Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and Characterization of TFT Gas Sensor with ZnO Nanorods Grown by Hydrothermal Synthesis

수열합성법으로 성장시킨 ZnO 나노 로드기반 TFT 가스 센서 제조 및 특성평가

  • Jeong, Jun-Kyo (Department of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Yun, Ho-Jin (Department of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Yang, Seung-Dong (Department of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Park, Jeong-Hyun (Department of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Kim, Hyo-Jin (Department of Material Science Engineering, Chungnam National University) ;
  • Lee, Ga-Won (Department of Electronic Radio Information Communication Engineering, Chungnam National University)
  • 정준교 (충남대학교 전자전파정보통신공학과) ;
  • 윤호진 (충남대학교 전자전파정보통신공학과) ;
  • 양승동 (충남대학교 전자전파정보통신공학과) ;
  • 박정현 (충남대학교 전자전파정보통신공학과) ;
  • 김효진 (충남대학교 재료공학과) ;
  • 이가원 (충남대학교 전자전파정보통신공학과)
  • Received : 2017.01.23
  • Accepted : 2017.02.21
  • Published : 2017.04.01
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Abstract

In this study, we fabricated a TFT gas sensor with ZnO nanorods grown by hydrothermal synthesis. The suggested devices were compared with the conventional ZnO film-type TFTs in terms of the gas-response properties and the electrical transfer characteristics. The ZnO seed layer is formed by atomic-layer deposition (ALD), and the precursors for the nanorods are zinc nitrate hexahydrate ($Zn(NO_3)_2{\cdot}6H_2O$) and hexamethylenetetramine ($(CH_2)6N_4$). When 15 ppm of NO gas was supplied in a gas chamber at $150^{\circ}C$ to analyze the sensing capability of the suggested devices, the sensitivity (S) was 4.5, showing that the nanorod-type devices respond sensitively to the external environment. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which showed that the oxygen deficiency of ZnO nanorods is higher than that of ZnO film, and confirms that the ZnO nanorod-type TFTs are advantageous for the fabrication of high-performance gas sensors.

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