• Title/Summary/Keyword: 깊은 트랩

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Nondestructive Evaluation of Semi-Insulating GaAs Wafer Surface Properties Using SAW (SAW를 이용한 반절연 GaAs웨이퍼 표면 성질의 비파괴 측정)

  • Park, Nam-Chun;Park, Sun-Kyu;Lee, Kuhn-Il
    • The Journal of the Acoustical Society of Korea
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    • v.10 no.3
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    • pp.19-30
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    • 1991
  • The surface properties such as energy gap, exciton, shallow trap level, deep trap level, type inversion with annealing and metastable state of $EL_2$ level of SI GaAs wafers and the conductivity distribution of 2 inch Cr doped GaAs wafer were investigated using nondestructive TAV(transverse acoustoelectric voltage) technique. The TAV is generated when SAW and semiconductor interact. We also have tried newly SAW oscillator technique to investigate the surface properties of semiconductor wafers and we have shown the validity of this technique.

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A Study on Threshold Voltage Degradation by Loss Effect of Trapped Charge in IPD Layer for Program Saturation in a MLC NAND Flash Memory (멀티레벨 낸드 플래쉬 메모리 프로그램 포화 영역에서의 IPD 층에 트랩된 전하의 손실 효과에 의한 문턱 전압 저하 특성에 대한 연구)

  • Choi, Chae-Hyoung;Choi, Deuk-Sung;Jeong, Seung-Hyun
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.3
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    • pp.47-52
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    • 2017
  • This research scrutinizes the data retention characteristics of the MLC NAND Flash Memory instigated by the loss effect of trapped charge when the memory is in the state of program saturation. It is attributed to the threshold voltage saturation phenomenon which engenders an interruption to the linear increase of the voltage in the memory cell. This phenomenon is occasioned by the outflow of the trapped charge from the floating gate to the control gate, which has been programmed by the ISPP (Incremental Step Pulse Programming), via Inter-Poly Dielectric (IPD). This study stipulates the significant degradation of thermal retention characteristics of threshold voltage in the saturation region in contrast to the ones in the linear region. Thus the current study evaluates the data retention characteristics of voltage after the program with a repeated reading test in various measurement conditions. The loss effect of trapped charge is found in the IPD layer located between the floating gate and the control gate especially in the nitride layer of the IPD. After the thermal stress, the trapped charge is de-trapped and displays the impediment of the characteristic of reliability. To increase the threshold saturation voltage in the NAND Flash Memory, the storage ability of the charge in the floating gate must be enhanced with a well-thought-out designing of the module in the IPD layer.

깊은준위 과도용량 분광법을 이용하여 양자점 태양전지의 결함상태가 광전변환 효율에 미치는 영향 분석

  • Lee, Gyeong-Su;Lee, Dong-Uk;Mun, Ung-Tak;Kim, Eun-Gyu;Choe, Won-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.225.1-225.1
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    • 2013
  • 지난 수년간 태양전지의 광전변환 효율을 높이기 위해 자가 조립된 InAs 또는 GaSb 와 같은 양자점을 GaAs 단일 p-n 접합에 적용하는 연구를 개발해 왔다. 그러나 양자점의 흡수 단면적에 의한 광흡수도는 양자점층을 수십 층을 쌓으면 증가하지만 활성층에 결함을 생성시킨다. 생성된 결함은 운반자 트랩으로 작용하여 태양전지의 광전변환 효율을 감소시킨다. 본 실험에서는 양자점이 적용된 태양전지와 적용되지 않은 태양전지의 광전변환 효율을 비교하고, 깊은준위 과도용량 분광법을 이용하여 결함상태를 측정하고 및 비교함으로써, 활성층 내부에 생성된 결함이 광전변환 효율에 미치는 영향을 분석하였다. 소자구조는 분자선 증착 방법을 이용하여, 먼저 n-형 GaAs 기판위에 n-형 GaAs를 300 nm 증착한 후, 도핑이 되지 않은 GaAs 활성층을 3.5 ${\mu}m$ 두께로 증착하였다. 마지막으로 p-형 GaAs를 830 nm 증착함으로써 p-i-n구조를 형성하였다. 여기서, n-형 GaAs 과 p-형 GaAs의 도핑농도는 동일하게 $5{\times}1018\;cm^{-3}$ 로 하였다. 또한 양자점 및 델타도핑 층을 각각 태양전지에 적용하기 위해 활성층내에 양자점 20층 및 델타도핑 20층을 각각 형성하였다. 이때, 양자점 태양전지, 델타도핑 태양전지와 양자점이 없는 태양전지의 광전변환 효율은 각각 4.24, 4.97, 3.52%로 나타났다. 태양전지의 전기적 특성을 측정하기 위해 소자구조 위에 Au(300nm)/Pt(30nm)/Ti(30nm)의 전극을 전자빔 증착장치로 증착하였으며, 메사에칭으로 직경 300 ${\mu}m$의 p-i-n 접합 다이오드 구조를 제작하였다. 정전용량-전압 특성 및 깊은준위 과도용량 분광법을 이용하여 태양전지의 결함분석 및 이에 따른 광전변환 효율의 상관관계를 논의할 것이다.

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Electrical Characteristics and Deep Level Traps of 4H-SiC MPS Diodes with Different Barrier Heights (전위 장벽에 따른 4H-SiC MPS 소자의 전기적 특성과 깊은 준위 결함)

  • Byun, Dong-Wook;Lee, Hyung-Jin;Lee, Hee-Jae;Lee, Geon-Hee;Shin, Myeong-Cheol;Koo, Sang-Mo
    • Journal of IKEEE
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    • v.26 no.2
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    • pp.306-312
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    • 2022
  • We investigated electrical properties and deep level traps in 4H-SiC merged PiN Schottky (MPS) diodes with different barrier heights by different PN ratios and metallization annealing temperatures. The barrier heights of MPS diodes were obtained in IV and CV characteristics. The leakage current increased with the lowering barrier height, resulting in 10 times larger current. Additionally, the deep level traps (Z1/2 and RD1/2) were revealed by deep level transient spectroscopy (DLTS) measurement in four MPS diodes. Based on DLTS results, the trap energy levels were found to be shallow level by 22~28% with lower barrier height It could confirm the dependence of the defect level and concentration determined by DLTS on the Schottky barrier height and may lead to incorrect results regarding deep level trap parameters with small barrier heights.

Properties of deep levels in In_{1-x}Ga_xP$ (In_{1-x}Ga_xP$의 깊은 준위 특성)

  • 김선태;문동찬
    • Electrical & Electronic Materials
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    • v.7 no.4
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    • pp.312-316
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    • 1994
  • In this study, ln$_{1-x}$ Ga$_{x}$P alloy crystal which has different compositions were grown by the temperature gradient solution(TGS) method, and the properties of deep levels were measured in the temperature range of 9OK-450K. We find the four deep levels of E$_{1}$, E$_{2}$(248meV), E$_{3}$(386meV) and E$_{4}$(618meV) in GaP, which has composition of Ga in In$_{1-x}$ Ga$_{x}$P is one, and the trap densities of E$_{3}$ and E4 levels were 7.5*10$^{14}$ cm$^{-3}$ and 9*10$^{14}$ cm$^{-3}$ , respectively. A broad deep level spectra was revealed in In$_{1-x}$ Ga$_{x}$P whose composition of Ga, x, were 0.56 and 0.83, and the activation energy and trap densities were about 430meV and 6*10$^{14}$ cm$^{-3}$ , respectively.ectively.

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양자점 태양전지구조내 결함상태와 광전변환 특성인자와의 상관관계 분석

  • Lee, Gyeong-Su;Lee, Dong-Uk;Kim, Eun-Gyu;Choe, Won-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.329.2-329.2
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    • 2014
  • 지난 수년간 태양전지의 광전변환효율을 높이기 위해 자가 조립된 InAs 또는 GaSb와 같은 양자점을 GaAs 단일 p-n 접합에 적용하는 연구를 개발해 왔다. 그러나 양자점의 흡수 단면적에 의한 광 흡수도는 양자점층을 수십 층을 쌓으면 증가하지만 활성층에 결함을 생성시킨다. 생성된 결함은 운반자트랩으로 작용하여 태양전지의 광전변환효율을 감소시킨다. 본 실험에서는 양자점이 적용된 태양전지와 적용되지 않은 태양전지의 광전변환 효율을 비교하고, 깊은준위 과도용량 분광법을 이용하여 결함상태를 측정 및 비교함으로써, 활성층 내부에 생성된 결함이 광전변환 효율에 미치는 영향을 분석하였다. 소자구조는 분자선 증착 방법을 이용하여, 먼저 n+-형 GaAs기판위에 n+-형 GaAs를 250 nm 증착한 후, 도핑이 되지 않은 GaAs활성층을 $1{\mu}m$ 두께로 증착하였다. 마지막으로 n+ 와 p+-형 GaAs를 각각 50, 750 nm 증착함으로써 p-i-n구조를형성하였다. 여기서, n+-형 GaAs 과 p+-형 GaAs의 도핑농도는 동일하게 $5{\times}1018cm-3$로 하였다. 또한 양자점을 태양전지 활성층에 20층을 형성하였다. 이때 p-i-n 태양전지 와 양자점 태양전지의 광전변환 효율은 각각 5.54, 4.22 % 를 나타내었다. p-i-n 태양전지의 개방 전압과 단락전류는 847 mV, 8,81 mA이며 양자점 태양전지는 847 mV, 6.62mA로 확인되었다. 태양전지의 전기적 특성을 측정하기 위해 소자구조 위에 Au(300nm)/Pt(30nm)/Ti(30nm)의 전극을 전자빔증착장치로 증착하였으며, 메사에칭으로 직경 $300{\mu}m$의 태양전지 구조를 제작하였다. 정전용량-전압 특성 및 깊은준위 과도용량 분광법을 이용하여 태양전지의 결함분석 및 이에 따른 광전변환 특성인자와의 상관관계를 논의할 것이다.

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The Properties of Electrical Conduction and Photoconduction in Polyphenylene Sulfide(PPS) by Uniaxial Elongation (일축연신에 따른 Polyphenylene sulfide(PPS)의 전기전도 및 광전도 특성)

  • 이운용;장동욱;강성화;임기조;류부형
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.223-226
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    • 1998
  • In this paper, we have investigated how morphology and electrical properties in Polyphenylene sulfide(PPS) are changed by uniaxial elongation. XRD pattern shows that interplanar distance and crystallinities are decreased by increasing elongation ratio. Electrical conduction mechanism of PPS is explained as schottky emission from analysis of electrical current. The electrical current is decreased by increasing elongation ratio. The conductivity is changed remarkably above the glass transition temperature around $(82^{\circ}C)$. The band gap of PPS is evaluated as 3.9-4(eV) from the results of photoconductivity. Increarnent of elongation ratio gives us some information about deep trap formation from photocurrent.

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The Properties of Electrical Conduction and Photoconduction in polyphenylene Sulfide(PPS) by Uniaxal Elongation (일축연신에 따른 Polyphenylene Sulfide(PPS)의 전기전도 및 광전도 특성)

  • Lee, Un-Yong;Jang, Dong-Uk;Shin, Tae-Su;Lim, kee-Joe;Ryu, Boo-Hyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.10
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    • pp.763-767
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    • 1998
  • In this paper, it is investigated how the morphology and electrical properties in Polyphenylene Sulfide(PPS) changed by uniaxial elongation. XRD(X-ray diffraction) pattern shows that interplanar distance and crystallinities are decreased by increasing elongation ratio. electrical conduction mechanism of PPS is explained as Schottky emission mechanism. the electrical current is decreased by increasing elongation ratio. The conductivity is changed considerably above the glass transition temperature around 82(>$^{\circ}C$). The band gap of PPS is evaluated as 3.7~4(eV)

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A Study on the Breakdown in MHEMTs with InAlAs/InGaAs Heterostructure Grown on the GaAs substrate (InAlAs/InGaAs/GaAs MHEMT 소자의 항복 특성에 관한 연구)

  • Son, Myung-Sik
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.11
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    • pp.1-8
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    • 2011
  • One of the most important parameters that limit maximum output power of transistor is breakdown. InAlAs/InGaAs/GaAs Metamorphic HEMTs (MHEMTs) have some advantages, especially for cost, compared with InP-based ones. However, GaAs-based MHEMTs and InP-based HEMTs are limited by lower breakdown voltage for output power even though they have good microwave and millimeter-wave frequency performance with lower minimum noise figure. In this paper, InAlAs/$In_xGa_{1-x}As$/GaAs MHEMTs are simulated and analyzed for breakdown. The parameters affecting breakdown are investigated in the fabricated 0.1-${\mu}m$ ${\Gamma}$-gate MHEMT device having the modulation-doped $In_{0.52}Al_{0.48}As/In_{0.53}Ga_{0.47}As$ heterostructure on the GaAs wafer using the hydrodynamic transport model of a 2D commercial device simulator. The impact ionization and gate field effect in the fabricated device including deep-level traps are analyzed for breakdown. In addition, Indium mole-fraction-dependent impact ionization rates are proposed empirically for $In_{0.52}Al_{0.48}As/In_xGa_{1-x}As$/GaAs MHEMTs.

A Review of Middle Cretaceous to Early Miocene Petroleum System in the Zagros Fold Belt, Iran (이란 자그로스 습곡대의 백악기 중기-마이오세 초기 석유 시스템에 대한 고찰)

  • Woo, Juhwan;Rhee, Chul Woo
    • Journal of the Korean earth science society
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    • v.42 no.6
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    • pp.646-661
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    • 2021
  • The Zagros fold-thrust belt formed from the collision of the Arabian and Eurasian plates during Cenozoic periods and extends for 2,000 km, from Turkey to the Hormuz Strait, in the northeast-southwest direction. Anticline traps in the front of the Zagros thrust fold hold approximately 8% of the world's petroleum reserves. Middle Cretaceous to Early Miocene petroleum systems of the belt have the largest original oil in place (OOIP). The oil is expelled from Kazhdumi and Pabdeh source rocks, and accumulated in the Asmari and Bangestan (including Sarvak and Ilam formations) reservoir rocks covered by the evaporitic Gachsaran and the marly Gurpi formations. The hydrocarbons trapped in the Asmari and Sarvak reservoirs are mainly charged (more than 90%) by the Kazhdumi Formation whereas the rest are charged by the Pabdeh Formation. In the Dezful Embayment, all the large high-relief anticlines have been drilled into, except in the Asmari, Sarvak and Khami formations, where a few anticlines of smaller size and deeper strata remain unexplored. Therefore, the exploration potential of these regions strengthens our understanding of the Zagros fold-thrust belt's petroleum system.