• Title/Summary/Keyword: 연구장비개발

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Development of low-k dielectric PECVD system for next generation and characterization of its films (차세대용 저유전막 PECVD 장비 개발과 박막 특성 평가)

  • Kim, Dae-Hee;Kim, Dae-Hyun;Park, So-Yeon;Lee, Do-Hyoung;Seo, Hwa-Il;Kim, Yeong-Cheol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.148-148
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    • 2009
  • 반도체 소자의 크기가 45 nm 이하로 감소함에 따라 최소 선폭에 따른 다층 배선 연결 구조가 요구되고 있다. 그러나 고집적화 구조는 기생 저항과 정전 용량에 의한 신호지연증가 및 혼선 전력 소모의 문제가 발생한다. 이런 문제를 해결하기 위한 방법 중의 하나는 저저항 배선연결물질과 층간 절연막으로 저유전 상수를 갖는 물질을 사용하는 것이다. 본 연구는 DEMS $(H-Si(CH_3)(OC_2H_5)_2)$ 전구체를 이용하여 저유전막을 증착할 때 사용되는 PECVD (plasma enhanced chemical vapor deposition) 장비를 국내 기술로 개발하고 개발된 장비로 저유전박막을 평가한 것에 관한 것이다. 본 연구에서 평가 및 박막 종확 시 사용한 장비는 MAHA hp 1 type ((주)아토)로서 양산용 PECVD 장비이다. 변수는 C-He의 유랑, 300 mm Si 웨이퍼와 shower head 사이의 거리, 증착 압력, 구동 전력이고, 증착된 저유전막의 두께, 두께의 균일성, 굴절률, 굴절률의 균일성를 평가하였다. 구동 전력이 500W 일 때, C-He의 유량과 진공의 크기를 감소시키면 박막의 두께가 감소하고 박막의 균일성은 증가하였다. C-He의 유량을 증가시키고 shower head 와 Si 웨이퍼 사이의 거리 및 구동 압력을 감소시키면 굴절률과 굴절률의 균일성이 모두 저하되었다. 구동 전력이 700W 일 때, 박막 두께의 경우, 구동 전력이 500W 일 때의 결과와 유사하지만, 박막의 균일성, 굴절률, 굴절률의 균일성은 모든 조건에서 저하되었다.

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Research for Proactive and Reactive Obsolescence Management by Aging of Militaries Systems Components (군사용 장비 부품 노후화 사전·사후 관리에 관한 연구)

  • Paik, Won-Chul;Shin, Seung-Jung
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.19 no.6
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    • pp.213-218
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    • 2019
  • The purpose of this study is concerned with the development of production for heavy industrial and militaries weapon systems in the field of industries and militaries in Korea. In managing the discontinuance and obsolescence of components and systems. Particularly, defense heavy industries are supporting the designs and production of heavy and weapon systems. Therefore, it is more realistic to manage the discontinues of components and systems, but Heavy and Militaries supports the maintenance of the weapon systems from the maintenance and repairs stage, Discontinued management are imperturbable reality and are moving to be reactive. In order to maintain and operate expensive heavy and weapon systems, it is necessary to manage the Total Life Cycle supportability of the components and systems. Proactive management should be preceded by active management rather than reactive management. In addition, the Information Systems will make you suitable management systems.

A Case Study of Virtual PLC Validation System’s Implementation : In Case of An Automobile Trim Line (가상 PLC 검증 시스템의 구현 사례 : 자동차 의장 라인의 예)

  • Bae, Seong-Hun;Kim, Yearn-Min
    • Journal of the Korea Society for Simulation
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    • v.19 no.2
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    • pp.9-16
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    • 2010
  • This study presents a system for validating the PLC code in the virtual environments of automobile trim line. There have been considerable efforts to develop standard PLC editors for saving human power and PLC test time. However, it was difficult to apply the PLC editor on a real shop floor environment. A virtual equipment was developed to communicate with the PLC module of a shop floor and to make up the connectivity environment by a special protocol. We can validate the code without launching real equipments because the PLC module and the virtual equipment is able to be controlled in real time by the OPC protocol. An experimental model is applied to the final assembly line of an automotive industry and validated by using DELMIA Automation. In conclusion, the system is valuable in the process of PLC codes validation and virtual equipments operation. This system would reduce the development time of the PLC codes and improve the productivity and the integrity of the PLC codes.

The Study on the Vibration Characteristic of Electronic Subrack System (전자통신장비 서브랙 진동특성연구)

  • 허남일;김원태;김형섭;한재섭
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 1994.10a
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    • pp.62-66
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    • 1994
  • 본 연구에서는 실제 사용되고 있는 TDX-10 교환기의 subrack과 보드에 대한 진동 특성과 이 보드가 subrack에 실장되었을 때 진동 특성을 연구하였으며, subrack이 rack에 실장되는 조건을 갖는 진동 시험용 jig를 제작하여 보드와 subrack을 실장한 후 강제 진동시의 진동 전달 특성을 알아보았다. 본 연구의 결과는 내진동 특성이 우수한 전자통신 시스템 설계와 CDMA 이동통신 시스템의 HINA subrack 구조설계와 같은 개발장비 환경시험의 기초 자료로 활용될 수 있을 것이다.

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A Practical Method for Predicting Initial Maintenance Time To Repair (MTTR) Using Maintenance Complexity in Equipment Design (장비 설계 시 정비복잡도를 활용한 현실적인 초기 정비시간 및 정비도(MTTR) 예측방법)

  • Shin, Sang-Hee;Lee, Hak-Jae;Hwang, Seong-Guk;Kim, Moo-Young;Kwon, Ki-Sang
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.9
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    • pp.247-254
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    • 2019
  • Recently, in designing military equipment, considerable attention has been paid to maintaining operations, including reliability, maintenance, and maintenance time of equipment, from the early stages of development. Therefore, both users and developers stress the importance of design considering the maintenance time. This study evaluated the specific methodologies for predicting the realistic maintenance time, such as the access complexity of equipment, other than the standard maintenance time provided by the conventional method mil-hdbk-470a at the beginning of the design, and applied the time conversion factor using a measure of the maintenance complexity. In addition, the actual maintenance time reflecting the actual maintenance time of the developed equipment and the time-conversion factor applied was compared/verified to confirm the reliability of the data. In a study to set a target for repair and the repair of equipment design in the future, it is expected that the maintenance time of equipment that fails to measure the maintenance time for the initial actual equipment will be reflected as a more realistic time. Moreover, activities, such as research and design reflection activities, will be performed to reduce the maintenance time, operational maintenance cost, etc.

A Study on the Development of Simulator for LPG Transporting System (LPG 이송시스템 교육장비(시뮬레이터) 개발에 관한 연구)

  • Leem, Sa-Hwan;Huh, Yong-Jeong
    • The Journal of Korean Institute for Practical Engineering Education
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    • v.1 no.1
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    • pp.66-71
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    • 2009
  • Simulator is being utilized usefully in industrial education. Especially, it is the best method to use for the higher value-added business or hazardous system to train. Also, it is needed to effect in forward-looking industrial education changing from theoretical education to hands-on training. Therefore, the development of equipment that can be used in both theory and experience class and its application to education help you to maximize the training effect on LPG transportation method when you work in the field. As a result of its applying to the education, the understanding of transportation system of educational equipment came out 4.86 points of 5 points, the utilization on site had 4.47 points/5 points, and the satisfaction has 0.5 points/4.48 points. The LPG transporting system(simulator) is considered effective when it is utilized in the education.

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Simulation-based Evaluation of AGV Operation at Automated Container Terminal (시뮬레이션을 이용한 자동화 컨테이너 터미널의 AGV 운영평가)

  • Ha Tae-Young;Choi Yong-Seok;Kim Woo-Sun
    • Journal of Navigation and Port Research
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    • v.28 no.10 s.96
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    • pp.891-897
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    • 2004
  • This paper provided a simulation model for transport vehicles that carry container from the ship to yard block and vice versa at automated container terminal with a perpendicular yard layout. Usually, the efficiency of container terminal is evaluated by the productivity of container cranes at apron, and the stevedoring system for transport vehicles and yard cranes should be supported enough to improve productivity of container cranes. Especially, transport vehicle is very important factor in the productivity of container cranes and the performance of transport vehicles are changed according to the number and traveling type of vehicles. For these reason, a method that can estimate productivity of transport vehicle is required Finally, we developed the simulation model to analyze the productivity of transport vehicle and presented the productivity of container cranes for a varying operation of transport vehicles.

Design & Fabrication for Small Aircraft Landing Gear Drop Test Rig System (소형 항공기 착륙장치 낙하시험 장비 설계 및 제작)

  • Han, Jae-Do;Lee, Young-Shin;Ahn, Oh-Sung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.11
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    • pp.1121-1125
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    • 2008
  • A development of landing gear drop test rig system for a small aircraft was studied and presented in this paper. Hydraulic actuators were considered in order to operate test system automatically and the wire winch system was applied to keep safety of test operators. This rig system was manufactured after checking the structural stability. Friction force measurement and drop velocity evaluation tests were done to confirm the confidence of test system. As a results of evaluation tests, it was confirmed that developed landing gear drop test system was adaptable.

Recent Research Trend in Multifunctional Flexible Neural Interfaces (다기능 유연성 신경 인터페이스 연구동향)

  • Park, Seongjun
    • Prospectives of Industrial Chemistry
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    • v.22 no.6
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    • pp.26-40
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    • 2019
  • 고령화 사회에 접어들면서 신경, 정신질환으로 인한 사회경제적 부담이 늘어나고 있다. 이를 해결하기 위해서는 관련된 신경 회로를 직접적으로 자극하거나 그곳에서 일어나는 일을 실시간으로 감지할 수 있는 장비의 개발이 필수적이다. 하지만 이를 위한 수많은 공학적 도구의 개발에도 불구하고, 뛰어난 공간적/시간적 분해능, 세포형의 선택성, 장시간 안정성을 보유한 신경 인터페이스의 개발은 아직까지도 연구가 필요한 분야이다. 특히 신경전달 원리를 모두 이용하고자 하는 다기능 인터페이스의 개발은 최근 많은 연구자들의 관심 주제이고, 유연성을 가지는 인터페이스 개발 또한 안정성뿐만 아니라 신경 신호의 수명을 좌우하는 중요한 요소이기에 그 중요성을 인정받고 있다. 이를 해결하기 위한 여러 가지 과학적 시도 중에서도, 열 인장 공정으로 제작되는 섬유 형태의 장비는 그 통합적 기능을 수행하는 한 가지 방법으로써 많은 관심을 받고 있다. 이 기술은 다양한 기하학적 구조, 기능적 요소 등을 통합하는데 매우 유리하며, 또한 기존 반도체 공정으로 다루기 어려운 유연성 물질로 마이크로 스케일의 인터페이스를 제작하는 데에 매우 효과적이다. 본 기고문에서는 먼저 현재까지 개발되고 있는 다기능 유연 신경 인터페이스의 연구동향을 소개하고, 특히 그 중에서도 최근에 주목받고 있는 광섬유 기반의 인터페이스 개발에 대해 이야기하고자 한다.

Development of Simulator for CBRN Reconnaissance Vehicle-II(Armored Type) (화생방정찰차-II(장갑형)용 모의훈련장비(시뮬레이터) 개발)

  • Lee, Sang Haeng;Seo, Seong Man;Lee, Yun Hee
    • Journal of the Korea Society for Simulation
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    • v.31 no.3
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    • pp.45-54
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    • 2022
  • This paper is about designing and implementing the simulation training equipment (simulator) for the CBRN Reconnaissance Vehicle-II (armor type). The simulation training equipment (simulator) is a military training equipment in a virtual environment that analyzes the training using various CBRN equipment according to the CBRN situation and make a professional report. The controller or training instructor can construct a scenario using the instructor control system for a possible CBRN situation, spread the situation, and observe the process of the trainee performing the propagated situation appropriately. All process can be monitored and analyzed by the system, and it can be recorded, so it is also used for AAR (After Action Review). To implement CBRN situation training in a virtual environment, instructor control (IOS), host (HOS), video (IGS), input/output device (IOC), and sound (ACS) were implemented, a long-range chemical automatic detector (LCA), a combined chemical detector (CAD), a control (MCC) and an operation (OCC) computer were developed as simulators. In this paper, the design and development of simulation training equipment for CBRN Reconnaissance Vehicle-II (armor type) was conducted, and the performance was verified through integrated tests and acceptance tests.