• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.16 no.3
• /
• pp.116-120
• /
• 2006

We have investigated plasma spray coated $Al_2O_3$ layers on Al-60 series substrates for development of wafer electrostatic chuck in semiconductor dry etching system. Samples were prepared without/with cooling bar on backside of samples, at various distances, and with different powder feed rates. There were many cracks and pores in the $Al_2O_3$ layers coated on Al-60 series substrates without cooling bar on the backside of samples. But the cracks and pores were almost disappeared in the $Al_2O_3$ layers on Al-60 series substrates coated with cooling bar on the back side of samples, 15 g/min. powder feed rate and various 60, 70, 80 mm working distances. Then the surface morphology was not changed with various working distances of 60, 70, 80 mm. When the powder feed rate was changed from 15 g/min to 20 g/min, the crack did not appear, but few pores appeared. Also the $Al_2O_3$ layer was coated with many small splats compared with $Al_2O_3$ layer coated with 15 g/min powder feed rate. The deposited rate of $Al_2O_3$ layer was higher when the process was done without cooling bar on the back side of sample than that with cooling bar on the back side of sample.

• Journal of the Korean Electrochemical Society
• /
• v.6 no.2
• /
• pp.103-112
• /
• 2003

Various kinds of metals were coated on synthetic graphite in order to investigate the relationship between film characteristics and their electrochemical performance. Gas suspension spray coating method was employed for the coating of synthetic graphite. In our experimental range, all of the metal coated synthetic graphite showed the higher capacity than that of raw material at high C-rate mainly due to decrease in impedance of passivation film. In cyclic voltammetry experiments, silver-coated and tin-coated graphite anodes found the lithium-alloy reaction. Considering smaller amount of metal coating, the most increase in discharge capacity was caused by improvement of conductivity of the electrode. When single-component metal was coated, silver-coated graphite anode exhibited the highest discharge capacity and better cycleability. Double components of silver-nickel coated active material showed the highest discharge capacity, rate capability and the best cycle performance in the range of our experiments.

• Proceedings of the KAIS Fall Conference
• /
• 2007.11a
• /
• pp.74-77
• /
• 2007

Primary charging roller rotated with contacting surface of OPC drum and take charge OPC drum. Owing to this reason, primary charging roller made by elasticity substance with electric conduction. Properties of charging and image changed by class of coating, method of coating and environment. This study developed about coating method to make print image of good quality.

• 한국신재생에너지학회:학술대회논문집
• /
• 2010.11a
• /
• pp.41.1-41.1
• /
• 2010

전기수력학적 분무를 이용한 액적 미립화 기술은 나노사이즈의 액적 형성, 쿨롱 반발력에 의한 균일한 액적 형성, 그리고 향상된 액적 타겟팅을 가능하게 한다. 따라서 이를 이용하여 매우 균일한 박막 코팅이 가능하다. 이러한 점에 힘입어 현재 진공 공정으로 제작되고 있는 CIGS태양전지의 광흡수층을 비진공 공정중 하나인 전기수력학적 미립화를 이용하여 실험하였다. Ethanol-based 의 CIGS나노 입자를 포함하는 콜로이드 상태의 전구체를 이용하여 적절히 가열된 몰리브덴 배면 전극위에 적용하였다. 미립화한 액적은 접지된 몰리브덴 층에 부착되는 즉시 증발하여 CIGS입자를 남긴다. 여기서 가장 중요하게 다루어야 할 조건은 기판의 온도, 인가 전압, 전구체의 유량이다. 분사 모드는 Cone-jet을 적용하였으며 5~15kV의 인가 전압에서 1ml/hr내외의 유량을 공급하여 3분 이내에 적절한 광흡수층 두께인 1마이크론 내외에 도달할 수 있다. 이와같은 조건으로 형성된 박막층에 관한 SEM image를 통해 다른 비진공 코팅 방식과 비교하였다.

• Journal of the Korean Electrochemical Society
• /
• v.11 no.1
• /
• pp.16-21
• /
• 2008

The key component of a direct methanol fuel cell (DMFC) is the membrane electrode assembly (MEA), which comprises a polymer electrolyte membrane and catalyst layers (anode and cathode electrode). Generally the catalyst layer is coated on the porous electrode supporter (e.g. carbon paper or cloth) using various coating methods such as brushing, decal transfer, spray coating and screen printing methods. However, these methods were disadvantageous in terms of the uniformity of catalyst layer thickness, catalyst loss, and coating time. In this work, we used bar-coating method which can prepare the catalyst layer with uniform thickness for MEA of DMFC. The surface and cross-section morphologies of the catalyst layers were observed by SEM. The performances and resistance of the MEAs were investigated through a single cell evaluation and impedance analyzer.

• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.18 no.6
• /
• pp.107-112
• /
• 2018

Shielding effectiveness (SE) improvement with EMI shield layers fabricated by conformal spray coating system was studied. Silver or Nickel powder filled acrylic resin were sprayed on the samples. We compared the performance with the viscosity of 400 cPs and 100 cPs cases. The thickness range of the coating layer was 20 to 50 um for the silver, 60 to 120 um for the nickel. The shielding effectiveness was measured by ASTM D4935 using coaxial type TEM-cell. The silver-filled resin showed much better performance than that of the nickel-filled resin. The shielding effectiveness increased almost proportional to the thickness of the coating layers until being saturated around 63 dB for the silver-layer or around 34 dB for the nickel-layer. The best performance measured in this study was the shielding effectiveness of 63 dB with $35{\mu}m-thick$ of silver-layer.

• Composites Research
• /
• v.27 no.3
• /
• pp.109-114
• /
• 2014

Manufacture of nancomposites has simple process for developing nanocomposites due to the increasing applications using nanofillers. This work studied nanofiller coated glass fiber for reinforcing material with good wetting and conductivity and the morphology of nanofiller coated glass fiber was analyzed by FE-SEM. The durability of reinforced glass fiber was investigated with different shapes of nanofillers using sonication rinsing method. Fatigue test was performed to evaluate the adhesion of reinforcing interface and stability of nanofiller coating layer for single fiber reinforced composites. Apparent modulus and conductivity of nanofiller coating layer were evaluated to realize multifunctional of nanocomposites. Fiber type of nanofiller was better than plate type due to better cohesion between fiber and nanofillers. At last, the stability of fiber type nanofiller of coating layer has better durability and conductivity than plate type case.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.24 no.6
• /
• pp.256-260
• /
• 2014

This study was carried on the phenomena in reactivity with the clay surface according to the thickness of the cobalt component coating. In the coated specimen, it was observed that the cobalt component was spreaded to diffuse with a constant thickness from the surface of it and the diffusion layer at the white porcelain soil was more increased with the increase of the amount of cobalt sulfate than at the celadon porcelain one. It was evaluated that the color of the surface on the coated specimen at the white porcelain soil was changed from grayish blue to blue and the $L^*$ value was decreased from 51.78 to 37.61 and also in the case of the coated specimen in celadon porcelain soil, $L^*$ value was from 53.91 to 38.93 and the color was from dark olive gray to dark gray. The physical properties of the specimen were characterized by X-ray diffraction, Scanning electron microscope, Dilatometer, TG-DTA, UV-vis spectrophotometer and HRDPM.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.30 no.2
• /
• pp.66-72
• /
• 2020

The difference of plasma resistance between the CAS glass bulk and coating films were compared. Plasma resistance was confirmed by analyzing the etch rate and the microstructure of the surface when the CAS glass bulk and the glass coating film were etched with CF₄/O₂/Ar plasma gas. CAS glass coating film was etched up to 25 times faster than the glass bulk. A statistically high correlation between the surface roughness and the etching rate of the coating film was derived, and thus, the high surface roughness of the coating film was determined to cause rapid etching. In addition, cristobalite crystals that has a low Ca content and a high Si content, was foamed on the glass coating film. Therefore, the CAS glass coating film is considered to have low plasma resistance compared to the glass bulk.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.31 no.6
• /
• pp.276-281
• /
• 2021

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y₂O₃ and YF₃ as raw materials. Mixing ratio of the Y₂O₃ and YF₃ was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.