• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.43-44
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• 2008

실리콘 웨이퍼 위에 마이크로웨이브 플라즈마 화학증착법으로 나노결정질 다이아몬드 박막을 형성하고 그 위에 RF 마그네트론 스퍼터로 ZnO 박막을 적층한 후 SAW(Surface Acoustic Wave) 필터를 제작하여 평가하였다. 기판온도, 작업압력, Ar/$CH_4$ 비율을 변화시켜 최적공정 조건에서 30nm 수준의 결정립을 갖는 $4{\mu}m$ 두께의 다이아몬드 박막을 얻었고, RF 인가전력, 기판온도, Ar/$O_2$ 비율을 조정하여 결정성이 우수하고, 표면 거칠기가 좋으며, 높은 비저항을 갖는 $2.2{\mu}m$ 두께의 ZnO 박막을 얻었다. 박막의 특성은 FESEM과 XRD로 평가하였다. Lift-off 식각공정을 이용하여 일정한 선폭과 간격(Line/Space : 1.5/$1.5{\mu}m$)을 갖는 구리 전극 패턴을 형성하였다. Network Analyzer를 이용하여 측정한 SAW 필터의 중심주파수는 1.67GHz이었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.287-287
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• 2010

휴대용 기기의 사용이 증가하면서 배터리의 고용량화와 소형화가 요구되고 있다. 특히 내시경 캡슐과 같은 의료용 센서 기기에서는 소형화가 매우 중요하며 인체에 해로운 액체전해질이 들어가지 않는 것이 바람직하다. 최근 무선센서, RFID 태그, 스마트 카드 등을 위하여 고체전해질을 사용하는 박막 마이크로 배터리가 개발되고 있으나, 에너지 저장용량이 작아 응용분야가 제한적이다. Si wafer 위에 형성된 고단차의 3차원 구조 위에 박막 배터리를 형성한다면 표면적 증가에 의해 에너지 저장용량 역시 크게 증가할 것이며, Si 기반의 반도체, 디스플레이, 태양전지 등과 쉽게 집적이 가능할 것이다. 본 연구에서는 펄스 레이저 증착법(Pulsed Laser Deposition)으로 리튬 배터리의 cathode 물질인 $LiCoO_2$를 박막으로 제조하고 그 특성을 연구하였다. 펄스 레이저 증착법은 저온 증착이 가능하고 타겟 물질과 같은 조성의 박막을 증착하는 것이 용이한 장점이 있다. Pt, TiN 등의 기판 위에 $LiCoO_2$ 박막을 증착하고 증착 온도와 산소($O_2$) 분압이 박막의 조성, 미세구조, 결정성, 그리고 전하저장용량에 미치는 영향을 고찰하였다.

• Korean Chemical Engineering Research
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• v.50 no.4
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• pp.621-626
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• 2012

In this study, the composite coating materials with improved thermal insulation property were prepared by incorporating the hollow micro-spheres with high heat transfer resistance. The UV curable resin system consisting of hexa aliphatic urethane acrylate (UP118), trimethylolpropane triacrylate (TMPTA), 1,6-hexanediol diacrylate (HDDA), and photoinitiator (Irgacure184) was employed as an organic binder. The glass substrates were coated by the prepared composites via bar coating method and cured under UV radiation. The optical transparency, thermal insulation property, adhesion, and surface hardness of the glass coated with composites containing different type of micro-spheres were investigated. The incorporation of micro-spheres with only 20 vol% of content resulted in remarkable improvement in the thermal insulation property of the coated glass. In addition, the transparent coated glass with light transmittance of about 80% could be obtained when silica micro-sphere (SP) was used as a thermal barrier.

• Journal of the Korea Institute of Building Construction
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• v.15 no.6
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• pp.579-587
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• 2015

In this paper, microencapsulated healing agent was embedded in the polymer matrix to obtain self healing properties. Microencapsulation of methacrylate using polyurea-formaldehyde as a shell material and studied the effect of agitation rate on capsule characteristics such as size, shell thickness, and surface morphology. The formation of microcapsules was confirmed by FTIR and TGA, and capsule characteristics were studied by optical microscopy and SEM. The self-healing effect was evaluated using permeability measurements and further confirmed by surface analytical tools including optical microscope. According to the experimental results, the microencapsulated healing system has the self-heaing ability for artificial cracks.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.2
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• pp.91-96
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• 2016

In this study, effects of demolding temperature (DT) on the formability and optical properties were evaluated in order to optimize thermal nanoimprint lithography for anti-reflective film. Characterization on optical property showed that optical performance was gradually enhanced as the DT increased up to $70^{\circ}C$ while the transmittance and the reflectance was degraded as the DT increased further to $100^{\circ}C$. In addition, similar behavior was observed from formability analysis. It was contributed to the formation of free volume and viscose flow. Therefore, it was concluded that the formability and optical property are highly influenced by the formation of free volume and viscous flow of polymer depending on the DT.

• Journal of the Microelectronics and Packaging Society
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• v.6 no.3
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• pp.25-35
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• 1999

LTCC (Low Temperature Cofired Ceramic) or LTCC-M (Low Temperature Cofired ceramic on Metal) technology is one of MCM-C (Multichip Module on Ceramic) technologies and becomes to be widely used in consumer, RF and automotive electronics. As green sheets for LTCC are cofired below $1000^{\circ}C$ in comparison with those for HTCC (High Temperature Cofired Ceramic), high conductivity metal traces such as gold, silver and copper can be used. The dimensional stability in LTCC-M technology enables embedded passives to be integrated inside modules, which enhances the electrical performance and increases the reliability of the modules. Coefficient of thermal expansion and dielectric constant can be controlled by changing composition and heating profile for cofiring. In this technical review, LTCC and LTCC-M technologies are introduced and advantages of those technologies are explained.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.338-338
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• 2012

사파이어 ($Al_2O_3$)는 높은 밴드갭 에너지 (~19.5 eV)를 가진 물질로서 우수한 내마모성, 강도, 전기 절연성 및 안정한 화학적 특성을 갖고 발광다이오드 기판, 보석재료 등 각종 산업 및 기술적 분야에서 널리 사용되고 있다. 특히, 플립칩 발광다이오드 구조의 경우 광추출효율을 향상시키기 위해 높은 투과도를 갖는 사파이어 기판이 요구되어 왔으며, 지금까지 건식/습식식각방법을 이용한 사파이어 표면에 마이크로 크기의 심한 거칠기 또는 요철이 형성된 나노크기의 격자구조를 형성시키는 연구가 진행되어 오고 있다. 그 중, 나노 크기의 격자구조는 공기에서 반도체 기판까지 선형적인 유효굴절률 분포를 갖기 때문에 표면에서 생기는 Fresnel 반사 손실을 줄일 수 있다. 이러한 구조를 형성하기 위해서는 식각 마스크가 필요한데, 형성 방법으로 레이저 간섭 리소그래피, 전자빔 리소그래피, 나노임프린트 리소그래피 등이 있으나, 비싼 가격과 복잡한 공정 절차 등의 단점을 지니고 있다. 따라서 본 연구에서는 식각 마스크 패턴을 위해, 보다 저렴하고 간단한 실리카 나노구 및 열적응집 금 나노 입자를 이용하였다. 양면 폴리싱 c-plane 사파이어 기판을 사용하였고, 단일 층의 주기적인 실리카 나노구를 기판 표면에 스핀코팅에 의해 도포한 후 유도결합플라즈마 식각 장비를 이용하여 식각하여 주기적인 패턴을 갖는 렌즈모양의 격자구조를 형성하였다. 그리고 주기적으로 형성된 격자 위에 열 증착기를 이용하여 금 박막을 증착한 후 급속열적어닐닝(rapid thermal annealing)을 이용하여 열처리함으로써 비주기적인 금 나노입자를 형성시켰다. 형성된 금 나노패턴을 이용하여 동일한 조건으로 식각함으로써 광대역 및 전방향성 높은 투과도를 갖는 원뿔 모양의 사파이어 나노구조를 제작하였다. 제작된 샘플의 패턴 및 식각 형상은 전자현미경을 사용하여 관찰하였으며, UV-vis-NIR 분광광도계 (spectrophotometer)를 사용하여 투과율을 측정하였다. 렌즈 모양 표면 위에 원뿔모양의 나노구조를 갖는 사파이어 기판은 일반적인 사파이어 기판보다 향상된 투과율 특성을 보였다.

• Journal of the Mineralogical Society of Korea
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• v.27 no.2
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• pp.73-83
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• 2014

In order to investigate selective phase transformations and to determine the maximum Au leaching factors from microwave treated Au-bearing complex sulfides, a microscope, SEM-EDS analysis, and thiocyanate leaching tests were performed. When the Au-bearing complex sulfides were exposed to microwave heating, increasing the microwave exposure time increased temperature and decreased weight. Arsenopyrite was first selectively transformed to hematite, which formed a concentric rim structure. In this hematite, oxygen and carbon was detected and always showed high iron content and low arsenic content due to arcing and oxidation from microwave heating. The results of the leaching test using microwave treated sample showed that the maximum Au leaching parameters was reached with 0.5 g concentration thiocyanate, 2.0 M hydrochloric acid, 0.3 M copper sulfate and leaching temperature at$60^{\circ}C$. Under the maximum Au leaching conditions, 59% to 96.69% of Au was leached from the microwave treated samples, whereas only 24.53% to 92% of the Au was leached from the untreated samples.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.3
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• pp.17-24
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• 2021

Perovskite solar cells (PSCs) can be fabricated through solution process economically with variable bandgap that is controlled by composition of precursor solution. Tandem cells in which PSCs combined with silicon solar cells have potential to reach high power conversion efficiency over 30%, however, lack of long-term stability of PSCs is an obstacle to commercialization. Degradation of PSCs is mainly attributed to the mass transport of halide and metal electrode materials. In order to ensure the long-term stability, the mass transport should be inhibited. In this study, we confirmed degradation behaviors due to the mass transport in PSCs and designed buffer layers with LiF and/or SnO₂ to improve the long-term stability by suppressing the mass transport. Under high-temperature storage test at 85℃, PSCs without the buffer layers were degraded by forming PbI₂, AgI, and the delta phase of the perovskite material, while PSCs with the buffer layers showed improved stability with keeping the original phase of the perovskite. When the LiF buffer and encapsulation were applied to PSCs, superior long-term stability on 85℃-85% RH dump heat test was achieved; efficiency drop was not observed after 200 h. It was also confirmed that 90.6% of the initial efficiency was maintained after 200 hours of maximum power tracking test under AM 1.5G-1SUN illumination. Here, we have demonstrated that the buffer layer is essential to achieve long-term stability of PSCs.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.18 no.3 s.118
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• pp.323-333
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• 2007

In this paper, a new MDAS-DR antenna structure designed to efficiently shape a flat-topped radiation pattern is proposed. The antenna structure is composed of a stacked micro-strip patch exciter and a multi-layered disk array structure(MDAS) surrounded by a dielectric ring. The MDAS, which was supplied by a stacked microstrip patch exciter with radiating power, can form a flat-topped radiation pattern in a far field by a mutual interaction with the surrounding dielectric ring. Therefore, the design parameters of the dielectric ring and the MDAS structure are important design parameters for shaping a flat-topped radiation pattern. The proposed antenna used twelve multi-layered disk array elements and a Teflon material with a dielectric constant of 2.05. An antenna operated at 10 GHz$(9.6\sim10.4\;GHz)$ was designed in order to verify the effectiveness of the proposed antenna structure. The commercial simulator of CST Microwave $Studio^{TM}$, which was adapted to a 3-D antenna structure analysis, was used for the simulation. The antenna breadboard was also fabricated and its electrical performance was measured in an anechoic antenna chamber. The measured results of the antenna breadboard with a flat-topped radiation pattern were found to be in good agreement with the simulated one. The MDAS-DR antenna gain measured at 10 GHz was 11.18 dBi, and the MDAS-DR antenna was capable of shaping a good flat-topped radiation pattern with a beam-width of about $40^{\circ}$, at least within a fractional bandwidth of 8.0 %.