• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.267-270
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• 2004

In Micro injection process, it is needed to the technique of making micro die, Rapid Thermal Pressing (RTP) and other techniques. Those techniques are independent. But the mutual connected system of techniques is needed. The target of this paper is the design of micro mold and the development of the entire micro injection techniques for functional polymer.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.160.1-160.1
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• 2005

• Journal of the Computational Structural Engineering Institute of Korea
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• v.24 no.2
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• pp.185-191
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• 2011

Plastic gradient from geometrically necessary dislocation(GND) can affect material behavior significantly. In this research, mechanical behavior of polycrystalline solid is investigated using the finite element method incorporating plastic gradient from long range dislocation or GND effect. Plastic gradient effect is implemented in the analysis model by considering a long range strain term as well as elastic and plastic terms in the multiplicative decomposition. In the model, gradient hardness coefficient and length parameter are used to evaluate the effect of the long range strains and sensitive study is conducted for the parameters. It is confirmed that the GND amplifies hardening response of polycrystals compared with the single crystal.

• Journal of the Korean Society of Hazard Mitigation
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• v.11 no.2
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• pp.39-44
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• 2011

Plastic gradient from geometrically necessary dislocation(GND) can strongly affect micro-scale plastic behavior of polycrystalline solids. In this research, mechanical behavior of polycrystalline solid is investigated using the finite element method incorporating plastic gradient from GND effect. Gradient hardness coefficient and material length parameter are used to evaluate the effect of the plastic gradient on the behavior of materials. Sensitivity of the modeling parameters on the plastic gradient from GND is presented and effects of plastic gradient and material parameters on the behavior of single crystal inside a polycrystalline aggregate are investigated. It is confirmed that the plastic gradient from GND amplifies hardening response of polycrystals and affects single crystal behavior embedded in polycrystalline solids.

• Journal of the Microelectronics and Packaging Society
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• v.2 no.1
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• pp.49-58
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• 1995

출발물질은 cordierite 유리와 borosilicate/Si3N4 복합분말을 사용하였다. Cordierite 유리조성은 무게비로 17.8MgO-23.1Al2O3-48.1ASiO2-5.0ZnO-1.0B2O3를 선택하였다. Borosilicate/Si3N4복합분말은 sol-gel법으로 a-si3N4 core 분말에 borosilicate 겔을 코팅하여 얻었다. 복합분말과 cordierite 유리 분말을 부피비로 0/100, 12.5/87.5 및 25/75의 조성으로 혼합하여 tape casting 에 의해 green sheet를 제작하였다. 이들 sheet들을 800~100$0^{\circ}C$에서 2시간 소성하여 얻은 시편을 SEM, XRD, 밀도, 유전상수 등을 측정하여 저 유전율의 저온 소성 기판재료를 제조하기 위한 조건들을 검토하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.237-240
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• 2004

In this study, we have developed a new $UV(\lambda=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. Also, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• Journal of the Microelectronics and Packaging Society
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• v.31 no.2
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• pp.36-44
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• 2024

Copper electrodeposition technology is essential for producing copper films and interconnects in the microelectronics industries including semiconductor packaging, semiconductors and secondary battery, and there are extensive efforts to control the microstructure of these films and interconnects. In this study, we investigated the influence of crystallographic orientation on the local plastic deformation of copper films for secondary batteries deformed by uniaxial tensile load. Crystallographic orientation maps of two electrodeposited copper films with different textures were measured using an electron backscatter diffraction (EBSD) system and then used as initial conditions for crystal plasticity finite element analysis to predict the local plastic deformation behavior within the films during uniaxial tension deformation. Through these processes, the changes of the local plastic deformation behavior and texture of the films were traced according to the tensile strain, and the crystal orientations leading to the inhomogeneous plastic deformation were identified.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.417-420
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• 2007

Micro parts are usually used of producing by micro-electro-mechanical systems(MEMS). In this paper, we present some fundamental results concerning on the MEMS, extrusion condition on the micro forming characteristics and new micro forward extrusion machine has been developed. In the first step, we manufactured micro dies in two kinds of sections. One is a circle section, another is a cross section. The process for fabricating micro dies combines a deep UV-lithography, anisotropic etching techniques and metal electroplating with bulk silicon based on Ni with a thickness of $50{\mu}m$. The outer diameter of Ni-micro dies is 3mm and the diameter of extrusion section is $270{\mu}m$ for a cross section, $500{\mu}m$ for a circle section. The low linear density polyethylene(LLEPD) in the shape of a pellet has been used of micro extrusion. The billet was placed in a container manufactured by electric discharge machining and extruded through the micro die by a piezoelectric actuator. The micro extrusion has succeeded in a forming such micro parts as micro bars, micro cross shafts.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.240-244
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• 2003

후막 리소그라피 기술은 기판 위에 감광성 페이스트를 도포한 후 자외선과 패턴마스크를 사용하는 광식각(photolithography) 방법을 이용하여 세부 패턴을 형성시키는 기술이다, 이 기술은 후막기술로서는 높은 해상도인 선폭 $30{\mu}m$ 이하의 미세도선을 구현할 수 있어, 후막기술을 이용한 고주파 모듈의 제조에 있어서 새로운 대안으로 주목받고 있다. 본 연구에서는 알루미나 기판 상에 수십 ${\mu}m$ 이하의 마이크로 비아를 가지는 유전체 층을 형성시킬 수 있는 저온소결용 감광성 유전체 페이스트를 개발하였다. 저온소결용 유전체 파우더와 폴리머, 모노머, 광개시제 등의 양을 조절하여 마이크로 비아를 형성할 수 있는 최적 페이스트 조성을 연구하였으며, 노광량 및 현상시간과 같은 공정변수가 마이크로 비아의 해상도에 미치는 영향을 평가하였다. 알루미나 기판에 전면 프린팅 한 후 건조, 노광, 현상, 소성 과정을 거쳐 소결전 $37{\mu}m$, 소결후 $49{\mu}m$의 해상도를 가지는 마이크로 비아를 형성할 수 있었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.165-169
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• 2007

In this study, the factors that have strong relationship with size effects on forging simulation are investigated and then a dimensionless concept is implemented into the forging simulator. The approach is applied to simulating a micro former forging process of which sequence involves a piercing process to make a hole of 0.7mm diameter of the product whose maximum diameter is 3mm. The simulated results are discussed to reveal the size effect in forging simulation.