마이크로 자이로스코프의 응용 및 진동현상

References

1. Proceeding of MEMS'93 A Micromachined Comb Drive Tuning Fork Gyroscope Bernstein, J.(et al.)
2. Proceedings of MEMS'95 A Micromachined Vibrating Gyroscope Tanaka, K.(et al.)
3. Sensors and Actuators v.A64 Laterally Oscillated and Force-Balanced Micro Vibratory Rate Gyroscope Supported by Fish-Hook-Shaped Springs Park, K. Y.;Lee, C. W.;Oh, Y. S.;Cho, Y. H.
4. Technical Digest of the 16th Sensor Symposium Vibratory Rate Gyroscope with Lateral Movement for Driving and Sensing using SOI Substrate Kawai, H.;Shibano, T.;Moriya, K.;Kobayashi, S.;Ohwada, K.
5. Transducer 99 Sliicon Angular Rate Sensor for Automotive Applications with Piezoelectric Readout Sassen, S.;Voss, R.(et al.)
6. Transducer 99 Micromachined LIGA-Gyroscope Shumacher, K.;Kromer, O.(et al.)
7. Transducer 99 Vacuum Sealed Silicon Bulk Micromachined Gyroscope Fujita, T.;Hatano, K.(et al.)
8. New ULTRA cordless optical mouse
9. Micro Air Vehicles - Toward a New Dimension in Flight
10. Transducer 99 A Fabrication Method for Low Pressure Package with Glass-Silicon-Glass Structure and Its Stability Hara, T.;Kobayashi, S.(et al.)
11. 한국소음진동공학회지 v.11 no.1 수평형 마이크로 자이로스코프의 비어링현상 및 동특성 정호섭;박규연