• Title/Summary/Keyword: 나노합성

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시편 청정 공정변수에 따른 TiN 박막의 특성 변화

  • Jeong, Jae-Hun;Yang, Ji-Hun;Park, Hye-Seon;Song, Min-A;Jeong, Jae-In
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.295-295
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    • 2012
  • 본 연구에서는 아크방전을 이용한 질화 티타늄의 합성 과정 중에서, 시편 청정 공정변수를 변화시킴에 따라 계면에서의 미세조직 변화와 코팅층의 물성을 평가하였다. 아크 소스에 장착된 타겟은 $120mm{\Phi}$, 99.5 %의 티타늄 타겟을 사용 하였고, 시편과 타겟 간의 거리는 약 30 cm이며, 시편은 SUS를 사용하였다. 시편을 진공용기에 장착하고 진공배기를 실시한 후 Ar 가스 분위기에서 시편에 전압을 인가한 후 아크를 발생시켜 약 5분간 시편 청정을 실시하였다. 이 시편 청정 과정에서 시편 인가전압을 0~1,000 V로 변화시켰고 시편 정청이 끝나면 시편에 인가된 전압을 차단하고 코팅하였다. 질화 티타늄의 두께는 약 $3{\mu}m$로 동일하게 코팅하였다. 시편 인가전압 변화에 따라 시편청정 공정 시 계면에서 티타늄층이 코팅되거나 모재 내부까지 침투하는 현상을 관찰하였다. 시편청정 공정변수 변화에 따른 질화 티타늄의 코팅을 통해 계면의 미세조직과 성분의 변화를 주사전자현미경, 투과전자현미경 이미지와 에너지 분산분광기 (Energy Dispersive Spectroscopy ; EDS)를 통해 확인하였으며 나노인덴터를 이용해 경도, 탄성계수 등의 물성변화를 측정하였다. 본 연구에서 얻어진 결과를 이용하여 시편 청정 공정 제어를 통한 다양한 물성변화가 가능 할 것으로 예상된다.

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Morphology Control of ZnO Nanostructures by Surfactants During Hydrothermal Growth (수열합성중 계면활성제를 이용한 ZnO 나노구조 형상 제어)

  • Park, Il-Kyu
    • Journal of Powder Materials
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    • v.23 no.4
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    • pp.270-275
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    • 2016
  • We report on an all-solution-processed hydrothermal method to control the morphology of ZnO nanostructures on Si substrates from three-dimensional hemispherical structures to two-dimensional thin film layers, by controlling the seed layer and the molar contents of surfactants during their primary growth. The size and the density of the seed layer, which is composed of ZnO nanodots, change with variation in the solute concentration. The ZnO nanodots act as heterogeneous nucleation sites for the main ZnO nanostructures. When the seed layer concentration is increased, the ZnO nanostructures change from a hemispherical shape to a thin film structure, formed by densely packed ZnO hemispheres. In addition, the morphology of the ZnO layer is systematically controlled by using trisodium citrate, which acts as a surfactant to enhance the lateral growth of ZnO crystals rather than a preferential one-dimensional growth along the c-direction. X-ray diffraction and energy dispersive X-ray spectroscopy results reveal that the ZnO structure is wurtzite and did not incorporate any impurities from the surfactants used in this study.

Research on Synthesis and Sintering Behavior of Nano-sized (Pb, La)TiO3 Powders Using Mechano Chemical Process (기계화학공정에 의한 (Pb, La)TiO3 나노 분말의 합성 및 소결 특성 연구)

  • Lee, Young-In;Goo, Yong-Sung;Lee, Jong-Sik;Choa, Yong-Ho
    • Journal of Powder Materials
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    • v.17 no.2
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    • pp.101-106
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    • 2010
  • In this study, we successfully synthesized a nano-sized lanthanum-modified lead-titanate (PLT) powder with a perovskite structure using a high-energy mechanochemical process (MCP). In addition, the sintering behavior of synthesized PLT nanopowder was investigated and the sintering temperature that can make the full dense PLT specimen decreased to below $1050^{\circ}C$ by using $Bi_2O_3$ powder as sintering agent. The pure PLT phase of perovskite structure was formed after MCP was conducted for 4 h and the average size of the particles was approximately 20 nm. After sintered at 1050 and $1150^{\circ}C$, the relative density of PLT was about 93.84 and 95.78%, respectively. The density of PLT increased with adding $Bi_2O_3$ and the specimen with the relative densitiy over 96% were fabricated below $1050^{\circ}C$ when 2 wt% of $Bi_2O_3$ was added.

Synthesis of Nanocrystalline BaTiO3 Powder by the Combination of High Energy Ball Milling of BaCO3-TiO2 Mixture and Solid-State Reaction (고에너지 볼밀링된 BaCO3와 TiO2 혼합분말의 고상반응에 의한 나노결정 BaTiO3 분말 합성)

  • Ryu, Sung-Soo
    • Journal of Powder Materials
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    • v.19 no.4
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    • pp.310-316
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    • 2012
  • Nanocrystalline $BaTiO_3$ powder could be synthesized by solid-state reaction using the mixture which was prepared by a high energy milling process in a bead mill for $BaCO_3$ and nanocrystalline $TiO_2$ powders mixture. Effect of the milling time on the powder characteristic of the synthesized $BaTiO_3$ powder was investigated. Nanocrystalline $BaTiO_3$ with a particle size of 50 nm was obtained at $800^{\circ}C$. High tetragonal $BaTiO_3$ powder with a tetragonality(=c/a) of 1.009 and a specific surface area of $7.6m^2/g$ was acquired after heat-treatment at $950^{\circ}C$ for 2 h. High energy ball milling was effective in decreasing the reaction temperature and increasing the tetragonality.

Synthesis of SnO2 Nanotubes Via Electrospinning Process and Their Application to Lithium Ion Battery Anodes (전기방사법을 통한 주석산화물 나노튜브의 합성 및 리튬이차전지 음극으로의 응용)

  • Lee, Young-In;Choa, Yong-Ho
    • Journal of Powder Materials
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    • v.19 no.4
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    • pp.271-277
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    • 2012
  • $SnO_2$ nanotubes were successfully synthesized using an electrospinning technique followed by calcination in air. The nanotubes were the single phase nature of $SnO_2$ and consisted of approximately 14 nm nanocrystals. SEM and TEM characterizations demonstrated that uniform hollow fibers with an average outer diameter of around 124 nm and wall thickness of around 25 nm were successfully obtained. As anode materials for lithium ion batteries, the $SnO_2$ nanotubes exhibited excellent cyclability and reversible capacity of $580mAhg^{-1}$ up to 25 cycles at $100mAg^{-1}$ as compared to $SnO_2$ nanoparticles with a capacity of ${\sim}200mAhg^{-1}$. Such excellent performance of the $SnO_2$ nanotube was related to the one-dimensional hollow structure which acted as a buffer zone during the volume contraction and expansion of Sn.

Synthesis and Characterization of Nanoporous Zirconia (나노세공 Zirconia의 합성 및 특성평가)

  • Woo, Seung-Sik;Kim, Ho-Kun
    • Journal of Powder Materials
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    • v.14 no.5
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    • pp.309-314
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    • 2007
  • Zirconia powders with nano size pores and high specific surface areas were synthesized via aqueous precipitation and hydrothermal synthetic method using $ZrOCl_28H_2O$ and $NH_4OH$ under pH=11 and ambient condition. By this reaction. zirconia hydrate $(ZrO_x(OH)_{4-2x})$ was primarily synthesized and the obtained zirconia hydrate was heat treated hydrothermally using an autoclave at various temperatures under pH=11. X-ray diffraction, Scanning electron microscopy, Energy dispersive X-ray spectroscopy, FT-IR, Raman, Particle size analysis, DTA-TG, and BET techniques were used for the characterization of the powder. The synthesized zirconia showed an amorphous phase, however, the phase was transformed to the crystalline state during the hydrothermal process. The observed crystalline phase above $160^{\circ}C$ was a mixed phase of monoclinic and tetragonal zirconia. By the BET analysis, it was found that the specific surface area was ranged in $126{\sim}276m^2/g$ and the zirconia had the cylindrical shaped pores with average diameter of $2{\sim}7nm$.

Synthesis of SnO2 Powders by Oxidation Heat Treatment of Nano-sized Sn Powders and Their Microstructural Characteristics (나노크기 Sn 분말의 산화열처리에 의한 SnO2분말의 합성 및 미세조직 특성)

  • Oh, Sung-Tag;Lee, Sung-Il;Joo, Yeon-Jun
    • Journal of Powder Materials
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    • v.14 no.5
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    • pp.287-291
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    • 2007
  • Oxidation behavior and microstructural characteristics of nano-sized Sn powder were studied. DTA-TG analysis showed that the Sn powder exhibited an endothermic peak at $227^{\circ}C$ and exothermic peak at $560^{\circ}C$ with an increase in weight. Based on the phase diagram consideration of Sn-O system and XRD analysis, it was interpreted that the first peak was for the melting of Sn powder and the second peak resulted from the formation of $SnO_2$ phase. Microstructural observation revealed that the $SnO_2$ powder, heated to $1000^{\circ}C$ under air atmosphere, consisted of agglomerates with large particle size due to the melting of Sn powder during heat treatment. Finally, fine $SnO_2$ powders with an average size of 50nm can be fabricated by controlled heat treatment and ultrasonic milling process.

Synthesis and Optical Property of BaTiO3 Nanoparticles Using a Salt-assisted Ultrasonic Spray Pyrolysis Process (염 보조 초음파 분무 열분해 공정을 이용한 BaTiO3 나노입자의 합성과 광학적 성질)

  • Hwangbo, Young;Lee, Young-In
    • Journal of Powder Materials
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    • v.24 no.4
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    • pp.326-331
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    • 2017
  • The structural formation of inorganic nanoparticles dispersed in polymer matrices is a key technology for producing advanced nanocomposites with a unique combination of optical, electrical, and mechanical properties. Barium titanate ($BaTiO_3$) nanoparticles are attractive for increasing the refractive index and dielectric constant of polymer nanocomposites. Current synthesis processes for $BaTiO_3$ nanoparticles require expensive precursors or organic solvents, complicated steps, and long reaction times. In this study, we demonstrate a simple and continuous approach for synthesizing $BaTiO_3$ nanoparticles based on a salt-assisted ultrasonic spray pyrolysis method. This process allows the synthesis of $BaTiO_3$ nanoparticles with diameters of 20-50 nm and a highly crystalline tetragonal structure. The optical properties and photocatalytic activities of the nanoparticles show that they are suitable for use as fillers in various nanocomposites.

Synthesis and Nucleation Behavior of MoO3 Nano Particles with Concentration of Precursors (전구체 농도에 따른 MoO3 나노 분말 합성 및 핵생성 거동)

  • Lee, Seyoung;Kwon, Namhun;Roh, Jaeseok;Lee, Kun-Jae
    • Journal of Powder Materials
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    • v.27 no.5
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    • pp.394-400
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    • 2020
  • Molybdenum trioxide (MoO3) is used in various applications including sensors, photocatalysts, and batteries owing to its excellent ionic conductivity and thermal properties. It can also be used as a precursor in the hydrogen reduction process to obtain molybdenum metals. Control of the parameters governing the MoO3 synthesis process is extremely important because the size and shape of MoO3 in the reduction process affect the shape, size, and crystallization of Mo metal. In this study, we fabricated MoO3 nanoparticles using a solution combustion synthesis (SCS) method that utilizes an organic additive, thereby controlling their morphology. The nucleation behavior and particle morphology were confirmed using ultraviolet-visible spectroscopy (UV-vis) and field emission scanning electron microscopy (FE-SEM). The concentration of the precursor (ammonium heptamolybdate tetrahydrate) was adjusted to be 0.1, 0.2, and 0.4 M. Depending on this concentration, different nucleation rates were obtained, thereby resulting in different particle morphologies.

Preparation of Manganese Oxide Porous Nanostructures using Amino-acid and its Selective C3H8 Sensing Properties (아미노산을 이용한 망간 산화물 기공성 나노 구조의 합성 및 C3H8 가스에 대한 선택적 감응 특성)

  • Choi, Kwon-Il;Lee, Jong-Heun
    • Journal of Sensor Science and Technology
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    • v.20 no.1
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    • pp.64-69
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    • 2011
  • Porous manganese oxide porous nanostructures were prepared by amino-acid-mediated solvothermal self assembly reaction and subsequent heat treatment at $600^{\circ}C$. When Mn-precursors were heat-treated at $400-550^{\circ}C$, the sensors did not show significant gas responses. In contrast, the manganese oxide heat-treated at $600^{\circ}C$ showed the significant gas responses, that is, the resistance decrease to 100 ppm $C_3H_8$ ($R_a/R_g$ = 2.17, $R_a$ : resistance in air, $R_g$ : resistance in gas) and the resistance increase to 100 ppm $C_2H_5OH$ ($R_g/R_a$ = 1.92). The opposite change of resistance upon exposure to $C_3H_8$ and $C_2H_5OH$ was discussed in relation to the mixed phases of manganese oxides with different valences.