Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Parallelism and Straightness Measurement of a Pair of Rails for Ultra Precision Guide-ways

초정밀 안내면 레일의 평행도 및 진직도 동시측정

  • 황주호 (한국기계연구원 지능기계연구센터 초정밀기계팀) ;
  • 박천흥 (한국기계연구원 지능기계연구센터 초정밀기계팀) ;
  • ;
  • 김승우 (KAIST 기계공학과)
  • Published : 2007.03.01
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Abstract

This paper describes a three-probe system that can be used to measure the parallelism and straightness of a pair of rails simultaneously. The parallelism is measured using a modified reversal method, while the straightness is measured using a sequential two-point method. The measurement algorithms were analyzed numerically using a pair of functionally defined rails to validate the three-probe system. Tests were also performed on a pair of straightedge rails with a length of 250 mm and a maximum straightness deviation of $0.05{\mu}m$, as certified by the supplier. The experimental results demonstrated that the parallelism-measurement algorithm had a cancellation effect on the probe stage motion error. They also confirmed that the proposed system could measure the slope of a pair of rails about $0.06{\mu}rad$. Therefore, by combining this technique with a sequential differential method to measure the straightness of the rails simultaneously, the surface profiles could be determined accurately and eliminate the stage error. The measured straightness deviation of each straight edge was less than $0.05{\mu}m$, consistent with the certified value.

Keywords

References

  1. Gao, W., 'Precision Nanometrology and Its Applications to Precision Nanosystems,' International Journal of Precision Engineering and Manufacturing, Vol. 6, No. 4, pp.14-20, 2005
  2. Gao, W. and Park, C. H., 'High Precision Measurement of Rotational Accuracy,' Journal of the KSPE, Vol. 21, No. 8, pp.7-13, 2004
  3. Donaldson, R. R., 'A Simple Method for Separating Spindle Error from Test Ball Roundness Error,' Anna Is of the CIRP, Vol. 21, pp.125-126, 1972
  4. Estler, W. T., 'Calibration and Use of Optical Straigh tEdges in the Metrology of Precision Machines,' Opt ical Engineering, Vol. 24, pp. 372-379, 1985
  5. Evans, C. J., Hocken, R. J. and Estler, W. T., 'Sel f-calibration: Reversal, Redundancy, Error Separat ion, and Absolute Testing,' Annals of the CIRP Vol. 45, No.2, pp. 617-634, 1996 https://doi.org/10.1016/S0007-8506(07)60515-0
  6. Tanaka, H., Tazawa, K., Sato, H., O-hori, M. and Sekiguchi, H., 'Application of a Ne wStraightness Measurement Method to Large machin e Tools,' Annals of the CIRP, Vol. 30, No. 1, pp. 455­-459, 1981 https://doi.org/10.1016/S0007-8506(07)60977-9
  7. Tazawa, K., Sato, H. and O-hori, M., 'A new Met hod for the Measurement of the Straightness of Machine Tools and Machined Work,' ASME Journal of Mechanical Design, Vol. 104, pp. 587-592, 1982 https://doi.org/10.1115/1.3256390
  8. Kiyono, S. and Gao, W., 'Profile Measurement of Machined Surface with a New Differential Surfa ce with a New Differential Method,' Precision E ngineering, Vol. 16, No. 3, pp. 212-218, 1994 https://doi.org/10.1016/0141-6359(94)90127-9
  9. Gao, W. and Kiyono, S., 'High Accuracy Profile Measurement of a Machined Surface by the Com bined Method, Measurement,' Vol. 19, No. 1, pp. 55-64, 1996 https://doi.org/10.1016/S0263-2241(96)00066-8
  10. Makosch, G. and Drollinger, B., 'Surface Profile Measurement with a Scanning Differential AC In terferometer,' Applied Optics, Vol. 23-24, pp. 4544-4553, 1984
  11. Tanaka, H. and Sato, H., 'Extensive Analysis and Development of Straightness Measurement by S equential Two-point Method,' Transaction of the ASME Journal of Engineering for Industry, Vol. 108, pp. 176-182, 1986 https://doi.org/10.1115/1.3187061
  12. Fung, E. H. K. and Yang, S. M., 'An Approach to On-Machine Motion Error Measurement of a Linear Slide,' Measurement, Vol. 29, pp. 51-62, 2001 https://doi.org/10.1016/S0263-2241(00)00027-0
  13. Kounosu, K. and Kishi, T. 'Measurement of Surface Profile Using Smoothed Serial Three Point Method,' J. of JSPE, Vol. 61, No. 5, pp. 641-645, 1995
  14. Gao, W. and Kiyono, S., 'On-machine Measureme nt of Machined Surface Using the Combined Three-Point Method,' JSME International Journal, Vol. 40, No. 2, pp. 253-259,1997 https://doi.org/10.1299/jsmec.40.253
  15. Gao, W., Yokoyama, J., Kojima, H. and Kiyono, S., ' Precision Measurement of Cylinder Straightness Using a Scanning Multi-probe System,' Precision Engineering, Vol. 26, No. 3, pp279-288, 2002 https://doi.org/10.1016/S0141-6359(02)00106-X
  16. Yamaguchi, J., 'Measurement of Straight Motion Accuracy Using the Improved Sequential Three-p oint Method,' Journal of JSPE, Vol. 59, No. 5, pp. 773-778, 1993
  17. Furukawa, M., Gao, W., Shimizu, H., Kiyono, S., Yasutake, M. and Takahashi, K., 'Three-Dimension al Slit width Measurement for Long Precision SI ot Die,' Key Engineering Materials, Vols. 295-296, pp. 343-348, 2005 https://doi.org/10.4028/www.scientific.net/KEM.295-296.295
  18. Thalmann, R., 'Intercomparison of parallelism me asurements,' Measurement, Vol. 17, pp. 17-27, 1996 https://doi.org/10.1016/0263-2241(96)00002-4