• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.3
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• pp.47-56
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• 2005

This paper presents a performance improvement result with the aid of closed feedback controller loop to a micro gyroscope. The dynamic model of a micro gyroscope is derived and a conventional proportional and derivative controller is designed via frequency domain analysis. The proposed control loop is implemented using several analog devices and applied to the SNU-Bosch MEMS gyroscope to check its performance improvement in real environment. The experiments demonstrated the performance improvement with the proposed feedback control loop. The bandwidth, linearity, and bias stability are improved to 78 Hz, 0.504 %, and 0.043 deg/sec, respectively, from 35 Hz, 2.07 %, and 0.066 deg/sec of open loop system.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.1-8
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• 2001

Conventional microgyroscopes of vibrating type require resonant frequency tuning of the driving and sensing modes to achieve high sensitivity. These tuning conditions depend on each fabricated microgyroscopes, even though the microgyroscopes are identically designed. A new micromachined resonator, which is applicable to microgyroscopes with self-toning characteristics, is presented. Since the laterally driven two degrees of freedom (2DOF) resonator was designed as a symmetric structure with identical stiffness in two orthogonal axes, the resonator is applicable to vibrating microgyroscopes, which do not need mode tuning. A dynamic model of the resonator was derived considering gyroscopic application. The dynamic model was evaluated by experimental comparison with fabricated resonators. The microgyroscopes were fabricated using a simple 2-mask-process of a single polysilicon layer deposited on an insulator layer. The feasibility of the resonator as a vibrating microgyroscopes with self-tuning capability is discussed. The fabricated resonators of a particular design have process-induced non-uniformities that cause different resonant frequencies. For several resonators, the standard deviations of the driving and sensing frequencies were as high as 1232Hz and 1214Hz, whereas the experimental average detuning frequency was 91.75Hz. The minimum detuned frequency was 68Hz with $0.034mVsec/^{\circ}$ sensitivity. The sensitivity of the microgyroscopes was low due to process-induced non-uniformity; the angular rate bandwidth, however, was wide. This resonator could be successfully applicable to a vibrating microgyroscopes with high sensitivity, if improvements in uniformity of the fabrication process are achieved. Further developments in improved integrated circuits are expected to lower the noise level even more.

• Journal of KSNVE
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• v.11 no.1
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• pp.132-140
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• 2001

The vibratory gyroscope can effectively measure the angular velocity as the oscillating and position-sensing mode are exactly tuned. The veering Phenomenon impedes the exact tuning, which is caused by the mode coupling of two modes. In this paper, the gyroscope's structure with two frames is introduced to minimize the veering phenomenon that destabilizes the tuning process of oscillating and position-sensing mode. Experimental results show that the Proposed structure can achieve the mode intersection without veering phenomenon.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2022-2024
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• 2003

본 논문에서는 진동형 마이크로 자이로스코프를 위한 폐루프 제어기를 설계하였으며 실험을 통하여 설계된 제어기의 성능을 검증하였다. 일반적으로 진동형 자이로스코프를 동작시키기 위해서는 구동축과 검출축의 공진 모드가 일치되도륵 설계를 하며 높은 감도를 얻기 위해서는 이 두 모드의 Q값이 클수록 유리하다. 하지만 이러한 개루프 상에서 동작 하에서는 대역폭과 선형성 등의 성능에 제약을 가져오게 되며 이를 개선하기 위해 폐루프 제어기가 필요하다. 본 논문에서는 진공도에 따른 Q값의 변화와 이에 따른 제어기의 성능을 분석하였으며 실험 결과로부터 설계된 제어기가 만족할만한 성능의 개선을 가져옴을 확인하였다.

• Journal of the KSME
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• v.41 no.12
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• pp.60-65
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• 2001

• Journal of KSNVE
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• v.11 no.6
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• pp.675-683
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• 2001

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.8 s.227
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• pp.1065-1074
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• 2004

A robust optimal design considering fabrication influence has been performed for the decoupled vibratory microgyroscope fabricated by the bulk micromachining. For the analysis of the gyroscope, a design tool has been developed, by which user can perform the system level design considering electric signal process and the fabrication influence as well as mechanical characteristics. An initial design of the gyroscope is performed satisfying the performances of scale factor (or sensitivity) and phase delay, which depend on the frequency difference between driving and sensing resonant frequencies. The objective functions are formulated in order to reduce the variances of the frequency difference and the frequency in itself by fabrication error. To certify the results, the standard deviations are calculated through the Monte Caries Simulation (MCS) and compared initial deviation that is measured fabricated gyroscope chip.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.4
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• pp.149-154
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• 2008

The concept of robust design was introduced by Dr. G. Taguchi in the late 1940s, and his technique has become commonly known as the Taguchi method or the robust design. In this research, a robust design procedure for microgyroscope is suggested based on the kriging and optimization approaches. The kriging interpolation method is introduced to obtain the surrogate approximation model of true function. Robustness is calculated by the kriging model to reduce real function calculations. For this, objective function is represented by the probability of success, thus facilitating robust optimization. The statistics such as mean and variance are obtained based on the reliable kriging model and the second-order statistical approximation method.

• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.187-196
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• 2005

MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.119-123
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• 2009

Recently, a MEMS gyroscope has been broadly fabricated and used due to development of a micromachining. However, there is a difference between the modeling design and the actual product and this difference can lead to the performance variation of a MEMS gyroscope. A classical design method does not exactly estimate the performance of a MEMS gyroscope. Therefore a design process considering the design variable uncertainty has to be employed to design MEMS gyroscope model. In this paper, the equation of motion of a MEMS gyroscope model is obtained to analyze the performance of a MEMS gyroscope and the effects of the design variables on the MEMS gyroscope performance are investigated. Finally the performance of MEMS gyroscope is estimated through a statistical analysis based on sample statistics.