• Title/Summary/Keyword: 부정합 전위

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Suppression of misfit dislocations in heavily boron-doped silicon layers for micro-machining (마이크로 머시닝을 위한 고농도로 붕소가 도핑된 실리콘 층의 부정합 전위의 억제)

  • 이호준;김하수;한철희;김충기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.2
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    • pp.96-113
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    • 1996
  • It has been found that the misfit dislocations in heavily boron-doped layers originate from wafer edges. Moreover, the propagation of the misfit dislocation into a heavily boron-doped region can be suppressed by placing a surrounding undoped region. Using a surrounding undoped region the disloction-free heavily boron-deoped silicon membranes have been fabricated. The measured surface roughness, fracture strength, and residual tensile stress of the membrane are 20.angs. peak-to-peak, 1.39${\times}$10$^{10}$ and 2.7${\times}$10$^{9}$dyn/cm$^{2}$, while those of the conventional heavily boron-doped silicon membrane with high density of misfit dislocations are 500 peak-to-peak, 8.27${\times}$10$^{9}$ and 9.3${\times}$10$^{8}$dyn/cm$^{2}$ respectively. The differences between these two membranes are due to the misfit dislocations. Young's modulus has been extracted as 1.45${\times}$10$^{12}$dyn/cm$^{2}$ for both membranes. Also, the effective lattice constant of heavily boron-doped silicon, the in-plane lattice constant of the conventional membrane, and the density of misfit dislocation contained in the conventional membrane have been extracted as density of misfit dislocation contained in the conventional membrane have been extracted as density of misfit dislocation contained in the conventional membrane have been extracted as 5.424.angs. 5.426.angs. and 2.3${\times}$10$^{4}$/cm for the average boron concentration of 1.3${\times}$10$^{20}$/cm$^{-23}$ cm$^{3}$/atom. Without any buffer layers, a disloction-free lightly boron-doped epitaxial layer with good crsytalline quality has been directly grown on the dislocation-free heavily boron-doped silicon layer. X-ray diffraction analysis revealed that the epitaxial silicon has good crystallinity, similar to that grown on lightly doped silicon substrate. The leakage current of the n+/p gated diode fabricated in the epitaxial silicon has been measured to be 0.6nA/cm$^{2}$ at the reverse bias of 5V.

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Study on Misfit Dislocations and Critical Thickness in a $Si_xGe_{1-x}$ Epitaxial Film on a Si Substrate (Si 모재 위의 $Si_xGe_{1-x}$ 박막에서 부정합 전위와 임계두께에 관한 연구)

  • Shin, J.H.;Kim, J.H.;Earmme, Y.Y.
    • Proceedings of the KSME Conference
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    • 2001.06a
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    • pp.298-303
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    • 2001
  • The critical thickness of an epitaxial film on a substrate in electronic or optoelectronic devices is studied on the basis of equilibrium dislocation analysis. Two geometric models, a single dislocation and an array of dislocations in heteroepitaxial system, are considered respectively to calculate the misfit dislocation formation energy. The isotropic linearly elastic stress fields for the models are obtained by means of complex potential method combined with alternating technique, and are used for calculating the formation energies. As a result, the effect of elastic mismatch between film and substrate on critical thickness is presented and $Si_xGe_{1-x}/Si$ epitaxial structure is analyzed to predict the critical thickness with varying germanium concentration.

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SURGICAL REDUCTION OF DISPLACED SUBCONDYLAR FRACTURES OF MANDIBLE USING OF SAGITTAL SPLIT AND OBLIQUE SUBCONDYLAR OSTEOTOMY (시상골절단과 사선골절단술을 이용한 하악골 과두골절의 외과적 치험예)

  • Kim, Hyoun-Chull
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.11 no.2
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    • pp.87-95
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    • 1989
  • The therapeutic methods and follow - up prognosis of subcondylar fractures in adults have always been sources of controversy. To improve the therepeutic results in subcondylar fractures with displacement, and especially, the bicondylar ones, the auther employ the surgical reduction using of sagittal split and oblique subcondylar osteotomy. This report is illustrated by six clinical cases.

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Effects of Lattice Mismatch on Photoluminescence Efficiency of InGaAsP/InP Heterostructures (InGaAsP/InP이종접합구조의 격자부정합이 Photoluinescence효율에 미치는 영향)

  • Lee, Jong-Won
    • Korean Journal of Materials Research
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    • v.4 no.5
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    • pp.516-523
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    • 1994
  • The interfacial coherency of metal organic chemical vapor deposition grown InGaAsP/InP heterostructure wafers was examined and their influences on the optoelectronic properties were investigated in this study. (400) symmetric and (511) asymmetric reflections were employed to measure the lattice coherency. Existence of misfit dislocations was examined by x-ray topography and reverified by photoluminescence (PL) imaging. PI, measurements were performed, and higher PL intensity was obtained for elastically strained samples and lower intensity for plastically deformed samples. The highest PL intensity was obtained for the sample lattice matched at the growth temperature. PL full-width at half maximum (FWHM) was found to depend on the degree of lattice mismatch. A correlatior between x-ray FWHM and PL intensity was empirically established. The results presented demonstrate that the interfacial coherency is of primary significance in affecting the optoelectronic properties through elastic strain and plastic deformation.

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Micro structural Characterization of $\textrm{Zn}_{1-x}\textrm{Co}_{x}\textrm{Se}$ Epilayers and (ZnSe/FeSe) Superlattice by Transmission Electron Microscopy (투과전자현미경에 의한 $\textrm{Zn}_{1-x}\textrm{Co}_{x}\textrm{Se}$박막 및 (ZnSe/FeSe) 초격자 박막의 미세구조 분석)

  • Park, Gyeong-Sun
    • Korean Journal of Materials Research
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    • v.7 no.10
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    • pp.914-918
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    • 1997
  • MBS에 의해(001)GaAs기판 위에 성장된 Zn$_{1-x}$Co$_{x}$Se(x=1.0, 7.4, 9.5 %)반도체 박막과 (ZnSe/FeSe)반도체 초격자 박막의 미세구조를 투과전자현미경을 이용하여 연구하였다. Zn$_{1-x}$Co$_{x}$Se 박막 시편의 경우, 박막과 기판 사이의 격자 불일치때문에 a/2<110>형태의 버거즈 벡터를 가지는 부정합 전위를 관찰하였다. 모든 Zn$_{1-x}$Co$_{x}$Se 박막과 기판의 계면은 뚜렷이 구별되었고, 계면에서 산화물이나 이물질이 존재하지 않았다. 또한, (ZnSe/FeSe)초격자를 성장시키기 전에 GaAs기판 위에 ZnSe바닥층을 넣음으로써 고품질의 (ZnSe/FeSe)초격자를 얻었다. (ZnSe/FeSe)초격자에 있는 FeSe는 섬아연광 결정구조로 존재하였다.

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ZnSe 박막 성장을 위한 Molecular Beam Epitaxy 성장 조건의 결정

  • Jeong, Myeong-Hun;Park, Seung-Hwan;Kim, Gwang-Hui;Jeong, Mi-Na;Yang, Min;An, Hyeong-Su;Jang, Ji-Ho;Kim, Hong-Seung;Song, Jun-Seok;Yao, Takafumi
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.1
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    • pp.990-994
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    • 2005
  • MBE growth conditions such as growth temperature, flux ration and growth rate for II-VI compound semiconductor growth has been studied. The growth temperature, flux ration and growth rate were tentatively controlled to 290$^{\circ}C$, 2, and 0.6 ${\mu}m$/h, respectively. From AFM result, relatively rough surface (RMS ${\sim}$ 2.9 nm) was observed. It was regarded as an indication of low growth temperature and high growth rate. XRD measurement shows that the film is relaxed, also the series of XRD measurements of different diffraction planes such as (002), (004), (115), (006) diffractions were performed to calculate the dislocation density in the film. The calculated dislocation density was found to be 8.30${\times}10^8$ dis/cm$^2$ which is compatible to the previous results.

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Comparison of Results Between Immediate Fixation Group and Delayed Reconstruction Group in Displaced Mid-shaft Fractures of the Clavicle (쇄골 전위성 간부 골절에서 조기 고정술 군과 지연 재건술 군 간의 결과 비교)

  • Kim, Doo-Sub;Rah, Jung-Ho;Yoon, Yeo-Seung;Lee, Chang-Ho
    • Clinics in Shoulder and Elbow
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    • v.12 no.1
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    • pp.61-66
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    • 2009
  • Purpose: Several authors have reported excellent results of delayed reconstruction of non-union & malunion in displaced mid-shaft fractures of the clavicle and these results were equal to that of immediate fixation. But direct comparison between these treatments is rare. We evaluated the results between the immediate fixation group and delayed reconstruction group for treating displaced mid-shaft fractures of the clavicle. Materials and Methods: We studied the results of 18 cases with immediate fixation of displaced mid-shaft fractures of the clavicle and 15 cases with delayed reconstruction of non-union & malunion after conservative management, and these cases were seen from March 2000 to February, 2006. The final postoperative outcome was analyzed according to the clinical outcomes with using the Constant score and the radiological findings of bony union. Results: The constant score was low in the delayed reconstruction group compare to that of the immediate fixation group (p value=0.045). For the pain score & the activities of daily living score, a statistically significant difference was seen between the two groups (p<0.05), but not for the range of motion score & the power score (p>0.05). Radiological findings of bony union were seen for both groups at an average of 8.8 weeks for the immediate fixation group and at an average of 9.8 weeks for the delayed reconstruction group. Conclusion: Though the delayed reconstruction group was shown good clinical and radiological results, the immediate fixation group had a significantly better pain score, a better activities of daily living score and a better Constant score. It is important to choose the initial treatment option for displaced mid-shaft fractures of the clavicle after sufficient explanation to patients about the merits and demerits between these two treatment options.

A Study on Misfit Dislocation Generation in InAs Epilayers Grown on InP Substrates by Metalorganic Chemical-Vapor Deposition (MOCVD방법으로 InP 기판 위에 성장시킨 InAs 박막에서의 부정합 전위 생성 연구)

  • Kim, Jwa-Yeon;Yun, Eui-Jung;Park, Kyeong-Soon
    • Applied Microscopy
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    • v.27 no.4
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    • pp.483-488
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    • 1997
  • A misfit dislocation generation in InAs epilayers grown on (001) InP substrates (oriented $2^{\circ}$ off (001) toward the [110] direction) using metalorganic chemical-vapor deposition was studied. The InAs film of 17 nm thickness grown at $405^{\circ}C$ showed the three different arrays of dislocations: a straight orthogonal array to the <110> direction, an array to the >100> direction, and an array tilted by a degree of $5\sim45^{\circ}$ from the [110] direction. All of the dislocations had a/2<101> Burgers vectors inclined $45^{\circ}$ to the interface. Upon annealing at $660^{\circ}C$ the InAs films with 60, 140 and 220 nm thicknesses, most of the misfit dislocations became the Lomer type $(\sim100%)$ oriented exactly along the >110> direction. These misfit dislocation spacings were decreased with increasing the InAs thickness up to 220 nm thickness. This phenomena was interpreted by the relationship between the dislocation interaction energy among parallel misfit dislocations and the opposite remnant InAs epilayer strain energy. The distance between misfit dislocations was measured by transmission electron microscopy.

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Curvature stroke modeling for the recognition of on-line cursive korean characters (온라인 흘림체 한글 인식을 위한 곡률획 모델링 기법)

  • 전병환;김무영;김창수;박강령;김재희
    • Journal of the Korean Institute of Telematics and Electronics B
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    • v.33B no.11
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    • pp.140-149
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    • 1996
  • Cursive characters are written on an economical principle to reduce the motion of a pen in the limit of distinction between characters. That is, the pen is not lifted up to move for writing a next stroke, the pen is not moved at all, or connected two strokes chance their shapes to a similar and simple shape which is easy to be written. For these reasons, strokes and korean alphabets are not only easy to be changed, but also difficult to be splitted. In this paper, we propose a curvature stroke modeling method for splitting and matching by using a structural primitive. A curvature stroke is defined as a substroke which does not change its curvanture. Input strokes handwritten in a cursive style are splitted into a sequence of curvature strokes by segmenting the points which change the direction of rotation, which occur a sudden change of direction, and which occur an excessive rotation Each reference of korean alphabets is handwritten in a printed style and is saved as a sequence of curvature strikes which is generated by splitting process. And merging process is used to generate various sequences of curvature strikes for matching. Here, it is also considered that imaginary strokes can be written or omitted. By using a curvature stroke as a unit of recognition, redundant splitting points in input characters are effectively reduced and exact matching is possible by generating a reference curvature stroke, which consists of the parts of adjacent two korean alphasbets, even when the connecting points between korean alphabets are not splitted. The results showed 83.6% as recognition rate of the first candidate and 0.99sec./character (CPU clock:66MHz) as processing time.

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