• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.23-29
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• 2002

The soldering is widely used installing the electronic element on circuit board in the common electronic device. Since the flux which improves the liquidity of solder make the electronic and chemical performance worse, the circuit board need to wash clearly. At present however no-washing is required for the cost reduction, the chemical stability, and the protection of environment. In this research, the solder liquidity depending on the power density and the pulse width is comparatively analyzed by the diffusion area method for achieving the no-flux soldering.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2003.11a
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• pp.256-259
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• 2003

To develop cleaning process various particles should be deposited on wafer surfaces to measure particle removal efficiencies. The purpose of the article in to evaluate, removal efficient)r of silica and alumina particles from wafer surfaces when they are deposited by dry and wet method. Dry deposition in air and wet spray deposition using solutions are used. van der Waals are considered to calculate the adhesion force of particles on surfaces. Higher adhesion force is measured on alumina particles on silicon when particles are deposited in air.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1280-1282
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• 1997

The oxynitride films were photo-chemically deposited by ArF(wave length: 193nm) excimer laser CVD used to excite and dissociate gas phases $Si_2H_6$, $N_2O$, and $NH_3$ molecules. We obtained various electrical properties when we varied wafer cleaning procedures consisted of a conventional RCA and a two-dip step[4]. The results show the films have low leakage currents and good TZDB properties. We also analyzed the composition of the oxynitride films which have homogeneous composition throughout the film.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.643-651
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• 2013

This study applied a laser cleaning method (dry cleaning) that is used for cleaning semiconductor elements to dental implant cleaning. The lasers used in this study were pulsed fiber lasers with wavelengths of 1,064 and 532 nm. The peak output, energy per pulse, energy density per pulse, time of pulse experiment, and number of pulse experiments served as process variables for this study, and the variables were changed for each experiment. As a result, a laser with a wavelength of 532 nm showed much higher cleaning efficiency than its 1,064 nm counterpart. As the wavelength range decreased, the quantized energy increased and the reflection rate of the titanium used for the implant decreased; consequently, the energy absorption rate increased. Therefore, it is proposed that the energy density by wavelength has a greater influence on cleaning than does the output size.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.412-412
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• 2010

플라즈마는 미세 전기 소자 제작에 있어 박막의 증착, 식각, 세정등 여러 가지 공정에서 널리 사용되고 있다. 미세 소자의 선폭의 감소와 높은 생산성을 위한 웨이퍼 면적의 대형화가 진행됨에 따라 플라즈마의 균일도는 공정 수율 향상의 관점에서 중요한 요소로 그것의 계측과 공정 중 실시간 감시에 필요성이 부각되고 있다. 플라즈마에 존재하는 라디칼의 밀도, 이온의 밀도, 전자 온도 등의 웨이퍼 상에서의 공간 분포와 공정 결과물과의 상관관계에 대한 연구는 현재까지 다양하게 진행 되었으며 특히, 라디칼의 공간 분포가 공정 결과물의 균일도와 큰 상관 관계가 있는 것으로 알려져 있다. 라디칼의 농도 분포를 계측은 레이저 유도 형광법, 발광 분광법, 흡수 분광법 등을 통하여 이루어져 왔으며, 특히 발광 분광법의 경우 계측의 민감성, 편의성등을 이유로 가장 널리 사용되고 있다. 그러나 현재 까지 진행된 발광 분광법을 이용한 라디칼의 공간 분포 계측은 그 자체로 공간 분포를 계측하는 것이 아닌 플라즈마 밀도의 축 대칭성을 가정하여 Abel inversion을 적용하거나, 광섬유를 플라즈마에 직접 삽입하는 방식을 사용하기 때문에 실제 반도체 제작공정을 비롯한 미세소자 공정 플라즈마의 라디칼 밀도 분포를 실시간, 비 접촉 방식으로 계측 하는데 한계가 있다. 본 연구에서는 반도체 공정 플라즈마의 밀도 균일성 분석을 위한 공간 분해 발광 분광기를 제안한다. 기존의 발광 분광법과 비교하여 공간 분해능 향상을 위하여 직렬로 설치된 다수의 렌즈, 개구, 그리고 핀홀을 이용하였다. 공간 분해 발광 분광기의 공간 분해능을 계산하였으며, 실험을 통하여 검증 하였다. 또, HDP CVD를 이용한 $SiO_2$ 박막 증착 공정에서 산소 라디칼의 농도와 증착된 박막의 두께 분포의 상관 관계를 계측 함으로써 공간 분해 발광 분광기의 플라즈마 공정 적용 가능성 입증 하였다.

• Economic and Environmental Geology
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• v.56 no.6
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• pp.715-728
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• 2023

Tracksite of pterosaurs, birds, and dinosaurs in Chungmugong-dong in Jinju was designated as a natural monument in 2011 and is known as the world's largest in terms of the number and density of pterosaur footprints. This site has been managed by installing protection buildings to conserve in 2018. About 17% of the footprints of pterosaur, theropod, and ornithopod in this site under management in the 2nd protection building are of great academic value, but observation of footprints has difficulties due to continuous physical and chemical damage. In particular, the accumulation of milk-white contaminants is formed by the gypsum and air pollutant complex. Gypsum remains evaporated with a plate or columnar shape in the process of water circulation around the 2nd protection building, and the dust is from through the inflow of the gallery windows. The aqueous solution of gypsum, consisting of calcium from the lower bed and sulfur from grass growth, is catchmented into the groundwater from the area behind the protection building. Pollen and a few minerals other constituents of contaminants, go through the gallery window, which makes it difficult to expel dust. To conserve the fossil-bearing beds from two contaminants of different origins, controlling the water and atmospheric circulation of the 2nd protection building and removing the contaminants continuously is necessary. When cleaning contaminants, the steam cleaning method is sufficiently effective for powder-shaped milk-white contaminants. The fossil-bearing bed consists of dark gray shale with high laser absorption power; the laser cleaning method accompanies physical loss to fossils and sedimentary structures; therefore, avoiding it as much as possible is desirable.

• Journal of the Korean earth science society
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• v.33 no.3
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• pp.259-268
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• 2012

To investigate the fluctuation of marine aerosol number concentration at each different size with vertical winds in ocean area, aerosol particles and vertical wind components were measured in the Ieodo Ocean Research Station, which is located to 419 km southwest of Marado, the southernmost island of Korea, from 8 to 22 June 2009. The Laser Particle Counter (LPC) and ultrasonic anemometer were used to measure the number of aerosol particles and vertical wind speed. Surface weather chart, NCEP/NCAR reanalysis data and sounding data were used to analyze the synoptic condition. The distribution of aerosol number concentration had a large fluctuation of bigger particles more than 1.0 ${\mu}m$ in diameter by vertical wind speed during precipitation. The aerosol particles larger than 1.0 ${\mu}m$ in diameter increased as the wind changed from downward to upward during precipitation. The aerosol number concentration of bigger size than 1.0 ${\mu}m$ in diameter increased about 5 times when vertical velocity was about 0.4 $ms^{-1}$. In addition, the accumulation and coarse mode aerosol number concentration decreased about 45% and 92%, respectively compared to concentrations during precipitation period. It is considered that vertical wind plays an important role for the increasing of coarse mode aerosol number concentration compared to the large aerosol particles sufficiently removed by the scavenging effect of horizontal winds. Therefore, the upward vertical winds highly contribute to the formation and increase in aerosol number concentration below oceanic boundary layer.