References

1. 井澤實 外, '精密位置決め技術-その設計, テクニック-,' 工業調査會, 1989
2. 大塚二郞, 坂戶啓一郞 '超精密位置決め機構設計,' 工業調査會, 1996
3. (社)精密工學會超精密位置決め專門委員會, '次世代超精密位置決め技術,' フジテクノシステム, 2000
4. N. Taniguchi, 'Nanotechnology,' Oxford University Press, 1996
5. Tlusty, J., Smith, S., and Zamudia, C., 'Operation Planning Based on Cutting Process Model,' Annals of the CIRP, Vol. 39, pp. 517 - 521, 1990
6. Plannetary Roller Screws, Technical Product Information Series RGT INA Corp., 1986
7. John H.Rumbarger.George Wertwijn; 'First Design Information on Hydrostatic Lead Screw,' Machine Design, April. 11, 1968
8. M. Shiraishi, 'Geometrical Adaptive Control in NC T.Operation,' Trans. ASME, Vol. 106, 1984
9. David Henderson, 'A New Inchworm Motor For Industrial Nanopositioning Applications,' ASPE, Vol. 12 pp. 215-218, 1995
10. A. Kanai, S. Sano, J. Yoshioka and M. Miyashita, 'Positioning of a 200 kg carriage on plain bearing guideways to nanometer accuacy with a force-operated linear actuator,' Nanotechnology, No. 2, pp. 43-51, 1991
11. A. Kanail, M. Miyashita, T. Hatai and M. Yoshida, 'Friction Characteristics of Linear Plain Bearing Guideway and Motion Controllability of Numerically Controlled Slide,' Proc. of ASPE 1996 Annual Meeting, pp. 614-617, 1996
12. A. H. Slocum, P. A. Scagnetti, N. R. Kane and C. Brunner, 'Design of self-compensated water-hydrostatic bearings,' Precision Engineering, Vol. 17, No. 3, pp. 173, 1995 https://doi.org/10.1016/0141-6359(94)00015-R
13. P. Holster and J. Jacobs, 'Theoretical analysis and experimental verification on the static properties of externally pressurized air-bearing pads with load compensation,' Tribology International, Vol. 20, no. 5, pp. 276, 1987 https://doi.org/10.1016/0301-679X(87)90028-4
14. P. Scagnetti, A. H. Slocum and N. R. Kane, 'Low Noise Fluid Circuit Design Method for Hydrostatic Bearing System,' Proc. of ASPE, Annual Meeting, pp. 57, 1994
15. E. Blondeel and R. Snoeys, 'Aerostatic bearings with infinite stiffness,' Annals of CIRP, 25-1, pp. 291, 1976