• 한국레이저가공학회지
• /
• 제6권1호
• /
• pp.9-16
• /
• 2003

Micromachining using the DPSS 3rd Harmonic Laser (355nm) has outstanding advantages as a UV source in comparison with Excimer lasers in various aspects such as maintenance cost, maskless machining, high repetition rate and so on. It also has the greater absorptivity of many materials in contrast to other IR sources. In this paper, the process for micro-drilling of blind hole in Cu/PI/Cu substrate with the DPSS UV laser and the scanning device is investigated by the experimental methods. It is known that there is a large gap between the ablation threshold of copper and that of PI. We use the Archimedes spiral path for the blind hole with different energy densities to ablate the different material. Finally, the blind via hole of diameter 100$\mu\textrm{m}$ and 50$\mu\textrm{m}$ was drilled.

• 한국세라믹학회지
• /
• 제38권7호
• /
• pp.654-659
• /
• 2001

고령토 슬러리의 분산특성에 미치는 양이온성 polyethyleneimine 결합제의 영향을 고찰하였다. 분산제인 Sodium Hexametaphosphate (SHP)를 0.8 wt% 첨가한 경우와 첨가하지 않은 두 가지 슬러리 내에서 polyethyleneimine (PEI)의 첨가량에 따른 슬러리의 응집, 분산거동을 점도 및 제타전위 측정을 통해 평가하였다. 슬러리 내에 SHP 유무에 상관없이 PEI 농도가 0.02 wt%일 경우에는 응집, 0.6 wt%에서는 분산, 0.6 wt% 이상에서는 재응집되는 것으로 각각 나타났다. 슬러리가 응집-분산-재응집과정을 거치는 동안 점토입자의 제타전위는 항상 일정한 값을 유지하였다. 또한 입자표면의 PEI의 흡착량은 SHP를 첨가한 슬러리의 경우가 크게 나타났으며, 분산성은 상대적으로 더 향상됨을 알 수 있었다.

• 한국정밀공학회지
• /
• 제21권12호
• /
• pp.160-166
• /
• 2004

Self-Assembled Monolayers(SAMs) by alkanethiol adsorption to thin metal film are widely being investigated fer applications as coating layer for anti-stiction or friction reduction and in fabrication of micro structure of molecule and bio molecule. Recently, there have been many researches on micro patterning using the advantages of very thin thickness and etching resistance of Self-Assembled Monolayers in selective etching of thin metal film. In this report, we present the several machining method to form the nanoscale structure by Mask-Less laser patterning using alknanethiolate Self-Assembled Monolayers such as thin metal film etching and heterogeneous SAMs structure formation.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.106-109
• /
• 2004

In this project, we have developed the eye-safe LRF system of 1.54 ${\mu}{\textrm}{m}$ wavelength using OPO. The maximum measured distance was 3.7km in outdoor experiment. We used Nd：YAG (1064nm) as a laser medium. It was applied BBO to construct the system. We also developed a time-counter for the range finder using a method of TOF (time of flight). The counter-clock used at the time counter was 320MHz making resolution within $\pm$1m. Start and stop signals were detected by two channel systems using PIN and APD. The LRF's repetition rate was 4 times per minute. The energy was measured to be over 9mJ. And, pulse-duration was 23ns. Resolution was $\pm$2m at the distance measurement using a target.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.369-372
• /
• 2004

Photo-induced surface alignment is charming as a non-contact photo-patternable alignment technology which can be used in the next generation of displays, such as large area, multi-domain. For decades, many polymer film have been investigated and developed to be used in the photo alignment. Among these photoreactive materials, recently developed polyimide, Chloromethylated Polyimide(CMPI) now became the focus of interests in this area because of its high photosensitivity and superior thermal stability. In this report, we present micro patterning method to form the nanoscale structure by Mask-Less laser patterning using this CMPI film and NSOM probe.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1992년도 추계학술대회 논문집
• /
• pp.17-21
• /
• 1992

최근 들어 공작기계 자동화의 보편화로 절삭가공작업은 고속화, 정밀화되고 있어 생산성을 높이고 있다. 하지만 이러한 생산성의 증가는 단위시간당 chip생산량을 증가시켰으며, 이에 따라 효율적이면서 바람직한 chip처리가 생산성 향상과 연관되어 매우 중요한 문제로 대두되었다. 본 연구에서는 부착장애형 chip breaker를 설치한 insert 공구를 이용, 피삭재로서 내식성, 내마모성을 기계적 성질이 우수하여 근래 산업의 여러 분야에서 각광받고 있는 난삭재 STS304를 절삭하였다. 난삭재 STS304연질금속으로서, 자유표면이 다소 매끄러운 일반재료와 달리 chip의 단면이 어느 정도 규칙적인 톱니형 chip을 발생한다. 그러므로 부착장애형 chip breaker의 각 및 거리, 기타 각 조건을 이용하여 STS304를 절삭특성 및 chip 조절상태를 관찰하고, 기존의 실험에서 자주 이용되었던 연강과 STS304의 비교절삭을 행하여 chip형태등을 비교하여 보는 것도 난삭재의 절삭가공기술 진전에 일조하리라 생각한다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.616-619
• /
• 2003

Photochemical and photothermal effects have correlation with each other and depend on laser wavelength. Multi-scanning laser ablation process of polymer with DPSS(Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser with wavelength of 355nm is applied to fabricate three-dimensional micro shape. The DPSSL photomachining system can rapidly and cheaply fabricate 2D pattern or 3D shape with high efficiency because we only use CAD/CAM software and precision stages instead of complex projection mask. Photomachinability of polymer is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for 355nm laser source is investigated by experimentally and theoretically.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.640-643
• /
• 2003

We present investigations of the surface micromachining for transparent glass substrate, e.g. soda lime glass using tightly focused 800nm Ti:sapphire femtosecond laser. In this study, experiment conditions such as laser intensity, scanning speed, focus position were controlled as variable parameters to decide optimal machining conditions. This study shows clearly that laser intensity and scanning speed are dominant factors for good surface morphology. Using the optimal conditions, grooves with 50${\mu}{\textrm}{m}$ line width were fabricated on glass substrate and their surface morphologies were investigated from SEM image.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.938-941
• /
• 2003

As the application area of range finder initially developed for military purpose has been extended, the necessity of precision measurement for long distance and its miniaturization is being presented. Recently, LRF(Laser Range Finder) is widely used because it shows more accurate results of range finding. However, most of LRFs use laser source which have wavelength ranges harmful to the human eyes. In this study, we developed the LRF using OPO(Optical Parametric Oscillator) which can stretch laser wavelength to safe region and realized more compact one using solid state laser

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.26-29
• /
• 2003

UV laser micromachining are generally used to create microstructures for micro product through a sequence of lithography-based photopatterning steps. However, the micromachining process is not suitable for the rapid realization of complex microscale 3D product because it depends on worker experiences, excessive cost and time to make many masks. In this paper, the more effective micro rapid manufacturing process, which is developed upon the base of laser micromachining. is proposed to fabricate micro products directly using UV laser ablation and phase change filling. The filling process is useful to hold the micro product during the next ablation step. The proposed micro rapid manufacturing process is also proven experimentally that enables to fabricate the 3D microscale products of UV sensitive polymer from 3D CAD data to functional micro parts.