakage current at Al/PES substrates. Also, the capacitances of all prepared samples on ITO/glass and Al/PES substrates w ere ranged from 1.0 to $1.2nF/cm^2$, showing very similar result with the calculated capacitance values.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.6
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• pp.1599-1606
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• 2008

Recently, new dispersed generation systems such as photovoltaic, wind power, fuel cell etc. are energetically interconnected and operated in the distribution systems, as one of the national projects for alternative energy with the provision against oil crisis. The technical guidelines on the interconnection of dispersed generation systems have been established and conducted positively. However, protection devices (Re-closer) in primary feeder of distribution system interconnected with photovoltaic generation may cause problems with mis-operation, and then many customers could have problems like an interruption. So, this paper presents the optimal method to minimize the impact of interruption, using both the symmetric method and MATLAB/SIMULINK. And, also this paper shows the effectiveness of proposed method by simulating at the real distribution systems.

• Electrical & Electronic Materials
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• v.3 no.3
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• pp.233-241
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• 1990

본 연구에서는 xPb(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$-yBa(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$-zPbTiO(0.50.leq.x.leq.0.60, 0.10.leq.y.leq.0.20, 0.20.leq.z.leq.0.40)세라믹을 1050.deg.C에서 2시간동안 유지시켜 일반소성법으로 제작하였다. 시편 제작시 조성은 조성변태 상경계부근을 선택하였으며 Ba(Zn$_{1}$3/ Nb$_{2}$3/)O$_{3}$ 고용량에 따른 purochlore상의 억제 및 그 영향을 조사하고 구조적, 유전적 및 압전적 특성을 측정하였다. X-선 회절분석 및 미세구조의 관찰 결과, Ba(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$의 고용량에 따라 pyrochlore상 및 미반응 물질등은 억제되어 0.20mol 고용된 시편에서는 균질한 perovskite상이 형성되었다. Ba(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$의 고용량이 증가함에 따라 유전상수는 증가하여 0.50PZN-0.20BZN-0.30PT시편의 경우 6880.9의 높은 값을 나타내었으며 정전용량의 온도계수는 감소하여 0.383[%/.deg.C]의 양호한 값을 나타내었다. 큐리온도는 PbTiO$_{3}$의 고용량이 0.20mol에서 0.40mol로 증가함에 따라 30.deg.C에서 170.deg.C로 증가하였다. 전기기계 결합계수 (K$_{p}$), 기계적 품질계수(Qm) 및 압전전하 계수 (d$_{33}$)는 조성변태 상경계 부근의 조성에서 크게 나타났으며 0.60PZN-0.15BZN-0.25PT 시편의 경우 각각 58.5%, 120.5, 150x$10^{-12}$[C/N]의 값을 나타내었다.다.다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.342-342
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• 2007

원자층 증착(Atomic Layer Deposition: ALD) 방법은 반응물질들을 펄스형태로 챔버에 공급하여 기판 표면에 반응물질의 표면 포화반응에 의한 화학적 흡착과 탈착을 이용한 박막증착기술이다. ALD법은 박막의 조성 정밀제어가 쉽고, 파티클 발생이 없으며, 대면적의 박막 증착시 균일성이 우수하고, 박막 두께의 정밀 조절이 용이한 장점이 있다. 원자층 증착 공정에서 짧은 시간 안에 소스를 충분히 공급하기 위한 방법으로는 소스 온도를 증가시켜 전구체의 증기압을 높여 반응기로의 유입량을 증가시키는 방법, 전구체의 공급시간을 늘리는 방법 등을 들 수 있다. 그러나 전구체 온도를 상승시키는 경우, 공정 조건의 변화가 요구되며 전구체의 변질에 의하여 형성된 막이 의도하는 막 특성을 만족시키지 못하게 되는 문제점이 발생될 우려가 있다. 그리고 전구체를 충분히 공급하기 위하여 전구체의 공급시간을 늘이는 방법을 사용하면, 원하는 두께의 막을 형성하기 위하여 소요되는 공정시간이 증가된다. 이를 해결하기 위해 수송가스를 이용한 버블러 형태의 전구체 공급 장치를 사용하지만 이 또한 전구체의 수명을 단축시키는 단점을 가지고 있다. 본 논문에서는 위의 문제점을 극복할 수 있는 새로운 개념의 수송가스 도움 전구체 공급 장치를 소개한다. 본 연구에서 사용된 수송가스 도움 전구체 공급 장치를 가지는 ALD 장비는 Lucida-D200 (NCD Technology사)이며 기판으로는 8인치 실리콘 웨이퍼를 사용하였으며 (TEMA)Zr을 사용하여 ZrO2 박막을 성장하였다. 수송가스 도움 전구체 공급 장치를 사용한 경우, 그렇지 않은 경우 보다 $30^{\circ}C$ 이상 전구체 온도를 낮출 수 있으며, 또한 증착 속도를 약 2배정도 증가시킬 수 있었다. 이들 박막들은 XRD, XPS, AFM 등을 이용하여 결정구조, 결합에너지, 표면 거칠기 등의 특성을 관찰하였다. 그리고 C-V, I-V 측정을 이용해 정전용량, 유전율, 누설전류 등의 전기적 특성을 평가하였다.

• Applied Chemistry for Engineering
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• v.34 no.4
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• pp.426-433
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• 2023

Capacitor performance was considered using coffee grounds-based activated carbon produced through oil extraction and KOH activation to increase the utilization of boiwaste. Oil extraction from coffee grounds was performed by solvent extraction using n-Hexane and isopropyl alcohol solvents. The AC_CG-Hexane/IPA produced by KOH activation after oil extraction increased the specific surface area by up to 16% and the average pore size by up to 2.54 nm compared to AC_CG produced only by KOH activation without oil extraction. In addition, the pyrrolic/pyridinic N functional group of the prepared activated carbon increased with the extraction of oil from coffee grounds. In the cyclic voltage-current method measurement experiment, the specific capacitance of AC_CG-Hexane/IPA at a voltage scanning speed of 10 mV/s is 133 F/g, which is 33% improved compared to the amorphous capacity of AC_CG (100 F/g). The results show improved electrochemical properties by improving the size and specific surface area of the mesopores of activated carbon by removing components from coffee grounds oil and synergistic effects by increasing electrical conductivity with pyrrolic/pyridinic N functional groups. In this study, the recycling method and application of coffee grounds, a bio-waste, is presented, and it is considered to be one of the efficient methods that can be utilized as an electrode material for high-performance supercapacitors.

• Applied Chemistry for Engineering
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• v.33 no.1
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• pp.71-77
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• 2022

To increase biomass utilization, rice husk-based activated carbon (RHAC) followed by nitrogen plasma surface treatment was prepared and the electric double-layer capacitor performance was investigated. Through nitrogen plasma surface treatment, up to 2.17% of nitrogen was introduced to the surface of RHAC, and in particular the sample reacted for 5 min with nitrogen plasma showed dominant formation of pyrrolic/pyridine N functional groups. In addition, mesopores were formed on the RHAC material by the removal of silica, and the surface roughness of the carbon material increased by nitrogen plasma surface treatment, resulting in the formation of many micropores. As a result of cyclic voltammetry measurement, at a scan rate of 5 mV/s, the specific capacitance of the RHAC treated with nitrogen plasma increased up to 200 F/g, showing an 80.2% improvement compared to that of using untreated RHAC (111 F/g). This is attributed to the synergetic effect of the introduction of pyrrolic/pyridine-based nitrogen functional groups and the increase of the micropore volume on the surface of the carbon material. This study has a positive effect on the environment in terms of recycling waste resources and using plasma surface treatment.

• Corrosion Science and Technology
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• v.8 no.2
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• pp.53-61
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• 2009

In this study, both evaluations by visual imaging for exterior view of coating and by EIS were executed for epoxy primer coated specimens deteriorated by accelerated test, and comparison and analysis were carried out for 2 evaluation methods. In the comparison between total damaged area ratio acquired by image processing method and deterioration point, higher deterioration points were appeared for rusted specimens than for non-rusted specimens. It is attributed that deterioration point per unit area ratio given for rust is higher than for peeling. In the comparison between total damaged area ratio and EIS result, impedance of coating was largely decreased as about TEX>$10^4{\Omega}{\cdot}cm^2$ or less when rust area ratio is more than about 0.1%, and blistering area ratio is more than about 3%. Charge transfer resistance ($R_{ct}$) and double layer capacitance ($C_{dl}$) values were appeared for all specimens except 2 ones, which shows that water is accumulated and steel substrate is corroded at coated film-steel interface. In the comparison between deterioration point and EIS result, more than 10 points as deterioration point were given for specimens of below $10^6{\Omega}{\cdot}cm^2$ of impedance at low frequency. For specimens deteriorated by NORSOK cyclic test, impedance was lowest of all, though deterioration point was not high. It is thought to be attributed that coating system and accelerated deterioration condition of cyclic tested specimens were different from those of main specimens. From the result, it is thought that coating resistance can be relatively more decreased than deterioration degree estimated from exterior view under more severe corrosion environment or in the present of more complex deterioration factors.