• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.103-108
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• 2000

The texture of Al/Ti thin films deposited on low-dielectric polymer substrates has been investigated. Fifty-nm-thick Ti films and 500-nm-thick Al-1%Si-0.5%Cu (wt%) films were deposited sequentially onto low-k polymers and SiO$_2$ by using a DC magnetron sputtering system. The texture of Al thin film was determined using X-ray diffraction (XRD) theta-2theta ($\theta$-2$\theta$) and rocking curve and the microstructure of Al/Ti films on low-k polymer and SiO$_2$ substrates was characterized by Transmission electron microscopy (TEM). hall thin films deposited on SiO$_2$ had stronger texture than those deposited on low-k polymer. The texture of Al thin films strongly depended on that of Ti films. Cross-sectional TEM resealed that Brains of Ti films on SiO$_2$ substrates had grown perpendicular to the substrate, while the grains of Ti films on SiLK substrates were farmed randomly. The lower degree of 111 texture of Al thin films on low-k polymer was due to Ti underlayer.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.7
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• pp.1619-1629
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• 1995

The Al/Al$_{2}$O$_{3}$ SiC and Al/Al$_{2}$O$_{3}$/C hybrid metal matrix composites (MMCs) were fabricated by squeeze infiltration method. Uniform distribution of reinforcements were found in the microstructure of metal matrix composites. Mechanical tests were carried out under various test conditions to clearly identify mechanical behavior of MMCs, and the wear mechanism of Al/Al$_{2}$O$_{3}$/(SiC or C) hybrid metal matrix composites were investigated. The tensile strength and hardness of hybrid composites was resulted in increasing compared with those of the unreinforced matrix alloy. Wear resistance was strongly dependent upon kinds of fiber, volume fraction and sliding speed. The wear resistance of metal matrix composites was remarkably improved by the addition of reinforcements. Especially, the wear resistance of the hybrid composites of carbon fibers was more effective than in the composites reinforced with alumina and SiC whiskers of reinforcements. This was due to the effect of carbon fiber on the solid lubrication. Wear mechanisms of hybrid composites were suggested from wear surface analyses. The major wear mechanism of hybrid composites was the abrasive wear at low to intermediate sliding speed, and the melting wear at intermediate to high sliding speed.

• Nuclear Engineering and Technology
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• v.55 no.10
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• pp.3725-3731
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• 2023

Thorium dioxide (ThO₂)-silicon carbide (SiC) composite fuel pellets were fabricated via the spark plasma-sintering (SPS) method to investigate the role of the addition of SiC in enhancing the thermal conductivity of ThO₂ fuel. SiC particles with an average size of 1㎛ in 10 and 15 vol% were used to manufacture the composite pellets. The changes in the composites' densification, microstructure and thermal conductivity were explored by comparing them with pure ThO₂ pellets. The structural and microstructural characterization of the composite pellets has revealed that SPS could manufacture high-quality composite pellets without having any reaction products or intermetallic. The density measurement by the Archimedes principles and the grain size from the electron back-scattered diffraction (EBSD) analysis has indicated that the composites have higher densities and smaller grain sizes than the pellets without SiC addition. Finally, thermal conductivity as a function of temperature has revealed that sintered ThO₂-SiC composites showed an increase of up to 56% in thermal conductivity compared to pristine ThO₂ pellets.

• Analytical Science and Technology
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• v.6 no.2
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• pp.207-215
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• 1993

$Si_3N_4$ powders were mixed with sintering additives($3Y_2O_3{\cdot}5Al_2O_3$, YAG) by coprecipitation method. Mixing homogeneity, sintered and mechanical properties of coprecipitation-mixed powder compacts were compared with those of mechanically-mixed ones. SIMS-analysis for composition on the surface and in the matrix of prepared powder mixtures showed that the added YAG exists mainly on the $Si_3N_4$ powder surfaces in a form of coating. From this result it could be concluded that coprecipitation method is superior to mechanical mixing in the mixing homogeneity. This mixing homogeneity can accompany an improvement in sintered density, microstructure and consequently the mechanical properties of sintered bodys.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.100-100
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• 2000

Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

• Korean Journal of Materials Research
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• v.11 no.7
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• pp.562-568
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• 2001

Devitrifiable solder glass/$ZrB_2$ sintered composites were prepared by using glass with the composition of $60ZnO-20B_2O_3-10SiO_2-10PbO$(in wt%) and $ZrB_2$, powder as starting materials under the $N_2$atmosphere. $ZrB_2$which the good conduction materials showed sensitive oxidation characteristics, because some parts of the $ZrB_2$in specimens changed into the insulated phase of $ZrO_2$. These Phenomena would be estimated that it caused a few amount of residual oxygen in the furnace and/or specimens and the coordination number change of $B_2O_3$ in the glass. The sintering temperature and the mixed ratios of each phase were control of large ranged the resistivity ranged from 10 to 10$^{3}{\Omega}/cm^2$ orders, and to make a conductible microstructure. From these results, it would be explained that the conduction path of $ZrB_2$particles built up within sintered glass matrix.

• Korean Journal of Materials Research
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• v.11 no.2
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• pp.94-103
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• 2001

SiO$_2$ and PDMS/SiO$_2$ xerogels which are derived PDMS into TEOS have been synthesized by sol-gel process and controlled pore size and distribution through 2 step acid/base catalyzed processes using HCI and NH$_4$OH as a catalyst. In HCl catalyzed SiO$_2$ and PDMS/SiO$_2$ xerogels, pH and gellation time of xerogel were 2.3~2.5 and 12~13 days, respectively, and the shape of xerogel was identified to pellet type and column type. Under acidic condition of final reaction solution, the hydrolysis rate is accelerating, resulting in long gel times. The shape of xerogel is pellet type. In contrast, under less acidic condition, the condensation rate is accelerating, resulting in shorter gel times and the shape of xerogel is column type. The surface area and average Pore size were changed 400$\rightarrow$600($\m^2$/g) and 15$\rightarrow$28$\AA$, respectively, depending to the increase of the mole ratio of HCl/NH$_4$OH, and represented uniform pore size distribution. It is that all the alkoxide groups are hydrolyzed by HCl after the first step and the condensation rate is enhanced by NH$_4$OH. The regular backbone structures of silica are formed at low temperature and the uniform pores are produced by heat treatment.

• Journal of the Korean institute of surface engineering
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• v.33 no.1
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• pp.17-24
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• 2000

The microstructures and corrosion properties of Al-Si diffusion coated PWA1426 and PWA658 alloys have been investigated. The coated layer and corrosion properties were analysed by SEM, EDS and hot corrosion test. According to the results of SEM, it is supposed that the coated layers were composed of mixed, denuded and inter-diffusion layer. The coated PWA1426 alloy improved corrosion properties, compared to the PWA658 alloy. Corrosion debris generated during hot corrosion test of PWA658 alloy are identified as NiO, $TiO_2$and $NiAl_2$$O_4$from coated layer which increase oxidation rate and decrease adhesion. The PWA1426 alloy heat treated at $1080^{\circ}C$ showed that NiAl and $Al_2$$O_3$formed on coated layer.

• Journal of the Korean Ceramic Society
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• v.54 no.2
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• pp.141-149
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• 2017

The influence of the co-additive concentration (0 - 45 wt% with an interval of 5 wt%) of MgO-$TiO_2$ on the phase formation, microstructure and fracture toughness of MgO-$TiO_2$-reinforced dental porcelain nanocomposites derived from a one-step sintering technique were examined using a combination of X-ray diffraction, scanning electron microscopy and Vickers indentation. It was found that MgO-$TiO_2$-reinforced dental porcelain nanocomposites exhibited significantly higher fracture toughness values than those observed in single-additive (MgO or $TiO_2$)-reinforced dental porcelain composites at any given sintering temperature. The amount of MgO-$TiO_2$ as a co-additive was found to be one of the key factors controlling the phase formation, microstructure and fracture toughness of these nanocomposites. It is likely that 30 wt% of MgO-$TiO_2$ as a co-additive is the optimal amount for $MgTi_2O_5$ and $Mg_2SiO_4$ crystalline phase formation to obtain the maximum relative density (96.80%) and fracture toughness ($2.60{\pm}0.07MPa{\cdot}m^{1/2}$) at a sintering temperature of $1000^{\circ}C$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.1
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• pp.36-40
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• 2003

The diamond-like nanocomposite (DLN) thin films were deposited on Si substrates using $CH_4/(C_2H_5O)_4Si/H_2$/Ar gas mixtures as source gases by the plasma enhanced chemical vapor deposition (PECVD). The chemical structure and microstructure of grown films were investigated and their tribological properties were evaluated by a ball-on-plate type tribometer. The deposited DLN films mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The DLN films had a good agreement with tribological coating applications due to their extremely low friction coefficients and low wear rates.