• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.223-223
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• 1999

PZT(PbZr1-xTixO3) 박막은 고유전율과 같은 remanent polarization을 가져서 고집적 소자의 커패시터 유전율층 또는 비휘발성 메모리 소자의 제조에 이용되고 있으나, fatigue 와 aging 문제로 인하여 새로운 물질의 개발이 필요한데, 그 대표적으로 연구되고 있는 것이 PMN-PT(Pb(Mg1/3Nb2/3)O-PbTiO3) 이다. 본 실험에서는 sol-gel 법에 의하여 제조된 PMN-PT막을 ICP(Inductively coupled plasma)에 의하여 식각하였고 mask층으로는 PR을 사용하였다. 식각 가스로는 Ar, Cl, BCl를 단독 또는 혼합하여 사용하였으며, 식각 특성을 보기 위하여 RF Power, Substrate bias, Operation pressure, Substrate temperature를 변화시켰다. 식각속도는 stylus profiler를 이용하여 측정하였고, 단면 profile은 scanning electron microscopy (SEM)를 이용하여 관찰하였다. 식각 메커니즘을 규명하고자 식각된 박막의 표면을 X-ray photoelectron spectroscopy (XPS)로 관찰하였고, optical emission spectroscopy (OES)로 플라즈마 특성을 규명하고자 하였다. 식각속도는 Ar 또는 Cl2 플라즈마에 BCl3 가스를 혼합하였을 경우 증가되었고, BCl3 가스를 단독으로 사용하여도 높은 식각속도를 나타내었으며, BCl3의 첨가량이 늘어날수록 PR의 식각속도는 감소하여 높은 선택비를 보였다. 90% BCl3/10%Cl2 플라즈마에서 2800$\AA$/min의 식각속도 그리고 1.37:1의 PR 선택비를 얻을 수 있었다. Power나 기판 bias 증가에 따라 식각속도는 증가하였으나 기판 온도변화에는 민감하지 않았다. BCl3 rich에서의 식각속도 증가와 선택비 증가는 B2O3의 형성에 의한 것으로 생각된다.

• Journal of the Korean Ceramic Society
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• v.22 no.3
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• pp.19-24
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• 1985

The phtoelectrochemical porperties of $Nb_2O_5$, $Sb_2O_3$ and $V_2O_5$ doped and pure $SrTiO_3$ ceramic electodes were investigated. Shapes of I-V and I-λ characteristics of the pure $SrTiO_3$ ceramic electrode are similar to those of SrTiO3 single crystal electorde ; the anodic current strats at -0.9V (vs. Ag/AgCI) in 1 N-NaOH aqueous solution and the photoresponse appears at a wavelength of about 390nm and the quantum efficiency is about 3.5% at wavelength of 390nm under 0.5V vs. Ag/AgCl. Photocurrents of $Nb_2O_5$, $Sb_2O_3$ and $V_2O_5$ doped electrodes and $V_2O_5$ doped ceramic electrode appears at wavelength of 390nm and 500nm respectively.

• Journal of Surface Science and Engineering
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• v.31 no.3
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• pp.157-164
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• 1998

Effects of alloying elements on the pitting behavior of Ti-Al intermetalic compounds in the electrolytic soution containing Cl- were investigated through electrochemical tets and corrosion morphologies. Corrosion potential increased in the case of Cr addition to Ti-48%Al, whereas it decreased in the case of Si and B addition. The simultaneous addition of Cr and Si increased passive current density and decrosion corrosion potential. The passive current density of N addtion was higher than that of B addition in H2SO4 solution. With the addition of alloying elements, The pitting resistance decreased in order of TiAl>TiAlSi>TiAlN>TiAlB>TiAlCr and whin siumultaneous addition, it decreased in order of TiAlCrSi>TiAlCrBN>TiAlCrrN. The surface merohology after pitting test showed that the TiAl coataining Si had for fewer pits than that containing Cr and N simultaneously.

• Applied Chemistry for Engineering
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• v.10 no.1
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• pp.73-79
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• 1999

The superstructured $Li_{4/3}Ti_{5/3}O_4$ was prepared by sol-gel process using a mixed solution of lithium acetate (LA) and titanium n-butoxide (TNB). The gel phase was obtained by adding ammonia water ($NH_4OH/TNB$ mole ratio of 0.35) and water ($H_2O/TNH$ mole ratio of 3.5) into the clear sol that was prepared after mixing TNB/LA mole ratio of 5/4 with AA/TNB mole raio of 0.125. It was found that the most suitable $Li_{4/3}Ti_{5/3}O_4$ was obtained by heat treatment of xerogel at $600^{\circ}C$ for 30 hrs. The synthesized $Li_{4/3}Ti_{5/3}O_4$ showed an initial discharge capacity of 174 mAh/g and the capacity loss of about 27.3% during 25 cycles in Li/1M $LiClO_4(in\;PC)/Li_{4/3}Ti_{5/3}O_4$ at current density of $0.15mA/cm^2$ and the voltage range of 0.5~3.0 V.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.104.2-104
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• 1998

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.8
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• pp.646-651
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• 1998

In this present study, the luminescence characteristics and mechanism of energy $CaTiO_3$:Pr phosphor were studied using disk specimens sintered at various temperatures and envirenment. A single-phase $CaTiO_3$:Pr was synthesized by sintering above 140$0^{\circ}C$ and its crystal structure was found to be perovskite orthorhombic. A dominant peak around 360 nm and a broad peak around 395 nm were observed in the PLE(Photoluminescence Excitation) spectrum of $CaTiO_3$:Pr with fixed emission wavelength at 612 nm, the decay time of 360 nm excitation was found to be longer than that of 395 nm excitation. From this result, it is assumed that the free carrier excited to 360 nm is transferred to 395 nm energy level. Therefore, the decrease in 395 nm intensity observed in CaTiO$_3$:Pr specimens sintered in Ar gas environment induced shorter decay time and improved CL luminescence.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.396-396
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• 2012

산업 분야에서 TiN, CrN, CrAl-N, TiAl-N과 같은 Hard 코팅들은 기계적 특성이 우수하여 절삭 공구, 기계 부품분야에서 많이 사용되고 있다. 최근 연구 동향을 살펴보면 기존에 하나 또는 두가지 합금상태의 Hard 코팅을 넘어서 제3원소, 제4원소를 첨가하여 미세 구조적 변화를 통해 기존의 우수한 특성에 고온안정성, 내식성, 내산화성 등 다양한 기능성을 부여하는 다기능성 연구가 활발히 진행 중이다. 본 연구에서는 마그네트론 스퍼터를 이용하여 고경도 코팅인 Ti-Al계열에 Si, Cu, Cr, B을 첨가함에 따른 내식특성을 확인해보았다. 성분이 균일한 코팅을 만들기 위해 Ti-Al, Ti-Al-Si, Ti-Al-Cu, Ti-Al-Cr, Ti-Al-B 단일합금타겟을 제조하여 실험을 진행하였다. 기본 물성을 확인하기 위해 경도 측정과 SEM XRD 등을 분석하였다. 내식성 평가는 동전위 테스트와 염수분무 테스트를 진행하였고 전해질은 염수와 동일한 5%-NaCl로 진행하였다. 그 결과 Ti-Al-Cr이 내식성에 강한 것으로 나타났고 염수분무 실험에서도 1200시간 이상 지속되는 성과를 보였다.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.3
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• pp.285-289
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• 2013

The coastal area of Republic of Korea is very clean compared to other countries. In this reason, west coastal area of our country is a good place for breeding up a fish such as shrimp. In winter season, the heating system is required for preventing shrimp death caused by freezing in the farm. The heater in the heating system for fishery's farm is operated very severe combating corrosion due to high accumulation by feeding material and high temperature in heated sea water. Almost all manufactured heaters of STS 316L and Ti material are scrapped every year due to heavy corrosion such a general and crevice corrosion. For comparing the general and galvanic corrosion in new heater material, the test material of Zirconium (Zr), Titanium (Ti) and STS 316L are tested by potentiodynamic polarization, electrochemical impedance spectroscopy (EIS), current density-time methods and microscopic examination in a 3.5% NaCl solution. The corrosion potential (Ecor) measured by potentiodynamic polarization for Zr, Ti and STS 316L reveals -198, -250 and -450mV, corrosion current density 0.5, 2.5 and $6.5{\mu}A/cm^2$ respectively. The film resistance measured by EIS are Zr 63,000, Ti 39,700 and 316L $3,150{\Omega}$, and the current of Zr-Ti couple is $0.03{\mu}A$, whereas Zr-316L SS is $0.1{\mu}A$. According to the result of this experiment in 3.5% NaCl solution, Zr is excellent corrosion resistance material than Ti and STS 316L.

• Journal of Environmental Science International
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• v.12 no.12
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• pp.1277-1284
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• 2003

The photocatalytic oxidation of Rhodamine B (RhB) was studied using immobilized TiO$_2$ and fluidized bed reactor. Immobilized TiO$_2$ onto GF/C was employed as the photocatalyst and a 30 W germicidal lamp was used as the light source and the reactor volume was 4.8 L. The effects of parameters such as the amounts of photocatalyst, initial concentration, initial pH, air flow rate and anion additives (NO$_3$$\^$-/, SO$_4$$\^$2-/, Cl$\^$-/, CO$_3$$\^$2-/) competing for reaction. The results showed that the optimum dosage of the immobilized TiO$_2$ was 40.0 g/L. Initial removal rate of immobilized TiO$_2$ was expressed Langmuir - Hinshelwood equation.

• Applied Chemistry
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• v.15 no.2
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• pp.85-88
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• 2011

We synthesized ethylene-styrene copolymer by coordination polymerization using 2 types of pyrazolato metallocene catalysts ((1,2,4-Me₃C₅H₄)TiCl₂(3,5-iPr₂C₃HN₂), (tert-BuC₅H₄) TiCl₂(3,5-iPr₂C₃HN₂)). We observed the effects of styrene concentration on the catalytic activity, yield, molecular weight and molecular weight distribution.