A Study on Heat and Vibration of Nano Precision Linear Motors

나노 구동용 선형 모터의 열.진동에 관한 연구

The heat and vibration effect is known to cause a serious deformation in linear motor system. The paper presents a heat and vibration characteristics that compare a advanced linear motor with developed linear motor through experiment and analyses. The heat in linear motor system is identified for experimental data and analytic data using the Finite Volume Method (FVM). Also, it shows that the optimum standard analyzed the acceleration patterns of the moving part cause the vibration source in linear motor. It presents the analyzed dynamics of linear motor in compliance with a deformation of the non-linear factor.