• Title/Summary/Keyword: $Yb_2O_3$

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Schottky Contact Application을 위한 Yb Germanides 형성 및 특성에 관한 연구

  • Na, Se-Gwon;Gang, Jun-Gu;Choe, Ju-Yun;Lee, Seok-Hui;Kim, Hyeong-Seop;Lee, Hu-Jeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.399-399
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    • 2013
  • Metal silicides는 Si 기반의microelectronic devices의 interconnect와 contact 물질 등에 사용하기 위하여 그 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 이 중 Rare-earth(RE) silicides는 저온에서 silicides를 형성하고, n-type Si과 낮은 Schottky Barrier contact (~0.3 eV)을 이룬다. 또한 낮은 resistivity와 Si과의 작은 lattice mismatch, 그리고 epitaxial growth의 가능성, 높은 thermal stability 등의 장점을 갖고 있다. RE silicides 중 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 n-channel schottky barrier MOSFETs의 source/drain으로 주목받고 있다. 또한 Silicon 기반의 CMOSFETs의 성능 향상 한계로 인하여 germanium 기반의 소자에 대한 연구가 이루어져 왔다. Ge 기반 FETs 제작을 위해서는 낮은 source/drain series/contact resistances의 contact을 형성해야 한다. 본 연구에서는 저접촉 저항 contact material로서 ytterbium germanide의 가능성에 대해 고찰하고자 하였다. HRTEM과 EDS를 이용하여 ytterbium germanide의 미세구조 분석과 면저항 및 Schottky Barrier Heights 등의 전기적 특성 분석을 진행하였다. Low doped n-type Ge (100) wafer를 1%의 hydrofluoric (HF) acid solution에 세정하여 native oxide layer를 제거하고, 고진공에서 RF sputtering 법을 이용하여 ytterbium 30 nm를 먼저 증착하고, 그 위에 ytterbium의 oxidation을 방지하기 위한 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, rapid thermal anneal (RTA)을 이용하여 N2 분위기에서 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium germanides를 형성하였다. Ytterbium germanide의 미세구조 분석은 transmission electron microscopy (JEM-2100F)을 이용하였다. 면 저항 측정을 위해 sulfuric acid와 hydrogen peroxide solution (H2SO4:H2O2=6:1)에서 strip을 진행하여 TiN과 unreacted Yb을 제거하였고, 4-point probe를 통하여 측정하였다. Yb germanides의 면저항은 열처리 온도 증가에 따라 감소하다 증가하는 경향을 보이고, $400{\sim}500^{\circ}C$에서 가장 작은 면저항을 나타내었다. HRTEM 분석 결과, deposition 과정에서 Yb과 Si의 intermixing이 일어나 amorphous layer가 존재하였고, 열처리 온도가 증가하면서 diffusion이 더 활발히 일어나 amorphous layer의 두께가 증가하였다. $350^{\circ}C$ 열처리 샘플에서 germanide/Ge interface에서 epitaxial 구조의 crystalline Yb germanide가 형성되었고, EDS 측정 및 diffraction pattern을 통하여 안정상인 YbGe2-X phase임을 확인하였다. 이러한 epitaxial growth는 면저항의 감소를 가져왔으며, 열처리 온도가 증가하면서 epitaxial layer가 증가하다가 고온에서 polycrystalline 구조의 Yb germanide가 형성되어 면저항의 증가를 가져왔다. Schottky Barrier Heights 측정 결과 또한 면저항 경향과 동일하게 열처리 증가에 따라 감소하다가 고온에서 다시 증가하였다.

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Nonstoichiometry of the Ytterbium Oxide (산화 이테르븀의 비화학양론)

  • Chul Hyun Yo;Hyung Rak Kim;Kwon Sun Roh;Kyu Hong Kim;Eung Ju Oh
    • Journal of the Korean Chemical Society
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    • v.36 no.4
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    • pp.511-516
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    • 1992
  • The x-values of the nonstoichiometric compound YbO$_x$ have been measured in a temperature range of 600 to 1150$^{\circ}C$ under oxygen partial pressure of 1.00 ${\times}$ 10$^{-2}$ atm∼atmospheric air pressure. The values are varied between 1.55453 and 1.60794 in the conditions. The enthalpy of the formation for x' in YbO$_{1.5+x'}$(${\Delta}$H$_f$) was 1.55, 1.18, and 1.05 kJ/mol under the above conditions, respectively. The electrical conductivities of the oxides or ${\sigma}$ have been measured in the temperature range from 600 to 1100$^{\circ}C$ under oxygen partial pressure of 1.00 ${\times}$ 10$^{-5}$ ∼ 2.00 ${\times}$ 10$^{-1}$ atm. They varied from 10$^{-9}$ to 10$^{-5}$ ohm$^{-1}$ cm$^{-1}$ within the semiconductor range. The Arrhenius plots of the electrical conductivities show a linearity and the activation energy for the conduction was about 1.7eV. The oxygen partial pressure dependence of the conductivity or 1/n value increases with the pressure. The nonstoichiometric conduction mechanism of the oxide was discussed in terms of the x values, ${\sigma}$ values, and the thermodynamic data.

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Geochemical Characteristics of Soils and Sediments at the Narim Mine Drainage, Korea: Dispersion, Enrichment and Origin of Heavy Metals (나림광산 수계의 토양과 퇴적물에 관한 지구화학적 특성: 중금속 원소의 분산, 부화 및 기원)

  • Lee, Chan Hee;Lee, Hyun Koo;Lee, Jong Chang
    • Economic and Environmental Geology
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    • v.31 no.4
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    • pp.297-310
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    • 1998
  • Geochemical characteristics of environmental toxic elements at the Narim mine area were investigated on the basis of major, minor, rare earth element geochemistry and mineralogy. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in soils and sediments range from 11.57 to 22.21 and from 1.86 to 3.93, and are partly negative and positive correlation against $SiO_2/Al_2O_3$ (3.41 to 4.78), respectively. These suggested that sediment source of host granitic gneiss could be due to rocks of high grade metamorphism originated by sedimentary rocks. Characteristics of some trace and rare earth elements of V/Ni (0.33 to 1.95), Ni/Co (2.00 to 6.50), Zr/Hf (11.27 to 53.10), La/Ce (0.44 to 0.55), Th/Yb (4.07 to 7.14), La/Th (2.35 to 3.93), $La_N/Yb_N$ (6.58 to 13.67), Co/Th (0.63 to 2.68), La/Sc (3.29 to 5.94) and Sc/Th (0.49 to 1.00) are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. Major elements in all samples are enriched $Al_2O_3$, MgO, $TiO_2$ and LOI, especially $Fe_2O_3$ (mean=7.36 wt.%) in sediments than the composition of host granitic gneiss. The average enrichment indices of major and rare earth elements from the mining drainage are 2.05 and 2.91 of the sediments and are 2.02 and 2.60 of the soils, normalizing by composition of host granitic gneiss, respectively. Average composition (ppm) of minor and/or environmental toxic elements in sediments and soils are Ag=14 and 1, As=199 and 14, Cd=22 and 1, Cu=215 and 42, Pb=1770 and 65, Sb=18 and 3, Zn=3333 and 170, respectively, and extremely high concentrations are found in the subsurface sediments near the ore dump. Environmental toxic elements were strongly enriched in all samples, especially As, Cd, Cu, Pb, Sb and Zn. The level of enrichment was very severe in mining drainage sediments, while it was not so great in the soils. Based on the EPA value, enrichment index of toxic elements is 8.63 of mining drainage sediments and 0.54 of soils on the mining drainage. Mineral composition of soils and sediments near the mining area were partly variable being composed of quartz, mica, feldspar, amphibole, chlorite and clay minerals. From the gravity separated mineralogy, soils and sediments are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various hydroxide minerals.

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The Effect of Different Reaction Path on the Microstructure of the Melt Processed Y-Ba-Cu-O Superconducting System (서로 다른 반응경로에 따른 일방향 용융공정된 Y-Ba-Cu-O계 Bulk초전도체의 미세구조 고찰)

  • Kim, Jeong-Sik;Kim, Chan-Jung
    • Korean Journal of Materials Research
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    • v.7 no.10
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    • pp.919-925
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    • 1997
  • 초기 혼합분말을 다르게 사용함으로써 다른 반응경로를 따라 성장된 일방향 집합조직 YB $a_{2}$BaCu $O_{5}$(Y211)형상과 분포가 초기 혼합분말이 달라짐에 따라 상당히 다르게 형성되었다. 여러 반응경로 중에서 $Y_{2}$ $O_{3}$+Y123$\longrightarrow$ $Y_{1.6}$Ba/ sub 2.2/ $O_{y}$와 ( $Y_{2}$ $O_{3}$BaCu $O_{2}$)+Y123$\longrightarrow$ $Y_{1.6}$B $a_{2.3}$C $u_{3.3}$ $O_{y}$반응에 의하여 용융공정된 경우 일방향 집합조직 Y 123 결정 성장이 잘 일어났으며, 특히 Y123의 포정반응 온도 이하의 낮은 온도에서도 결정성장이 일어났다. 또한 Y211입자 미세화가 다른 반응에 의한 용융공정보다 잘 일어났다. 이와같은 서로 다른 반응과정에 의하여 용융공정된 미세구조의 차이점들을 $Y_{2}$ $O_{3}$-BaO-CuO 3원계 상평형도를 이용하여 설명하였다.다.다.다.다.다.다.

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Solvent Extraction of Heavy Rare Earth Elements Using PC88A from Synthesis Solution of Low Concentration Rare Earth Solution (저농도 희토류 용액으로부터 PC88A를 이용한 중희토류의 용매추출 연구)

  • Ahn, Nak-Kyoon;Im, Byoungyong;Lee, Jieun;Park, Jae Ryang;Lee, Chan-Gi;Park, Kyung-Soo
    • Resources Recycling
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    • v.26 no.4
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    • pp.26-33
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    • 2017
  • The behavior on the solvent extraction of heavy rare earths (HRE) by using PC88A was confirmed to demonstrate the possibility of recovery on the HRE from industrial wastewater, which consist of low concentration rare earth. We verified the extraction behavior of the HRE through a change of equilibrium pH, extractant concentration and A/O ratio, and also confirmed the stripping behavior depending on the type of mineral acids. At equilibrium pH 1.0, extraction of rare earth (RE) was completed from 95% to 100%. In all extraction conditions, it tend to be extracted in order of high atomic number. When A/O ratio was 10/1, Yb and Tm were concentrated at the maximum and increased 6-fold and 3-fold compared to initial concentration, respectively. To confirm the stripping behavior of the RE, three mineral acids were applied to the organic phase and consequently rate of stripping was increased in order of $HNO_3$, $H_2SO_4$ and HCl.

Phase Formation and Physical Properties of SiAlON Ceramics Fabricated by Gas-Pressure Reactive Sintering (가스압 반응소결로 제조된 SiAlON 세라믹스의 상형성과 물리적 특성)

  • Lee, Soyul;Choi, Jae-Hyeong;Han, Yoonsoo;Lee, Sung-Min;Kim, Seongwon
    • Journal of Powder Materials
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    • v.24 no.6
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    • pp.431-436
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    • 2017
  • SiAlON-based ceramics are some of the most typical oxynitride ceramic materials, which can be used as cutting tools for heat-resistant super-alloys (HRSA). SiAlON can be fabricated by using gas-pressure reactive sintering from the raw materials, nitrides and oxides such as $Si_3N_4$, AlN, $Al_2O_3$, and $Yb_2O_3$. In this study, we fabricate $Yb_{m/3}Si_{12-(m+n)}Al_{m+n}O_nN_{16-n}$ (m=0.3, n=1.9, 2.3, 2.7) ceramics by using gas-pressure sintering at different sintering temperatures. Then, the densification behavior, phase formation, microstructure, and hardness of the sintered specimens are characterized. We obtain a fully densified specimen with ${\beta}$-SiAlON after gas-pressure sintering at $1820^{\circ}C$ for 90 min. under 10 atm $N_2$ pressure. These SiAlON ceramic materials exhibited hardness values of ~92.9 HRA. The potential of these SiAlON ceramics for cutting tool application is also discussed.

Improvement of Grain-Boundary Conduction in Stabilized Zirconia (안정화 지르코니아 고체전해질의 입계전도 향상)

  • 이종흔
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.25-25
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    • 2003
  • 안정화 지르코니아(Stabilized Zirconia)는 산화물 연료전지 (SOFC: Solid Oxide Fuel Cell), 전기화학식 가스센서 등에 널리 사용되고 있는 대표적인 고체전해질이다. SOFC의 효율향상 및 센서의 저온 동작을 위해서는 높은 이온전도도를 갖는 고체전해질이 요구된다. 안정화 지르코니아의 이온 전도도를 향상시키기 위해 MgO, CaO, $Y_2$O$_3$, Yb$_2$O$_3$, Sc$_2$O$_3$ 등의 안정화제가 첨가된 바 있으며, 이들 첨가제의 변화에 의한 전기전도도 향상 연구는 현재 성숙된 단계이다. 지르코니아 고체전해질의 안정화제가 정해진 상태에서 재료의 전기전도도를 향상시키는 다른 방법은 입계에서의 이온전도도를 높이는 것이다. 안정화 지르코니아는 입계가 입내에 비해 저항이 약 100-10000배 정도크기 때문에, 입계가 얇은 두께에도 불구하고 전해질의 저항에서 큰 역할을 한다고 알려져 있다. 일반적으로 입계의 Si-포함상 편석, 입계액상, 공간전하층등이 입계의 저항에 대한 원인으로 받아 들여 지고 있다.

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Stability Studies of Divalent and Trivalent Metal Complexes with 1,7,13-Trioxa-4,10,16-triazacyclooctadecane-N,$N^{\prime},N^{\prime}^{\prime}$-tri(methylacetic acid)

  • 홍춘표;김동원;최기영
    • Bulletin of the Korean Chemical Society
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    • v.18 no.11
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    • pp.1158-1161
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    • 1997
  • The potentiometric methods have been used to determined the protonation constants (logKiH) for the synthesized 1,7,13-trioxa-4,10,16-triazacyclooctadecane-N,N',N''-tri(methylacetic acid) [N3O3-tri(methylacetic acid)] and the stability constants (logKML) of the complexes of divalent and trivalent metal ions with the ligand N3O3-tri(methylacetic acid). The protonation constants of N3O3-tri(methylacetic acid) were 9.70 for logK1H, 9.18 for logK2H, 7.27 for logK3H, 3.38 for logK4H, and 2.94 for logK5H. The stability constants for the complexes of divalent metal ions with N3O3-tri(methylacetic acid) were 10.39 for Co2+, 10.68 for Ni2+, 13.45 for Cu2+, and 13.00 for Zn2+. The order of the stability constants for the complexes of the divalent metal ions with N3O3-tri(methylacetic acid) was Co2+ < Ni2+ < Zn2+ < Cu2+. The stability constants for the complexes of trivalent metal ions with N3O3-tri(methylacetic acid) were 16.20 for Ce3+, 16.40 for Eu3+, 16.27 for Gd3+, and 15.80 for Yb3+. The results obtained in this study were compared to those obtained for similar ligands, 1,7-dioxa-4,10,13-triazacyclopentadecane-N,N',N"-tri(methylacetic acid) and 1,7,13-trioxa-4,10,16-triazacyclooctadecane-N,N',N"-triacetic acid, which have been previously reported.

Petrology and Geochemistry of Peridotite Xenoliths from Miocene Alkaline Basalt Near the Mt. Baekdu Area (백두산 지역의 마이오세 알칼리 현무암에 포획된 페리도타이트의 암석학적/지화학적 특성)

  • Kim, Eunju;Park, Geunyeong;Kim, Sunwoong;Kil, Youngwoo;Yang, Kyounghee
    • The Journal of the Petrological Society of Korea
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    • v.26 no.4
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    • pp.311-325
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    • 2017
  • Peridotite xenoliths in middle Miocene alkaline basalt from the Mt. Baekdu area are mainly anhydrous spinel lherzolites, displaying coarse-grained protogranular texture. These xenoliths have late-stage secondary orthopyroxene replacing olivine as the metasomatic mineral and glass formed along the grain boundaries. The studied xenoliths are characterized by the high $Mg{\sharp}[=100{\times}Mg/(Mg+Fe_{total})$ atomic ratio] of olivine, orthopyroxene and clinopyroxene (89~92) and the $Cr{\sharp}[=100{\times}Cr/(Cr+Al)$ atomic ratio] of spinel (10~29). Based on major-element data, the studied xenoliths are similar to those from the abyssal peridotites. Clinopyroxenes of the xenoliths are mostly enriched in incompatible trace elements, exhibiting two types of REE patterns: (1) LREE-depleted with $(La/Yb)_N$ of 0.1~0.2 and $(La/Ce)_N$ of 0.4~0.8. (2) LREE enriched with $(La/Yb)_N$ of 2.2~3.8 and $(La/Ce)_N$ of 1.2~1.6. The calculated equilibrium temperatures and oxygen fugacities resulted in $920{\sim}1050^{\circ}C$ and ${\Delta}fO_2(QFM)=-0.8{\sim}0.2$, respectively. It is suggested that the Mt. Baekdu peridotite xenoliths represent residues left after variable degrees of melt extraction(less than 15 vol%), which was subsequently subjected to different degrees of modal/cryptic metasomatism by silica- and LREE-enriched fluids (or melts).