참고문헌
- A. R. Parker and H. E. Townley, "Biomimetics of photonic nanostructures"", Nature nanotechnology 2(6), 347 (2007). https://doi.org/10.1038/nnano.2007.152
- S. H. Kim, S. U. Cho, Y. S. Kim and M. Y. Jeong, "Fabrication of Multi-height Nanostructures for High Antireflection and Superhydrophobicity", Journal of the Korean Society for Precision Engineering, 349 (2011).
- B. J. Bae, S. H. Hong, S. U. Kwak and H. Lee, "Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint Lithography and PVA Template", Journal of the Korean institute of surface engineering 42(2), 59 (2009). https://doi.org/10.5695/JKISE.2009.42.2.059
- S. R. Kennedy and M. J. Brett, "Porous broadband antireflection coating by glancing angle deposition", Applied optics, 42(22), 4573 (2003). https://doi.org/10.1364/AO.42.004573
- D. G. Choi, K. J. Lee, J. H. Jeong, K. D. Kim, J. H. Choi, J. H. Lee, A. Ali and E. S. Lee, "Fabrication of Synthetic Moth-Eye Anti-Reflection Structure Using Nanoimprint", Journal of The Korean Society of Mechanical Engineers spring conference, 13-17 (2008).
- M. H. Kwon and H. Lee, "Fabrication of Functional ZnO Nano-particles Dispersion Resin Pattern Through Thermal Imprinting Process", Journal of the Korean Society for Precision Engineering, 28(12), 1419 (2011).
- K. H. Moon, S. B. Shin, I. S. Park, H. Lee, H. S. Cha and J. H. Ahn, "UV-nanoimprint Patterning Without Residual Layers Using UV-blocking Metal Layer", J. Microelectron. Packag. Soc., 12(4), 275 (2005).
- Y. Hirai, M. Fujiwara, T. Okuno, Y. Tanaka, M. Endo, S. Irie, K. Nakagawa and M. Sasago, "Study of the resist deformation in nanoimprint lithography", Journal of Vacuum Science & Technology B, 19(6), 2811 (2001). https://doi.org/10.1116/1.1415510
- B. H. Kim, K. S. Kim, J. H. Ban, J. K. Shin and H. Y. Kim, "Micro/Nano Rheological Characteristics of PMMA in Hot Embossing Process", Journal of the Korean Society for Technology of Plasticity, 259 (2004).
- C. Gourgon, C. Perret, G. Micouin, F. Lazzarino, J. H. Tortai, O. Joubert and J. P. E. Grolier, "Influence of pattern density in nanoimprint lithography", Journal of Vacuum Science & Technology B, 21(1), 98 (2003). https://doi.org/10.1116/1.1532735
- S. A. Boden and D. M. Bagnall, "Tunable reflection minima of nanostructured antireflective surfaces", Applied Physics Letters, 93(13), 133108 (2008). https://doi.org/10.1063/1.2993231
- H. Schulz, M. Wissen and H.-C. Scheer, "Local mass transport and its effect on global pattern replication during hot embossing", Microelectronic engineering, 67, 657 (2003).
- W. K. Cho, S. U. Cho, D. I. Kim, D. U. Kim and M. Y. Jeong, "Effects of Static Contact Angle and Roughness on Rolling Resistance of Droplet", J. Microelectron. Packag. Soc., 23(1), 23 (2016). https://doi.org/10.6117/kmeps.2016.23.1.023
- H. S. Park, H. H. Shin, S. W. Seo, M. Y. Sung, W. B. Choi, S. W. Choi and S. Y. Park, "Novel Process to Improve Defect Problems for Thermal Nanoimprint Lithography", IEEE Transactions on Semiconductor Manufacturing, 20(1), 13 (2007). https://doi.org/10.1109/TSM.2006.890315
- S. G. Park, Z. Song, L. Brumfield, A. Amirsadeghi and J. J. Lee, "Demolding temperature in thermal nanoimprint lithography", Applied Physics A, 97(2), 395 (2009). https://doi.org/10.1007/s00339-009-5224-0
- T. Leveder, S. Landisa, L. Davoustb and N. Chaixc, "Optimization of demolding temperature for throughput improvement of nanoimprint lithography", Microelectronic Engineering, 84(5), 953 (2007). https://doi.org/10.1016/j.mee.2007.01.066
- H. K. Raut, V. A. Ganesh, A. S. Nair and S. Ramakrishna, "Anti-reflective coatings: A critical, in-depth review", Energy Environ. Sci., 4(10), 3779 (2011). https://doi.org/10.1039/c1ee01297e
- N. Yamada, O. N. Kim, T. Tokimitsu, Y. Nakai and H. Masuda, "Optimization of anti-reflection moth-eye structures for use in crystalline silicon solar cells", Progress in Photovoltaics: Research and Applications, 19(2), 134 (2011). https://doi.org/10.1002/pip.994
피인용 문헌
- 고분자 나노 표면의 내스크래치 특성 향상 연구 vol.24, pp.3, 2017, https://doi.org/10.6117/kmeps.2017.24.3.041
- 광 증폭용 플라즈모닉 나노구조 제작을 위한 은 나노입자 증착 연구 vol.25, pp.1, 2018, https://doi.org/10.6117/kmeps.2018.25.1.011