• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.829-832
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• 2002

Deformation of the specimens was investigated on hydrogen absorption-desorption cycling. In order to study this problem, the cold rolled and the annealed palladium thin plate as specimens had been used. By using the electrochemical method, the palladium plate specimens were cyclically hydrogenated in the 0.1mol $H_2SO_4$ electrolyte. As results, it is noted that the thickness of the plate specimens gradually increased in increasing hydrogenation cycles whereas the width and the length decreased. Also, Deformation of the cold rolled palladium specimen was lager than the annealed palladium specimen. And grains in the plate specimen were greatly deformed after hydrogenation cycling. But hydrogen absorption rate scarcely changed.

• Horticultural Science & Technology
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• v.18 no.4
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• pp.529-535
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• 2000

Organic materials such as composted rice-hull, saw dust, and pine bark, and inorganic materials such as vermiculite, perlite, and recycled rockwool were commonly employed as container media in domestic greenhouse industry. The objective of this research was to get informations in soil physico chemical properties of those materials. Composted dry-peeling bark and wet-peeling bark had 72.1% and 69.1%, respectively, in particles larger than 1.0 mm, which were much higher than 34.7% of composted rice-hull and 33.7% of composted saw dust. Imported vermiculite had 89.9%, but domestic vermiculite had 25.7% in particles larger than 1 mm. In soil physical properties, Russian peat had the highest container capacity of 79.3%, and wet-peeling bark had the lowest container capacity of 58.2%. However, Russian peat and composted saw-dust had 4.1% in air space indicating that possible problems could occur in soil aeration when those are employed for container grown crops. Saw dust had $2.3mS{\cdot}cm^{-1}$ in electrical conductivity, while other composted organic materials had less than $0.25mS{\cdot}cm^{-1}$. Imported vermiculite had 64.0 meq/100 g in cation exchange capacity, which was 2.4 times higher than those of domestic vermiculite, 27.2 meq/100 g. Domestic vermiculite had higher Ca and Mg and less Na contents than those of imported vermiculite.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.2
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• pp.57-62
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• 2003

Nano-bending method is presented to measure the Poisson's ratio of thinfilms for MEMS (Micro-Electro-Mechanical Systems) applicaiton. The douvle-ring specimen is designed and fabricated based on the surface micromachining process to facilitate the measurement of the Poisson's ratio. The Poisson's ratio can be obtained through analyzing the linear load-displacement relationship of the double ring specimen subjected to nano-indenter loading. The Present nano-bending mehod is an in-situ measurement approach due to the compatibility to the surface micromachining process. The Poisson's ratio is locally obtained at the location of the double ring specimen with micro dimension. To validate the nano-bending method, the Poisson's ratio of LPCVD (Low Pressure Chemical Vapor Deposition) poly-silicon with thickness of 2.3㎛ is investigated. Experimental results reveal that the Poisson's ratio of the poly-silicon film is 0.2569. The standard deviation of the nano-bending measurement for the stiffness of double ring specimens is 2.66%.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.256-257
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• 2015

마그네슘 합금은 낮은 비중, 높은 비강도, 주조성 및 절삭가공성, 치수안정성, 내흠집성이 우수한 특성을 지니고 있는 경량금속으로써 우수한 주조성과 상온강도, 연신율을 나타낸다. 최근에는 마그네슘 합금을 사용한 IT 기기의 케이스 및 자동차 내, 외장 부품 등의 제품이 다양하게 출시되어지며 금속 질감의 감성 기능까지 적용시킨 전자 기기 제품에 대한 수요가 급증하고 있는 추세이다. 하지만 마그네슘 합금의 낮은 부식 저항성은 마그네슘 합금을 적용시킨 제품에 큰 단점으로 작용되고 있으며 이를 해결하기 위한 연구가 활발히 진행 중이다. 본 연구에서는 플라즈마 전해산화법과 실리카 졸-겔 코팅법을 이용하여 마그네슘 합금의 내부식성을 향상시킴과 동시에 금속질감의 감성 기능을 구현하고자 하였다. 플라즈마 전해산화 공정으로 형성된 산화피막층과 $SiO_2$ 코팅으로 형성된 코팅층의 표면과 단면에 대해서는 FE-SEM(Field emission Scanning Electron Microscope)과 FE-TEM(Field emission Transmission Electron Microscope)으로써 확인하였고 전기화학적 특성 분석을 통한 동전위(Potentiodynamic polarization)와 EIS(Eletrochemical Impedance Spectroscopy) 그리고 Salt spray등을 분석하였다.

• Corrosion Science and Technology
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• v.17 no.4
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• pp.166-175
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• 2018

In this study, the electrochemical properties of CP-Ti (commercially pure titanium) and Ti-64 (Ti-6Al-4V) were evaluated and the effect of hydrofluoric acid on corrosion resistance and electrochemical properties was elucidated. Additive manufactured materials were made by DMT (Directed Metal Tooling) method. Samples were heat-treated for 1 hour at $760^{\circ}C$ and then air cooled. Surface morphologies were studied by optical microscope and SEM. Electrochemical properties were evaluated by anodic polarization method and AC-impedance measurement. The oxide film formed on the surface was analyzed using an XPS. The addition of HF led to an increase in the passive current density and critical current density and decreased the polarization resistance regardless of the alloys employed. Based on the composition of the oxide film, the compositional difference observed by the addition of HF was little, regardless of the nature of alloys. The Warburg impedance obtained by AC-impedance measurement indicates the dissolution of the constituents of CP-Ti and Ti-64 through a porous oxide film.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.61 no.4
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• pp.225-227
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• 2012

This paper presents a chemical etching system for groove manufacturing for the fluid and aero dynamic bearings. To manufacture the grooves to thrust and journal surface of the fluid and aero dynamic bearing, it is very important for grooves' depth to be smaller tolerance. It is very difficult for the internal surface of journal bearing to make the grooves precise. If the precision of the groove is not exact, we can not get the desirable performance for the target of the dynamic bearing. To make the groove of bearing precise, we propose the method of chemical etching system. It has known that the method of chemical etching can not make the groove on the internal surface of journal bearing excepts for on the surface of thrust bearing. However, this paper has shown the solution to make the grooves on it. We obtain the condition and the parameters of the system such as time, chemical material composition and so on. In this paper, we get the experimental results to verify the precise groove manufacturing for the fluid and aero dynamic bearing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.252-255
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• 2004

반도체는 high integrated, high speed, low power를 위하여 design 뿐만 아니라 재료 측면에서도 많은 변화를 가져오고 있으며, RC delay time을 줄이기 위하여 Al 배선보다 비저항이 낮은 Cu와 low-k material 적용이 그 대표적인 예이다. 그러나, Cu 배선의 경우 dry etching이 어려우므로, 기존의 공정으로는 그 한계를 가지므로 damascene 또는 dual damascene 공정이 소개, 적용되고 있다. Damascene 공정은 절연막에 photo와 RIE 공정을 이용하여 trench를 형성시킨 후 electrochemical plating 공정을 이용하여 trench에 Cu를 filling 시킨다. 이후 CMP 공정을 이용하여 절연막 위의 Cu와 barrier material을 제거함으로서 Cu 배선을 형성하게 된다. Dual damascene 공정은 trench와 via를 동시에 형성시키는 기술로 현재 대부분의 Cu 배선 공정에 적용되고 있다. Cu CMP는 기존의 metal CMP와 마찬가지로 oxidizer를 이용한 Cu film의 화학반응과 연마 입자의 기계가공이 기본 메커니즘이다. Cu CMP에서 backside pressure 영향이 uniformity에 미치는 영향을 살펴보았으며, electrochemical plating 공정에서 발생하는 hump가 CMP 결과에 미치는 영향과 dishing 결과를 통하여 그 영향을 평가하였다.

• Corrosion Science and Technology
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• v.17 no.6
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• pp.310-316
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• 2018

The effect of passive film on corrosion of metals and alloys in a static corrosive environment has been studied by many researchers and is well known, however few studies have been conducted on the electrochemical measurement of metals and alloys during cavitation corrosion conditions, and there are no test standards for electrochemical measurements 'During cavitation' conditions. This study used commercially additive manufactured(AM) pure titanium in tests of anodic polarization, corrosion potential measurements, AC impedance measurements, and repassivation. Tests were performed in 3.5% NaCl solution under three conditions, 'No cavitation', 'After cavitation', and 'During cavitation' condition. When cavitation corrosion occurred, the passive current density was greatly increased, the corrosion potential largely lowered, and the passive film revealed a small polarization resistance. The current fluctuation by the passivation and repassivation phenomena was measured first, and this behavior was repeatedly generated at a very high speed. The electrochemical corrosion mechanism that occurred during cavitation corrosion was based on result of the electrochemical properties 'No cavitation', 'After cavitation', and 'During cavitation' conditions.

• Journal of the Korea institute for structural maintenance and inspection
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• v.18 no.3
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• pp.133-142
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• 2014

Recently, more focus is shift to imbalances in aggregate market supply and demand and an exhaustion of natural resources. In this situation, Electric arc furnace oxidizing slag (EAF Slag) has high application possibility as aggregate for concrete due to similar property with general aggregate. In this study, We've got the plan to assure the chemical stability of EAF Slag, and then experimentally tested the mechanical performance and durability for the fine aggregate used EAF Slag. On this test result, we suggest the application plan. At the result of this study, it shows that EAF slag would reduce the surface defect such as pop-out due to natural aging for the fixed hour and adjustment the grain size of EAF Slag. And mechanical performance and durability according to the replacement rate of concrete service, were revealed more than equal or equal compare to general aggregate. Hereafter, quality control must precede not to impede the beauty of concrete surface as assure the safety for aging and processing. And, to establish the environmental resource recycling system for by-products of steel, it should be made development of various application and guideline of quality control for the EAF slag aggregate. Moreover, it must be constantly studied all kind of engineering performance and durability for related to this study.

• Journal of the Korea Concrete Institute
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• v.21 no.3
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• pp.367-375
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• 2009

Recently, more focus is shift to imbalances in aggregate market supply and demand and an exhaustion of natural resources. In this situation, Electric arc furnace oxidizing slag (EAF slag) has high application possibility as aggregate for concrete due to similar property with general aggregate. However, it is inherent the problem which causes pop-out by free-CaO contained in slag In this study, we've got the plan to assure the chemical stability of EAF slag, and then experimentally tested the mechanical performance and durability for the fine aggregate used EAF slag. On this test result, we suggest the application plan. At the result of this study, it shows that EAF slag would reduce the surface defect such as pop-out due to natural aging for the fixed hour and adjustment the grain size of EAF slag. And mechanical performance and durability according to the replacement rate of concrete service, were revealed more than equal or equal compare to general aggregate. Hereafter, quality control must precede not to impede the beauty of concrete surface as assure the safety for aging and processing. And, to establish the environmental resource recycling system for by-products of steel, it should be made development of various application and guideline of quality control for the EAF slag aggregate. Moreover, it must be constantly studied all kind of engineering performance and durability for related to this study.