• Title/Summary/Keyword: >-$Ga_{2}O_{3}$

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Growth of ε-Ga2O3 film and fabrication of high quality β-Ga2O3 films by phase transition (ε-Ga2O3 박막의 성장과 상전이를 이용한 고품질 β-Ga2O3 박막의 제조)

  • Lee, Hansol;Kim, Soyoon;Lee, Jungbok;Ahn, Hyungsoo;Kim, Kyounghwa;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.1
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    • pp.1-7
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    • 2021
  • ε-Ga2O3, a metastable phase of Ga2O3, has excellent compatibility with substrates having a hexagonal structure or a quasi-hexagonal structure, so that a film having a relatively lower surface roughness and defect density than β-Ga2O3 can be obtained easily. Accordingly, we attempted to fabricate a high-quality β-Ga2O3 film with a low surface roughness and defect density using the property of phase transition to β-Ga2O3 when ε-Ga2O3 is annealed at a high temperature. For this, the growth of high-quality ε-Ga2O3 films must be preceded. In this study, the optimal flow rate was investigated by analyzing the structural and morphological characteristics of the ε-Ga2O3 film according to the supplied precursor ratio. In addition, the annealing condition and the effect of β-Ga2O3 mixed in the ε-Ga2O3 film on the crystallinity of β-Ga2O3 after phase transition were also investigated.

Preparation of $Ga_2O_3:Eu^{3+}$ phosphors by homogeneous precipitation (균일침전법에 의한 $Ga_2O_3:Eu^{3+}$ 형광체의 제조)

  • 천민호;박인용;이종원;김선태
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.12 no.3
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    • pp.149-156
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    • 2002
  • Europium-activated $Ga_2O_3$ phosphor powders were prepared by homogeneous precipitation method. The resulting powders were characterized by means of TG/DTA, XRD, FT-IR and SEM, Two kinds of powders formed were the crystalline GaOOH and the amorphous-like $\gamma$-$Ga_2O_3$ phases. When the urea concentration was below 0,5 M, rod-like micrometer-sized GaOOH powders were formed. They were transformed via $\alpha$-$Ga_2O_3$ to $\beta$-$Ga_2O_3$ phases under heat treatment. On the other hand, the nanometer-sized $\gamma$-$Ga_2O_3$ powders were formed with urea concentrations higher than 1.0 M, and they were directly changed into $\beta$-$Ga_2O_3$.Photoluminescence (PL) spectra were observed at room temperature, and PL intensities of nanometer-sized $Ga_2O_3$ : $Eu^{3+}$ powders around 610 nm were higher than those of micrometer-sized ones.

Synthesis of Ga2O3 powders by precipitation method (침전법을 이용한 Ga2O3 분말의 합성)

  • Jung, Jong-Yeol;Kim, Sang-Hun;Kang, Eun-Tae;Kim, Jin-Ho;Han, Kyu-Sung;Hwang, Kwang-Teak;Cho, Woo-Seok
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.1
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    • pp.8-14
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    • 2014
  • In this study, we investigated synthesis and characteristics of gallium oxide ($Ga_2O_3$) powders prepared by precipitation method. $Ga_2O_3$ powders were synthesized using $Ga(NO_3)_3$ as a starting material and $NH_4OH$ as a precipitant. The oxidation temperature of $Ga(OH)_3$ and phase transition temperature of $Ga_2O_3$ was revealed using TG-DSC analysis. The crystal structural change of $Ga_2O_3$ powders was investigated by XRD analysis. The morphologies and size distributions of $Ga_2O_3$ particles were analyzed using SEM.

Effect of B2O3 Additives on GaN Powder Synthesis from GaOOH (GaOOH로부터 GaN 분말의 합성에 미치는 B2O3의 첨가효과)

  • Song, Changho;Shin, Dongwhee;Byun, Changsob;Kim, Seontai
    • Korean Journal of Materials Research
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    • v.23 no.2
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    • pp.104-111
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    • 2013
  • In this study, GaN powders were synthesized from gallium oxide-hydroxide (GaOOH) through an ammonification process in an $NH_3$ flow with the variation of $B_2O_3$ additives within a temperature range of $300-1050^{\circ}C$. The additive effect of $B_2O_3$ on the hexagonal phase GaN powder synthesis route was examined by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and Fourier transformation infrared transmission (FTIR) spectroscopy. With increasing the mol% of $B_2O_3$ additive in the GaOOH precursor powder, the transition temperature and the activation energy for GaN powder formation increased while the GaN synthesis limit-time ($t_c$) shortened. The XPS results showed that Boron compounds of $B_2O_3$ and BN coexisted in the synthesized GaN powders. From the FTIR spectra, we were able to confirm that the GaN powder consisted of an amorphous or cubic phase $B_2O_3$ due to bond formation between B and O and the amorphous phase BN due to B-N bonds. The GaN powder synthesized from GaOOH and $B_2O_3$ mixed powder by an ammonification route through ${\beta}-Ga_2O_3$ intermediate state. During the ammonification process, boron compounds of $B_2O_3$ and BN coated ${\beta}-Ga_2O_3$ and GaN particles limited further nitridation processes.

Characteristics of Al/$BaTa_2O_6$/GaN MIS structure (Al/$BaTa_2O_6$/GaN MIS 구조의 특성)

  • Kim, Dong-Sik
    • 전자공학회논문지 IE
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    • v.43 no.2
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    • pp.7-10
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    • 2006
  • A GaN-based metal-insulator-semiconductor (MIS) structure has been fabricated by using $BaTa_2O_6$ instead of conventional oxide as insulator gate. The leakage current o) films are in order of $10^{-12}-10^{-13}A/cm^2$ for GaN on $Al_2O_3$(0001) substrate and in order of $10^{-6}-10^{-7}A/cm^2$ for GaN on GaAs(001) substrate. The leakage current of thses films is governed by space-charge-limited current over 45 MV/cm in case of GaN on $Al_2O_3$(0001) substrate and by Poole-Frenkel emission in case of GaN on GaAs(001).

Properties of Beta-Ga2O3 Film from the Furnace Oxidation of Freestanding GaN (FS-GaN을 열산화하여 제작된 Beta-Ga2O3 박막의 특성)

  • Son, Hoki;Lee, YoungJin;Lee, Mijai;Kim, Jin-Ho;Jeon, Dae-Woo;Hwang, Jonghee;Lee, Hae-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.7
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    • pp.427-431
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    • 2017
  • In this paper, we discuss ${\beta}-Ga_2O_3$ thin films that have been grown on freestanding GaN (FS-GaN) using furnace oxidation. A GaN template was grown by horizontalhydride vapor phase epitaxy (HVPE), and FS-GaN was fabricated using the laser lift off (LLO) system. To obtain ${\beta}-Ga_2O_3$ thin film, FS-GaN was oxidized at $900{\sim}1,100^{\circ}C$. Surface and cross-section of prepared ${\beta}-Ga_2O_3$ thin films were observed by field emission scanning electron microscopy (FE-SEM). The single crystal FS-GaNs were changed to poly-crystal ${\beta}-Ga_2O_3$. The oxidized ${\beta}-Ga_2O_3$ thin film at $1,100^{\circ}C$ was peel off from FS-GaN. Next, oxidation of FS-GaNwas investigated for 0.5~12 hours with variation of the oxidation time. The thicknesses of ${\beta}-Ga_2O_3$ thin films were measured from 100 nm to 1,200 nm. Moreover, the 2-theta XRD result indicated that (-201), (-402), and (-603) peaks were confirmed. The intensity of peaks was increased with increased oxidation time. The ${\beta}-Ga_2O_3$ thin film was generated to oxidize FS-GaN.

Porous Sn-incorporated Ga2O3 nanowires synthesized by a combined process of powder sputtering and post thermal annealing (분말 스퍼터링과 후열처리 복합 공정으로 제조한 주석 함유 갈륨 산화물 다공성 나노와이어)

  • Lee, Haram;Kang, Hyon Chol
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.6
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    • pp.245-250
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    • 2019
  • We investigated the post-annealing effect of Sn-incorporated β-Ga2O3 (β-Ga2O3 : Sn) nanowires (NWs) grown on sapphire (0001) substrates using radio-frequency powder sputtering. The β-Ga2O3 : Sn NWs were converted to a porous structure during the vacuum annealing process at 800℃. Host non-stoichiometric Ga2O3-x, is transformed into stoichiometric Ga2O3, where Sn atoms separate and form Sn nano-clusters that gradually evaporate in a vacuum atmosphere. As a result, the amount of Sn atoms was reduced from 1.31 to 0.27 at%. Pores formed on the sides of β-Ga2O3 : Sn NWs were observed. This increases the ratio of the surface to the volume of β-Ga2O3 : Sn NWs.

Synthesis of nano-sized Ga2O3 powders by polymerized complex method (착체중합법을 이용한 Ga2O3 나노 분말의 합성)

  • Jung, Jong-Yeol;Kim, Sang-Hun;Kang, Eun-Tae;Han, Kyu-Sung;Kim, Jin-Ho;Hwang, Kwang-Teak;Cho, Woo-Seok
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.6
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    • pp.302-308
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    • 2013
  • In this study, we report the synthesis and characteristics of gallium oxide ($Ga_2O_3$) nanoparticles prepared by the polymerized complex method. $Ga_2O_3$ nanoparticles were synthesized using $Ga(NO_3)_3$, ethylene glycol, and citric acid as the starting materials at a low temperature of $500{\sim}800^{\circ}C$. The temperature of the weight reduction by the loss of organic precursor was revealed using TG-DTA analysis. The crystal structural change of $Ga_2O_3$ nanoparticles by the annealing process was investigated by XRD analysis. The morphologies and the size distributions of $Ga_2O_3$ nanoparticles were analyzed using SEM.

Structural Analysis of $Na_2O$-$Ga_2O_3$-$SiO_2$ System Glasses by FT-IR and Raman Spectroscopy (FT-IR 및 Raman 분광법에 의한 $Na_2O$-$Ga_2O_3$-$SiO_2$ 계 유리의 구조분석)

  • Whang, Chin-Myung;Rhee, Jhun;Bae, In-Kook
    • Journal of the Korean Ceramic Society
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    • v.25 no.1
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    • pp.27-34
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    • 1988
  • In order to investigate the reason of changes in the physical properties of glasses near the region for which R(Ga/Na)=1, spectroscopic studies using FT-IR and Raman spectroscopy have been carried out on Na2O.2SiO2 glass with addition of Ga2O3 from 0 to 35 mole %, i.e., from R=0 to 1.61. The main purpose of this work is to investigate the coordination number of Ga3+ in glass with variation of glass composition and to determine the existence of tricluster in the Ga-rich region for which R>1.0 in Na2O-Ga2O3-SiO2 system.

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