• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.115-115
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• 2012

반도체/디스플레이 산업분야의 발전으로 진공 공정 기술력 또한 증진되고 있다. 반도체소자의 초미세화, 진공부품의 대면적화가 진행 되면서 진공 공정 중에 발생하는 오염입자를 제어하는 것이 이슈가 되고 있다. 오염입자는 플라즈마의 물리적인 부식과 활성이 높은 화학반응에 의해 진공부품에서 부식이 진행되어 발생하며, 이는 반도체 및 디스플레이 부품의 신뢰성측면과 수율저하 등 life time의 근본적인 문제점으로 대두되고 있다. 본 연구에서는 반도체/디스플레이 장비용 코팅부품으로 많이 사용되고 있는 Al2O3 코팅막을 이용하였으며, sealing time에 따른 Anodic Aluminum Oxide (AAO) electrode의 물성특성평가 및 진공평가기술을 이용하여 life time을 예측하는 연구를 수행하였다.

• Nuclear Engineering and Technology
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• v.27 no.5
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• pp.760-766
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• 1995

A general method is proposed for elastic stiffness analysis of the leaf type holddown springs using only the geometric data and Young's modulus of the springs. In this method, an engineering beam theory and Castigliano's theory are applied to elastic stiff analysis of the leaf type holddown springs. To show reliability and effectiveness of this method, the elastic stiffness from the proposed method is compared with test result and from the comparison, the unposed method has been proven to be effective for estimating the elastic stiffness of the leaf springs.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.61-61
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• 2008

이동 통신의 급격한 발전에 따라 이동통신 기기의 부품들이 소형화되고 다양한 기능이 요구되어지고 있다. 이동 통신용 부품은 패턴의 미세화와 비아 수의 증가 등 고집적화로 인한 강도 요구로 LTCC 소재의 사용이 증가되고 있다. 또한 glass의 조성이 결정상 생성 및 복합체의 미세 구조에 영향을 미칠 것으로 기대되지만 유리의 조성에 관한 연구는 아직 미비하다. 본 연구에서는, anorthite를 생성시키는 LTCC composite용 glass에서 융점 및 Tg에 영향을 주는 것으로 알려진 B와 Zn의 양을 변화시키고 2가 금속(Mg, Sr, Ba)원소를 첨가함에 따라 compostite에서 아노사이트 상을 비롯한 결정상의 생성과 이에 따른 미세구조의 변화를 살펴 보았다. 조성변화에 따라 제조된 glass는 Tg를 측정하고, 제조된 glass를 $Al_2O_3$ filler와 혼합하여 tape casting 공정으로 시트를 제작하였다. 제조된 시트를 소결한 후에, 강도, 유전 특성, 밀도를 측정하였다. 소결체는 미세구조와 상분석을 통해 LTCC 소재와 글래스 조성과의 상관관계를 확인하고자 하였다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.1
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• pp.90-94
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• 2012

This study evaluates the strength of surface treatment parts using the hard anodizing method to the aluminum alloy brake disks. In order to achieve weight reduction of vehicles, Eco-friendly cars parts of the high-quality and competitive price is to equip. Especially while pursuing parts of weight reduction, it has to maintain the strength of the surface of the brake by nature. To enhance surface strength of aluminum alloy, we use hard anodizing technology in the surface treatment. This study is resulted of 3 times greater the hardness value of the hard anodized specimen than the aluminum alloy specimen for the lightweight parts of EV brake disk

• Journal of Surface Science and Engineering
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• v.53 no.5
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• pp.249-256
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• 2020

As the size of manufacturing equipment for LCD and OLED displays increases, replacement of existing heavy stainless steel components with light metals, such as aluminum alloys, is being more important in semiconducting and display manufacturing industries. To use aluminum alloys for components in semiconducting and display industries, it is important to develop a new anodization method for improved performance of anodic oxide films than conventional anodization method based on sulfuric acid. In this work, optimum applied current density and the best sealing methods for anodic oxide films in 3% oxalic acid were explored. Experimental results showed 2.5 A/dm2 is the best applied current density for improved hardness and dielectric breakdown voltage. Sealing of the anodic oxide films further improved their hardness, dielectric breakdown voltage and resistance to HCl, by which application of anodic oxide films become applicable for components in semiconducting and display industries.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.37-41
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• 2021

We report on the formation of anodic aluminum oxide (AAO) film using sulfuric acid containing cerium salt. When the temperature of the sulfuric acid containing cerium salt changes from 5 ℃ to 20 ℃, the current density and the thickness growth rate increase. The surface morphology of the AAO film change according to the temperature of the electrolytes. And that affected the breakdown voltage and the plasma etch rate. The breakdown voltage per unit thickness was the highest at 15 ℃, and the plasma etch rate was the lowest at 10 ℃ at 2.80 ㎛/h.

• Journal of Embryo Transfer
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• v.30 no.3
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• pp.183-188
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• 2015

This study analyzed the coat color-related genes of MC1R, ASIP, ECA3-inversion, and STX17 of 1,462 Jeju horses administered by the Jeju Special Self-Governing Province. This was done to investigate the distributional characteristics of coat color-related genes in the Jeju horse group and the changes of its coat color-related genes by generation. The genotype frequency of the MC1R gene of $E^+/E^+$ and $E^+/E^e$ related to black coat color was 0.122 and 0.447, respectively, while $E^e/E^e$ of the chestnut genotype was 0.429. The genotype frequency of the ASIP gene of $A^A/A^A$, $A^A/A^a$, and $A^a/A^a$ was 0.46, 0.448, and 0.091, respectively, where the genotype frequency of $A^a/A^a$ turned out to be relatively low. The To/To and +/To genotype that manifests the Tobiano shape was 0.001 and 0.119, respectively, with the share of Tobiano shape around 12%. The genotype frequency of G/G and G/g of STX17 related to grey coat color was 0.002 and 0.680, respectively, with the share of grey horses among the Jeju horse group at 68.2%. As for the change of coat color genes by generation, no large changes were observed in the MC1R and ASIP genes. In ECA3-inversion, the To allele that manifests Tobiano significantly decreased following the generational change (p<0.05), while the STX17 G allele related to grey coat color significantly increased following the generational change (p<0.05). It will be necessary to examine the coat color genes when selecting breeding horses so that the diversity of coat colors among the Jeju horse group can be maintained.

• Journal of the Korean Solar Energy Society
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• v.27 no.3
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• pp.175-179
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• 2007

This experimental demonstration has successfully shown that it is possible to use direct sunlight for the illumination of deeper building zones using the material for light path system(light duct). Three kinds of reflectors which were 95% Silver vaporizing fixed, 85% Anodized and 85% Hot melted applied to evaluate and compare their performances each others. Also, these three kind of reflectors were compared in view point of economics. The most high performance was obtained in 95% Silver vaporizing fixed reflector hater than another reflectors of 85% Anodized reflector and 85% Hot melted reflector even though more high production cost in 95% Silver vaporizing fixed reflector. The rest two reflectors of 85% Anodized and 85% Hot melted $10{sim}15%$ less performance than 95% Silver vaporizing fixed reflector but their production cost were low than the production cost of 95% Silver vaporizing fixed reflector which identified very weak and light yellow color in the light.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.250.2-250.2
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• 2015

결정질 태양전지의 변환효율은 이미 이론적 한계에 가까워져, 최근 산업에서는 이 대신 제조공정 단가를 낮추려는 연구가 진행되고 있다. 본 연구에서는 태양전지 도핑공정에 대기압 DBD 플라즈마를 응용하여 저렴하게 태양전지를 제작할 수 있는 방법을 모색한다. 대기압 DBD 플라즈마를 발생시키기 위해 DC-AC 인버터 구조의 전원을 사용하여 수십 kHz의 주파수, 수 kV의 전압을 인가하여 $5cm{\times}1cm$ 직사각형 모양의 아노다이징된 알루미늄 전극을 사용하였다. 전극과 Ground 사이에 Argon 가스를 주입하여 플라즈마를 발생시켰으며, 출력전류는 수십 mA의 전류가 측정되었다. $3cm{\times}3cm$의 P-type wafer에 스핀코팅 방식으로 H3PO4를 도포한 후, Wafer 표면에 플라즈마를 조사하여 대기압 DBD 플라즈마를 이용한 태양전지 도핑 가능성을 확인하였다. 플라즈마 출력 전류와 플라즈마 조사시간을 변수로 도핑된 Wafer의 특성을 확인하였다. 도핑 프로파일은 SIMS (Secondary Ion Mass Spectrometry)를 통해 측정하였으며, 전기적인 특성은 4 point probe로 면저항을 측정하였다. 대기압 DBD 플라즈마를 이용해 도핑된 wafer에 전극을 형성하여, 같은 도펀트를 사용하여 Furnace로 열 확산법을 이용해 도핑 공정을 진행한 wafer와 변환효율(Conversion efficiency)을 측정하여, 대기압 플라즈마를 이용한 도핑 가능성을 확인하였다.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.899-903
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• 2004

A limit switch box is used for a indicator of a valve actuator. This device indicates an opening and closing of a valve or throttle in a valve actuator. In ship, equipments are required safe and robust because of a rough environment and a specific condition during a voyage. However, the limit switch box is used in an indoor environment generally. Thus, a new limit switch box must be developed which can be used at an outdoor environment. This study designed the limit switch box. The housing of the limit switch box was made by an aluminium die cast method with surface painting after anodizing or chromate coating. In order to evaluate the endurance of the housing, the endurance tests against salt water have been conducted. Experiment results showed that the proposed device provides a reliable performance against salt water.