MEMS/MST 고속 회전체 요소의 안전성에 관한 연구

  • Published : 2001.12.01

Abstract

Keywords

References

  1. Sixth International Micromachine Symposium Power-croelectromechanical Systems(Power MEMS) Tanaka, S.
  2. Ph. D. Thesis, Dept. of Aeronautics and Astronautics, Massachusetts Institute of Techonology Macro-Scale Investigation of High Speed Gas Bearings for MEMS Devices Orr, D. J.
  3. Journal of Tribology v.121 Pseudospectral Orbit Simulation of Nonideal Gas-Lubricated Journal Bearing for Microfabricated Turbomachines Piekos, E. S.;Breuer, K. S.
  4. 17th Sensor Symposium Air turbinedriven Micro-polarization Modulator for Fourier Transform Infrared Spectroscopy Tanaka(et al.)
  5. Journal of Fluids Eng. v.120 Combustors for Micro Gas Turbine Engines Ian A.;waitz;Guatam Guaba;Yang-Sheng Tzeng
  6. STLE Tribology Transactions v.44 no.4 Analysis of Gas-lubricated Bearings for Micro Gas Turbine with Coupled Boundary Effects Lee, Y. B.;Kwak, H. D.;Kim, C. H.;Jang, G. H.
  7. 대한기계학회 2001년도 열 및 유체공학부문 추계학술대회 논문집 MEMS- based 마이크로 파워시스템 개발 김세준;민홍석;박건중;방정환;전병선;민경덕;송성진;주영창
  8. Journal of Micromech. Microeng. v.7 Flow and Load Characteristics of Microbearings with Slip Gad-el-Hak