• 한국재료학회지
• /
• 제17권8호
• /
• pp.437-441
• /
• 2007

Preparation and morphology control of $TiO_2$ nano powders for gas sensor applications are investigated. $TiO_2$ nanopowders with rutile and anatase structures were prepared by controlling the pH value of a precursor solution without any heat treatment. The mean particle size of $TiO_2$ powders were below 10nm. The prepared $TiO_2$ nano powders were hydrothermal treated by NaOH solution. The sample was washed in HCl solution. As a result and $TiO_2$ nanotubes were formed. The lengths of $TiO_2$ nanotube were $1{\mu}m$ and the diameters were 10nm. Crystal structure and microstructure of $TiO_2$ nanotube were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM). As-prepared $TiO_2$ nanotube powders have several advantages of nano particle size and high surface area and could be a prominent candidate for nano-sensors. The sensitivity of $TiO_2$ nanotube sensor was measured for toluene and NO in this study.

• 한국재료학회지
• /
• 제21권10호
• /
• pp.546-549
• /
• 2011

Nano-sized $SnO_2$ thick films were prepared by a screen-printing method onto $Al_2O_3$ substrates. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a test box as a function of the detection gas. The nano-sized $SnO_2$ thick film sensors were treated in a $N_2$ atmosphere. The structural properties of the nano $SnO_2$with a rutile structure according to XRD showed a (110) dominant $SnO_2$ peak. The particle size of $SnO_2$:Ni nano powders at Ni 8 wt% was about 45 nm, and the $SnO_2$ particles were found to contain many pores according to the SEM analysis. The sensitivity of the nano $SnO_2$-based sensors was measured for 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in the target gases. The results showed that the best sensitivity of $SnO_2$:Ni and $SnO_2$:Co sensors for $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature was observed in $SnO_2$:Ni sensors doped with 8 wt% Ni. The response time of the $SnO_2$:Ni gas sensors was 10 seconds and recovery time was 15 seconds for the $CH_4$ and $CH_3CH_2CH_3$ gases.

• 한국전기전자재료학회논문지
• /
• 제29권12호
• /
• pp.803-808
• /
• 2016

In this work, one dimension $In_2O_3$ nanostructures as detecting materials for indoor toxic gases were synthesized by an electrospinning process. The morphology of electrospun $In_2O_3$ nanofibers was controlled by electrolyte composition, applied voltage and working distance between a nozzle and a substrate. The synthesized $In_2O_3$ nanofibers-based paste with/without carbon black additives was prepared for the integration on a sensor device. The integration of $In_2O_3$ sensing materials was conducted by a hand-printing of the paste into the interdigit Au electrodes patterned on Si wafer. Gas sensing properties on CO and HCHO gases were characterized at $300^{\circ}C$. The evaluated sensing properties such as sensitivity, response time and recovery time were improved in $In_2O_3$ nanofiber pastes with carbon black, compared to the paste without carbon black.

• 한국전기전자재료학회논문지
• /
• 제30권4호
• /
• pp.229-234
• /
• 2017

In this study, we fabricated a TFT gas sensor with ZnO nanorods grown by hydrothermal synthesis. The suggested devices were compared with the conventional ZnO film-type TFTs in terms of the gas-response properties and the electrical transfer characteristics. The ZnO seed layer is formed by atomic-layer deposition (ALD), and the precursors for the nanorods are zinc nitrate hexahydrate ($Zn(NO_3)_2{\cdot}6H_2O$) and hexamethylenetetramine ($(CH_2)6N_4$). When 15 ppm of NO gas was supplied in a gas chamber at $150^{\circ}C$ to analyze the sensing capability of the suggested devices, the sensitivity (S) was 4.5, showing that the nanorod-type devices respond sensitively to the external environment. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which showed that the oxygen deficiency of ZnO nanorods is higher than that of ZnO film, and confirms that the ZnO nanorod-type TFTs are advantageous for the fabrication of high-performance gas sensors.

• 한국통신학회논문지
• /
• 제37권4C호
• /
• pp.329-337
• /
• 2012

캡슐 내시경은 인체 내부의 소화기관 병변을 조사할 수 있는 캡슐 모양의 전자장치로서 인체 내에 케이블을 삽입하는 기존 푸시 타입(push-type)내시경과는 달리 환자에게 공포와 고통을 주지 않는 시술로 인식되고 있어, 최근 환자와 의사 모두에게 큰 관심을 끌고 있다. 이 기술은 바이오 기술(BT), 정보통신 기술(IT), 나노 기술(NT) 등의 성숙과 융합으로 2000년에 들어와 처음으로 가능하게 되었으며, LED를 포함한 광학계와 이미지 센서, 통신 모듈, 파워 모듈 등으로 구성되어 있다. 캡슐 내시경은 첨단 기술의 총체로 유비쿼터스 시대에 다양한 기술 분야의 핵심 기술을 필요로 한다. 따라서 본 논문에서는 캡슐 내시경의 구성에 관해 소개하고, 현재 데이터 전송을 위해 사용되고 있는 대표적인 RF 무선 통신 방식 및 인체 통신 시스템 방식에 대해 비교하였다. 아울러 현재 상용된 캡슐 내시경의 사양을 비교 분석하고, 미래의 캡슐 내시경의 진화 방향과 기술적 도전 과제를 제시하였다.

• 한국항공우주학회지
• /
• 제36권6호
• /
• pp.581-586
• /
• 2008

기존의 수 mN급의 MEMS 고체 추진제 추력기는 실제 마이크로/나노 위성체의 킥모터,지능탄(Smart bomb)의 측추력기로 응용하기에는 추력 레벨이 너무 낮다는 한계가 있었다. 이 연구에서는 고체 추진제의 연소 면적을 증대시킴으로써 추력 레벨이 향상된 MEMS 고체 추진제 추력기의 제작 가능성을 확인하고 연소 실험을 통해서 구조체의 안정성을 확인하였으며 직접 추력을 측정하여 수백 mN급의 단위 추력기를 개발하였다. 연소 챔버와 노즐, 덮개 층은 감광성 유리 기판을 이용하여 제작하였으며 마이크로 점화기는 파이렉스 기판 위에 300 ㎚ 높이의 니켈과 크롬을 페터닝(patterning)하여 제작하였다. 마이크로 점화기의 성능 해석과 실험을 통한 검증을 수행하여 고체 추진제의 점화를 위한 공급 전력을 계산하였으며 힘 센서를 통하여 추력기의 추력을 측정하였다. 측정된 추력은 K=15와 20인 경우에 300, 600 mN 이었다.

• 한국재료학회지
• /
• 제27권12호
• /
• pp.658-663
• /
• 2017

Urchin-structured zinc oxide(ZnO) nanorod(NR) gas sensors were successfully demonstrated on a polyimide(PI) substrate, using single wall carbon nanotubes(SWCNTs) as the electrode. The ZnO NRs were grown with ZnO shells arranged at regular intervals to form a network structure with maximized surface area. The high surface area and numerous junctions of the NR network structure was the key to excellent gas sensing performance. Moreover, the SWCNTs formed a junction barrier with the ZnO which further improved sensor characteristics. The fabricated urchin-structured ZnO NR gas sensors exhibited superior performance upon $NO_2$ exposure with a stable response of 110, fast rise and decay times of 38 and 24 sec, respectively. Comparative analyses revealed that the high performance of the sensors was due to a combination of high surface area, numerous active junction points, and the use of the SWCNTs electrode. Furthermore, the urchin-structured ZnO NR gas sensors showed sustainable mechanical stability. Although degradation of the devices progressed during repeated flexibility tests, the sensors were still operational even after 10000 cycles of a bending test with a radius of curvature of 5 mm.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
• /
• pp.236-236
• /
• 2013

비냉각 적외선 검출기는 산업용 군사용으로 최근 각광을 받고 있다. 이는 주야간 빛이 없는 곳에서도 사물의 열을 감지할 수 있어 인체감지 및 보안감시, 에너지 절감 등에 응용될 수 있는 핵심부품이다. 비냉각 적외선 검출기로는 재료의 저항의 변화를 감지하는 마이크로볼로미터형이 가장 많이 사용된다. 감지재료로는 비정질 실리콘(a-Si)과 산화바나듐(VOx)이 가장 많이 사용된다. VOx 박막은 일반적으로 RF sputtering 방법으로 증착이 되며, 저항이 낮고, 저항의 온도변화 계수(TCR)가 크며 신호 대 잡음 특성이 우수한 반면 산소(oxygen) phase가 다양하여 갓 증착된 상태의 박막은 재현성이 떨어지는 단점이 있다. 본 연구에서는 기존의 V 타겟을 사용한 VOx 박막을 증착하는 방법을 개선하여 ZnO 나노박막을 중간에 삽입하여 저항 특성을 조절할 뿐만 아니라 열처리에 의해 TCR 값을 향상시키고, VO2 phase 가 주로 나타나는 박막 증착 및 공정 방법을 소개한다. RF sputtering 장비를 이용하여 산소와 아르곤 가스의 혼합비를 4.5로 하였으며, VOx 증착 시 플라즈마 Power는 150 W 로 하여 상온에서 증착하였다. 갓 증착된 VOx 다층박막의 XRD 스펙트럼은 V2O5 피크가 주된 상을 이루고 있었으며, 산소열처리에 의해 VO2 상이 주로 나타남을 알 수 있었다. TCR 값은 갓 증착된 샘플에서 -0.13%/K의 값을 얻었으며, $300^{\circ}C$에서 50분간 열처리 후 -3.37%/K 으로 급격히 향상됨을 알 수 있었다. 저항은 열처리 후 약 100 kohm으로 낮아져 검출소자를 위한 조건에 적합한 특성을 얻을 수 있었다. 또한 산소열처리의 온도 및 시간에 따라 TCR 및 표면 거칠기 특성을 조사하였으며, 최적의 열처리 조건을 얻고자 하였다.

• 한국운동역학회지
• /
• 제31권3호
• /
• pp.183-188
• /
• 2021

Objective: The purpose of this study was to develop a stretchable joint motion sensor that is based on silver nano-particle. Through this sensor, it can be utilized as an equipment for rehabilitation and analyze joint movement. Method: In this study, precursor solution was created, after that, nozel printer (Musashi, Image master 350PC) was used to print on a circuit board. Sourcemeter (Keithley, Keithley-2450) was used in order to evaluate changes of electric resistance as the sensor stretches. In addition, the sensor was attached on center of a knee joint to 2 male adults, and performed knee flexion-extension in order to evaluate accurate analysis; 3 infrared cameras (100 Hz, Motion Master 100, Visol Inc., Korea) were also used to analyze three dimensional movement. Descriptive statistics were suggested for comparing each accuracy of measurement variables of joint motions with the sensor and 3D motions. Results: The change of electric resistance of the sensor indicated multiple of 30 times from initial value in 50% of elongation and the value of electric resistance were distinctively classified by following 10%, 20%, 30%, 40% of elongation respectively. Through using the sensor and 3D camera to analyze movement variable, it showed a resistance of 99% in a knee joint extension, whereas, it indicated about 80% in flexion phase. Conclusion: In this research, the stretchable joint motion sensor was created based on silver nanoparticle that has high conductivity. If the sensor stretches, the distance between nanoparticles recede which lead gradual disconnection of an electric circuit and to have increment of electric resistance. Through evaluating angle of knee joints with observation of sensor's electric resistance, it showed similar a result and propensity from 3D motion analysis. However, unstable electric resistance of the stretchable sensor was observed when it stretches to maximum length, or went through numerous joint movements. Therefore, the sensor need complement that requires stability when it comes to measuring motions in any condition.

• 반도체디스플레이기술학회지
• /
• 제17권2호
• /
• pp.1-5
• /
• 2018

Elastic resistive pressure sensor is fabricated by a direct spray coating of silver nanowires (AgNWs) on uncured polydimethylsiloxane (PDMS) and an additional coating of a conductive polymer, poly(3,4-ethylenedioxythiophene): poly (styrene sulfonate) (PEDOT:PSS). To improve the sensitive and stability, we have fabricated sandwich-structured AgNW/polymer sensor where two AgNW/polymer-coated PDMS films are laminated with the conducting surfaces contacted by pressure lamination. It shows a resistance decrease upon loading due to the formation of dense network of AgNWs. It is demonstrated that the sandwich-structured AgNW/polymer sensor exhibits very high sensitivity ($2.59kPa^{-1}$) and gauge factor (37.8) in the low pressure regime. It can also detect a subtle placement and removal of a weight as low as 3.4 mg, the corresponding pressure of which is about 5.4 Pa. It is shown that the protrusion of AgNWs from PDMS is suppressed substantially by the over-coated PEDOT:PSS layer, thereby reducing hysteresis and rendering the sensor more stable.