• Analytical Science and Technology
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• v.23 no.2
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• pp.216-223
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• 2010

In previous research, results on efficiency versus size and type of Ag particles showed similarity of detection efficiency comparing the particles of flake and spherical type with the gray particle on the market and in the case of nAg (rod, $0.9\;{\mu}m$) particle, relatively good results was given in the various evaluation methods for detection efficiency of latent fingerprint. However, oxidation was occurred when nAg particles laying on nature condition for a month and due to water absorption, detection efficiency was decreased. Therefore, with need to prevent oxidation and water absorption, more research is necessary. In this research, surface modification on nAg particles using silicon oil was conducted in various methods for complementing weakness of oxidation and water absorption. Then detection efficiency of nAg particles and surface modified nAg particles was evaluated by the number of feature points on the surface of non-porous materials (glass, plastic etc.) and degree of particle adhesion with ridges and contrast of detected fingerprint. Improvement of preventing oxidation and water absorbtion was given by surface modification using silicon oil (DC200, 0.5%) on the surface of non-porous materials.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.52-57
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• 2006

Coptidis Rhizoma, an antimicrobial agent from natural source, is known to have the antiviral effect on the Candida albicans that causes the infectious dermatitis. The valuable protein was extracted from the Coptidis Rhizoma, To prevent denaturalization from external stimulus and improve adsorption onto the skin, the nano-sized liposomes were prepared as a carrier. The CPR-containing liposomes showed an average diameter of 187 nm, surface charge of 3.337 mV and 33% encapsulation efficiency. The release behavior of CRP from the liposome was investigated with various temperature and releasing time. The PVA solution was coated on the surface of liposome to improve the stability. The coated liposome showed slow release behavior in comparison with the non-coated liposome. The CRP in the liposome maintained the effect on the Candida albicans after treating it at 50 and with ultraviolet for 24 h.

• Korean Journal of Materials Research
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• v.23 no.7
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• pp.379-384
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• 2013

In order to produce size-controllable Ag nanoparticles and a nanomesh-patterned Si substrate, we introduce a rapid thermal annealing(RTA) method and a metal assisted chemical etching(MCE) process. Ag nanoparticles were self-organized from a thin Ag film on a Si substrate through the RTA process. The mean diameter of the nanoparticles was modulated by changing the thickness of the Ag film. Furthermore, we controlled the surface energy of the Si substrate by changing the Ar or $H_2$ ambient gas during the RTA process, and the modified surface energy was evaluated through water contact angle test. A smaller mean diameter of Ag nanoparticles was obtained under $H_2$ gas at RTA, compared to that under Ar, from the same thickness of Ag thin film. This result was observed by SEM and summarized by statistical analysis. The mechanism of this result was determined by the surface energy change caused by the chemical reaction between the Si substrate and $H_2$. The change of the surface energy affected on uniformity in the MCE process using Ag nanoparticles as catalyst. The nanoparticles formed under ambient Ar, having high surface energy, randomly moved in the lateral direction on the substrate even though the etching solution consisting of 10 % HF and 0.12 % $H_2O_2$ was cooled down to $-20^{\circ}C$ to minimize thermal energy, which could act as the driving force of movement. On the other hand, the nanoparticles thermally treated under ambient $H_2$ had low surface energy as the surface of the Si substrate reacted with $H_2$. That's why the Ag nanoparticles could keep their pattern and vertically etch the Si substrate during MCE.

• Clean Technology
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• v.10 no.2
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• pp.61-72
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• 2004

In this study, aqueous/semi-aqueous cleaning agents which consist of organic solvent, surfactant, cosurfactant, and water were developed by changing formulation parameters such as organic solvent type and contents, surfactant type and contents, and cosurfactant/surfactant(A/S) ratio, etc.. And physical properties and flux removal of the formulated cleaning agents have been evaluated. Also, the performance of oil-water separation from the rinse water contaminated during the cleaning process was evaluated for its recycling. The formulated cleaning agents in this work expected to have good penetration because of their low viscosity and low surface tension values of 30.2~32.5 dyne/cm. The flux removal with the terpene type cleaning agent was higher than that with hydrocarbon type cleaning agent and two commercial products (CPA(commercial product A), CPB(commercial product B)). And the performance of oil-water separation by gravity settling from the rinse water contaminated with formulated cleaning agent and soils was shown to be very good. The cleaning agents developed in this work were applied to surface mounting technology(SMT) cleaning process for manufacturing electronic parts at L electronic company. As a result, the newly developed cleaning agents showed two times better cleaning speed for removal of solder cream than the conventional ond containing ethanol and IPA(isopropyl alcohol). In addition, malodor and VOC problems generated by the previous organic cleaning agents have been solved in the manufacturing field through introduction of the non-volatile and environmental-friendly cleaning agents to the field.

• Journal of the Korea Concrete Institute
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• v.29 no.1
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• pp.101-107
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• 2017

This study aimed to conduct the basic analysis on the fractal characteristics of cementitious materials. The pore structure of cement paste incorporating ground granulated blast furnace slag (GGBFS) was measured using mercury intrusion porosimetry (MIP) and the fractal characteristics were investigated using different models. Because the pore structure of GGBFS-blended cement paste is an irregular system in the various range from nanometer to millimeter, the characteristics of pore region in the different scale may not be adequately described when the fractal dimension was calculated over the whole scale range. While Zhang and Li model enabled analyzing the fraction dimension of pore structure over the three divided scale ranges of micro, small capillary and macro regions, Ji el al. model refined analysis on the fractal characteristics of micro pore region consisting of micro I region corresponding to gel pores and micro II region corresponding to small capillary pores. As the pore size decreased, both models suggested that the pore surface of micro region became more irregular than macro region and the complexity of pores increased.

• Journal of the Korean Magnetics Society
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• v.18 no.3
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• pp.120-125
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• 2008

In this study, NiCoZn ferrites with the variation of sintering temperature and chemical composition were prepared by the coprecipitation. Microstructures Crystal structure of NiCoZn ferrites were analyzed by XRD and their electric magnetic characteristics were analyzed by LCR meter and their morphology observed by SEM. We identified that these powders have a typical NiCoZn spinel structure and nanoparticles average size of 40 nm. The impurity, the initial permeability and the Q factor value are the lowest of sintered NiCoZn ferrite at $1250^{\circ}C$. Also, we measured S-parameter for $(Ni_{0.4}Co_{0.1}Zn_{0.5})Fe_2O_4$ which showed a maximum reflection loss of -3.1 dB at 6 GHz for the 2 mm thick sample. From this result, we found that the NiCoZn ferrite can be used in ferrite microwave-absorbing application at a higher frequency region (> 6 GHz).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.11
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• pp.7761-7772
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• 2015

This study describes the spatio-temporal distributions in phytoplankton community such as species composition, standing crops and dominant species from April to November 2008 in the Jeju Marine Ranching Area (JMRA). A total of 106 species of phytoplankton belonging to 63 genera was identified. In particular, diatoms and dinoflagellates were occupied more than 61% and 35% of total species, respectively. The annual dominant species were Skeletonema costatum-like species(ls) in April, Torodinium teredo, Cylindrotheca closterium, Scrippsiella trochoidea in June, S. costatum - ls, Thalassionema nitzschioides, Pseudo-nitzschia pungens, Ebria tripartita in September and Corethron pennatum, Dictyocha fibura, Neoceratium teres in November. Phytoplankton cell density ranged between $0.6cells{\cdot}mL^{-1}$ in June and $64.0cells{\cdot}mL^{-1}$ in April. It fluctuated with an annual mean of $11.7cells{\cdot}mL^{-1}$ between the lowest value of $0.9cells{\cdot}mL^{-1}$ in November and the highest value of $37.0cells{\cdot}mL^{-1}$ by S. costatum -ls in April. Diversity index in September was higher than diatom blooming seasons in April. According to the phytoplankton community structure, the biological oceanographic characteristics of the JMRA was characterized by nanoplankton during a year. That is, primary production is deemed to have a higher possibility of being adjusted by a reproduction by material cycle in the ecosystems than nutrients supply from the lands.

• Journal of Korean Society of Environmental Engineers
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• v.34 no.9
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• pp.613-622
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• 2012

A chrome absorbent that is useful in rapid magnetic recovery and recycling was developed though a synthesis of Multi-Terminalized Magnetic-core Dendrimer (MTMD). Divergence through coprecipitation and rotation growth was used for synthesis. The dendrimer was multi-terminilized through methyl propionate and glutaric acid. The property analysis of the synthesized sample was performed through XRD, FT-IR, TEM, EDS, TGA and zeta potential analyzer. A magnetic-core of MTMD had a magnetite crystal and the size of 4th generation dendrimer was identified to be from 15 nm to 20 nm. Through the analysis of the TGA, the rate of the dendrimer branch for the first generation dendrimer was about 7% and 3% of diminished weight occurred as the generation grows. Also, the potential of the dendrimer when multi-terminalized, had variation from 25.26 mV to -6.53 mV. As a result of MTMD adsorption experiment, it absorbed more than 80% within 5 minutes and indicated absorptivity of 6.308 mg/g. When it was compared with COOH Dendrimer (COOH-D) after magnetic recovery, the recovery time was rapidly reduced by more than half and it could recover 100% within 30 minutes. In case of the regeneration experiment that used chrome, it was identified to maintain the same adsorptivity for four runs.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.234-234
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• 2010

최근 CMOS 소자 크기가 축소됨에 따라 소스와 드레인 영역에서의 접촉저항을 줄이기 위하여, 실리사이드 공정이 많이 연구되고 있다. 실리사이드 물질로서 NiSi는 낮은 저항률과 낮은 실리콘 소모, 낮은 공정온도, 등의 장점을 가지고 있다. 그러나, 실리사이드 형성으로 인한 나노소자의 소오스/드레인에서정션(junction) 누설전류의 증가는 큰 문제가 되므로 실리콘과 실리사이드 계면의 특성이 중요하다. 본 연구에서는 니켈을 이용한 실리사이드 형성시 계면 활성제인 에틸 요오드를 이용하여 실험을 진행하였다. 금속 유기 전구체인 MABONi을 사용하여 ALD 방식으로 증착 한 니켈 박막과 니켈 핵 형성시 계면활성제인 에틸요오드의 처리 방법에 따른 Ni-silicide 박막의 특성을 비교, 분석하였다. 먼저 자연산화막을 건식식각으로 제거한 뒤, 첫 번째 샘플에서는 10회의 주기로 초기 니켈을 증착한 뒤, 에틸요오드로 니켈의 표면 위를 처리하고, 다시 200회의 주기로 니켈을 증착하였으며, 두 번째는 첫 번째 방식에서 에틸요오드 주입 시 동시에 수소도 함께 주입하였다. 세 번째는 비교를 위해 에틸요오드 처리를 하지 않고 니켈 박막만을 증착 하였다. 이어서, 각 샘플을 급속 열처리 장비에서 $400^{\circ}C$부터 $900^{\circ}C$까지 각각 30sec간 열처리를 진행후, 반응하지 않은 잔여 니켈을 제거한 후, XRD(x-ray diffraction), AES(auger), 그리고 4-point probe 등을 이용하여 형성된 실리사이드의 특성을 분석하였다. 에틸요오드와 함께 수소를 주입한 경우 계면에서의 산소 불순물과 카본 성분이 효과적으로 제거되어 $400^{\circ}C$에서 $2.9{\Omega}/{\Box}$ 의 낮은 면저항을 가지는 NiSi가 형성되었고 모든 온도구간에서 다른 샘플에 비하여 가장 낮은 면저항 분포를 보였다. 이는 분해 흡착된 요오드에 의한 계면 특성 향상과 카본 성분이 포함된 잔여물들이 수소처리에 의해 효율적으로 제거되어 실리사이드의 특성이 향상되었기 때문이다. 계면활성제를 사용하지 않은 경우에는 $500^{\circ}C$에서 NiSi가 형성되었다. 반면에 에틸요오드로만 표면을 처리한 경우에는 니켈과 실리콘 계면에서의 카본 성분에 의하여 silicidation 이 충분히 일어나지 않았다. 이러한 결과는 향후 45nm 이하의 CMOS 공정상에서 소스와 드레인의 낮은 누설전류를 가지고, 접촉저항을 줄이기 위한 니켈 실리사이드 형성에 큰 도움을 줄 것으로 기대된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.