• Title/Summary/Keyword: 광 산란

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Stimulated Raman scattering at 1.54${\mu}m$ and Brillouin scattering at 1.06${\mu}m$ in $CH_4$ under 5 Hz repetition rate (반복률과 라만매질 압력에 따른 1.54 ${\mu}m$ 전방, 후방 유도라만 및 1.06${\mu}m$ Brillouin 산란광의 출력특성)

  • 최영수;전용근;김재기
    • Korean Journal of Optics and Photonics
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    • v.10 no.2
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    • pp.95-101
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    • 1999
  • We have studied the 1.54$\mu\textrm{m}$ forward and backward stimulated Raman scattering (SRS) and stimulated Brillouin scattering (SRS) for various $CH_4$pressures by 1.06$\mu\textrm{m}$ Q-switched Nd:YAG laser pumping under a repetition rate of Hz in single pass. We obtained that the output of backward SRS was more efficient than that of the forward SRS. The output energy and conversion efficiency of forward and backward SRS were higher than those of SBS since SRS is a steady state, but SBS is a transient state. In a $CH_4$gas uncirculating system, the output energy of the backward SRS and SBS were reduced the about 47% due to a thermal heating of $CH_4$medium in a focusing region for a repetition rate of 5 Hz. But, the output energy of forward SRS was slightly enhanced by about 8.5% due to the increase of the undepleted pump beam in the backward SRS generation. Inthe Raman half resonator using a dichromatic focusing lens, the conversion efficiency of SRS was more than 37% for a input pump laser energy of 40 mJ.

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저압 광 산란 입자측정센서의 신호 분석 알고리즘 연구

  • Mun, Ji-Hun;Yun, Jin-Uk;Jeong, Hyeok;Gwon, Yong-Taek;Gang, Sang-U;Yun, Ju-Yeong;Sin, Yong-Hyeon;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.35-35
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    • 2011
  • 반도체 공정 및 디스플레이 공정에서 발생하는 오염입자는 공정 불량을 일으키는 가장 큰 원인 중의 하나이며, 수십 나노에서 수 백 나노의 크기를 갖는다. 최근 디스플레이 및 반도체 산업이 발전함에 따라 회로의 선폭이 점차 감소하고 있으며 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법은 레이저를 이용하여 공정 후 표면에 남아있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 본 연구에서는 저압 환경에서 실시간으로 입자를 모니터링 할 수 있는 장비를 입자의 광 산란 원리를 이용하여 개발하였으며, 산란 신호를 입자크기로 변환하는 신호 분석 알고리즘 연구를 수행하였다. 빛이 입자와 충돌하게 되면 산란 및 흡수 현상이 발생하게 되는데 이 때 발생하는 산란 및 흡수량과 입자 크기와의 연관성이 Gustav Mie에 의해서 밝혀졌으며, 현재까지 광을 이용한 입자 크기 분석 장치의 기본 원리로 사용되고 있다. 하지만, Mie 이론은 단일입자가 일정한 강도를 가진 광을 통과할 경우인 이상적인 조건에서 적용이 가능하고 실제 조건에서는 광이 가우시안 분포를 가지며 광 집속에 의해서 광 강도가 위치에 따라 변하기 때문에 이러한 조건을 가지는 광을 입자가 통과할 때 발생하는 산란량은 단순히 Mie 이론에 의해서 계산하는 것이 불가능 하다. 본 연구에서는 이러한 현상을 입자 측정의 불확정성 이라고 규정하고 입자가 특정한 위치를 통과할 확률을 이용하여 신호를 분석하는 알고리즘을 개발 및 연구를 수행하였다.

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Dependence of Localized Surface Plasmon Properties on the Shape of Metallic Nanostructures (금속 나노 구조체의 형상에 따른 국소 표면 플라즈몬 특성)

  • Kim, Joo-Young;Cho, Kyu-Man;Lee, Taek-Sung;Kim, Won-Mok;Lee, Kyeong-Seok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.77-77
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    • 2008
  • 금(Au)이나 은(Ag)과 같은 귀금속 물질로 형성된 금속 나노 구조체는 표면 플라즈몬 공진(Surface Plasmon Resonance, SPR) 현상과 이의 국부 환경(local environment) 변화에 대해 민감한 의존성으로 인하여 생화학적 센서로의 응용이 주목 받고 있다. 표면 플라즈몬 공진은 광 흡수와 광 산란을 수반하는데, 두 가지 특성 모두 분광학적 신호검출방식으로 센서에 응용가능하다. 이 중 광 산란을 이용하는 방식은 광원의 배경잡음 효과가 배제되기 때문에 단일 입자 검출에 유리하다. 광 흡수와 광 산란 특성은 금속 나노 구조체는 크기, 형상, 주변 매질, 물질의 선택에 따라서 영향을 받는다. 본 연구에서는 금 나노 디스크(nanodisc)의 형상에 따라서 여기 되는 표면 플라즈몬이 광 흡수와 광 산란 특성에 미치는 영향을 가시광과 근적외선 영역에 대해서 불연속 쌍극자 근사법(Discrete Dipole Approximation, DDA)을 이용하여 전사모사(simulation) 하였다. 금 나노 디스크의 형상과 플라즈몬 특성 간의 관계는 공명 파장과 산란 양자 거둠율(scattering quantum yield, $\eta$)을 이용하여 분석하였고, 센서로서의 응용을 가늠하기 위해 주변 매질의 굴절률을 조절하여 그에 따른 민감도(sensitivity )를 비교하였다. 나노 디스크의 모양이 판상에 가까워질수록 공명 파장은 적색 편이하였고 광 산란 효율과 민감도는 증가하는 현상이 나타났다. 또한, 산란 양자 거둠율은 증가하다가 완만하게 감소하는 경향이 나타났다.

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Measurement of angular velocity using the self-mixing effect of semiconductor laser (되먹임 효과를 이용한 회전체의 속도측정)

  • 이병욱
    • Korean Journal of Optics and Photonics
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    • v.11 no.4
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    • pp.250-254
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    • 2000
  • We have constructed laser Doppler velocimetry system using self-mixing effect with a semiconductor laser. This technology is based on the frequency mixing phenomena which occurs when light scattered back from the moving object into the laser cavity interferes with light inside the laser. We have compared the value of Doppler shifted frequency with the velocity variation of the wheel. Frequency dependence on the angle between the moving direction of rotating aluminum wheel and the incident beam also have been proved. As an illustration of the performance of the velocimeter, velocity measurements of a rotating disk are described. Doppler signal shows a good linear relationship with velocity of rotating disk.

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The Turbidity Measured by Division Image Analysis in Flow Type Sample (분할화상분석에 의한 흐름 형태 시료의 탁도 측정)

  • Park, Jong-Ho;Park, Soo-Haeng;Ryu, Min-Su
    • Applied Chemistry for Engineering
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    • v.20 no.6
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    • pp.681-684
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    • 2009
  • The turbidity of flow type samples has a nonlinear relation to brightness of laser scattered light, but the shape of images in laser scattered light is different from each turbidity samples. The turbidity measurement will be easy if it uses a pattern of images in laser scattered light. But the excessive analysis load comes from the turbidity measured by red, green, blue intensity (intensity) of all pixels of images in laser scattered light. Therefore the images in laser scattered light were divided by appropriate block to decrease excessive analysis load. The shape of divided images in laser scattered light was different from each turbidity sample. The real turbidity has a linear relation to turbidity measured by the artificial neural network learned with the intensity of divided images in laser scattered light and turbidity.

Surface roughness analysis of distributed Bragg reflectors in vertical-cavity surface-emitting lasers by measuring the scattering distribution function (광 산란 측정을 통한 수직 공진 표면광 레이저 반사경의 계면 거칠기 분석)

  • Ju, Young-Gu;Kang, Myung-Su;lee, Yong-Hee;Shin, Hyun-Kuk;Kim, Il
    • Korean Journal of Optics and Photonics
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    • v.9 no.2
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    • pp.63-69
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    • 1998
  • For detailed characterization of scattering losses occurring in VCSEL's distributed Bragg reflectors, we performed scattering experiment and obtained the information about surface roughness through the analysis of a modified transmission matrix method. The various wafers grown for VCSELs were used for the scattering experiment. The fractal surface assumption and extrapolation is used to estimate the scattered intensity near specular angle. The modified transmission matrix method employed in the analysis considers the scattering loss at each interface and calculates the reflectivity efficiently and easily. As a result, the surface roughness ranges from $4{\AA}$ to $10{\AA}$ The reduction of reflectivity due to the scattering amounts to 0.26% in case of $10{\AA}$ roughness.

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Response of laser light active scattering aerosol spectrometer to light-absorbing aerosol particulates (광흡수성 분체입자에 대한 레이저산란광 분체입도측정기의 반응 특성)

  • Jeung, I. S.
    • Journal of the korean Society of Automotive Engineers
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    • v.6 no.2
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    • pp.55-63
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    • 1984
  • Berglund-Liu 진동방식 단분산 분체입자 발생기(Berglund-Liu vibrating orifice monodisperse aerosol generator)에 의하여 제작한 단분산 광흡수성 표준분체입자를 사용하여 레이저 산란광 분체입도 측정기 (Knollenberg active scattering aerosol spectrometer)의 반응특성을 조사하 였다. 실험결과, 기기의 반응특성은 Mie 산란이론에 의하여 계산한 이론치와 매우 잘 일치하며 특히 광흡수성 분체입자는 광통과성 분체입자가 다의적인 특성을 나타내는 것에 반하여 거의 단조증가하는 일의적인 특성을 가지고 있으며 광흡수성 분체입자의 반응특성이 제작자의 교정 치에 가까운 결과를 나타내었다.

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Measurement of optical coefficients of multiple scattering media by using frequency domain spectroscopy (주파수 영역 분광법을 이용한 다중산란 매질의 광학계수 측정)

  • 전계진;윤길원;김건식;전성만;박승한
    • Korean Journal of Optics and Photonics
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    • v.10 no.5
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    • pp.357-363
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    • 1999
  • A frequency domain spectroscopic system was constructed to investigate the optical properties of multiple scattering media. The alternating current (AC) and phase lag components of backscattered light were measured by using the heterodyne detection method. Absorption and transport scattering coefficients were computed from the values based on diffusion theory. Predictions showed excellent matches in comparison with actual values of absorption and scattering. Predictable ranges of the optical coefficients were analyzed in terms of the distance between light source and detector, and modulation frequencies. A proposed compact experimental set-up using laser diodes can be utilized to estimate non-invasively the optical properties of multiple scattering media such as biological tissues.

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Improvement of Canopy Light Distribution, Photosynthesis, and Growth of Lettuce (Lactuca Sativa L.) in Plant Factory Conditions by Using Filters to Diffuse Light from LEDs (LED 식물공장에서 산란 유리 이용에 의한 상추(Lactuca Sativa L.)의 군락 광분포, 광합성 및 생장 향상)

  • Kang, Woo Hyun;Zhang, Fan;Lee, June Woo;Son, Jung Eek
    • Horticultural Science & Technology
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    • v.34 no.1
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    • pp.84-93
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    • 2016
  • Plant factories with artificial lights require a large amount of electrical energy for lighting; therefore, enhancement of light use efficiency will decrease the cost of plant production. The objective of this study was to enhance the light use efficiency by using filters to diffuse the light from LED sources in plant factory conditions. The two treatments used diffuse glasses with haze factors of 40% and 80%, and a control without the filter. For each treatment, canopy light distribution was evaluated by a 3-D ray tracing method and canopy photosynthesis was measured with a sealed acrylic chamber. Sixteen lettuces for each treatment were cultivated hydroponically in a plant factory for 28 days after transplanting and their growth was compared. Simulation results showed that the light absorption was concentrated on the upper part of the lettuce canopy in treatments and control. The control showed particularly poor canopy light distribution with hotspots of light intensity; thus the light use efficiency decreased compared to the treatments. Total light absorption was the highest in the control; however, the amount of effective light absorption was higher in treatments than the control, and was highest in treatment using filters with a haze factor of 80%. Canopy photosynthesis and plant growth were significantly higher in all the treatments. In conclusion, application of the diffuse glass filters enhanced the canopy light distribution, photosynthesis, and growth of the plants under LED lighting, resulting in enhanced the light use efficiency in plant factory conditions.

Fabrication of PDMS microlens for optical detection (광학적 검출을 위한 PDMS 마이크로렌즈의 제작)

  • Park, Se-Wan;Kim, Hyeon-Cheol;Chun, Kuk-Jin
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.4
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    • pp.15-20
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    • 2009
  • In a detection system based on laser light scattering, focusing an excitation laser beam into a focal point of a channel in a microfluidic chip is important for obtaining the highest excitation intensity, and consequently for obtaining a laser light scattering signal using a photodetector with a high efficiency. In this paper, we present a polydimethylsiloxane (PDMS) microfluidic chip consisting of an integrated PDMS microlens for cell detection based on laser light scattering. We fabricated PDMS microlens for optical detection system by simply putting down on PDMS chips. The PDMS microlens was fabricated by photoresist reflow and replica molding. This fabrication technique is simple and has an excellent property in terms of the microlens and a high-dimensional accuracy. The PDMS microlens integrated on the PDMS microfluidic chip has been verified to improve the laser intensity, and accordingly, the signal-to-noise ratio and sensitivity of laser light scattering detection for red blood cells(RBCs)