• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.428-428
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• 2012

CIGS 또는 CIS 태양전지는 높은 흡광계수와 조절가능한 밴드갭 특성으로 인해 높은 광전변환효율을 나타내므로 실리콘 태양전지를 대체할 차세대 태양전지로 주목받고 있다. 그러나 태양전지의 저가화를 위해서는 기존의 동시증발법 또는 스퍼터링을 대신할 수 있는 비진공 방식의 박막제조방법이 요구된다. 다양한 비진공 코팅방법 중에서 용액 또는 콜로이드 전구체를 프린팅하는 방법은 batch 조성이 박막의 조성으로 전사되므로, 전착법에 비해 조성 조절이 용이하다는 장점이 있다. 한편, 콜로이드 공정에 속하는 Cu-In 합금 나노 분말법은 셀렌화 또는 황화 과정 중에 부피가 팽창하는 장점을 활용 가능한 반면, 전구체 박막의 충진밀도가 낮을 경우 열처리를 통한 치밀화에 한계가 생길 수 있는 단점이 있다. 본 연구에서는 합성한 Cu-In합금 분말을 이용하여 전구체 박막을 형성한 후 반응기구가 다른 황 및 셀레늄 분위기에서의 열처리를 통해 소결된 박막의 결정상, 미세구조 및 표면 형상의 차이를 비교하였다.

• Textile Coloration and Finishing
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• v.23 no.3
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• pp.195-200
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• 2011

Silicone-coated fabric were treated by oxygen low temperature plasma to improve the adhesion. The surface of silicone-coated fabric was modified with gaseous plasma of several discharge power in the presence of oxygen gas at 1Torr pressure. Oxygen plasma treatment introduces oxygen-containing functional groups and micro-pittings on the silicone-coated fabric surface. The treated fabrics with oxygen low temperature plasma were measured by contact angle analyzer and XPS(X-ray photoelectron spectroscopy), and interfacial adhesion was measured by T-peel test. The surface of fabric was investigated by SEM photographs. The chemical and physical modification of the surface wettabillity by plasma treatment can increase the adhesion.

• 기계와재료
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• v.22 no.3
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• pp.6-13
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• 2010

최근 신재생에너지, 녹색성장분야의 연구는 미래 산업의 핵심 기술로 평가되고 있다. 특히나 태양전지 분야는 미래 대체 에너지 기술로써 크게 각광 받고 있으며 과거 실리콘 기반의 전력 생산용 태양전기 기술이 주가 되었지만 근래에는 모바일 기기의 보조 전력, 스마트 윈도우 등 다양한 산업에 적용 가능한 박막 태양전지 기술이 급속도로 발전을 하고 있다. 현재 박막 태양전지 기술은 아직까지도 산업화 기술에 근접하지 못하고 있지만 향후 5년이내에는 다양한 형태로 산업화가 이루어 질 것으로 예측하고 있다. 따라서 본 논문에서는 박막형 태양전지 중의 하나인 OPV태양전지의 산업화 적용을 위해 스프레이 공정 기술과 이를 이용하여 OPV 소자를 제작한 내용에 대해 기술했다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.597-600
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• 2001

In this paper, we evaluated the effect of accumulated charges on hydrophobicity of room temperature vulcanized(RTV) silicone rubber, which could improve the contamination performance of porcelain insulators, with uv radiation time. Outdoor insulating material could be charged by the corona discharge on field intensified area of insulator and discharge between the water drops. In addition, we performed the accelerated uv radiation on samples and investigated the change of charging decay with time. In this results, it is found that silica-like structure on the surface of RTV silicone rubber was formed by uv treatments and this layer have the characteristic of retaining the charges on surface for a long time. These charges have effects on its hydrophobicity and so adversely effects on contamination performance. Based on our results, we discussed the other degradation mechanism with well known ones.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.66-66
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• 2006

Development of ArF Photo-lithography process has proceeded with the increase of numerical aperature (NA) and the decrease of resist thickness. It makes many problems such as cost and process complexity. A novel spin-on hard mask system is proposed to overcome many problems Spin-on hard mask composed of two layers of siloxane and carbon. The optical thickness of two layers is designed from reflectivity measurement at specified n, k respectively. The property of photo-resist shows different results according to Si contents. Si-contents was measured XPS(X-ray Photoelectron spectroscopy).

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.04a
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• pp.91-96
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• 1998

In recent years, the tribological behavior of coated ceramic material has been the topic of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for potential applications in MEMS. In this work under light load and low speed, the tribological behavior of coated silicon was investigated. The results show that both adhesive and abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction was influenced by the apparent ares of contact between the two surfaces. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles.

• Journal of the Microelectronics and Packaging Society
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• v.1 no.2
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• pp.113-124
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• 1994

MOD법을 마이크로회로용 티탄산 바륨 콘덴서 박막형성에 적용하였다. Barium decanoate barium 2-ethylhexanoate titanium dimethoxy didecanoate 및 titanium dimethoxy di-2-ethylhexanoate와 같은 여러 가지 금속유기화합물들을 합성하고 동정한 다 음 공통용매에 대한 용해도를 시험하였다. 이금속유기화학물들 가운데 barium 2-ethylhexanoate와 titanium dimethoxy di-2-ethylhexanoate가 xylene-pyridine 혼합용매에 잘녹고 MOD법에 의한 BaTiO3 박막형성에 매우 안정한 조성을 이룸을 확인하였다. 이 조 성을 스핀코팅에 의하여 백금박과 실리콘 웨이퍼상에 금속유기화학물 막을 형성하고 최고 온도와 유지시간에 따라 소성하여 형성된 유전체 박막들의 전기전 특성을 측정하고 고찰하 였다.

• Tribology and Lubricants
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• v.15 no.1
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• pp.29-38
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• 1999

In recent years, the tribological behavior of coated ceramic material has been the issue of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for its potential in applications of MEMS. The friction and wear behavior of ceramic material that occur at light load depends on several factors such as surface roughness, contact area and material properties. In this work, the tribological behavior of coated silicon under light load and low speed was investigated. Particularly, the effects of coated materials, humidity and undulated surface were also studied. The results show that the effect of humidity on fiction was influenced by the apparent area of contact between the two surfaces. Also both adhesive and abrasive wear occurred depending on the sliding condition. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles and resulted in the reduction of friction.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.4
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• pp.361-365
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• 2003

A unipolar-type E-chuck was fabricated for the application of holding silicon wafers in the oxide etcher. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on thin coated copper substrates to minimize the plasma damage during the etch processing. Thin film heater technology was also developed for new type of E-chuck.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.180-180
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• 2011

본 연구에서는 MEMS 공정 기술 및 니켈 전해도금 공정을 이용한 프로브 카드를 제작 및 연구 했으며 MEMS기술을 사용함에 따라 다양한 형상의 프로브 카드를 구현하였다. 본 연구를 진행하면서 Photolithography공정 중 스핀코팅, 노광의 세기 및 도금시간의 변화를 각각 다르게 했을 때 도금용 Thick PR Mold 높이에 큰 영향이 있는 것을 알 수 있었다. 실리콘 웨이퍼를 대신하여 Pi필름 상에 Thick PR를 이용하여 Mold를 형성하고, 그 위에 니켈 도금법에 의해 니켈 박막을 형성한 후, Lapping에 의해 두께 평탄도를 조정한다면 일정한 두께편차, 직각에 가까운 수직도 및 항상 일정한 치수 정밀도를 갖는 저단가 니켈 소재의 프로브 카드를 제작 할 수 있을 것이며, 높은 효율을 기대 할 수 있다.