• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.217.1-217.1
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• 2014

반도체 및 디스플레이 산업은 많은 공정들에서 저온 플라즈마 반응을 이용한다. 특히 소자 제작을 위한 실리콘 박막의 증착은 저온 플라즈마 공정의 주요 공정이다. 하지만 실리콘 박막을 합성하는데 있어서 저온 플라즈마에서 형성되는 실리콘 나노 입자는, 오염입자로써 박막의 특성을 악화시켜 소자생산 수율을 악화시키는 주요 원인이 되고 있다. 따라서 플라즈마에서 입자 형성의 원인이 되는 화학반응 및 입자들의 성장 매커니즘에 대한 연구는, 1980년대 플라즈마 공정에서 입자 합성이 보고된 이래 공정의 최적화를 위해 꾸준히 연구되어왔다. 이러한 매커니즘의 연구들은, 플라즈마 화학반응에 의해 실리콘 입자 핵을 만들어 내는 과정과 입자들이 충돌에 의해 성장해가는 과정으로 나눠진다. 플라즈마 화학 반응 과정은 아레니우스 방정식에 의해 정의된 반응계수를 이용하여 플라즈마 내 전자와 이온, 중성 화학종들이 전자 온도와 전자 밀도, 챔버 온도 등에 의해 결정되는 현상을 모사한다. 또한 이 과정에서 실리콘을 포함하는 화학종들의 반응에 의해 핵이 생성 되가는 양상을 모사한다. 생성된 핵은 충돌에 의해 입자가 성장해 가는 과정의 가장 작은 입자로써 이용된다. 입자들이 성장해가는 과정은 입자들이 서로 충돌하면서 다양한 입경의 입자로 분화되어가는 현상을 모사한다. 이 과정에 의해 다양한 입경분포로 분화된 입자들은 플라즈마 내 전자에 의해 하전되며, 이러한 하전 양상은 입경에 따라 다른 분포를 보인다. 본 연구에서는 입자의 하전 분포를 고려하여, 입자들의 성장의 주요 원인인 입자간의 충돌을 대표하는 충돌주파수를 수정하는 방식을 채택하여 보다 정밀한 입자 성장 양상을 모델링하였다. Inductively coupled plasma (ICP) 타입의 저온 플라즈마 반응기에서 합성된 입자들을 Particle Beam Mass Spectrometer (PBMS)와 Scanning Electron Microscope (SEM)를 이용하여 입경분포를 측정한 데이터와 모델링에 의해 계산된 결과를 비교하여 본 모델의 유효성을 검증하였다. 검증을 위해 100~300 mtorr의 챔버 압력 조건과 100~350 W의 입력 전력 조건들을 달리하며 측정한 결과와 계산한 데이터를 조건별로 비교하였다.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.13 no.2
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• pp.245-256
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• 2000

A moment-curvature relationship to simulate the behavior of reinforced concrete beam under cyclic loading is introduced. Unlike previous moment-curvature models and the layered section approach, the proposed model takes into consideration the bond-slip effect by using monotonic moment-curvature relationship constructed on the basis of the bond-slip relation and corresponding equilibrium equation at each nodal point. In addition, the use of curved unloading and reloading branches inferred from the stress-strain relation of steel gives more exact numerical result. The advantages of the proposed model, comparing to layered section approach, may be on the reduction in calculation time and memory space in case of its application to large structures. The modification of the moment-curvature relation to reflect the fixed-end rotation and pinching effect is also introduced. Finally, correlation studies between analytical results and experimental studies are conducted to establish the validity of the proposed model.

• Journal of the Korean Data and Information Science Society
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• v.27 no.3
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• pp.629-638
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• 2016

Among data mining techniques, the association rule is one of the most used in the real fields because it clearly displays the relationship between two or more items in large databases by quantifying the relationship between the items. There are three primary quality measures for association rule; support, confidence, and lift. We evaluate association rules using these measures. The approach taken in the previous literatures as to estimation of association rule number has been one of a determination function method or a regression modeling approach. In this paper, we proposed a few of non-linear regression equations useful in estimating the number of rules and also evaluated the estimated association rules using the quality measures. Furthermore we assessed their usefulness as compared to conventional regression models using the values of regression coefficients, F statistics, adjusted coefficients of determination and variation inflation factor.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.42 no.2
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• pp.239-248
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• 2022

Risks in construction projects are increasing remarkably due to recent changes in the construction environment. Active risk management is required to recognize risks as opportunities. The purpose of this study is to propose a risk management model of the importance determination method through comparative analysis using Kano model, Timko CSC (Customer Satisfaction Coefficient), and ASC (Average Satisfaction Coefficient). Based on previous studies, the validity of risk management factor determination is reviewed through a questionnaire modified Kano model through interviews with working-level workers using the Delphi technique. Through this, a suitable risk management model is presented by selecting key risk management factors recognized by domestic construction project practitioners. As a result of the study, the Kano model developed to verify risk management of construction projects was evaluated to be effective in verifying the risk management of practitioners. It is expected that the Kano model presented in this study will be actively used to verify the importance of risk management for construction projects.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.32 no.1B
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• pp.9-20
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• 2012

Recently to overcome limitations of conceptual, hydrological and physics based models for flood stage forecasting, multiple linear regression model as one of data-driven models have been widely adopted for forecasting flood streamflow(stage). The objectives of this study are to compare performance of different multiple linear regression models according to regression coefficient estimation methods and determine most effective multiple linear regression flood stage forecasting models. To do this, the time scale was determined through the autocorrelation analysis of input data and different flood stage forecasting models developed using regression coefficient estimation methods such as LS(least square), WLS(weighted least square), SPW(stepwise) was applied to flood events in Jungrang stream. To evaluate performance of established models, fours statistical indices were used, namely; Root mean square error(RMSE), Nash Sutcliffe efficiency coefficient (NSEC), mean absolute error (MAE), adjusted coefficient of determination($R^{*2}$). The results show that the flood stage forecasting model using SPW(stepwise) parameter estimation can carry out the river flood stage prediction better in comparison with others, and the flood stage forecasting model using LS(least square) parameter estimation is also found to be slightly better than the flood stage forecasting model using WLS(weighted least square) parameter estimation.

• Journal of the Korean GEO-environmental Society
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• v.13 no.6
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• pp.51-57
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• 2012

This study investigated on the photolytic degradation of Triclosan by E-beam process. The optimization of process was investigated during a series of batch experiments by design of experiments(DOEs). The DOE was one of the statistical application that was used for designed the response surface to determine the effects of each parameters. The responses were applied as removal rate of Triclosan(%, $Y_1$) and TOC removal rate(%, $Y_2$). Two independent variables were concentration of Triclosan and irradiation intensity that were designed as "$x_1$" and irradiation intensity was designed as "$x_2$". The regression equation in coded parameter between the Triclosan removal efficiencies(%) and TOC removal efficiencies(%) was $Y_1=63-12.4335x_1+15.1835x_2+5.8125x{_1}^2-5.6875x{_2}^2-0.75x_1x_2(R^2=95.1%,\;R^2(Adj)=91.7%)$ and $Y_2=46-8.8462x_1+11.7175x_2-0.75x{_1}^2-6.25x{_2}^2(R^2=98.7%,\;R^2(Adj)=97.7%)$, respectively. The model predictions agreed well with the experimentally observed results $R^2$ and $R^2(Adj)$ over 90% within both of $Y_1$ and $Y_2$. This result shows that the regression model express well about the effects of parameters on E-beam process and the statistical method was successfully applied.

• Korean Journal of Poultry Science
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• v.49 no.4
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• pp.229-237
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• 2022

This study investigated the growth characteristics of four strains of newly developed synthetic Korean native commercial chickens (KNCs). We investigated a suitable growth curve model in KNCs and estimated the number of days to reach a 2 kg market weight. Body weight was measured at 2-week intervals from birth to 12 weeks of age. The growth curves were estimated using von Berteralanffy, Gompertz, and logistic functions. The results showed that males were significantly heavier than females at all ages, but there were no significant differences in body weight between strains, except at birth and 2 and 6 weeks of age. The coefficients of determination and adjusted determination of growth function had high goodness-of-fit (97.4~99.7). Of the growth curve parameters, the mature weight and growth ratio were higher in males than in females, but the maturity rate was similar in males and females. The inflection point occurred at approximately 7 weeks of age for females and 8 to 9 weeks of age for males. The weights estimated from the growth curve functions almost agreed with the actual weights, except for male weights estimated using the von Bertalanffy function. The coefficients of determination of the regression equations for weight to age were 0.9583 to 0.9746. The 8- and 10-week-old body weights estimated using the regression equation, and the 12-week-old weight estimated using the logistic function were most similar to the actual weight. Using these models, the estimated age of KNCs to reach 2 kg was 62.0~64.6 days for males and 74.9~78.6 days for females.

• Tunnel and Underground Space
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• v.14 no.2
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• pp.86-96
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• 2004

Rock mass classification methods such as RMR, Q system and GSl have been widely adopted with certain modifications for the design of mine openings. The GSI system is the only rock mass classification system that is related to Mohr-Coulomb and Hoek-Brown strength parameters and gives a simple method to calculate the engineering properties of rock masses which can be useful input parameters for a numerical analysis. A detailed surveying for GSI mapping as well as far calculating RMR values was undertaken at Daesung and Pyunghae underground limestone mining sites. RQD values were determined for row locations in these two mining sites. Based on GSI values and intact rock strength properties, the rock mass strength modulus of elasticity as well as the Mohr-Coulomb strength parameter c$_{m}$ and $\phi$$_{m}$ were determined. GSI and RMR are correlated.

• Journal of the Korean Geotechnical Society
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• v.28 no.4
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• pp.35-42
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• 2012

This paper evaluates the effect of anisotropic conductivity on the seepage face and reliability index of an homogeneous dam with and without toe drain. The analysis are conducted under steady state saturated-unsaturated seepage condition using finite element method. Various anisotropic conductivity ratios were interpreted under such conditions as the vertical conductivity is reduced while the horizon conductivity is fixed. The shear strength of soil is defined by the modified Mohr-Coulomb failure criterion. The analysis results demonstrate that the length of seepage face and reliability index at the downstream and upstream of the dam increase with an increasing anisotropic ratio. These results of the seepage face and reliability index, however, depend on the total head difference between the upstream slope and downstream toe. The difference in seepage face and reliability index is attributed to the different equipotential head with different anisotropic ratios of the dam material.

• Journal of the Korean Geotechnical Society
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• v.29 no.6
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• pp.5-17
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• 2013

Slug tests can be adopted to estimate hydraulic conductivity of the slurry trench wall backfill for its abilities to reflect the in-situ performance of the construction. A comprehensive three-dimensional numerical model is developed to simulate the slug test in a slurry trench wall considering the presence of bentonite cake on the interface boundaries between the wall and the surrounding soil formation. Influential factors such as wall width (i.e., proximity of wall boundary), well deviation, vertical position of well intake section, compressibility of wall backfill, etc. are taken into account in the model. A series of simulation results are examined to evaluate the bentonite cake effect in analyzing practical slug test results in the slurry trench wall. The results show that the modified line-fitting method can be used without any correction factor for the slug test in the slurry trench wall with the presence of bentonite cake. A case study is reanalyzed with the assumption of existing bentonite cake. The results are compared with the previously reported results by the approaches assuming no bentonite cake (constant-head boundary) or upper-bound solution (no-flux boundary). The case study demonstrates the bentonite cake effect and the validity of the modified line-fitting method in the estimation of the hydraulic conductivity of the slurry wall backfill.