• Title/Summary/Keyword: 공동시험

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진공공정 실시간 측정 기술 개발 동향

  • Sin, Yong-Hyeon;Hong, Seung-Su;Im, In-Tae;Seong, Dae-Jin;Im, Jong-Yeon;Kim, Jin-Tae;Kim, Jeong-Hyeong;Gang, Sang-U;Yun, Ju-Yeong;Yu, Sin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.28-28
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    • 2011
  • 우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

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Bioequivalence Evaluation of the Tiropramide Formulation by GC/MS (티로프라미드 주사제의 생물학적 동등성 평가를 위한 GC/MS 방법)

  • Myung, Seung-Woon;Kim, Myungsoo;Kim, Hye-Young;Kwak, Hyun-Tae;Min, Hye-Ki;Sohn, Dong-Ryul;Hong, Young-Hun
    • Analytical Science and Technology
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    • v.14 no.3
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    • pp.221-229
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    • 2001
  • The bioequivalence study of two tiropramide products was evaluated in 16 health male volunteers following intra-muscular injection. Test product was Tiram$^{(R)}$ injection (S Pharm. Co, Ltd.) and reference product was Tiropa$^{(R)}$ injection(D Pharm. Co., Ltd.). The drug concentration in plasma was determined by GC/MS for over a period of 8 hours after injection. Analysis of variance reveal that there are no differences in AUC (area under the plasma concentration-time curve from time zero to infinity), Cmax (maximum plasma concentration) and Tmax (time to reach Cmax). The differences of mean AUC, Cmax and Tmax between two products were 0.73, -1.385 and -12.994%, respectively. Minimum detectable differences (%) at ${\alpha}=0.05$ were all less than 20% given as a guideline (10.05, 17.90 and 19.01% for AUC, Cmax and Tmax, respectively). From these results, the two formulations of tiropramide are bioequivalent and thus, may be prescribed interchangeably.

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A Study on the Inhibition of Skin Pigmentation by Lobaric Acid as Protease Activated Receptor-2 Antagonist (Protease Activated Receptor-2의 길항제로서 Lobaric Acid의 피부 색소침착 억제 효능 연구)

  • Goo, Jung Hyun;Lee, Ji Eun;Myung, Cheol Hwan;Park, Jong Il;Hwang, Jae Sung
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.41 no.3
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    • pp.243-252
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    • 2015
  • Melanosome, the pigment granule in melanocyte, determines the color of skin when it moves into the keratinocyte. Inhibition of melanosome transfer from melanocyte to keratinocyte results in skin depigmentation. Protease activated receptor-2 (PAR-2) is involved in signal transduction systems via cell membrane and increases the melasome transfer when it is activated by cleavage of their extracellular amino acid sequence by trypsin or by a peptide such as SLIGKV. Here, we showed that lobaric acid inhibited PAR-2 activation and affected the mobilization of $Ca2^+$. The uptake of fluorescent microspheres and isolated melanosomes from melan-a melanocytes to keratinocytes induced by SLIGKV were inhibited by lobaric acid. Also, confocal microscopy studies illustrated a decreased melanosome transfer to keratinocytes in melanocyte-keratinocyte co-culture system by lobaric acid. In addition, lobaric acid induced visible skin lightening effect in human skin tissue culture model, melanoderm$^{(R)}$. Our data suggest that lobaric acid could be an effective skin lightening agent that works via regulation of phagocytic activity of keratinocytes.

Comparisons of Sludge Pre-Treatment Systems : Hydrodynamic vs Ultrasonic Cavitation (수리동력학적 및 초음파 캐비테이션 슬러지 전처리 장치의 비교 연구)

  • Maeng, Jang-Woo;Bae, Jae-Ho
    • Journal of Korean Society of Environmental Engineers
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    • v.31 no.2
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    • pp.90-95
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    • 2009
  • Sludge pre-treatment utilizing cavitation is one of the commercialized methods at present. Cavitation can be generated by two different methods, sonotrode and hydrodynamic principle, and there has been no direct comparison between the two methods. In this study, solubilization efficiency, changes in sludge size distribution, and the methane production potential after pre-treatment by the two methods were compared. The maximum solubilization efficiency per unit energy input with the two methods was similar, and was 302 mg ${\Delta}SCOD/g$ TS at the energy input of 0.18 kWh/L. Break-up of sludge flocs were dominant during the early period of pre-treatment, while cell disintegration continued through the pre-treatment with the increase in the number of particles with less than 1 ${\mu}m$. BMP test results indicated that the methane potential increased up to 24.3% without differences between the two pre-treatments, and the increase in methane potential did not proportional to energy input. Although the energy efficiency of the two methods was quite similar, hydrodynamic methods might be a better choice for field application considering the operation and maintenance cost, and its potential improvement in energy efficiency.

Comparison in Elastic Wave Propagation Velocity Evaluation Methods (탄성파의 매질 내 이동속도 산정방법 비교)

  • Kim, Taesik
    • Journal of the Korean GEO-environmental Society
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    • v.15 no.5
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    • pp.31-37
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    • 2014
  • In situ investigations and laboratory tests using elastic wave have become popular in geotechnical and geoenvironmental engineering. Propagation velocity of elastic wave is the key index to evaluate the ground characteristics. To evaluate this, various methods were used in both time domain and frequency domain. In time domain, the travel time can be found from the two points that have the same phase such as peaks or first rises. Cross-correlation can also be used in time domain by evaluating the time shift amount that makes the product of signals of input and received waveforms maximum. In frequency domain, wave propagation velocity can be evaluated by computing the phase differences between the source and received waves. In this study, wave propagation velocity evaluated by the methods listed above were compared. Bender element tests were conducted on the specimens cut from the undisturbed hand-cut block samples obtained from Block 37 excavation site in Chicago, IL, US. The evaluation methods in time domain provides relatively wide range of wave propagation velocities due to the noise in signals and the sampling frequency of data logger. Frequency domain approach provides relatively accurate wave propagation velocities and is irrelevant to the sampling frequency of data logger.

Performance Analysis of Electronic Personal Dosimeter(EPD) for External Radiation Dosimetry (전자개인선량계(EPD)의 외부피폭방사선량 평가 성능분석)

  • Lee, Byoung-Il;Kim, Taejin;Lim, Young-Khi
    • Journal of Radiation Protection and Research
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    • v.40 no.4
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    • pp.261-266
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    • 2015
  • As performance of electronic personal dosimeter (EPD) used for auxiliary personal dosimeter in nuclear power plants (NPPs) has been being continuously improved, we investigated application cases in Korea and other countries and also tested it in NPPs to assess the performance of EPD for external radiation dosimetry. Result of performance tests done in domestic NPPs was similar to those obtained by IAEA in cooperation with EURADOS (IAEA-TECDOC-1564). In addition, EPD/TLD dose ratio has shown similar tendency of EPD/Film-badge dose ratio from the research by the Japan Atomic Power Company (JAPC) and EPD provided more conservative value than TLD or Film-badge. Although some EPD's failures have been discussed, EPD has shown continuous improvement according to the report of Institute of Nuclear Power Operation (INPO) and data from domestic NPPs. In conclusion, It is considered that the general performance of EPD is adequate for external radiation dosimetry compared with that of TLD, providing appropriate performance checking procedure and alternative measures for functional failure.

Research on development plan of medium and long period of Vocational Education for Chungbuk (충청북도 직업교육 중·장기발전 방안)

  • Oh, SeongKyeun;Uh, SangHo;Eun, TaeWook;Kim, JinKyun;Kim, JinSoo
    • 대한공업교육학회지
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    • v.31 no.1
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    • pp.146-169
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    • 2006
  • 'VEC 2010' is a mid-long term scheme on the development of Vocational Education for Chung-buk which is to be accomplished by 2010. On the basis of this scheme, schools adopt 3-Type curriculum considering their conditions and covert themselves into specialized high school which is associated with local industry cluster. They also establish combined high schools which run various curriculums emphasizing basic vocational abilities so that they can meet the needs of demanders The activation plan of Chung-buk province vocational education is a dualized one which is for both ongoing education for entrance into a school of higher grade and the last education for employment, which is supposed to foster the human resources required by the knowledge-based society in the 21st century. The specific contents of 'VEC 2010' is as follows. First, VEC 2010 presents 2 kinds of mid-long term management system for industrial high schools: general industrial high school, specialized high school(single type, combined type). Second, VEC 2010 arranges and run the 3-Type of curriculum of Chung-buk province industrial high schools: employment-centered type, entering higher school-centered type, inaugurating enterprise-centered type. Third, VEC 2010 divides Chung-buk province industrial high schools into 4 districts and suggests mid-long term reorganization plan of system. Fourth, VEC 2010 suggests the substantial strategies of Chung-buk province vocational education: scholarship improvement in the vocational investigation course of the government-sponsored scholastic aptitude test, education for improving basic vocational abilities, substantial management of joint laboratory, administrative and financial support of development of specialized, licensed textbooks. reenforcement of career education.

Theoretical Investigation on Molecular Diffusion and Conceptual Change of Preservice Teachers by Inquiry Experiment (분자확산에 대한 이론적 고찰과 탐구실험을 통한 예비교사의 개념변화)

  • Seong, Suk-Kyoung;Baek, Jong-Ho;Jeong, Dea-Hong
    • Journal of The Korean Association For Science Education
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    • v.30 no.1
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    • pp.80-93
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    • 2010
  • The scope of this study is: (1) to review or summarize the theoretical explanations of diffusion; (2) to investigate the preservice teachers' understanding of diffusion utilizing the inquiry experiment of diffusion that was developed in this study. The data was collected through questionnaires given to 41 preservice teachers in 3 universities and interviews with 20 subjects from this population, who conducted the inquiry experiment. During the experiment, the data was collected from the students' reports and 3 small groups' audio/video recordings. To understand preservice teachers' conceptions, reports, audio/video recordings, questionnaires and interviews were analyzed and discussed with co-workers. The results follow: (1) The differences between effusion and diffusion as well as equal-pressure experiment and equal-flux one on diffusion were discussed; (2) Most preservice teachers understood effusion and diffusion connected to Graham's law of diffusion by rote and have misconceptions about the diffusion process; (3) They observed two kinds of diffusion experiments (equal-pressure and equal-flux) by inquiry experiment, but the majority of them failed to find conceptual differences between these experiments. After the inquiry experiment, about 40% of the samples modified their conceptions about diffusion.

Floor Impact Noise Characteristics Depending on the Experimental Conditions Using Impact Ball (실험조건에 따른 임팩트 볼의 바닥충격음 변화 고찰)

  • Lee, Won-Hak;Haan, Chan-Hoon
    • The Journal of the Acoustical Society of Korea
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    • v.30 no.2
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    • pp.92-99
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    • 2011
  • In Japan, bang machine has been considered to have problems about not only the impact force and frequency response which are different from the real impact sources such as children's jumping and running, but also damage in the wooden structure housing. Therefore, a new impactor for lower impact force to prevent demage in wooden structure housing was developed. The impact ball was adopted as the second standard impact source in JIS A 1418-2 and ISO 140-11. In the present study, floor impact sounds generated by impact ball with drop heights in four floors of mock-up building of Building Research Institute (BRI) similar to typical Japanese wooden structure housing were investigated and also compared to jumping sound. The results show that Impact ball sound dropped at 10 cm to 30 cm was most similar to jumping sound. And The impact sound levels at 250 and 500 Hz were more sensitive to drop height than other lower frequencies. The error that may occur from the difference of height of 10 cm up and down based on the standard drop height caused by the impact ball operated by human hands was approx. 1 dB or less only in its value of characteristic, but it must be carefully taken into Impact ball in the Korea Standard.

정형외과 모의수술을 위한 원격 시뮬레이터의 개발에 관한 연구

  • 최수미;김명희
    • Proceedings of the Korea Society for Simulation Conference
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    • 1996.05a
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    • pp.6-6
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    • 1996
  • 컴퓨터 통신망의 활용이 각 분야에서 걸쳐서 점차 확대되고 있으며 의료 분야에서도 원격진료(tele-medicine), 원격교육(tele-education), 원격수술(tele-surgery) 등에 대한 시스템 개발이 관심을 끌고 있다. 본 연구에서는 초고속 정보통신망 환경에서 정형외과 모의수술을 하기 위한 시뮬레이터의 프로토타입을 구현하였다. 원격 모의수술 시뮬레이터를 구축하기 위해서는 CT, MRI와 같은 의학영상 처리, 다지점간의 회의를 제어할 수 있는 통신 제어, 환자의 진료를 위한 멀티미디어 데이터의 저장 및 검색을 위한 데이터베이스 구축 등 다양한 기술들의 총체적인 결합이 요구되어진다. 구축 시뮬레이터는 세가지 주요 서브 시스템으로 구성된다. 첫째, 원격 시뮬레이션을 위한 전반적인 관리, 운영, 제어를 담당하는 수술회의 시스템, 둘째, 모의수술을 가능케 하기 위한 2차원 영상의 전처리 3차원 영상 재구성 및 조작을 통한 모의수술 시스템, 셋재, 멀티미디어 환자 자료의 검색 및 관리를 하기 위한 데이터베이스 운영시스템으로 구성된다. 제안된 원격 모의수술 시뮬레이터는 서버-클라이언트 구조를 기반으로 하고, 여러명의 의사가 공동작업(CSCW: Computer Supported Cooperative Work)에 의해 모의수술을 할 수 있도록 공용 윈도우를 기반으로 한 그래픽 사용자 인터페이스를 제공한다. 멀티미디어 의료 데이터의 전송은 TCP/IP 프로토콜을 사용하고, 사용자 인터페이스는 X-window를 이용하여 구축하였다. 본 시뮬레이터는 SUN Server 1000을 서버로 하고, 두대의 SDT Workstation을 클라이언트로 하여 Ethernet 환경에서 구현 및 검증하였다. 또한 ATM Network에서 본 시뮬레이터를 시험함으로써 국책 사업으로 구축되는 초고속 정보통신망 환경에서의 사용 가능성을 입증하였다. 판단된다.원과 섭식장소, 수중생물의 경우는 특히 수온, 수량 영양원등이다.(중략). 본 연구의 접근방법으로는 ASRS의 개념적인 Reference Model을 수립하고 이 Reference Model에 대한 Formal Model로 DEVS(Discrete Event System Specification)을 이용하여 시스템을 Modeling하였다. 이의 Computer Simulation을 위하여 DEVS형식론 환경에서의 Simulation Language인 DEVSim ++ⓒ를 이용하여 시스템을 구현하였다.. 실형 결과로는 먼저 선형 상미분방정식의 예로 mass-damper-spring system, 비선형 상미분방정식의 예로는 van der Pol 방정식, 연립 상미분방정식의 예로는 mixing tank problem 등을 보였으며, 그의 공학에서 일어나는 여러 가지 문제들도 다루었다.화물에 대한 방어력이 증가되어 나타난 결과로 여겨지며, 또한 혈청중의 ALT, ALP 및 LDH활성을 유의성있게 감소시키므로서 감잎 phenolic compounds가 에탄올에 의한 간세포 손상에 대한 해독 및 보호작용이 있는 것으로 사료된다.반적으로 홍삼 제조시 내공의 발생은 제조공정에서 나타나는 경우가 많으며, 내백의 경우는 홍삼으로 가공되면서 발생하는 경우가 있고, 인삼이 성장될 때 부분적인 영양상태의 불충분이나 기후 등에 따른 영향을 받을 수 있기 때문에 앞으로 이에 대한 많은 연구가 이루어져야할 것으로 판단된다.태에도 불구하고 [-wh]의미의 겹의문사는 병렬적 관계의 합성어가 아니라 내부구조를 지니지 않은 단순한 단어(minimal $X^{0}$ elements)로 가정한다. 즉, [+wh] 의미의 겹의문사는 동일한 구성요 소를 지닌 병렬적 합성어([$[W1]_{XO-}$ $[W1]_{

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