• Title/Summary/Keyword: 갈륨

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Development of Si(110) CMOS process for monolithic integration with GaN power semiconductor (질화갈륨 전력반도체와 Si CMOS 소자의 단일기판 집적화를 위한 Si(110) CMOS 공정개발)

  • Kim, Hyung-tak
    • Journal of IKEEE
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    • v.23 no.1
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    • pp.326-329
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    • 2019
  • Gallium nitride(GaN) has been a superior candidate for the next generation power electronics. As GaN-on-Si substrate technology is mature, there has been new demand for monolithic integration of GaN technology with Si CMOS devices. In this work, (110)Si CMOS process was developed and the fabricated devices were evaluated in order to confirm the feasibility of utilizing domestic foundry facility for monolithic integration of Si CMOS and GaN power devices.

Phase Transformation in Epitaxial Growth of Galium Nitride by HVPE Process (HVPE법에 의한 질화갈륨 단결정막 성장시 상전이에 관한 연구)

  • Rakova, E.V.;Kuznetsov, A.V.;Kim, Hyang Sook;Lee, Sun Sook;Hwang, Jin Soo;Chong, Paul Joe
    • Korean Journal of Crystallography
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    • v.6 no.1
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    • pp.49-55
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    • 1995
  • The oriented islands of cubic galium nitride are grown on the (0001) surface of hexagonal GaN epitaxial films by halide vapour phase epitaxial process. The mutual orientation of cubic β-GaN and hexagonal α-GaN phase was observed as : [110](111) β-GaN//[1120](0001) α-GaN. Trigonally faced islands of β-GaN occupy the twined positions in relation to (111) plane in parallel to the film surface. The band gap value for β-GaN determuned from photo and local catchodoluminescent measurments is estimated to be 3.18±0.30eV at room temperature.

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Effect of Ga-doping on the properties of ZnO films grown on glass substrate at room temperature by radio frequency magnetron sputtering (RF 마그네트론 스퍼터링 방법으로 상온에서 유리기판 위에 성장시킨 ZnO의 성질에 미치는 Ga 도핑 효과)

  • Kim, G.C.;Lee, J.S.;Lee, S.K.;Kim, D.H.;Lee, S.H.;Moon, J.H.;Jeon, M.H.
    • Journal of the Korean Vacuum Society
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    • v.17 no.1
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    • pp.40-45
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    • 2008
  • We present the effect of Ga-doping on the electrical, structural and optical properties of ZnO layers with a thickness of ${\sim}500nm$ deposited on glass substrates. Polycrystalline ZnO and Ga-doped ZnO (GZO) layers were deposited by radio frequency (rf) magnetron sputtering at room temperature. Based on the X-ray diffraction (XRD) and transmission electron microscopy (TEM) data, the crystalline quality of Ga-doped ZnO film was improved and GZO film has a preferred orientation along with the (002) crystal direction. The transmittance of the GZO film was enhanced by 10% in the visible region from that of the ZnO film. From photoluminescence (PL) data, the ratio of intensity of near band edge (NBE) emission to deep level (DL) emission was as high as 2.65:1 and 1.27:1 in the GZO and ZnO films, respectively. The res istivities of GZO and ZnO films were measured to be 1.27 and 1.61 $\Omega{\cdot}cm$, respectively. The carrier concentrations of ZnO and GZO film were approximately 1018 and 1020 $cm^2$/Vs, respectively. Based on our experimental results, the Ga-doping improves the electrical, structural and optical properties of ZnO film with potential application.

Physical and Electrochemical Properties of Gallium Oxide (β-Ga2O3) Nanorods as an Anode Active Material for Lithium Ion Batteries (리튬이온전지용 산화갈륨 (β-Ga2O3) 나노로드 (Nanorods) 음극 활물질의 물리적.전기화학적 특성)

  • Choi, Young-Jin;Ryu, Ho-Suk; Cho, Gyu-Bon;Cho, Kwon-Koo;Ryu, Kwang-Sun;Kim, Ki-Won
    • Journal of the Korean Electrochemical Society
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    • v.12 no.2
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    • pp.189-195
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    • 2009
  • $\beta-Ga_{2}O_{3}$ nanorods were synthesized by chemical vapor deposition method using nickel-oxide nanoparticle as a catalyst and gallium metal powder as a source material. The average diameter of nanorods was around 160 nm and the average length was $4{\mu}m$. Also, we confirmed that the synthesis of nanorods follows the vapor-solid growth mechanism. From the results of X-ray diffraction and HR-TEM observation, it can be found that the synthesized nanorods consisted of a typical core-shell structure with single-crystalline $\beta-Ga_{2}O_{3}$ core with a monoclinic crystal structure and an outer amorphous gallium oxide layer. Li/$\beta-Ga_{2}O_{3}$ nanorods cell delivered capacity of 867 mAh/g-$\beta-Ga_{2}O_{3}$ at first discharge. Although the Li/$\beta-Ga_{2}O_{3}$ nanorods cell showed low coulombic efficiency at first cycle, the cell exhibited stable cycle life property after fifth cycle.

Band-gap energy (Eo) measurements of semi-insulating GaAs by photoreflectance (Photoreflectance에 의한 반절연성 GaAs의 띠간격 에너지(Eo)측정)

  • 배인호;김말문;이정열;김인수;김기홍
    • Electrical & Electronic Materials
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    • v.7 no.6
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    • pp.490-495
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    • 1994
  • We investigated photoreflectance of semi-insulating GaAs with respect to modulation sources, that is, modulation beam intensity, modulation frequency, temperature, and thickness of sample. PR spectra by each modulation source turned out to be signals of low electric field third differential, and band gap values of sample were fitted by least square root method for Aspnes' theoretical equation.

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Deformation pathway of semiconductor materials in nanometer scale (반도체 소재의 나노미터 스케일의 변형거동 해석)

  • Kim, Dong-Earn;Oh, Soo-Ik
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.518-520
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    • 2007
  • Since all essential property of semiconductor materials are structure-sensitive, the understanding of the deformation mechanism and the deformed structure which can be formed in the nanometer-scale devices is very crucial. To investigate the deformation mechanism and the corresponding structures, nanometer-scale contact loading simulations are carried out using molecular dynamics in silicon and gallium-arsenide.

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Design of miniaturized power divider multiple coupled line on RFIC/MMIC for application to vessel wireless communication components (선박 무선통신소자에의 응용을 위한 다중결합 선로를 이용한 RFIC/MMIC용 초소형 전력분배기의 설계)

  • Lee, Dong-Hwan;Yun, Young
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2005.06a
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    • pp.401-405
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    • 2005
  • This paper proposed a miniaturization passive element employing the multiple microstrip line. As a result of this method, we realized the transmission line miniaturized. The applying structure designed and evaluated a power divider on GaAS MMIC circuit. It draws a plan in a center Frequency as the observation could do good characteristic.

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A Study on the GaAs MESFET Modeling and the Method of Parameter Extraction (갈륨비소 MESFET의 모델링과 파라미터 추출법에 관한 연구)

  • 정명래;김학선;이형재
    • Proceedings of the Korean Institute of Communication Sciences Conference
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    • 1991.10a
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    • pp.210-214
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    • 1991
  • We briefly compared GaAs MESFET model and s셔요 on the method of parameter extraction for PSPICE simulation. The parameter determined from above method were substituded into a commercial version of PSPICE which supports the hyperbolic tangentent model. The result of simulation is reasonably good at the lower VGS and is significantly fitted overall by optimization.

GaAs 본딩장비용 Resin Coater의 동적 안전성 평가

  • 김옥구;송준엽;강재훈;지원호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.202-202
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    • 2004
  • 화합물 반도체는 초고속, 초고주파 디바이스에 적합한 재료인 갈큠비소(GaAs), 인듐-인산듐(InP) 등 2 개 이상의 원소로 구성되어 있고, 실리콘에 비해 결정내의 빠른 전자이동속도와 발광성, 고속동작, 고주파특성, 내열특성을 지니고 있어 발광 소자 (LED)와 이동통신(RE)소자의 개발 등에 다양하게 이용되고 있다. 이와 같이 화합물 반도체는 고부가가치의 첨단산업 부품들로 적용되는 만큼 생산제조 공정에 해당하는 연마, 본딩, 디본딩에 관한 방법과 기술에 대한 연구가 꾸준히 진행되고 있다.(중략)

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넓은 밴드갭을 갖는 인듐-갈륨-아연 산화막의 광학적 및 전기적 특성에 대한 연구

  • Jang, Gyeong-Su;Baek, Gyeong-Hyeon;Choe, U-Jin;An, Si-Hyeon;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.296-296
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    • 2011
  • 기존에 디스플레이 적용을 위한 TFT의 채널 영역에 널리 이용되고 있는 산화물 반도체의 밴드갭은 약 3.3eV이다. 현재 밴드갭을 증가시키기 위한 연구가 널리 진행 중이며, Mg등의 도핑을 통해 증가시키는 방법이 있다. 기본 sputtering 공정을 이용한 Eg 증가에 대한 연구가 없지만, 이번 연구에서는 가스비, 파워 등의 기본 공정 가변을 통하여 밴드갭 증가와 이를 이용한 광학적 및 전기적 특성을 비교 분석하였다.

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