• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.254-259
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• 2005

The heat and vibration effect is known to cause a serious deformation in linear motor system. The paper presents a heat and vibration characteristics that compare a advanced linear motor with developed linear motor through experiment and analyses. The heat in linear motor system is identified for experimental data and analytic data using the Finite Volume Method (FVM). Also, it shows that the optimum standard analyzed the acceleration patterns of the moving part cause the vibration source in linear motor. It presents the analyzed dynamics of linear motor in compliance with a deformation of the non-linear factor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.413-417
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• 2004

Recent experiments have shown the 'size effects' in micro/nano scale. But the classical plasticity theories can not predict these size dependent deformation behaviors because their constitutive models have no characteristic material length scale. The Mechanism - based Strain Gradient(MSG) plasticity is proposed to analyze the non-uniform deformation behavior in micro/nano scale. The MSG plasticity is a multi-scale analysis connecting macro-scale deformation of the Statistically Stored Dislocation(SSD) and Geometrically Necessary Dislocation(GND) to the meso-scale deformation using the strain gradient. In this research we present a study of nano-indentation by the MSG plasticity. Using W. D. Nix and H. Gao s model, the analytic solution(including depth dependence of hardness) is obtained for the nano indentation , and furthermore it validated by the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.351-354
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• 2004

This work presents a simple and cost-effective approach for maskless fabrication of positive-tone silicon master for the replica molding of hyperfine elastomeric channel. Positive-tone silicon masters were fabricated by a maskless fabrication technique using the combination of nanoscratch by Nanoindenter ⓡ XP and XOH wet etching. Grooves were machined on a silicon surface coated with native oxide by ductile-regime nanoscratch, and they were etched in a 20 wt％ KOH solution. After the KOH etching process, positive-tone structures resulted because of the etch-mask effect of the amorphous oxide layer generated by nanoscratch. The size and shape of the positive-tone structures were controlled by varying the etching time (5, 15, 18, 20, 25, 30 min) and the normal loads (1, 5 mN) during nanoscratch. Moreover, the effects of the Berkovich tip alignment (0, 45$^{\circ}$) on the deformation behavior and etching characteristic of silicon material were investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.442-446
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• 2004

Reducing the particle size of drug materials down to submicron is an important matter in pharmaceutical industry. Cryogenic milling technology is one of the mechanical milling processes, which is mostly utilized in refining grain size of metal and ceramics at extremely low temperature environment. This technique has not been readily studied in application to medical and biotechnology. This paper, therefore, describes the application of cryogenic milling process to reduce particle size of Ibuprofen. The shape and size of the Ibuprofen particle before and after the cryogenic ball milling process were analyzed. XRD analysis was performed to examine a change in crystallinity of Ibuprofen by the cryogenic ball milling process. The results showed that the size of Ibuprofen particles was reduced to 1/10 or less of its initial size. The results also showed that the degree of crystallinity of Ibuprofen was slightly reduced after cryogenic ball milling with nitrogen

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.189-195
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• 2003

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.12 s.189
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• pp.128-134
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• 2006

Two-dimensional nano-patterns are fabricated using immersion holographic lithography. The photoresist layer is exposed to an interference pattern generated by two incident laser beams($\lambda$=441.6 nm, He-Cd laser) of which the pitch size is less than 200 nm. Good surface profiles of the 2 dimensional patterns are achieved by trimming the lithography process parameters, such as, exposure time, developing time and refractive index of medium liquid.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.186-193
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1178-1181
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• 2003

Nanotechnology is the creation and utilization of materials, devices, and systems through the control of matter on the nanometer-length scale, that is, at the level of atoms, molecules, and supramolecular structures. The essence of nanotechnology is the ability to work at these levels to generate larger structures with fundamentally new molecular organization. These nanostructures, made with building blocks understood from first principles, are the smallest human-made objects, and they exhibit novel physical, chemical, and biological properties and phenomena. The aim of nanotechnology is to learn to exploit these properties and efficiently manufacture and employ the structures. Control of matter on the nanoscale already plays an important role in scientific disciplines as diverse as physics, chemistry, materials science, biology, medicine, engineering, and computer simulation. This paper describes the superprecision nano separator to productive particle size of nano powder. this separator system is very important in the industrial area for other high technology parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.686-689
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• 2003

Many technologies are applied to the measurement of elastohydrodynamic lubrication (EHL) film thickness. In particular, optical in-situ interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. Careful selection of incident lights greatly enhances the fringe resolution up to nanometer scale by using image processing technology. In this work, it is found that dichromatic incident light can provide much finer resolution of EHL film thickness than monochromatic incident light, because it has much more variables of color components to be discriminated among the wavelengths of colors according the variations of EHL film thickness. Some simulated interferometric images are shown how the film thickness is resolutionized in nanometer scale

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.624-627
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• 2003

Microcontact printing (uCP) of alkanethiols on gold was the first representative of soft-lithography processes. This is an attempt to enhance the accuracy of classical to a precision comparable with optical lithography, creating a low-cost, large-area, and high-resolution patterning process. Microcontact printing relies on replication of a pattered PDMS stamp from a master to form an elastic stamp that can be inked with a SAM solution(monolayer -forming ink) using either immersion inking or contact inking. The inked PDMS stamp is then used to print a pattern that selectively protects the gold substrate during the subsequent etch.