• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.133.2-133.2
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• 2016

차세대 디스플레이로 유연하고 투명한 기능들이 요구되면서 Indium Tin Oxide(ITO)를 대체하기 위한 투명전극 개발 연구가 많이 수행되고 있다. ITO는 높은 투과도와 낮은 저항으로 현재 가장 많이 활용되고 있는 투명전극 소재이지만 유연성이 떨어져 유연 터치 패널 소재로 활용하기 어렵다. 이러한 문제 해결을 위해 ITO 대체 물질로 CNT, Graphene, Metal mesh, Ag nano wire, 전도성 고분자 등의 차세대 투명 전극 소재가 대두되고 있다. 본 연구에서는 메탈 메쉬 전극 소재로 사용하기 위해 Cu 박막 증착 시 플라즈마 표면처리를 통해 밀착력 및 저항을 개선하였다. Cu 금속 박막의 양산화를 위한 공정으로 자체 제작한 Linear Ion Source(LIS)가 부착된 roll to roll 시스템을 적용하여 플라즈마 전처리 공정 및 Ni buffer layer 도입 이후 Cu 박막을 형성하였다. 그 결과 PET 기판과 Cu 박막 사이의 밀착력을 0 degree에서 5 degree까지 향상시킬 수 있었고, 플라즈마 표면처리를 시행함으로써 저항 또한 감소되는 결과를 얻을 수 있었다. 본 연구를 통해서 폴리머 기판 소재에 in-situ로 표면처리 및 Cu 금속 박막을 증착함으로써 금속 박막의 밀착력 및 전기적 특성이 향상되는 공정 기술을 개발하였다.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.8
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• pp.653-658
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• 2014

Roll-to-Roll printing process has become a great issue as a breakthrough for low cost and mass production of electronic devices such as organic thin film transistor, and etc. To print the electronic devices, multi-layer printing is essential, and high precision register control is required for this process. Unlike stop-and-repeat printing process, it is impossible to control the register in a static state since the roll-to-roll process is a continuous system. Therefore, the behavior of web such as polyethylene terephthalate (PET) and polyimide (PI) by the tensile and thermal stress generated in the roll-to-roll process as well as motor control of driven rolls has to be considered for a high precision register control. In this study, the correlation between curing temperature and thermal deformation of PET web is analyzed. Finally, it is verified experimentally that the temperature disturbance generates the more serious register error under the higher curing temperature.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.5
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• pp.16-22
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• 2013

A two-dimensional photonic crystal structure was investigated using a roll-to-roll nanoreplication and physical vapor deposition processes for the inexpensive enhanced fluorescence substrate which is not sensitive to the polarization directions of excitation light source. An 8 inch silicon master having nano dot array with a diameter of 200 nm, a height of 100 nm and a pitch of 400 nm was prepared by KrF laser scanning lithography and reactive ion etching processes. A flexible polymer mold was fabricated by flat type UV replication process and a deposition of 10 nm nickel layer as an anti-adhesion layer. A roll mold was prepared by warping the flexible polymer mold on an aluminum roll base and a roll-to-roll UV replication process was carried out using the roll mold. After the deposition of ~ 100 nm $TiO_2$ layer on the replicated nano dot array, a 2 dimensional photonic crystal structure was realized with a resonance wavelength of 635 nm for both p- and s-polarized light sources.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.5
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• pp.23-29
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• 2013

Recent advances in printing technology have increased the productivity of the roll-to-roll (R2R) printing process for printed circuitry. In the R2R printed electronics, characteristics of printed and coated layers are one of the most important issues that determine the functional quality of final products. The slot-die technology can coat a large area with high uniformity using low-viscosity materials; determining the process parameters is important to obtain excellent coating qualities. In this study, a viscocapillary model was used to predict qualities of coated layers and patterns. On the basis of analysis results, a novel meta model was derived using design of experiment methodology to improve accuracy. Sensitivity analysis was performed to define major parameters in R2R slot-die coating process. The coating speed was found to most significantly affect the coated layer thickness and was easily controlled. The performance of the proposed model is verified through experimental studies. Based on the statistical analysis results, R2R slot die process can be optimized to guarantee a desired thickness.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.95-103
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• 2010

Roll to Roll (R2R) is one of the most promising production technologies in the printed electronics such as OLEDs, e-paper, backplanes, RFID because this technology can save production cost and increase production speed. Printed electronics includes various processes such as printing, drying, winding, unwinding, and so on. In printed electronics R2R system, air-flotation oven is employed for drying process. Therefore, it is essential to introduce efficient and fast drying process when printing is finished. This paper considers the analysis of drying process in R2R that involves hot air flow. Air-flotation oven consists of non-contact supports and drying of coated web materials such as plastic films and paper. In this paper, experimental results and numerical analysis of pressure-pad air bar are investigated. The aerodynamic characteristics of pressure-pad air bar are numerically calculated using computational fluid dynamics (CFD) approach. Then the measured values of the aerodynamic forces for air bars are compared with those of CFD analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.244.1-244.1
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• 2014

디스플레이 패널의 터치 스크린에 가장 널리 사용되는 ITO 전극은 사용자의 눈에 전극 면이 시각적으로 구분되지 않도록 해야 한다. 따라서 최근에는 ITO 전극 면이 구분되지 않도록 하기 위해 다층 박막으로 이루어진 인덱스 매칭(index matching, IM) 기술을 이용하여 ITO 전극 필름을 제작하고 있다. 이러한 인덱스 매칭된 ITO 필름은 기판이나 공정 조건, 인덱스 매칭 층의 물질 종류에 따라 ITO 박막의 전기적 광학적 특성이 각각 다르게 나타나기 때문에 이에 대한 많은 연구가 이루어지고 있다. 본 연구에서는 롤투롤 스퍼터링(roll to roll sputtering) 방법으로 고굴절과 저굴절이 순차적으로 코팅 처리된 PET 기판 위에 ITO 박막을 증착하여 IM-ITO 필름을 제작하고 전기적 광학적 특성을 관찰하였다. 이를 위해 습식(wet) 코팅 방법으로 저굴절층과 고굴절층을 PET 필름 위에 코팅하여 IM층을 제작한 PET 필름 위에 ITO 박막을 증착하고, $150^{\circ}C$로 후 열처리를 하여 인덱스 매칭된 ITO 필름을 제작하였다. 제작된 필름은 GIXD를 이용하여 박막의 구조와 결정성을 조사하였고, 면저항 측정기와 홀측정 장치를 이용하여 전기적 특성을 관찰하였다. 그리고 분광광도계와 탁도(haze) 측정기를 이용하여 광학적 특성을 조사하였다. 본 연구를 통해 롤투롤 스퍼터링 방법으로 유무기 복합막으로 구성된 IM-ITO 박막의 전기적 광학적 구조적 특성에 대해 보고하고자 한다.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.159-166
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• 2015

Slot-die coating is well known technique to guarantee a uniformly coated layer and is compatible with roll-to-roll process. In actual roll-to-roll slot-die coating process, the lateral difference of coated layer thickness is observed. An experimental study was performed to improve the coating quality. Coating speed and coating gap were selected as the experimental factors. A full factorial, statistical method was conducted to optimize the process conditions. Based on the results of repeated experiment, the lowest deviation of lateral thickness (700 nm, <10%) was achieved at 10 m/min coating speed and $300{\mu}m$ coating gap. This result has significance because such optimized process guideline can be utilized with all process improvement in various coating applications.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.5
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• pp.191-195
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• 2023

Three-layer nano-coated films in applications for the back cover of mobile cellular phones were prepared utilizing a roll-to-roll continuous process. By introducing a coating layer with a ceramic/metal/ceramic three-layer structure, the inherent reflective properties of the metals were maintained while electrically insulating properties were maintained. The thickness of the composite coating layer on a large area PET film with a length of 1,500 nm and width of 500 nm was less than 60 nm, and a uniform thickness was maintained in all areas. The transmittance according to the wavelength range (240~1600 nm) of the nanocoating film gradually increases as the wavelength increases, and is about 48 % at 1,000 nm, which is within the infrared region, and about 35.5 % at 550 nm, which is within the visible region. These results meet the required level of coated backcover (< 40 %).

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.3
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• pp.51-58
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• 2018

In this paper, the organic material Poly(methyl methacrylate) PMMA is used with inorganic $Al_2O_3$ to fabricate organic-inorganic multilayer barrier thin films. The organic thin films are developed using a roll-to-roll electrohydrodynamic atomization system, whereas the inorganic are grown using a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system. For the first time, these two technologies are used together to develop organic-inorganic multilayer barrier thin films in atmospheric condition. The films are grown under optimized parameters and classified into three classes based on the layer structures, when the total thickness of the barrier is maintained at ~ 160 nm. All classes of barriers show good morphological, optical and chemical properties. The $Al_2O_3$ films with a low average arithmetic roughness of 1.58 nm conceal the non-uniformity and irregularities in PMMA thin films with a roughness of 5.20 nm. All classes of barriers show a notably good optical transmission of ~ 85 %. The hybrid organic-inorganic barriers show water vapor and oxygen permeation in the range of ${\sim}3.2{\times}10^{-2}g/m^2/day$ and $0.015cc/m^2/day$ at $23^{\circ}C$ and 100% relative humidity. It has been confirmed that it can be mass-produced and used as a low-cost barrier thin film in various printing electronic devices.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.29 no.3
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• pp.123-131
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• 2019

In this study, the development of transparent UV blocking material using $TiO_{2-x}$ oxide thin film process was developed. A process technology is related to a process technology for making a sample with ultraviolet-shielding property of visible light transmittance of 78 % or more (total light transmittance at 550 nm) and of a UV cut-off characteristic of more than 95 % at 315 nm in ultraviolet wavelength band. In this study, it is possible to establish a flexible device process condition of high performance ultraviolet (UV) shielding thin film, to design mixed type of transparent flexible device with heterogeneous characteristics and to formulate composite deposition technology, according to various market demands. Establishment of actual roll-to-roll continuous process and equipment and process technology will affect related industries greatly.