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Hwang, Joo-Ho;Park, Chun-Hong;Wei, Gao;Kim, Seung-Woo
- Journal of the Korean Society for Precision Engineering
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- v.24 no.3 s.192
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- pp.117-123
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- 2007
This paper describes a three-probe system that can be used to measure the parallelism and straightness of a pair of rails simultaneously. The parallelism is measured using a modified reversal method, while the straightness is measured using a sequential two-point method. The measurement algorithms were analyzed numerically using a pair of functionally defined rails to validate the three-probe system. Tests were also performed on a pair of straightedge rails with a length of 250 mm and a maximum straightness deviation of $0.05{\mu}m$, as certified by the supplier. The experimental results demonstrated that the parallelism-measurement algorithm had a cancellation effect on the probe stage motion error. They also confirmed that the proposed system could measure the slope of a pair of rails about $0.06{\mu}rad$. Therefore, by combining this technique with a sequential differential method to measure the straightness of the rails simultaneously, the surface profiles could be determined accurately and eliminate the stage error. The measured straightness deviation of each straight edge was less than $0.05{\mu}m$, consistent with the certified value.
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Kim, Kyung-Ho;Park, Chun-Hong;Lee, Hu-Sang;Kim, Seung-Woo
- Journal of the Korean Society for Precision Engineering
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- v.19 no.6
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- pp.77-85
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- 2002
An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.
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Kim, Seok-Il;Lee, Won-Jae;Cho, Sun-Joo
- Proceedings of the KSME Conference
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- 2003.04a
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- pp.1008-1013
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- 2003
This paper concerns the structural characteristic analysis and evaluation on the hydrostatic guide way and feeding system of a high precision centerless grinder for machining ferrules. In order to realize the required accuracy of ferrules with sub-micron order, the axial stiffness and motion accuracy of feeding system have to become higher level than those of existing centerless grinders. Under these points of view, the physical prototype of feeding system consisted of steel bed, hydrostatic guide way and ballscrew feeding mechanism is designed and manufactured for trial. Experimental results show that the axial and vertical stiffnesses of the physical prototype are very low as compared with those design values. In this paper, to reveal the cause of these stiffness difference, the structural deformations on the virtual prototype of feeding system are analyzed based on the finite element method under experimental conditions. The simulated results illustrate that the deformation of front ballscrew support-bearing bracket is the main cause of reduction in the axial stiffness of feeding system, and the deflection of bed structure and the bending deformation of hydrostatic guide rails are the main causes of reduction in the vertical stiffness of feeding system.
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김경호;박천홍;송창규;이후상;김승우
- Proceedings of the Korean Society of Precision Engineering Conference
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- 2000.05a
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- pp.692-695
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- 2000
This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.
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