• 제목/요약/키워드: $YBa_2Cu_3O_{7-x}$ (YBCO) films

검색결과 65건 처리시간 0.022초

균질한 대면적 YBCO 박막증착을 위한 실린더형 할로우 캐소드 스퍼터링 증착법 (Cylindrical Hollow Cathode Sputtering Deposition for Uniform Large Area YBCO Thin Film)

  • 서정대;한석길;성건용;강광용
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.67-70
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    • 1999
  • We have fabricated YBa$_2Cu_3O_{7-x}$ thin films by cylindrical hollow cathode sputtering. For 2 inch diameter of MgO (100) substrate, we obtained the zero resistance temperature in the range from 83 K to 86 K and thickness uniformity better than 5 % over the whole area. Also, the average deposition rate was 100nm/h which is higher than 10 times compare to conventional off-axis sputtering method. These results indicate that cylindrical hollow cathode sputtering seems to have unique capabilities for high rate and homogeneous deposition of large area thin film.

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직접삽입 급전 방식을 이용한 고온초전도 마이크로스트립 안테나의 제작 및 특성 해석 (Fabrication and characteristic analysis of High-Tc superconducting microstrip antennas using direct inset feeding technique)

  • 정동철;한병성;김진;유기수;홍석용;이종하
    • 대한전자공학회논문지TE
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    • 제37권1호
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    • pp.70-78
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    • 2000
  • 초전도체를 초고주파 소자에 응용하려고 할 경우, 초전도 전자기학의 불확실함이나 초전도 기판의 돈도 의존성은 산업 응용을 위한 안테나를 제작하는데 있어 어려움을 준다. 따라서 실제 응용을 위해서는 일반 안테나와 비교하여 정확하고 자세한 특성이 알려져야만 한다. 본 논문에서는 금 안테나와 초전도 안테나의 비교 연구를 수행하였으며 반사 손실, 특성임피던스, 효율 및 다른 다양한 특성들을 보고하였다. 본 연구에 사용된 고온초전도 박막은 $YBa_2Cu_3O_{7-x}$ (YBCO)/MgO 이며 초전도 안테나는 마이크로스트립 급전선을 방사 패치의 50 ${\Omega}$ 영역에 결합시키는 형태로 만들어졌다. 금 안테나와 초전도 안테나의 측정 결과는 이러한 구조를 이용하여 유용한 안테나가 제작될 수 있음을 보여주었다.

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개구결합을 이용한 H 형태 초전도 안테나의 제작 및 특성 해석 (Fabrication and characterization of)

  • 정동철;한병성;유기수;이종하;석중현;이은홍
    • 대한전자공학회논문지TE
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    • 제37권1호
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    • pp.63-69
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    • 2000
  • "H" 형태의 공진기로서 이루어진 초전도 안테나는 비슷한 크기를 가진 마이크로스트립 안테나에 비하여 소형화에 유리하다. "H"형 초전도 안테나 제작을 위해 rf 마그네트론 스퍼터링을 이용하여 $YBa_2Cu_3O_{7-x}$ (YBCO)/MgO 고온초전도 박막을 제조하였으며 표준 식각법을 이용하여 안테나를 형상화 하였다. 일반 금속과의 특성을 비교하기 위해서 동일한 차원의 금 안테나가 제작되었다. 개구 결합 방식을 이용하여 초전도 안테나 패치와 $50{\Omega}$ 급전선을 임피던스 결합을 시켰다. 다양한 종류의 실험 결과가 반사손실, 공진주파수, 특성임피던스 등을 중심으로 보고되었다. H형 초전도 안테나는 금 안테나에 비하여 정재파비에서 0.36 효율에서 24% 반사손실에서 14.6bB 이상 더 우수한 성능을 보여주었다.

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MOCVD법에 의한 YBCO coated conductor용 YSZ 완충층 제작 (Fabrication of YSZ buffer layer for YBCO coated conductor by MOCVD method)

  • 선종원;김형섭;정충환;전병혁;김찬중
    • 한국초전도저온공학회:학술대회논문집
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    • 한국초전도저온공학회 2003년도 학술대회 논문집
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    • pp.129-132
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    • 2003
  • Yttria stabilized zirconia (YSZ) buffer layers were deposited by a metal organic chemical vapor deposition (MOCVD) technique using single liquid source for the application of YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) coated conductor. Y:Zr mole ratio was 0.2:0.8, and tetrahydrofuran (THF) was used as a solvent. The (100) single crystal MgO substrate was used for searching deposition condition. Bi-axially oriented CeO$_2$ and NiO films were fabricated on {100}〈001〉 Ni substrate by the same method and used as templates. At a constant working pressure of 10 Torr, the deposition temperatures (660~80$0^{\circ}C$) and oxygen flow rates (100~500 sccm) were changed to find the optimum deposition condition. The best (100) oriented YSZ film on MgO was obtained at 74$0^{\circ}C$ and $O_2$ flow rate of 300 sccm. For YSZ buffer layer with this deposition condition on CeO$_2$/Ni template, full width half maximum (FWHM) values of the in-plane and out-of-plane alignments were 10.6$^{\circ}$ and 9.8$^{\circ}$, respectively. The SEM image of YSZ film on CeO$_2$/Ni showed surface morphologies without microcrack.k.

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DCA-MOD 법으로 YBCO 박막 제조시 하소열처리의 승온속도 효과 (Effect of heating rate on calcination heat treatment of YBCO thin films by DCA-MOD method)

  • 김병주;김혜진;조한우;권연경;유정희;이희균;홍계원
    • Progress in Superconductivity
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    • 제8권2호
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    • pp.186-192
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    • 2007
  • High $J_c\;YBa_2Cu_3O_{7-x}$ superconducting films have been fabricated $LaAlO_3(100)$ substrate by MOD method using dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. Heating rate was varied in order to optimize the calcination heat treatment condition in DCA-MOD method. Coated films were calcined at lower temperature up to $500^{\circ}C$ in flowing humid oxygen atmosphere. The heating rate was calcined from $13.3^{\circ}C/min\;to\;0.28^{\circ}C/min$. Conversion heat treatment was performed $800^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. Surface and cross sectional SEM microstructures showed that particle sizes were increased with heating rate at a calcination step. The amount of pores was increased with heating rate in the calcined films. Dense microstructure and sharp texture were developed in an YBCO films after conversion heat treatment. A high critical current density (Jc) of $1.26MA/cm^2$ (@77 K and self-field) was obtained for the YBCO film which was prepared with a heating rate of $0.28^{\circ}C/min$.

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YBCO 고온 초전도체 후막의 제작 및 특성 연구 (Fabrication and Characterization of High $T_c$ $YBa_2Cu_3O_7-x$ Thick Films)

  • 정형진;박홍순;이전국;송진태
    • 한국세라믹학회지
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    • 제27권3호
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    • pp.299-310
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    • 1990
  • The fabrication of Y-Ba-Cu-O films and experimental factors affecting to characteristics of films are studied in detail. Superconducting thick films are fabricated by the screen printing method. The metal-citrate precursors are obtained simply by mixing of metal nitrate with citric acid. The particle size of heat treated powders is approximately 0.3-1${\mu}{\textrm}{m}$ and the thickness of film is estimated as 30-35${\mu}{\textrm}{m}$. According to the XRD analysis, the films sintered at 870-93$0^{\circ}C$ for 10min. -6hr with P(oxygen)=1atm has the unique orthorhombic crystal symmetry indicating the 123 phae. Tc, onset is determined around 92-87。K, but it shows semiconducting behavior probably due to the oxygen deficiency in the lattice, porosity and impurities in films. Extrapolated Tc, zero is estimated as 76-50。K. For films sintered at 90$0^{\circ}C$ for 1hr, superconducting properties are observed with the room temperature resistivity of 0.025$\Omega$.cm Tc, onset at 88。K and Tc, zero at 63。K.

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TFA-MOD법으로 제조된 다층 YBCO 박막의 미세구조 관찰 (Microstructural Observation of Multi-coated YBCO Films Prepared by TFA-MOD)

  • 장석헌;임준형;이창민;황수민;최준혁;심종현;주진호;김찬중
    • Progress in Superconductivity
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    • 제9권2호
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    • pp.167-172
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    • 2008
  • We fabricated $YBa_2Cu_3O_{7-x}$(YBCO) films on (00l) $LaAlO_3$ substrates prepared by metal organic deposition(MOD) method using trifluoroacetate(TFA) solution. The films with various thicknesses were prepared by repeating the dip-coating and calcining processes. The effects of film thickness on phase formation, microstructures, and critical properties were evaluated by X-ray diffraction, scanning electron microscopy, and transmission electron microscopy. The microstructure and resultant critical current($I_C$) and critical current density($J_C$) varied remarkably with film thickness: The ($I_C$) value increased from 39 to 160 A/cm-width as the number of coatings increased from one to four, while the corresponding $J_C$ was measured to be in the range of $0.84-1.21\;MA/cm^2$. Both the $I_C$ and $J_C$ decreased when an additional coating was applied due to microstructural degradation, indicating that the optimum thickness is in the range of $1.1-1.8\;{\mu}m$. The possible cause for the decrease in the $I_C$ and $J_C$ value for film thicker than $1.8\;{\mu}m$ include non-uniform thickness, increased surface roughness, and the poor formability of the YBCO phase and texture arising from the insufficient heat treatment time with respect to the increased thickness.

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사파이어 기판을 사용한 병렬 검출코일 구조의 계단형 모서리 접합 SQUID 자력계 (YBCO step-edge junction dc SQUID magnetometers with multi-loop pickup coil fabricated on sapphire substrates)

  • 황태종;김인선;김동호;박용기
    • Progress in Superconductivity
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    • 제5권2호
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    • pp.94-97
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    • 2004
  • Step-edge Josephson junctions (SEJ) have been fabricated on sapphire substrates with in situ deposited films of CeO$_2$ buffer layer and YBa$_2$Cu$_3$O$_{7}$ films on the low angle steps. Direct coupled SQUID magnetometers with the SEJ were formed on 1 cm X 1 cm R-plane sapphire substrates. Typical 5-${\mu}{\textrm}{m}$-wide Josephson junctions have R$_{N}$ of 3 Ω and I$_{c}$ of 50 $mutextrm{A}$ at 77 K. The direct coupled SQUID magnetometers were designed to have pickup coils of 50-${\mu}{\textrm}{m}$-wide 16 parallel loops on the 1 cm X 1 cm substrates with outer dimension of 8.8 mm X 8.8 mm. The SEJ SQUID magnetometers exhibit relatively low 1/f noise even with dc bias control, and could be stably controlled by flux-locked loops in the magnetically disturbed environment. Field noise of the do SQUID was measured to be 200∼300 fT/Hz$^{1}$2/in the white noise region and about 2 pT/Hz$^{1}$2/ at 1 Hz when measured with dc bias method.hod.d.

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