• Title/Summary/Keyword: 가스측정시스템

Search Result 477, Processing Time 0.034 seconds

In-situ Deposition Rate Measurement System to Improve the Accuracy of the Film Formation Process (성막 공정 정밀도 향상을 위한 실시간 성막 속도 측정 시스템)

  • Somi Park;Seung-Yo Baek;Hyun-Bin Kim;Jonghee Lee;Jae-Hyun Lee
    • Applied Chemistry for Engineering
    • /
    • v.34 no.4
    • /
    • pp.383-387
    • /
    • 2023
  • The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

A Development Of The Portable Spirometry System Of Pressure Method Using Static Pressure In Pitot Tube (개구관에서의 정체압을 이용한 차동 압력 방식의 휴대형 호흡측정 시스템 개발)

  • 이종수;신창민;김영길
    • Journal of Biomedical Engineering Research
    • /
    • v.22 no.6
    • /
    • pp.479-486
    • /
    • 2001
  • Spirometer is a medical equipment which diagnoses respiratory function by measuring 9as volume across Patient's lunes through airway. Because a little overdose of anesthesia medicine can take away Patient's life in the ventilator for a surgical operation. an exact measurement of respiring volume is very important. This Paper Presented an exact flow volume calculation method from factors having an influence on measurement and introduced a spirometry system for an anesthesia ventilato. This system, using differential Pressure sensor measured flow by mutual relation with Pressure. temperature. gas density and linearization from the 2nd order characteristics of differential pressure with flow.

  • PDF

The Improvement of Sensitivity Characteristics of Pd doped $SnO_2$ Nanowire Gas Sensor (Pd 도핑에 따른 $SnO_2$ 나노선 가스센서의 감도 특성 개선)

  • Kim, Yeon-Woo;Kwon, Sun-Il;Park, Seung-Beom;Lee, Seok-Jin;Jung, Tae-Hwan;Yang, Kea-Joon;Lim, Dong-Gun;Park, Jae-Hwan;Kim, Hong-Oh
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.06a
    • /
    • pp.160-161
    • /
    • 2008
  • $SnO_2$는 n형 반도체로써 3.6 eV의 큰 밴드갭을 가지는 물질로 CO와 NOx 가스에 좋은 감도를 나타내는 것으로 보고되고 있다. 문헌에 따른 일반적인 $SnO_2$ 가스센서는 후막이나 벌크형태로 제작되었다. 근래에는 가스감응체가 $SnO_2$ 나노선 형태인 가스센서가 활발한 연구 중에 있다. 본 논문에서는 기판 위에 서로 분리된 전극 패턴에 Au를 촉매로 하여 네트워크 구조로 된 $SnO_2$ 나노선이 합성되었다. 제작된 가스센서에 Pd 도핑에 따른 영향을 알아보기 위하여 1.8 mM의 Pd 용액 ($PdCl_2{\cdot}xH_2O$ 3 mg + $H_2O$ 10 ml)을 이용하여 센서에 도핑하였다. 측정 시스템에서 $NO_2$ 가스에 대한 센서의 특성을 분석한 결과 도핑하지 않은 $SnO_2$ 센서보다 20%정도의 감도가 개선되었다.

  • PDF

An Intelligent Ventilation System in an Enclosed Nursery Pig House (지능형 돈사 환기 제어 시스템)

  • Kim, Seok-hun;Lee, Sae-bom;Lee, Geon-won;Im, Kwang-hyuk
    • Proceedings of the Korean Society of Computer Information Conference
    • /
    • 2014.07a
    • /
    • pp.429-430
    • /
    • 2014
  • 본 논문은 돈사 내부의 환기부를 연속적으로 작동한 상태에서 환기부의 입기팬 및 배기팬의 회전수를 감소시키거나 증가시킴으로서 축사 내부로 유입되는 환기량을 조절하고, 이에 따라 환기 운영 시에 축사 내부의 온도 편차를 최소화함과 동시에 유해가스에 의한 돈사 내 공기오염을 방지할 수 있는 지능형 돈사 환기 제어 시스템 설계에 관한 연구이다. 본 시스템에는 온도 측정 데이터를 일정간격으로 저장하고, 저장된 온도 변화의 특성을 추출하여 지능적으로 돈사의 상태를 최적으로 유지할 수 있는 지능형 환기 제어 모델, 사용자의 연령 및 상황을 고려한 가시적이고 직관적인 사용자 위주의 인터페이스 설계가 포함된다.

  • PDF

Development of an Imaging-DOAS System for 2-D Remote Sensing of Atmospheric Gases (대기가스오염물질의 이차원 원격 모니터링을 위한 Imaging-DOAS 개발)

  • Lee, Han-Lim;Lee, Chul-Kyu;Jung, Jin-Sang;Park, Jeong-Eun;Kim, Young-Joon
    • Journal of Korean Society of Environmental Engineers
    • /
    • v.28 no.2
    • /
    • pp.150-157
    • /
    • 2006
  • Spatially resolved remote identification and quantification of trace gases in the atmosphere is desirable in various fields of scientific research as well as in public security and industrial contexts. Environmental observations investigating causes, extent md consequences of air pollution are of fundamental interest. We present an Imaging-DOAS system, a ground based remote sensing instrument that allows spatially resolved mapping of atmospheric trace gases by a differential optical absorption spectroscopy(DOAS) with sun scattered light as the light source. A passive DOAS technique permits the identification and quantification of various gases, e.g., $NO_2,\;SO_2,\;and\;CH_2O$, from their differential absorption structures with high sensitivity. The Imaging-DOAS system consists of a scanning mirror, a focusing lens, a spectrometer, a 2-D CCD, ad the integral control software. An imaging spectrometer simultaneously acquires spectral information on the incident light in one spatial dimension(column) and sequentially scans the next spatial dimension with a motorized scanning mirror. The structure of the signal acquisition system is described in detail and the evaluation method is also briefly discussed. Applications of imaging of the $NO_2$ contents in the exhaust plumes from a power plant are presented.

Measuring the Greenhouse Gas Emission Reduction and Management System Using Bluetooth Sensor Node (블루투스 센서노드를 이용한 온실가스 배출 저감 측정 및 관리시스템)

  • Lee, Seung-Jin;Jin, Kyo-Hong
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.17 no.5
    • /
    • pp.1095-1100
    • /
    • 2013
  • Carbon dioxide is a major cause for which accelerates Global Warming. Therefore several countries are working on the project recommended to use a bicycle instead of the car when you move to the nearby destination in an effort to reduce the emissions of carbon dioxide. In this paper, It was developed to measure the greenhouse gas reduction using Bluetooth Sensor Node by riding a bicycle instead of a car and management system in order to authenticate the riding record. The developed application provides various information such as individual bicycle mileage, greenhouse gas reductions, bicycle riding path, the number of planted ginkgo trees. This proposed system is expected to be helpful to green house gas emission reduction because the usage rate of bicycle will increase if government combine ways to offer people rewards such as pin money or tax breaks for people who take advantage of the bicycle with the project.

Capacitance Characteristics of Fly Ash for Monitoring the Unburned Carbon Contained in Fly Ash (석탄회 미연탄소함량 동시측정을 위한 석탄회 정전용량 분석에 관한 연구)

  • 이재근;김장우;구재현;신진혁;김성찬;신희수;황유진
    • Journal of Energy Engineering
    • /
    • v.11 no.1
    • /
    • pp.67-73
    • /
    • 2002
  • The carbon-in-ash system for simultaneously monitoring the unburned carbon in fly ash produced in a coal-fired power plan is designed and evaluated using the domestic fly ash produced in the coal-fired power plant. Real time monitoring is very important to control the combustion of the boiler in the coal-fired power plant and the purification system for fly ash recycling. The carbon-in-ash system based on the capacitance measurement consists of a LCR meter, a duct collector and an electrode cell. The capacitance of fly ash increases linearly with increasing fly ash carbon contents. The water content in fly ash plays an important role on the ash capacitance. The empirical equation for predicting the content of unburned carbon in fly ash produced in the domestic Boryung, Hadong and Samchenpo coal-fired power plants can be derived in the range of carbon content 0-20%.

NMHCs measurement using a cryogenic concentration system and application on gas samples (저온농축장치를 이용한 NMHCs의 측정법과 가스 시료에 적용)

  • Kim, Su Ha;Moon, Dong Min;Kim, Jin Seog
    • Analytical Science and Technology
    • /
    • v.25 no.6
    • /
    • pp.375-381
    • /
    • 2012
  • In this study, we have developed a cryogenic concentration system for the analysis of non-methane hydrocarbons (NMHCs) in air sample. NMHCs with nmol/mol level of concentrations in the atmosphere were quantified by a comparative method with certified reference gas mixture. GC/FID with cryogenic concentration system operated in the range from $-67^{\circ}C$ to $180^{\circ}C$ was adopted. After cryogenic concentration, a fast desorption by heating could achieve a large amount of sample injection into the GC/FID. The linearity of the system was verified with the peak areas of NMHCs of the concentration amount of sample. The reproducibility is less than 10% and the limit of detection (LOD) is 0.1 nmol/mol. For the application of this system, we analyzed NMHCs in gas samples taken from air and soil in Daejeon, Seosan and Goheung.

Web-based GIS partial discharge monitoring system development (Web기반 GIS 부분방전 진단 시스템 개발)

  • Kim, Hong-Seok;Hong, Jung-Ki;Choi, Dae-Hee;Lee, Hahk-Sung;Oh, Jae-Hun
    • Proceedings of the KIEE Conference
    • /
    • 2007.11b
    • /
    • pp.217-219
    • /
    • 2007
  • GIS 부분방전 진단 시스템은 가스 절연개폐장치(GIS: Gas Insulated Switchgear) 내부에서 발생하는 UHF 대역의 부분방전 신호를 측정하며 이상신호가 발생하면 위상에 대한 부분방전 패턴을 분석하고 원인을 진단한다. 이러한 GIS 부분방전 진단 시스템은 다수의 변전소에 설치되어 운전되며 중앙제어센터에서 통합하여 관리하고자 할 경우 네트워크와 데이터베이스에 병목현상이 발생한다. 이에 본 논문에서는 Web을 통한 시스템의 분산화와 정보의 구분을 통한 정보의 분류로 병목현상을 줄이는 Web기반 GIS 부분방전 진단 시스템의 개발에 대하여 기술하고자 한다.

  • PDF

The performance improvement of magnetic flux leakage system (자기누설 탐상 시스템의 성능 향상에 관한 연구)

  • Kim, Dug-Gun;Seo, Kang;Park, Gwan-Soo
    • Proceedings of the KIEE Conference
    • /
    • 2007.10c
    • /
    • pp.62-64
    • /
    • 2007
  • 자기누설 탐상(Magnetic Flux Leakage)시스템은 비파괴 검사의 일종으로 대상 물체를 자화시켜 결함 부위에서 자기 누설량을 측정함으로써 구조물의 결함 및 부식 등을 탐지하는 시스템이다. 지하 가스배관의 결함 판정에 있어 기존의 신호처리 기법을 통한 노이즈 제거와 검출 성능 향상은 한계가 있다. 이는 후처리 단계로써 각종 노이즈를 포함하고 있기 때문이다. 따라서 검출 신호 크기의 증가를 통한 결함 검출 성능을 향상시키기 위해 논문에서는 브러쉬와 백요크의 크기 및 형상 변화에 따른 자기장 분포 해석을 하고 시스템 제작 및 실험을 통해 자기누설 탐상 시스템의 성능 향상을 검증하였다.

  • PDF