Study on the Influence of Applied Forces Acting on Small Scale Cantilever Beams

미소 외팔보의 동적해석 시 작용하는 힘들의 영향도에 관한 연구

The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.