• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.83-83
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• 2012

금속 실리사이드는 낮은 비저항, 실리콘과의 좋은 호환성 등으로 배선 contact 물질로 널리 연구되고 있다. 특히 $CoSi_2$는 선폭의 축소와 관계없이 일정하고 낮은 비저항과 열적 안정성이 우수한 특성 등으로 배선 contact 물질로 활발히 연구되고 있다. 금속 실리사이드를 실리콘 평면기판에 형성시키는 방법으로는 열처리를 통한 금속박막과 실리콘 기판 사이에 확산작용을 이용한 SALICIDE (self-algined silicide) 기술이 대표적이며 CoSi2도 이와 같은 방법으로 형성할 수 있다. Co 박막을 증착하는 방법에는 물리적 기상증착법 (PVD)과 유기금속 화학 증착법 등이 보고되어있지만 최근 급격하게 진행 중인 소자구조의 나노화 및 고 단차화에 따라 기존의 증착 기술은 낮은 단차 피복성으로 인하여 한계에 부딪힐 것으로 예상되고 있다. ALD(atomic layer deposition)는 뛰어난 단차 피복성을 가지고 원자단위 두께조절이 용이하여 나노 영역에서의 증착 방법으로 지대한 관심을 받고 있다. 앞선 연구에서 본 연구진은 CoCp2 전구체과 $NH_3$ plasma를 사용하여 Plasma enhanced ALD (PE-ALD)를 이용한 고 순도 저 저항 Co 박막 증착 공정을 개발 하고 이를 SALICIDE 공정에 적용하여 $CoSi_2$ 형성 연구를 보고한 바 있다. 하지만 이 연구에서 PE-ALD Co 박막은 플라즈마 고유의 성질로 인하여 단차 피복성의 한계를 보였다. 이번 연구에서 본 연구진은 Co(AMD)2 전구체와 $NH_3$, $H_2$, $NH_3$ plasma를 반응 기체로 사용하여 Thermal ALD(Th-ALD) Co 및 PE-ALD Co 박막을 증착 하였다. 고 단차 Co 박막의 증착을 위하여 Th-ALD 공정에 초점을 맞추어 Co 박막의 특성을 분석하였으며, Th-ALD 및 PE-ALD 공정으로 증착된 Co 박막의 단차를 비교하였다. 연구 결과 Th-ALD Co 박막은 95% 이상의 높은 단차 피복성을 가져 PE-ALD Co 박막의 단차 피복성에 비해 크게 향상되었음을 확인하였다. 추가적으로, Th-ALD Co 박막에 고 단차 박막의 증착이 가능한 Th-ALD Ru을 capping layer로 이용하여 CoSi2 형성을 확인하였고, 기존의 PVD Ti capping layer와 비교하였다. 이번 연구에서 Co 박막 및 $CoSi_2$ 의 특성 분석을 위하여 X선 반사율 분석법 (XRR), X선 광전자 분광법 (XPS), X선 회절 분석법 (XRD), 주사 전자 현미경 (SEM), 주사 투과 전자 현미경 (STEM) 등을 사용하였다.

• Analytical Science and Technology
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• v.25 no.5
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• pp.265-272
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• 2012

Okamoto cavity was modified to generate high power (2.45 GHz, 2 kW) He, N2 and Ar plasmas with WR-340 waveguide. Many factors which influence to the plasma generation were optimized and investigated for the spectroscopic properties of the He plasma generated. Some of the important factors are the diameter of the inner conductor, the distance between the inner and outer conductors and the distance between the tip of the inner conductor and the torch. After optimization for the He, two torches (a commercial mini torch for ICP and a tangential flow torch made locally) were compared and showed similar results for the helium plasma gas flow of 25 L/min~30 L/min. A tall torch (extended) was used to block the air in-flow and reduced the background intensity at 340 nm region (NH band). Emission intensity was measured for determination of halogen element in the aqueous solution with power and carrier gas flow rate. Electron number density and the excitation temperature were on the order of $3.67{\times}10^{11}/cm^3$ and 4,350 K, respectively. These values are similar or a bit smaller than other microwave plasmas. It has been possible to analyze aqueous samples. The detection limit for Cl (479.45 nm) was obtained to be 116 mg/L and needs analytical optimization for the better performance.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.8
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• pp.699-705
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• 2015

Aircraft needs high lift-to-drag ratio and weight reduction of the structure for long endurance flight with a small power. Generally high aspect ratio wing is applied to HALE(High Altitude Long Endurance) aircraft. Also high modulus, and high strength CFRP(Carbon Fiber Reinforced Plastic) has been used in primary structures. and thin mylar(membrane material) film has been applied to skin of wing. As a result, wing is more flexible than the other structures. and the stiffness of thin mylar film has an affect on dynamic stability. In this study, the membrane characteristic of mylar film has been simulated using nonlinear gap elements. And equivalent modeling method using shell elements is presented using the nonlinear simulation result. The linear equivalent model has verified using the results of nonlinear membrane method. Proposed linear equivalent shell model has applied to mode analysis for estimate the effect of mylar mechanical properties on natural frequency.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2005.06a
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• pp.476-484
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• 2005

This paper is to evaluate rather correctly $C^{14}$ ingestion dose that inhabitants around PWR plants can receive, and draw how to apply TF(Transfer Factor) to evaluate dose by the ingestion of animal products. For this, in this paper, dose assessment and analysis about existing materials related to TF were carried out, and the methodology to present TF was based on dose assessment and analysis result. The ingestion dose calculated using TFs presented by CSA and KEPRI was high or equal compared with SAM(Specific Activity Model) which is the most conservative, on the other hand, TFs given by NEC did not consider the effect according to volume change of animal at all, Therefore, it is judged that models used in the existing codes to asses the $C^{14}$ concentration into animal products must be improved to apply fundamentally hybrid model using transfer factors, that transfer factor on each animal products have to be developed through experiment for applying to our county.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2005.06a
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• pp.121-128
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• 2005

A study on the selective separation of $^{99}Tc,\;^{94}Nb,\;^{55}Fe,\;^{90}Sr$ and $^{59}Ni(^{63}Ni)$ from various radioactive wastes discharged from the nuclear power plants in Korea is being performed for use in their quantifications which are indispensible for the evaluation of the radionuclide inventory. Separation behaviour of Ce, Ca, Mg, Al, Cr, Ti, Mn and Cu recovered along with Ni during the separation of Re (as a surrogate of $^{99}Tc$), Nb, Fe and Sr by anion exchange and Sr-Spec extraction chromatography was investigated by cation exchange and Ni-Spec extraction chromatography using synthetic radioactive waste dissolved solutions containing matrix elements such as Re, Nb, Fe, Sr, Ni, B, Na, K, Ce, Co, Ca, Mg, Al, Zn, Cr, Pb, Cd, Mo, Mn, Cu, Zr, Ti and U. To purify the Ni fraction recovered and prepare a radionuclide source available for gas proportional counting, an application of the Ni precipitation procedure with dimethylglyoxime in the medium of ammonium citrate and tartaric acid solutions as a masking agent for co-existing metal ions was described in detail.

• Journal of Sensor Science and Technology
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• v.10 no.6
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• pp.295-303
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• 2001

White emission thin film electroluminecent device was fabricated with ZnS for phosphor layers and BST ferroelectric thin film for insulating layers. The ZnS:Mn and $ZnS:SmF_3$ layers were used for emission of red color. Also the $ZnS:TbF_3$ and $ZnS:AgF_3$ layers were used to emission of green and blue color, respectively. And the fabrication conditions of the BST insulating layers were followings, that is, the composition ratio of target, substrate temperature, working pressure and operating gas ratio were $Ba_{0.5}Sr_{0.5}Ti_{0.3}$, $400^{\circ}C$, 30 mTorr and 9:1, respectively. The thickness of phosphor were 150 nm for each layers and the insulating layers of upper and bottom were 400 nm and 200 nm, respectively. The luminesence threshold voltage was $75\;V_{rms}$ and the maximum brightness of the thin film electroluminecent device was $3200\;cd/m^2$ at $100\;V_{rms}$.

• Journal of Sensor Science and Technology
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• v.12 no.3
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• pp.103-111
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• 2003

A chromel-alumel thermoelectric flow sensor using $Si_3N_4/SiO_2/Si_3N_4$ thermal isolation membrane was fabricated. Temperature coefficient of resistance of thin film Pt-heater was about $0.00397/^{\circ}C$, and Seebeck coefficient of chromel-alumel thermocouple was about $36\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and $N_2$-flow sensitivity increased as heater voltage increased or the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_2$-flow sensitivity and thermal response time of the sensor were about $1.5\;mV/sccm^{1/2}$ and 0.18 sec., respectively. Linear range in flow sensitivity of the flow sensor was wider than that of Bi-Sb flow sensor.

• Applied Chemistry for Engineering
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• v.17 no.3
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• pp.250-254
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• 2006

Reaction of $CO_2$ with $Li_{2}ZrO_{3}$ has been investigated in a TGA and the effects of $H_{2}$ and CO on the removal of $CO_{2}$ using $Li_{2}ZrO_{3}$ were evaluated in a packed bed reactor. The initial rate of $CO_{2}$ removal reaction of $Li_{2}ZrO_{3}$ increased with the increase of gas flow rate up to 100 mL/min and then was maintained, which implied the disappearance of the gas film resistance. The reaction of $CO_{2}$ with $Li_{2}ZrO_{3}$ took place as the first order and the range of optimum temperature was found to be about $500{\sim}600^{\circ}C$. XRD and SEM analysis showed the formation of crystalline $Li_{2}ZrO_{3}$ and porous $Li_{2}ZrO_{3}$/$ZrO_{2}$. The presence of $H_{2}$ did not affect the adsorption of $CO_2$ with $Li_2ZrO_3$. On the other hand, CO inhibited the sorption of $CO_{2}$ into $Li_{2}CO_{3}$(L) on $Li_{2}ZrO_{3}$.

• Applied Chemistry for Engineering
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• v.18 no.6
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• pp.643-649
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• 2007

Lipase-catalyzed esterification of structural butanol isomers and n-butyric acid was investigated in supercritical carbon dioxide. The experiments were performed in a high pressure cell for 5 hrs with a stirring rate of 150 rpm at 323.15 K and 130 bar. The Candida Antarctica lipase B (CALB) was used in whole system as a catalyst. The experimental results were analyzed by GC-FID using a INNOWax capillary column. The conversion yield and the tendency of the esterification in supercritical carbon dioxide were compared with estimated results by molecular dynamics simulation. Based on the Ping-Pong Bi-Bi mechanism with competitive inhibition, each step of the reaction was optimized; using this result the transition state was predicted. Conformational preference of isomers was also analyzed using molecular dynamics simulations. This kind of approach will be further extended to the prediction of enzyme-catalyzed reactions using computers.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.24 no.4
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• pp.277-286
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• 2012

In the numerical simulation of wave fields using a multi-phase flow model that considers simultaneous flows of materials with different states such as gas, liquid and solid, there is need of an accurate representation of the interface separating the fluids. We adopted an algebraic interface capturing method called tangent of hyperbola for interface-capturing(THINC) method for the capture of the free-surface in computations of multi-phase flow simulations instead of geometrical-type methods such a volume of fluid(VOF) method. The THINC method uses a hyperbolic tangent functions to represent the surface, and compute the numerical flux for the fluid fraction functions. One of the remarkable advantages of THINC method is its easy applicability to incorporate various numerical codes based on Navier-Stokes solver because it does not require the extra geometric reconstruction needed in most of VOF-type methods. Several tests were carried out in order to investigate the advection of interfaces and to verify the applicability of the THINC method to wave fields based on the one-field model for immiscible two-phase flows (TWOPM). The numerical results revealed that the THINC method is able to track the interface between air and water separating the fluids although its algorithm is fairly simple.