Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2007.05a
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- Pages.417-420
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- 2007
Micro forming technology for micro parts below $500{\mu}m$ in diameter by n hot extrusion process
열간 압출 공정에 의한 직경 $500{\mu}m$ 마이크로 부품 성형
Abstract
Micro parts are usually used of producing by micro-electro-mechanical systems(MEMS). In this paper, we present some fundamental results concerning on the MEMS, extrusion condition on the micro forming characteristics and new micro forward extrusion machine has been developed. In the first step, we manufactured micro dies in two kinds of sections. One is a circle section, another is a cross section. The process for fabricating micro dies combines a deep UV-lithography, anisotropic etching techniques and metal electroplating with bulk silicon based on Ni with a thickness of