• Title/Summary/Keyword: 반도체공동연구소

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Pulse power supply design of RF amplifier for industrial high power electron beam accelerator (산업용 대출력 전자빔 가속기용 RF증폭기에 필요한 펄스전원장치 설계)

  • Son, Y.G.;Kwon, S.J.;Jang, S.D.;Oh, J.S.;Cho, M.H.;NamKung, W.;Lee, K.O.;Chung, K.H.
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.250-251
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    • 2007
  • 산업용 조사장치로 전자빔은 활용도가 매우 높고, 대부분의 장치는 국내에서 제작이 어려울 뿐만 아니라 외국의존도 높다. 현재 미국, 일본, 러시아, 캐나다 등을 중심으로 약 1500 기의 전자빔 조사 설비가 산업용 및 연구용으로 설치되어 있는데, 이 중 많은 설비가 공동이용 연구시설 또는 상업적인 전자빔 조사서비스 시설로 운영되고 있다. 산업적으로 이용하기 위하여 철원물리기술연구소에 설치될 전자빔 조사 시설을 위한 전자빔 가속기를 개발 중이다. 곡물 살충 및 발아억제, 식품 저장, 위생용품 살균, 의약품 및 의료용구 살균, 전력반도체 생산 등의 분야에 전자빔 조사 설비를 응용할 수 있다. 본 논문에서는 산업용 조사 설비의 전원장치로 사용되는 펄스 모듈레이터의 설계, 제작 및 실험내용을 보이고자 한다.

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진공공정 실시간 측정 기술 개발 동향

  • Sin, Yong-Hyeon;Hong, Seung-Su;Im, In-Tae;Seong, Dae-Jin;Im, Jong-Yeon;Kim, Jin-Tae;Kim, Jeong-Hyeong;Gang, Sang-U;Yun, Ju-Yeong;Yu, Sin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.28-28
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    • 2011
  • 우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

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Peace Leadership and the New Economic Initiative of the Korean Peninsula : Focusing on Exchanges and Cooperation between South and North in the Moon Jae-in Government (평화리더십과 한반도신경제구상 : 문재인 정부의 남북교류협력을 중심으로)

  • Yang, young-mo
    • Korea and Global Affairs
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    • v.3 no.2
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    • pp.59-86
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    • 2019
  • This study explores "4.27 Panmunjom Declaration" and "9.19 Pyongyang Declaration" for the peace and prosperity of the Korean Peninsula in terms of inter-Korean exchanges and scrutinizes the Declarations in conjunction with the New Economic Initiative of the Korean Peninsula. The leadership of President Moon Jae-in pursues the value of the "peaceful and prosperous Korean Peninsula" of which pre-requisite and requirement are exchanges and cooperation between South and North Koreas. The New Economic Initiative of the Korea Peninsula for economic prosperity proposed in the inter-Korean summit premises complete denuclearization in the Peninsula. It is accentuated that the Initiative provides a new tonic impetus to the Korean economy in recession, and simultaneously, shapes a necessary foundation for the economic development of North Korea. The Initiative with connotation of the two Korea's mutual opulence aims at proceeding to a new Korean Peninsular system. The new system implies the new peace-cooperative community where confrontation and discord are ceased, and the new economic-cooperative one where the age of ideological rivalry comes to an end. The two Koreas have to lead the new age of peaceful and prosperous Northeast Asia as a buffer zone of peace.

A Study on the Growth Proccess and Strategic Niche Management of New Energy Technology: A Case Study with Government Supporting Photovoltaic R&D Project (전략적 니치관리(SNM)를 활용한 정부 신재생 R&D 성장과정 분석)

  • Kim, Bong-Gyun;Moon, Sun-Woo
    • Journal of Technology Innovation
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    • v.20 no.2
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    • pp.161-187
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    • 2012
  • Recently, environmentally friendly technology are becoming important due to reconsideration about climate change and environmental pollution. In addition, as well as technical skills and social interaction through an analysis of the nonlinear transition management and policy implementation are emerging. This study of the development of photovoltaic industry in Korea 10 years analyze with strategic niche management (SNM) based on the theoretical and multi-layered perspective (MLP) is used as the analytical framework. Choose the gerverment-support project for niche technology, through a process of quantifying and alnalyze the phase transition to Regime with the numerical method and policy vision, learning effects, and network that key elements of SNM, MLP. Through the analysis of the photovoltaic industry technology-commercialization phase was investigated. This conventional overall and step-by-step model for technical management is proposed to replace exiting linear and narrow method and through the case study its validity was confirmed.

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Research for Space Activities of Korea Air Force - Political and Legal Perspective (우리나라 공군의 우주력 건설을 위한 정책적.법적고찰)

  • Shin, Sung-Hwan
    • The Korean Journal of Air & Space Law and Policy
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    • v.18
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    • pp.135-183
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    • 2003
  • Aerospace force is a determining factor in a modem war. The combat field is expanding to space. Thus, the legitimacy of establishing aerospace force is no longer an debating issue, but "how should we establish aerospace force" has become an issue to the military. The standard limiting on the military use of space should be non-aggressive use as asserted by the U.S., rather than non-military use as asserted by the former Soviet Union. The former Soviet Union's argument is not even strongly supported by the current Russia government, and realistically is hard to be applied. Thus, the multi-purpose satellite used for military surveillance or a commercial satellite employed for military communication are allowed under the U.S. principle of peaceful use of space. In this regard, Air Force may be free to develop a military surveillance satellite and a communication satellite with civilian research institute. Although MTCR, entered into with the U.S., restricts the development of space-launching vehicle for the export purpose, the development of space-launching vehicle by the Korea Air Force or Korea Aerospace Research Institute is beyond the scope of application of MTCR, and Air Force may just operate a satellite in the orbit for the military purpose. The primary task for multi-purpose satellite is a remote sensing; SAR sensor with high resolution is mainly employed for military use. Therefore, a system that enables Air Force, the Korea Aerospace Research Institute, and Agency for Defense Development to conduct joint-research and development should be instituted. U.S. Air Force has dismantled its own space-launching vehicle step by step, and, instead, has increased using private space launching vehicle. In addition, Military communication has been operated separately from civil communication services or broadcasting services due to the special circumstances unique to the military setting. However, joint-operation of communication facility by the military and civil users is preferred because this reduces financial burden resulting from separate operation of military satellite. During the Gulf War, U.S. armed forces employed commercial satellites for its military communication. Korea's participation in space technology research is a little bit behind in time, considering its economic scale. In terms of budget, Korea is to spend 5 trillion won for 15 years for the space activities. However, Japan has 2 trillion won annul budget for the same activities. Because the development of space industry during initial fostering period does not apply to profit-making business, government supports are inevitable. All space development programs of other foreign countries are entirely supported by each government, and, only recently, private industry started participating in limited area such as a communication satellite and broadcasting satellite, Particularly, Korea's space industry is in an infant stage, which largely demands government supports. Government support should be in the form of investment or financial contribution, rather than in the form of loan or borrowing. Compared to other advanced countries in space industry, Korea needs more budget and professional research staff. Naturally, for the efficient and systemic space development and for the prevention of overlapping and distraction of power, it is necessary to enact space-related statutes, which would provide dear vision for the Korea space development. Furthermore, the fact that a variety of departments are running their own space development program requires a centralized and single space-industry development system. Prior to discussing how to coordinate or integrate space programs between Agency for Defense Development and the Korea Aerospace Research Institute, it is a prerequisite to establish, namely, "Space Operations Center"in the Air Force, which would determine policy and strategy in operating space forces. For the establishment of "Space Operations Center," policy determinations by the Ministry of National Defense and the Joint Chief of Staff are required. Especially, space surveillance system through using a military surveillance satellite and communication satellite, which would lay foundation for independent defense, shall be established with reference to Japan's space force plan. In order to resolve issues related to MTCR, Air Force would use space-launching vehicle of the Korea Aerospace Research Institute. Moreover, defense budge should be appropriated for using multi-purpose satellite and communication satellite. The Ministry of National Defense needs to appropriate 2.5 trillion won budget for space operations, which amounts to Japan's surveillance satellite operating budges.

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