• The Magazine of the IEIE
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• v.24 no.10
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• pp.23-44
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• 1997

이 글에서는 요즘 신문이나 텔레비전을 통해서 인체 내부를 돌며 검사 및 치료를 하는 마이크로 로보트 등의 차세대 첨단기술로서 일반 국민들에게 소개되기도 하며, MEMS, 마이크로머신, 마이크로시스템, 혹은 초소형 정밀기계 등으로 불리는 기술과 이 기술에 대한 각국 (미국, 일본, 유럽, 한국)의 기술 동향을 소개한다. 이에 이어서, 현재 과기처의 선도기술개발사업 (소위 G7사업) 으로서 진행되고 있는 초소형 정밀기계 기술개발 사업에 대한 소개를 한다. 이 분야에 종사하지 않는 보통 사람들을 위해 가급적 쉬운 말로 풀어 쓰도록 노력하였다. 이 글에서 다루고 있는 크기의 기본 단위는 마이크로미터 (천분의 일 밀리미터) 이며, 사람의 머리카락의 직경이 약 100 마이크로미터 (0.1mm) 내외이다. 초소형 기계나 초소형 부품들은 대개 이 머리카락의 직경정도이며, 머리카락속에 모터나 기어 등이 들어있다고 생각해도 크게 틀리지 않을 것이다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.315-319
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• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.16.2-16.2
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• 2005

• Journal of the Microelectronics and Packaging Society
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• v.30 no.2
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• pp.13-20
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• 2023

The process of microelectromechanical system (MEMS) fabrication involves surface treatment to impart functionality to the device. Such surface treatment method is the self-assembled monolayer (SAM) technique, which modifies and functionalizes the surface of MEMS components with organic molecule monolayer, possessing a precisely controllable strength that depends on immersion time and solution concentration. These monolayers spontaneously adsorb on polymeric substrates or metal/ceramic components offering high precision at the nanoscale and modifying surface properties. SAM technology has been utilized in various fields, such as tribological property control, mass-production lithography, and ultrasensitive organic/biomolecular sensor applications. This paper provides an overview of the development and application of SAM technology in various fields.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.702-707
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• 2005

The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.9
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• pp.1256-1261
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• 2003

Since the viscous effect increases as the size of device decreases, viscous-driven micropump is a promising mechanism in microscale applications. In the present study, a dual-rotor type pump which contains two counter-rotating cylinders for improving performance characteristics is proposed. First, for flows in the single-rotor type pump, the present unstructured grid simulation method is validated by comparing its results to the previous results. Next, the performance of the dual-rotor type pump is evaluated by the parametric studies and is compared to that of the previous single-rotor type pump. The flow characteristics are qualitatively similar to those of single-rotor type pump. However, the performance of the micropump with tandem rotors is still better than that of previous pumping type, e.g. much larger flow rate, smaller driving region, higher efficiency, and wider operation range.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.3
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• pp.77-85
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• 2022

In this study, to diagnose the grinding state of a micro drill bit, a sensor attachment location was selected through random vibration analysis of the grinding unit of the micro drill-bit grinding system. In addition, the vibration data generated during the drill bit grinding were collected from the grinding unit for the grinding wheels under the steady and worn conditions, and data feature extraction and dimension reduction were performed. The wear of the micro-drill-bit grinding wheel was diagnosed by applying KNN, a machine-learning algorithm. The classification model showed excellent performance, with an accuracy of 99.2%. The precision, recall and f1-score were higher than 99% in both the steady and wear conditions.

• Proceedings of the KIPE Conference
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• 2016.07a
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• pp.233-234
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• 2016

본 논문에서는 소형 어선의 전기 시스템을 DC 마이크로그리드의 관점에서 설계하고, 선박의 동력원인 엔진-발전기를 가변속 제어함으로써 선박 전력 계통의 효율을 개선하고자 한다. 선박 전력 계통은 물리적으로 육지 계통과 분리된 마이크로그리드의 형태를 갖추고 있다. 때문에 소형 기계 추진 어선의 경우, 추진을 위한 엔진뿐만 아니라 추가적으로 선내 전력을 공급하기 위한 엔진-발전기를 갖출 필요가 있다. 이에 반해 전기 추진 어선은 하나의 엔진-발전기 세트로 추진과 선내 전력 공급이 모두 가능하다. 하지만 어선이 정지 상태에서 조업을 할 때에 전력 부하량이 작기 때문에 엔진의 저부하 운전 문제가 발생한다. 본 논문에서는 이를 해결하기 위하여, DC마이크로그리드를 어선에 적용하여 엔진 가변속을 적용하고자 한다. 통상적으로 20% 내외의 부하율로 운용되는 엔진에 가변속 제어를 적용하면 20% 이상의 연비 개선 효과를 기대할 수 있다. 이러한 DC마이크로그리드 어선의 연비 개선 효과를 항해와 조업으로 구분하여 시뮬레이션을 통해 예측하였다.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.1
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• pp.17-21
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• 2019

In this paper, a high precision straightness measurement system has been developed at low cost using a visible laser and CMOS image sensor. CMOS image sensor detected optical image and the variation of straightness was calculated by image processing. We have observed that the error of the developed straightness measurement system was 0.9% when a distance of 3m between laser and image sensor. And it can be applied to 3D printer and any other areas.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1999-2004
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• 2004

Experiments were conducted to investigate the flow characteristics of water through rectangular PDMS microchannels with a hydraulic diameter ranging from 66.67 to 200 ${\mu}m$. In the experiments, the flow rate and pressure drop across the microchannels were measured at steady states. The experimental results were compared with the predictions from the conventional laminar flow theory. A significant difference between the experimental data and the theoretical predictions was found. Experimental results indicate that the pressure gradient and flow friction in microchannels are higher than those from the conventional laminar flow theory. This may be attributed to the fact that there exists effect of surface roughness of the microchannels. In this study, a surface roughness model is implemented to interpret the experimental data. A good agreement between the experimental data and the numerical predictions with a surface roughness model were found.