• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.78-79
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• 2015

PVD 공정에서 다성분으로 이루어진 나노복합 코팅을 형성하는 것은 원소들간의 합금화 문제로 인해 어렵다. 따라서 일반적으로 두 개 이상의 원소타겟 또는 멀티타겟을 이용한 PVD+PECVD 의 융합공정에 의해 제조된다. 하지만 멀티타겟을 사용한 공정은 공정의 복잡화가 뒤따르며 신뢰성이 떨어진다. 본 연구에서는 멀티타겟의 단점을 보완하기 위해 Ti-Al-X(Cr, Si, B, V) 단일 합금 타겟을 제작하여 나노복합 코팅을 형성하고자 하였다. 기계적 합금화법을 통해 합금분말을 제조하였으며, 방전플라즈마소결법으로 합금 타겟을 제작하였다. 제작된 타겟을 이용하여 스퍼터링 장치를 통해 박막을 형성 하였다. 그 결과 분말은 밀링 시간 20시간에서 정상상태에 도달하였으며, 더 이상 분말의 입자는 줄어들지 않았다. 이때 분말의 입자크기는 $5{\sim}6{\mu}m$ 이었으며 결정립의 크기는 16~20nm 이었다. 소결을 통해 99% 이상의 진밀도를 갖는 합금타겟을 제작하였으며, 이때 결정립의 크기는 매우 미세하였다. 박막의 경우 모두 30GPa 이상의 고경도 특성을 나타냈다.

• Korean Journal of Metals and Materials
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• v.49 no.3
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• pp.250-255
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• 2011

The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and Spark Plasma Sintering (SPS) were compared and analyzed. From the results, the Cu film prepared heating $60^{\circ}C/min$ (SPS process) showed a similar specific resistance compared to the commercial cast Cu film. Also, auording to the results of XRD, SIMS, and TEM. There was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Cu target was found to have quite similar properties with the commercial one and it is expected to be applied in futare research to the metal wiring material for semiconductor/display devices.

• Journal of Powder Materials
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• v.30 no.1
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• pp.41-46
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• 2023

In this study, an Al₈₂Ni₇Co₃Y₈ (at%) bulk metallic glass is fabricated using gas-atomized Al₈₂Ni₇Co₃Y₈ metallic glass powder and subsequent spark plasma sintering (SPS). The effect of powder size on the consolidation of bulk metallic glass is considered by dividing it into 5 ㎛ or less and 20-45 ㎛. The sintered Al₈₂Ni₇Co₃Y₈ bulk metallic glasses exhibit crystallization behavior and crystallization enthalpy similar to those of the Al₈₂Ni₇Co₃Y₈ powder with 5 ㎛ or less and it is confirmed that no crystallization occurred during the sintering process. From these results, we conclude that the Z-position-controlled spark plasma sintering process, using superplastic deformation by viscous flow in the supercooled liquid-phase region of amorphous powder, is an effective process for manufacturing bulk metallic glass.

• Journal of Powder Materials
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• v.8 no.1
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• pp.35-41
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• 2001

$BaTiO_3$ fine powder was synthesized by hydrothermal process from the mixture of titania-hydroxide($TiO_2{\cdot}xH_2O$) and barium hexa-hydroxide ($Ba(OH)_2{\cdot}8H_2O$) as starting materials. Fine powder(< 100 nm) was made under the reaction conditions of 18$0^{\circ}C$,10 atm, 1.5 hr in autoclave and showed cubic structure. The powders were sintered by a spark plasma sintering technique from 1050~115$0^{\circ}C$ for 5 min. The grains of sample sintered at 110$0^{\circ}C$ were about 0.9${\mu}m$ in average size and showed the mixture of cubic and tetragonal structures.

• Korean Journal of Materials Research
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• v.22 no.6
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• pp.280-284
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• 2012

Bismuth antimony telluride (BiSbTe) thermoelectric materials were successfully prepared by a spark plasma sintering process. Crystalline BiSbTe ingots were crushed into small pieces and then attrition milled into fine powders of about 300 nm ~ 2${\mu}m$ size under argon gas. Spark plasma sintering was applied on the BiSbTe powders at 240, 320, and $380^{\circ}C$, respectively, under a pressure of 40 MPa in vacuum. The heating rate was $50^{\circ}C$/min and the holding time at the sintering temperature was 10 min. At all sintering temperatures, high density bulk BiSbTe was successfully obtained. The XRD patterns verify that all samples were well matched with the $Bi_{0.5}Sb_{1.5}Te_{3}$. Seebeck coefficient (S), electric conductivity (${\sigma}$) and thermal conductivity (k) were evaluated in a temperature range of $25{\sim}300^{\circ}C$. The thermoelectric properties of BiSbTe were evaluated by the thermoelectric figure of merit, ZT (ZT = $S^2{\sigma}T$/k). The grain size and electric conductivity of sintered BiSbTe increased as the sintering temperature increased but the thermal conductivity was similar at all sintering temperatures. Grain growth reduced the carrier concentration, because grain growth reduced the grain boundaries, which serve as acceptors. Meanwhile, the carrier mobility was greatly increased and the electric conductivity was also improved. Consequentially, the grains grew with increasing sintering temperature and the figure of merit was improved.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.6
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• pp.349-355
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• 2017

Zinc sulphide (ZnS) nanoparticles were fabricated by hydrothermal synthesis at $180^{\circ}C$ for 12 h. Two kinds of ZnS powder (hydrothermal synthesized ZnS and commercial ZnS) were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM) for phase and microstructure, respectively. The XRD patterns showed that all ZnS nanoparticles have a sphalerite (cubic) structure. The nanoparticles of two different ZnS powders were sintered by spark plasma sintering. The sintered ZnS were analyzed by XRD, SEM, and FT-IR. We found that the transmittance of the infrared region is highly dependent on the density and crystal structure of sintered ZnS and the purity of the starting ZnS powder.

• Journal of the Korean Ceramic Society
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• v.45 no.1
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• pp.60-64
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• 2008

[ $B_4C$ ] ceramics were fabricated by spark plasma sintering process and their sintering behavior, microstructure and mechanical properties were evaluated. Relative density of $B_4C$ ceramics could be achieved by spark plasma sintering method reached as high as 99% at lower temperature than conventional sintering method, in addition, without any sintering additives. The mechanical properties of $B_4C$ ceramics could be improved by the heat treatment at $1300^{\circ}C$ during sintering process which can be removed $B_2O_3$ phase from a $B_4C$ powder surface. This improvement results from the formation of a fine and homogeneous microstructure because the grain coarsening was suppressed by the elimination of $B_2O_3$ phase. Particularly, mechanical properties of the specimen experienced the $B_2O_3$ removing process improved over 30% compared with the specimen without that process.

• Korean Journal of Materials Research
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• v.17 no.2
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• pp.107-114
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• 2007

Porous Ti compacts were fabricated by spark plasma sintering (SPS) method and their in vitro and in vivo biocompatibilities were investigated. Alkaline phosphatase (ALP) activity representing the activity of osteoblast was increased when osteoblast-like MG-63 cells were cultured on the Ti powder surface. Some genes related to cell growth were over-expressed through microarray analysis. The porous Ti compact with 32.2% of porosity was implanted in the subcutaneous tissue of rats to confirm in vivo cytotoxicity. 12 weeks post-operation, outer surface and inside the porous body was fully filled with fibrous tissue and the formation of new blood vessels were observed. No inflammatory response was confirmed. To investigate the osteoinduction, porous Ti compact was implanted in the femur of NZW rabbits for 4 months. Active in-growth of new bone from the surrounded compact bone was observed around the porous body. From the results, The porous Ti compacts fabricated by spark plasma sintering might be available for the application of the stem part of artificial hip joint.

• Journal of Powder Materials
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• v.15 no.5
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• pp.371-377
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• 2008

This paper deals with the phase analysis of $MgB_2$ bulk using spark plasma sintering process after ball milling. Mg and amorphous B powders were used as raw materials, and milled by planetary-mill for 9 hours at argon atmosphere. In order to confirm formation of $MgB_2$ phase, DTA and XRD were used. The milled powders were fabricated to $MgB_2$ bulk at the various temperatures by Spark Plasma Sintering. The fabricated $MgB_2$ bulk was evaluated with XRD, EDS, FE-SEM and PPMS. In the DTA result, reaction on formation of $MgB_2$ phase started at $340^{\circ}C$. This means that ball milling process improves reactivity on formation of $MgB_2$ phase. The $MgB_2$ MgO and FeB phases were characterized from XRD result. MgO and FeB were undesirable phases which affect formation of $MgB_2$ phase, and it's distribution could be confirmed from EDS mapping result. Spark Plasma Sintered sample for 5 min at $700^{\circ}C$ was relatively densified and it's density and transition temperature showing super conducting property were $1.87\;g/cm^3$ and 21K.

• Journal of Powder Materials
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• v.24 no.1
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• pp.53-57
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• 2017

In this study, we report the microstructure and the high-temperature oxidation behavior of Fe-Ni alloys by spark plasma sintering. Structural characterization is performed by scanning electron microscopy and X-ray diffraction. The oxidation behavior of Fe-Ni alloys is studied by means of a high-temperature oxidation test at $1000^{\circ}C$ in air. The effect of Ni content of Fe-Ni alloys on the microstructure and on the oxidation characteristics is investigated in detail. In the case of Fe-2Ni and Fe-5Ni alloys, the microstructure is a ferrite (${\alpha}$) phase with body centered cubic (BCC) structure, and the microstructure of Fe-10Ni and Fe-20Ni alloys is considered to be a massive martensite (${\alpha}^{\prime}$) phase with the same BCC structure as that of the ferrite phase. As the Ni content increases, the micro-Vickers hardness of the alloys also increases. It can also be seen that the oxidation resistance is improved by decreasing the thickness of the oxide film.