• Title/Summary/Keyword: $ZrF_4$

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Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.108-108
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    • 2010
  • We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

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Gold Abundance in Aicd-Sulfate Alteration Zone of the Ogmaesan-Seongsan Ore Deposits in Haenam Area, Korea (해남 옥매산-성산광산 Acid-Sulfate 변질대에서 금 함량에 관한 연구)

  • Yoon, Chung-Han
    • Economic and Environmental Geology
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    • v.26 no.2
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    • pp.155-166
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    • 1993
  • Gold contents with major and trace elements have been determined in 67 fresh igneous and altered wall rocks in the acid-sulfate alteration zone of the Ogmaesan-Seongsan pyrophyllite deposits in the Haenam area of the south-western part of Korean peninsula. The results are as follows; (1) Li contents have a tendency to show high value in dickite and altered rocks with dickite, while As, Mo and Sb contents have tendencies to show high values in alunite vein and silicified zone. F contents are higher in the altered rocks compared to fresh rocks. (2) Gold contents are enriched in alunite vein and silicified zone of the Seongsan deposit, but depleted in dickite and altered rock with dickite. Gold contents are especially concentrated in fault or conjunction area of two faults. (3) Gold contents are higher values in the mineral assemblages of alunite-quartz-pyrite and alteration zone of the Seongsan deposit among the studied deposits. (4) Gold contents in samples of silicified zones tend to show positive correlations with Ag, As, Co, Hg, Sb and V content, but negative correlations with Y and Zr contents, while on the other gold contents of silicified tuffs tend to show positive correlations with Hg and Sb contents. Therefore it is important to survey alunite vein and silicified zone at the conjunction of faults, and to analyze pathfinder elements such as Ag, As, Hg and Sb for geological and geochemical exploration of gold in the studied deposits.

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Morphology Change of Nanotube and Micropore on the Ti-25Nb-xHf Alloys with Hf Contents after Anodization

  • Kim, Sung-Hwan;Ko, Yeong-Mo;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.333-333
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    • 2012
  • In this study, we investigated morphology of nanotube and micropore on the Ti-25Nb-xHf alloys with Hf contents after anodization. Ti-25Nb-xHf ternary alloys contained from (0~15) wt.% Hf contents were manufactured by vacuum arc-melting furnace. The obtained ingots were homogenized in an argon atmosphere at $1000^{\circ}C$ for 12h and then water quenching. The specimens were cut from ingots to 3mm thickness and first ground and polished using SiC paper (grades from 100 to 2000). 2steps anodization treatments on Ti-25Nb-xHf alloys were carried out at room temperature for experiments. Micro-pore formation was performed in Ca+P mixed solution at 265V for 3min. After that, nanotube formation was in 1M $H_3PO_4$ electrolytes containing 0.8wt.% NaF solutionat 10V for 120min. Morphologies of micropore and nanotube depended on the Hf content in Ti-25Nb-xZr ternary system.

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Eco-friendly Fabrication Process of Al-Ti-C Grain Refiner

  • Cho, Hoon;Kim, Bong-Hwan
    • Journal of Korea Foundry Society
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    • v.30 no.4
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    • pp.147-150
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    • 2010
  • An eco-friendly production technique of Al-8.6Ti-0.025C refiner was developed by melting a Al-Ti master alloy in a graphite crucible, in which the potential nucleation site, TiC effectively formed by the spontaneous in-situ reaction between excessive Ti and carbon from graphite crucible. The A3003 alloy refined by the Al-8.6Ti-0.025C showed effectively refined macrostructure and enhanced mechanical properties comparable to the commercial Al-Ti-B refiner. The effective refinement was achieved in a shorter compare to the melt-treating time commercial Al-Ti-B refiner.

The Application of Radiolabeled Targeted Molecular Probes for the Diagnosis and Treatment of Prostate Cancer

  • Luyi Cheng;TianshuoYang;Jun Zhang;Feng Gao;Lingyun Yang;Weijing Tao
    • Korean Journal of Radiology
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    • v.24 no.6
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    • pp.574-589
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    • 2023
  • Radiopharmaceuticals targeting prostate-specific membrane antigens (PSMA) are essential for the diagnosis, evaluation, and treatment of prostate cancer (PCa), particularly metastatic castration-resistant PCa, for which conventional treatment is ineffective. These molecular probes include [68Ga]PSMA, [18F]PSMA, [Al18F]PSMA, [99mTc]PSMA, and [89Zr]PSMA, which are widely used for diagnosis, and [177Lu]PSMA and [225Ac]PSMA, which are used for treatment. There are also new types of radiopharmaceuticals. Due to the differentiation and heterogeneity of tumor cells, a subtype of PCa with an extremely poor prognosis, referred to as neuroendocrine prostate cancer (NEPC), has emerged, and its diagnosis and treatment present great challenges. To improve the detection rate of NEPC and prolong patient survival, many researchers have investigated the use of relevant radiopharmaceuticals as targeted molecular probes for the detection and treatment of NEPC lesions, including DOTA-TOC and DOTA-TATE for somatostatin receptors, 4A06 for CUB domain-containing protein 1, and FDG. This review focused on the specific molecular targets and various radionuclides that have been developed for PCa in recent years, including those mentioned above and several others, and aimed to provide valuable up-to-date information and research ideas for future studies.

Analyses on the Physical and Electrochemical Properties of Al2O3 Coated LiCoO2 (리튬이차전지용 양극 활물질(LiCoC2)의 표면처리의 특성 분석 및 전기화학적 특성 고찰)

  • Chang, Youn-Han;Choi, Sei-Young
    • Journal of the Korean Electrochemical Society
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    • v.10 no.3
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    • pp.184-189
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    • 2007
  • The importance of secondary battery industry is getting excited according to the development of battery industry as a high efficiency energy supplier of electronic machine of mobile information such as mobile phone, lap-top computer, PDA. It is rasing the interest about security of safety and high efficiency of cathode material for main part of secondary lithium battery. The cathode material which has been used like $LiCoO_2,\;LiMn_2O_4,\;LiNi_xCo_yMn_zO_2,\;LiNi_xCo_yM_zO_2$ (M=Al, Zr, Mg etc.,) the most typical material is $LiCoO_2$. But it is studying the development of substitute such as efficiency amelioration of $LiCoO_2$, thetiary element, olivine element because of the capacity of $LiCoO_2$, the matter of security; especially the betterment of efficiency, security research of safety has been actively processed in domestic and overseas about surface coating treatment of active cathode which is using oxide ($M_xO_3$). This study analyses side effect of battery according to increase of surface treatment, formation of precipitation for reagent condensation, non-reagent residue of oxide ($M_xO_3$) which is remains during the surface treatment of $LiCoO_2$; conducts study of new process, the consideration of the electrochemical property to improve oxide solution of mixing rate, mixture of surface treatment, dryness, calcinations conditionetc.

Formation of Nano-oxides on Porous Metallic Glass Compacts using Hydrothermal Synthesis (수열합성 공정을 이용한 금속 다공체의 나노 산화물 형성)

  • Park, H.J.;Kim, Y.S.;Hong, S.H.;Kim, J.T.;Cho, J.Y.;Lee, W.H.;Kim, Ki Buem
    • Journal of Powder Materials
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    • v.22 no.4
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    • pp.229-233
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    • 2015
  • Porous metallic glass compact (PMGC) are developed by electro-discharge sintering (EDS) process of gas atomized $Zr_{41.2}Ti_{13.8}Cu_{12.5}Ni_{10}Be_{22.5}$ metallic glass powder under of 0.2 kJ generated by a $450{\mu}F$ capacitor being charged to 0.94 kV. Functional iron-oxides are formed and growth on the surface of PMGCs via hydrothermal synthesis. It is carried out at $150^{\circ}C$ for 48hr with distilled water of 100 mL containing Fe ions of 0.18 g/L. Consequently, two types of iron oxides with different morphology which are disc-shaped $Fe_2O_3$ and needle-shaped $Fe_3O_4$ are successfully formed on the surface of the PMGCs. This finding suggests that PMGC witih hydrothermal technique can be attractive for the practical technology as a new area of structural and functional materials. And they provide a promising road map for using the metallic glasses as a potential functional application.

Mineralogical and Geochemical Studies of Uranium Deposits of the Okchon Group in Southwestern District off Taejon, Korea (대전서남지대(大田西南地帶)에 있어서의 옥천대(沃川帶) 우라늄광상(鑛床)에 대(對)한 광물학적(鑛物學的) 및 지화학적(地化學的) 연구(硏究))

  • Yun, Suckew
    • Economic and Environmental Geology
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    • v.17 no.4
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    • pp.289-298
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    • 1984
  • Uraniferous black slates of the Okchon sequence occur in Koesan (northeast) through Miwon-Boun (middle) to the southwest off Taejon (southwest) within the Okchon fold belt. The Uraniferous balck slates in the southwest off Taejon are particularly well developed in Chubu (northeast) and Moksso-ri (middle) areas whereas they are less developed in Jinsan (southwest) area. The uraniferous beds range from less than a meter to 40 meters in thickness and range from less than 0.02% $U_3O_8$ (cut-off-grade) to 0.05% $U_3O_8$ in the southwestern district off Taejon. Electron microprobe analysis of uranium-minerals found in graphitic slate samples enables to estimate their major compositions semi-quantitatively so that uraninite, ferro-uranophane and chlopinite are tentatively identified. Uranium-minerals are closely associated with carbon and metal sulfides. Correlation analysis of trace element concentrations revealed that U and F.C., and U and Mo are lineary correlative respectively and their correlation coefficients are positively high whereas those of U and V, U and Mn, and U and Zr are negatively low, implying that uranium mineralization has been closely related with concentrations of carbon and molybdenum. Stable isotope analyses of pyrite sulfur range widely from +11.5% to -23.3% in ${\delta}^{34}S$ values whereas those of graphite carbon fall within a narrow range between -23.3% and -28.9% in ${\delta}^{13}C$ values. The wide range of ${\delta}^{34}S$ values suggests that the sulfur could be of meteoric origin rather than of igneous source. The narrow range of ${\delta}^{13}C$ values, which are close to those of coal, indicates that the graphite is organic carbon in origin. Therefore, it is concluded that the uranium mineralization in the Okchon sequence took place primarily in sedimentary environment rich in organic matter and sulfide ion, both of which served as the reducing agents to convert soluble uranyl complex to insoluble uranium dioxide.

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Influence of Ne-Xe Gas Mixture Ratio on the Extreme Ultraviolet (EUV) Emission Measurement from the Coaxially Focused Plasma

  • Lee, Sung-Hee;Hong, Young-June;Choi, Duk-In;Uhm, Han-Sup;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.220-220
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    • 2011
  • The Ne-Xe plasmas in dense plasma-focus device with coaxial electrodes were generated for extreme ultraviolet (EUV) lithography. The influence of gas mixture ratio, Ne-Xe (1, 10, 15, 20, 25, 30, 50%) mixture gas, on EUV emission measurement, EUV intensity and electron temperature in the coaxially focused plasma were investigated. An input voltage of 4.5 kV was applied to the capacitor bank of 1.53mF and the diode chamber was filled with Ne-Xe mixture gas at a prescribed pressure. The inner surface of the cylindrical cathode was lined by an acetal insulator. The anode was made of tin metal. The EUV emission signal of the wavelength in the range of 6~16 nm has been detected by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission line was also detected by the composite-grating spectrometer of the working wavelength range of 200~1100 nm (HR 4000CG). The electron temperature is obtained by the optical emission spectroscopy (OES) and measured by the Boltzmann plot with the assumption of local thermodynamic equilibrium (LTE).

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Measurement of electron temperature and density using Stark broadening of the coaxial focused plasma for extreme ultraviolet (EUV) lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.475-475
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    • 2010
  • We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

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