• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.128-128
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• 2016

Cu 배선폭 미세화 기술은 반도체 디바이스의 성능 향상을 위한 핵심 기술이다. 현재 배선 기술은 lithography, deposition, planarization등 종합적인 공정 기술의 발전에 따라 10x nm scale까지 감소하였다. 하지만 지속적인 feature size 감소를 위하여 요구되는 높은 공정 기술 및 비용과 배선폭 미세화로 인한 재료의 물리적 한계로 인하여 배선폭 미세화를 통한 성능의 향상에는 한계가 있다. 배선폭 미세화를 통한 2차원적인 집적도 향상과는 별개로 chip들의 3차원 적층을 통하여 반도체 디바이스의 성능 향상이 가능하다. 칩들의 3차원 적층을 위해서는 별도의 3차원 배선 기술이 요구되는데, TSV(through-Si-via)방식은 Si기판을 관통하는 via를 통하여 chip간의 전기신호 교환이 최단거리에서 이루어지는 가장 진보된 형태의 3차원 배선 기술이다. Si 기판에 $50{\mu}m$이상 깊이의 via 및 seed layer를 형성 한 후 습식전해증착법을 이용하여 Cu 배선이 이루어지는데, via 내부 Cu ion 공급 한계로 인하여 일반적인 공정으로는 void와 같은 defect가 형성되어 배선 신뢰성에 문제를 발생시킨다. 이를 해결하기 위해 각종 유기 첨가제가 사용되는데, suppressor를 사용하여 Si 기판 상층부와 via 측면벽의 Cu 증착을 억제하고, accelerator를 사용하여 via 바닥면의 Cu 성장속도를 증가시켜 bottom-up TSV filling을 유도하는 방식이 일반적이다. 이론적으로, Bottom-up TSV filling은 sample 전체에서 Cu 성장을 억제하는 suppressor가 via bottom의 강한 potential로 인하여 국부적 탈착되고 via bottom에서만 Cu가 증착되어 되어 이루어지므로, accelerator가 없이도 void-free TSV filling이 가능하다. Accelerator가 Suppressor를 치환하여 오히려 bottom-up TSV filling을 방해한다는 보고도 있었다. 본 연구에서는 유기 첨가제의 치환으로 인한 TSV filling performance 저하를 방지하고, 유기 첨가제 조성을 단순화하여 용액 관리가 용이하도록 하기 위하여 suppressor만을 이용한 TSV filling 연구를 진행하였다. 먼저, suppressor의 흡착, 탈착 특성을 이해하기 위한 연구가 진행되었고, 이를 바탕으로 suppressor만을 이용한 bottom-up Cu TSV filling이 진행되었다. 최종적으로 $60{\mu}m$ 깊이의 TSV를 1000초 내에 void-free filling하였다.

• International Journal of Highway Engineering
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• v.10 no.1
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• pp.123-134
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• 2008

Since the end treatments of guardrails installed on domestic roads have the shapes which can easily penetrate and turnover a vehicle, the occupant can be subjected to severe injury when a vehicle impacts the end treatments. In this study, the criteria of performance evaluation for end treatments are suggested which are suitable to domestic road circumstances. Based on the investigation for the installation and studies instances of end treatments, the mechanism of end treatments is examined and the new end treatment suitable to domestic road circumstances is suggested. The suggested end treatment was verified by computer simulation using d LS-DYNA programs and satisfied the suggested performance evaluation criteria for end treatments. And the developed end treatment was verified by full-scale vehicle crash test and satisfied the following three primary appraisal factors of the suggested performance evaluation criteria for end treatments; occupant risk criteria, structural adequacy, and after-collision vehicle trajectory. This study is the first to develop end treatments considering the occupant safety in Korea. Therefore, If the developed end treatments is installed on roads and highways, it can be expected that it will reduce the grave situation of end treatment accidents and increase the safety of roads.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.3
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• pp.47-52
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• 2008

This investigation was performed in order to study the properties of deposition and layers by Silicon Dioxide, SiO2, as dielectric onto Via and Trench which have high Aspect Ratio (AR). Thus, in order to confirm these properties, three types of CVD, which were PECVD, PETEOS, and ALD, were selected. On the experiment each of the property sections was estimated that step overage of PECVD: <30%, PETEOS: 45%, ALD: 75% and the RSM of PECVD: 27.8 nm, PETEOS: 2.1 nm, ALD: <2.0 nm. As a result of this experiment for the property of electric film, ALD was valuated to be the most favorable outcome. However, ALD was valuated to have the least quality for the deposition rate. ALD deposition rate, $10\;\AA/min$ by $1\;\AA$/1cycle, was prominently lower than PETEOS, which had the deposition rate of $5000\;\AA$/min. Since electric film requires at least $1000\;\AA$ thicknesses, ALD was not suitable for the deposition rate. which is the most important component in a practical use. Therefore, in this particular study, PETEOS was evaluated to be the most suitable recipe.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.9
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• pp.557-567
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• 2016

In this study, the optimal design of heat exchangers, including the evaporator and condenser of a solar-heating ocean thermal energy conversion (SH-OTEC), is investigated. The power output of the SH-OTEC is assumed to be 100 kW, and the SH-OTEC uses the working fluid of R134a and high-performance commercial tubes. The surface heat transfer area and the pressure drop were strongly dependent on the number of tubes, as well as the number of tube passes. To solve the reciprocal tendency between the heat transfer area and pressure drop with respect to the number of tubes, as well as the number of tube passes, a genetic algorithm (GA) with two objective functions of the heat transfer area (the capital cost) and operating cost (pressure drop) was used. Optimal results delineated the feasible regions of heat transfer area and operating cost with respect to the pertinent number of tubes and tube passes. Pareto fronts of the evaporator and condenser obtained from multi-objective GA provides designers or investors with a wide range of optimal solutions so that they can select projects suitable for their financial resources. In addition, the surface heat transfer area of the condenser took up a much higher percentage of the total heat transfer area of the SH-OTEC than that of the evaporator.

• Journal of Korean Society of Steel Construction
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• v.25 no.6
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• pp.601-612
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• 2013

In the present study, details of the TSC beam-to-PSRC column connection for low and middle seismic zones were developed. For ease construction, the top and bottom flanges of the steel section of the TSC beam were discontinuous at the joint face on purpose, while the web passes through the joint. Thus, tensile resistance of the top and bottom flanges is not considered in the calculation of nominal strength of the connection. Cyclic loading tests on two interior connections and an exterior connection were performed to verify the seismic performance. The test parameter for two interior connections was the depth of the TSC beams: 600 and 700 mm including the slab depth. The test results showed that the nominal strength of the connections predicted by KBC 2009 correlated well with the test results. The connection specimens exhibited relatively good deformation and energy dissipation capacities, greater than the requirements for the ordinary and intermediate moment frames. Ultimately, the connection specimens were failed at the story drift ratios of 3.0 to 4.0 % due to local buckling and tensile fracture of the web of the TSC beam passing through the joint. By modifying the existing provisions of ASCE, the joint shear strength of the TSC beam-PSRC column connection was evaluated.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.9 no.1
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• pp.33-40
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• 2011

In the compacted bentonite containing $Ag_2O$, the transport of iodide ion was investigated by Through-diffusion method. It is confirmed that Iodide ion is transported by diffusion process in the compacted bentonite containing $Ag_2O$ as well as in the compacted bentonite without $Ag_2O$. However, the lag-time of iodide ion in the compacted bentonite containing $Ag_2O$ is larger than that in the compacted bentonite without $Ag_2O$. The increase of the lag-time was observed in pure iodide ion solution and also in 0.1M NaCl-iodide ion solution. The apparent diffusion coefficient of iodide ion in the compacted bentonite containing $Ag_2O$ has lower value than that in the compacted bentonite without $Ag_2O$. The effect of $Ag_2O$ on the effective diffusion coefficient was not clearly investigated in the compacted bentonite containing $Ag_2O$ while the values of effective diffusion coefficient of iodide ion in the compacted bentonite without $Ag_2O$ obtained in this study were similar to those in the compacted bentonite reported in the literature.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.37 no.5
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• pp.787-799
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• 2017

Although the long-term leakage between the box culvert and the soil contact surface is one of the main causes of the failure in the embankment of the reservoir, there is a little studies on this matter. If a leakage occurs by the structure such as the buried box culvert of reservoir embankment is partially damaged, it is difficult to observe and there is a possibility of damage caused by piping. For these reasons, more research is necessary. In this study, the embankment type of the reservoir is divided into the core type and the homogeneous type when the damaged box culvert passing through the embankment of the reservoir is leaked due to the differential behavior of materials like differential settlement. In view of the condition, the seepage analysis of 2D was performed according to the water level change. The result of the study shows that the possibility of piping increases at the upper part rather than the bottom part of the box culvert when the leakage occurs to the box culvert passing through the embankment of the reservoir. Particularly, it is considered that the presence of the core helps to maintain the seepage stability of the embankment in case where the leakage occurs at the downstream side of the embankment. Also, if there is a drastic decrease on the internal pore water pressure in the embankment of reservoir, it is necessary to consider the possibility of piping.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.27 no.3
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• pp.147-154
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• 2014

In the context of an increasing need for safety in concrete structures under blast and impact loading condition, the behavior of concrete under high strain rate condition has been an important issue. Since concrete subjected to impact loading associated with high strain rate shows quite different material behavior from that in the static state, several material models are proposed and used to describe the high strain rate behavior under blast and impact loading. In the process of modelling high strain rate conditions with these material models, mesh dependency in the used finite element(FE) is the key problem because simulation results under high strain-rate condition are quite sensitive to applied FE mesh size. This paper introduces an criterion which can minimize the mesh-dependency of simulation results on the basis of the fracture energy concept, and HJC(Holmquist Johnson Cook) model is examined to trace sensitivity to the used FE mesh size. To coincide with the purpose of the perforation simulation with a concrete plate under a projectile(bullet), the residual velocities of projectile after perforation are compared. The analytical results show that the variation of residual velocity with the used FE mesh size is quite reduced and accuracy of simulation results are improved by applying a unique failure strain value determined according to the proposed criterion.

• Journal of the Korea institute for structural maintenance and inspection
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• v.23 no.1
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• pp.102-112
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• 2019

This paper studies impact fracture behavior under temperature variation and compressive flexural strength of cement composites using VAE(vinyl acetate ethylene) powder polymer and PVA(polyvinyl alcohol) fiber. Impact test were conducted in the temperature range selected for the $-35^{\circ}C$, $0^{\circ}C$ and $35^{\circ}C$. In this experimental study, impact test were carried out using a drop impact testing machine (Ceast 9350) to obtain such as displacement, time, and impact fracture energy of normal specimen and and cement composites specimen. As test results, the use of VAE powder polymer and PVA fiber were observed to enhance the flexural strength of mortar. The compressive strength of PVA fibers reinforced cement composites was slightly decreased at 28 days, but the flexural strength was observed to increase 24.4% of normal mortar strength. As a result of the drop impact tests, PVA fiber reinforced cement composites specimens showed microcracks due to energy dispersion and crack prevention with bridge effect of the fibers, and scabbing or perforation by impact was suppressed. On the other hand, the normal mortar and VAE powder polymer cement composites specimens were carried out to the perforation and macro crack. Most of normal mortar and the cement composites subjected to impact load on specimens shows mostly local brittle failure. The impact resistant performance of the specimen with PVA fiber was greatly improved due to the increase of flexure performance.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.125-125
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• 2010

극성 [0001] 방향으로 성장된 질화물 기반의 LED (light emitting diode) 는 분극현상에 의해 발생하는 강한 내부 전기장의 영향을 받게 된다. 이러한 내부 전기장은 양자우물 내의 전자와 정공의 공간적 분리를 야기하고 quantum confined Stark effect (QCSE)에 의한 발광 파장의 적색 편이가 발생하며 양자효율의 저하를 가져오게 된다. 이러한 문제를 해결하기 위해 InGaN/GaN이나 AlGaN/GaN 양자 우물구조를 GaN의 m-plane (1$\bar{1}$00) 이나 a-plane (11$\bar{2}$0) 등 비극성면 위에 성장하려는 시도를 하고 있다. 그러나 비극성 면의 비등방성 (anisotropy) 으로 인하여 결정성이 높은 비극성 GaN을 성장하는 데에는 많은 어려움이 있다. GaN 층의 표면을 평탄화하고 결정성을 향상시키기 위해서 저온 GaN 또는 AlN 버퍼층을 성장하는 2단계 방법이나 고온 버퍼층을 이용하여 성장하는 연구들이 많이 진행되고 있다. 본 연구에서는 고온 GaN 버퍼층을 이용하여 기존의 2단계 성장과정을 단순화한 비극성 a-plane GaN을 r-plane 사파이어 기판위에 유기금속 화학증착법 (MOCVD)으로 성장하였다. 사파이어 기판위에 AlN 층을 형성하기 위한 nitridation 과정 후 1030 도에서 두께 45 ~ 800 nm의 고온 GaN 버퍼층을 성장하고 총 박막 두께가 2.7 ~ 3 um 가 되도록 a-plane GaN을 성장하여 표면 양상의 변화와 결정성을 확인하였다. 또한 a-plane GaN 박막 성장 시에 성장 압력을 100 ~ 300 torr 로 조절하며 박막 성장의 변화 양상을 관찰하였다. 고온 GaN 버퍼층 성장 두께가 감소함에 따라 결정성은 증가하였으나 표면의 삼각형 형태의 pit 밀도가 증가함을 확인하였다. 또한 성장 압력이 감소함에 따라 표면 pit은 감소하였으나 결정성도 감소하는 것을 확인하였다. 성장 압력과 버퍼층 성장 두께를 조절하여 표면에 삼각형 형태의 pit이 존재하지 않는 RMS roughness 0.99 nm, 관통전위밀도 $1.78\;{\times}\;10^{10}/cm^2$, XRD 반가폭이 [0001], [1$\bar{1}$00] 방향으로 각 798, 1909 arcsec 인 a-plane GaN을 성장하였다. 이 연구를 통해 고온 GaN 버퍼 성장방법을 이용하여 간소화된 공정으로 LED 소자 제작에 사용할 수 있는 결정성 높은 a-plane GaN을 성장할 수 있는 가능성을 확인하였다.